| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
|---|
| 01/16/2002 | CN1331792A Appts. and method for controlling fluid in micromachined boiler |
| 01/15/2002 | US6338251 Mixed thermoelectric cooling apparatus and method |
| 01/15/2002 | US6338249 Electrothermally actuated vibromotor |
| 01/10/2002 | WO2002002458A1 Method for production of a semiconductor component and a semiconductor component produced by said method |
| 01/10/2002 | WO2002002328A1 Buckle resistant thermal bend actuators |
| 01/10/2002 | WO2001055952A9 Method and system for collecting and transmitting chemical information |
| 01/10/2002 | WO1999012002A9 Micromachined gyros |
| 01/10/2002 | US20020003920 Rolling shutter optical switch device with mirror on shutter and open aperture optical port |
| 01/10/2002 | US20020003231 Semi-transparent power monitor integrated with a light producing module |
| 01/10/2002 | DE10130713A1 Semiconductor acceleration sensor chip comprises peripheral grooves formed on substrate surface |
| 01/09/2002 | EP1170768A1 Micromachine switch |
| 01/09/2002 | EP1170248A2 Microelectromechanical actuators including sinuous beam structures |
| 01/09/2002 | EP1169650A1 Different sacrificial layer thickness under fixed and movable electrodes (capacitive acceleration sensor) |
| 01/09/2002 | CN1330034A Manufacture of membrane |
| 01/08/2002 | US6337027 Microelectromechanical device manufacturing process |
| 01/08/2002 | US6336658 Acceleration switch and the manufacturing method |
| 01/05/2002 | CA2351992A1 Microelectromechanical actuators including sinuous beam structures |
| 01/03/2002 | WO2002001717A1 Nano-electromechanical filter |
| 01/03/2002 | WO2002001706A1 Electronic microcomponent, sensor and actuator incorporating same |
| 01/03/2002 | WO2002001638A2 Microelectronic packages including reactive components, and methods of fabricating the same |
| 01/03/2002 | US20020001964 Method for fabricating a stencil mask |
| 01/03/2002 | US20020001960 Material removal method for forming a structure |
| 01/03/2002 | US20020001871 Triple layer isolation for silicon microstructure and structures formed using the same |
| 01/03/2002 | US20020000363 Acceleration switch |
| 01/02/2002 | EP1168609A2 Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof |
| 01/02/2002 | EP1167280A2 Production of diaphragms |
| 01/02/2002 | EP1166352A1 Micro-relay |
| 01/02/2002 | EP1166163A2 Cantilevered microstructure methods and apparatus |
| 01/02/2002 | EP1166071A1 Sensor element |
| 01/02/2002 | EP1165432A1 Thermal bend actuator and paddle structure for ink jet nozzle |
| 01/02/2002 | EP0983609B1 Method for making a machined silicon micro-sensor |
| 01/02/2002 | CN1328955A Bandpass filter of packaged microelectronic machinery system with integrated circuit and its manufacturing method |
| 01/01/2002 | US6334761 Check-valved silicon diaphragm pump and method of fabricating the same |
| 12/27/2001 | WO2001099098A2 Thermomechanical in-plane microactuator |
| 12/27/2001 | WO2001098786A1 Accelerometer with folded beams |
| 12/27/2001 | WO2001098200A1 Vertical transistor comprising a mobile gate and a method for the production thereof |
| 12/27/2001 | WO2001050137A3 Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same |
| 12/27/2001 | WO2001046664A3 Method for producing micromechanical structures |
| 12/27/2001 | WO2001035433A3 Cmos-compatible mem switches and method of making |
| 12/27/2001 | US20010055876 Semiconductor sensor device and method of manufacturing the same |
| 12/27/2001 | US20010055864 Encapsulated MEMS band-pass filter for integrated circuits and method of fabrication thereof |
| 12/27/2001 | US20010055833 Method of fabrication of an infrared radiation detector and infrared detector device |
| 12/27/2001 | US20010055831 Mechanical landing pad formed on the underside of a MEMS device |
| 12/27/2001 | US20010055242 Continuous laminar fluid mixing in micro-electromechanical systems |
| 12/27/2001 | US20010054778 Microfabricated elastomeric valve and pump systems |
| 12/27/2001 | US20010054315 Micromechanical component protected from environmental influences |
| 12/25/2001 | US6333584 Tiltable electrostatic microactuator and method for using same |
| 12/25/2001 | US6333583 Microelectromechanical systems including thermally actuated beams on heaters that move with the thermally actuated beams |
| 12/23/2001 | CA2351285A1 Production of diaphragms |
| 12/20/2001 | WO2001097562A2 Capacitive micromachined ultrasonic transducers |
| 12/20/2001 | WO2001097559A2 Capacitive micromachined ultrasonic transducers. |
| 12/20/2001 | WO2001096232A1 Microstructure and method for the production thereof |
| 12/20/2001 | WO2001096019A1 High-performance system for parallel and selective dispensing of micro-droplets |
| 12/20/2001 | US20010053261 Angular-precision enhancement in free-space micromachined optical switches |
| 12/20/2001 | US20010053016 Digital micromirror device and method for non-contacting, edge-coupled hidden hinge geometry |
| 12/20/2001 | US20010052834 Electromagnetic actuator |
| 12/20/2001 | US20010052628 Semiconductor pressure sensor having strain gauge and circuit portion on semiconductor substrate |
| 12/20/2001 | US20010052266 Semiconductor pressure sensor having rounded corner portion of diaphragm |
| 12/20/2001 | DE10128577A1 Semiconductor pressure sensor for e.g., as intake pressure sensor in vehicle engine intake, has semiconductor substrate, diaphragm portion, strain gauge, circuit portion, and local oxidation of silicon film |
| 12/18/2001 | US6331444 Method for manufacturing integrated devices including electromechanical microstructures, without residual stress |
| 12/15/2001 | CA2311622A1 Sub-nanoliter liquid drop dispensing system and method therefor |
| 12/13/2001 | WO2001095468A1 Micromechanical device with damped microactuator |
| 12/13/2001 | WO2001095006A1 Damped micromechanical device and method for making same |
| 12/13/2001 | WO2001094920A2 3d array of integrated cells for the sampling and detection of air bound chemical and biological species |
| 12/13/2001 | WO2001094823A1 Controlling physical motion with electrolytically formed bubbles |
| 12/13/2001 | WO2001094253A2 Bulk silicon structures with thin film flexible elements |
| 12/13/2001 | WO2001093997A1 Continuous laminar fluid mixing in micro-electromechanical systems |
| 12/13/2001 | US20010050618 Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise |
| 12/13/2001 | US20010050232 Methods of overplating surfaces of microelectromechanical structure |
| 12/13/2001 | CA2410513A1 3d array of integrated cells for the sampling and detection of air bound chemical and biological species |
| 12/12/2001 | EP1161985A1 Process for manufacturing integrated chemical microreactors of semiconductor material, and integrated microreactor |
| 12/12/2001 | EP0776476B1 Gravity-compensated accelerometer and method for making same |
| 12/11/2001 | US6330102 Apparatus and method for 2-dimensional steered-beam NxM optical switch using single-axis mirror arrays and relay optics |
| 12/11/2001 | US6329738 Precision electrostatic actuation and positioning |
| 12/11/2001 | US6328903 Surface-micromachined chain for use in microelectromechanical structures |
| 12/11/2001 | US6328794 Method of controlling stress in a film |
| 12/11/2001 | US6328697 Capacitive micromachined ultrasonic transducers with improved capacitive response |
| 12/11/2001 | US6328696 Bias charge regulator for capacitive micromachined ultrasonic transducers |
| 12/11/2001 | US6328425 Thermal bend actuator for a micro electro-mechanical device |
| 12/11/2001 | US6327907 Microgyroscope having asymmetric comb sensors |
| 12/11/2001 | US6327855 Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods |
| 12/06/2001 | WO2001092939A1 Staggered torsional electrostatic combdrive and method of forming same |
| 12/06/2001 | WO2001092842A2 Manufacture of mems structures in sealed cavity using dry-release mems device encapsulation |
| 12/06/2001 | WO2001055704A8 System for transferring fluid samples through a sensor array |
| 12/06/2001 | US20010049193 Forming an electroconductive metallization thin film in the movable part and a connecting support; the layer is of an inert metal having a Young's modulus at room temperature which is greater than that of gold; stress relieving |
| 12/06/2001 | US20010048784 Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing |
| 12/06/2001 | US20010048353 Microelectromechanical micro-relay with liquid metal contacts |
| 12/06/2001 | US20010048265 Microelectromechanical apparatus for elevating and tilting a platform |
| 12/06/2001 | US20010048141 Microelectromechanical switch |
| 12/06/2001 | US20010047688 Method for manufacturing a vibrating beam accelerometer |
| 12/06/2001 | DE10126621A1 Semiconductor pressure sensor with a rounded corner part of a membrane for picking up pressure has a recess on a semiconductor substrate with a sidewall, a bottom wall acting as a membrane and a corner part with a bending radius |
| 12/05/2001 | EP1159758A1 Flash memory cell having a flexible element |
| 12/04/2001 | US6326682 Hermetically sealed transducer and methods for producing the same |
| 12/04/2001 | US6324748 Method of fabricating a microelectro mechanical structure having an arched beam |
| 11/29/2001 | WO2001090577A1 Micromachined fluidic device and method for making same |
| 11/29/2001 | WO2001089986A1 A stiction-free electrostatically driven microstructure device |
| 11/29/2001 | WO2001089695A2 Valve for use in microfluidic structures |
| 11/29/2001 | US20010046776 Method for fabricating a stencil mask |
| 11/29/2001 | US20010046346 Micromachined structure for opto-mechanical micro-switch |
| 11/29/2001 | US20010045610 Micro-machined surface structure |