| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 03/05/2015 | US20150061047 Capacitive pressure sensors and fabrication methods thereof |
| 03/05/2015 | US20150060956 Integrated mems pressure sensor with mechanical electrical isolation |
| 03/05/2015 | US20150060955 Integrated mems microphone with mechanical electrical isolation |
| 03/05/2015 | US20150060954 CMOS-MEMS Integrated Flow for Making a Pressure Sensitive Transducer |
| 03/05/2015 | US20150060756 Optical-microwave-quantum transducer |
| 03/05/2015 | US20150059485 Micromechanical sensor system and corresponding manufacturing method |
| 03/05/2015 | DE112013000589T5 Verfahren, Gerät und System zum Bereitstellen von Messungen der Beschleunigung A method, apparatus and system for providing measurements of acceleration |
| 03/05/2015 | DE102014216742A1 MEMS-Vorrichtung MEMS device |
| 03/05/2015 | DE102014112597A1 Vibrationsvorrichtung und Verfahren zur Herstellung einer Vibrationsvorrichtung Vibration device and method for manufacturing a vibrating device |
| 03/05/2015 | DE102014112495A1 Sensoranordnung Sensor array |
| 03/05/2015 | DE102013217318A1 Herstellungsverfahren für eine mikromechanische Sensoranordnung mit Rückseitentrench und entsprechende mikromechanische Sensoranordnung Manufacturing method for a micromechanical sensor arrangement with back trench and corresponding micromechanical sensor arrangement |
| 03/05/2015 | DE102013217312A1 Kapazitives MEMS-Bauelement mit einer druckempfindlichen Membran Capacitive MEMS device having a pressure sensitive diaphragm |
| 03/05/2015 | DE102013217301A1 Bauteil Component |
| 03/05/2015 | DE102013217094A1 Mikromechanisches Bauelement und entsprechendes Prüfverfahren für ein mikromechanisches Bauelement Micromechanical component and corresponding test methods for a micromechanical component |
| 03/03/2015 | US8969979 MEMS devices |
| 03/03/2015 | US8969978 TMAP sensor systems and methods for manufacturing those |
| 02/26/2015 | WO2015026490A1 Mems display incorporating extended height actuators |
| 02/26/2015 | US20150054101 Micromechanical component and method for manufacturing a micromechanical component |
| 02/26/2015 | US20150054100 Micro-electro-mechanical system (mems) and related actuator bumps, methods of manufacture and design structures |
| 02/26/2015 | US20150054096 Reducing mems stiction by introduction of a carbon barrier |
| 02/26/2015 | US20150053003 Method and apparatus for fabricating electrostatic capacitance-type acceleration sensor and electrostatic capacitance-type acceleration sensor |
| 02/26/2015 | US20150053002 Micromechanical sensor and method for manufacturing a micromechanical sensor |
| 02/26/2015 | US20150053001 Micromechanical component and method for producing a micromechanical component |
| 02/26/2015 | DE102013216915A1 Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors Micromechanical sensor and method for manufacturing a micromechanical sensor |
| 02/26/2015 | DE102013216907A1 Mikromechanischer Sensor Micromechanical sensor |
| 02/26/2015 | DE102013216901A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 02/26/2015 | DE102013216898A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 02/24/2015 | US8964273 Optical reflection element |
| 02/24/2015 | US8963261 Capacitive transducer and methods of manufacturing and operating the same |
| 02/24/2015 | US8962389 Microelectronic packages including patterned die attach material and methods for the fabrication thereof |
| 02/24/2015 | US8960230 Valve, in particular for a component in microfluid technology |
| 02/19/2015 | US20150048714 Electroactive polymer structures printed with varying compositions of ions |
| 02/19/2015 | US20150047435 Micromechanical Measuring Element |
| 02/19/2015 | DE102013013402A1 Biegeelementanordnung sowie deren Verwendung Bending element arrangement and the use thereof |
| 02/18/2015 | EP2836455A1 Membrane arrangement for a micro-electromechanical measuring transducer and method for producing a membrane arrangement |
| 02/17/2015 | US8958138 Display device and method of manufacturing the display device |
| 02/17/2015 | US8957485 Fabrication of MEMS based cantilever switches by employing a split layer cantilever deposition scheme |
| 02/17/2015 | US8957378 Nano-tip spacers for precise gap control and thermal isolation in MEMS structures |
| 02/12/2015 | US20150044418 Monolithic Fabrication of Three-Dimensional Structures |
| 02/12/2015 | US20150041932 Planar cavity mems and related structures, methods of manufacture and design structures |
| 02/12/2015 | US20150041931 Embedded Micro Valve In Microphone |
| 02/12/2015 | US20150041930 Acoustic transducer |
| 02/12/2015 | US20150041927 Mems device with differential vertical sense electrodes |
| 02/12/2015 | DE102009059871B4 Elastische Vorrichtung Elastic device |
| 02/11/2015 | EP2834650A1 Mems sensor with movable z-axis sensing element |
| 02/11/2015 | CN101588987B 大面积诱导的纳米结构组装 Large induced nanostructure assembly |
| 02/10/2015 | US8952466 Flexible stop for an acceleration sensor |
| 02/10/2015 | US8952464 MEMS apparatus |
| 02/10/2015 | US8952463 MEMS structure preventing stiction |
| 02/10/2015 | US8950259 Element structure, inertia sensor, and electronic device |
| 02/05/2015 | WO2015015032A1 Device or microbridle useful for determining and monitoring the cross-section of a structure |
| 02/05/2015 | US20150035122 Micro-Electro-Mechanical System (MEMS) Structures And Design Structures |
| 02/05/2015 | US20150035094 Microphone assembly having at least two mems microphone components |
| 02/05/2015 | US20150035091 Process for manufacturing a packaged device, in particular a packaged micro-electro-mechanical sensor, having an accessible structure, such as a mems microphone and packaged device obtained thereby |
| 02/05/2015 | US20150035089 Mems device and method of forming the same |
| 02/05/2015 | US20150033878 Method for producing a pressure sensor and corresponding sensor |
| 02/05/2015 | DE102013214823A1 Mikrofonbauteil mit mindestens zwei MEMS-Mikrofonbauelementen Microphone component with at least two MEMS microphone devices |
| 02/04/2015 | EP2833542A1 Actuator element using carbon electrode |
| 02/04/2015 | EP2833153A1 Method for manufacturing capacitive acceleration sensor, device for manufacturing same, and capacitive acceleration sensor |
| 02/04/2015 | CN104326434A 一种微机械静电驱动的梳齿结构 A micro mechanical electrostatic comb drive structure |
| 02/04/2015 | CN102826499B 弹性梁及包括其的mems传感器 Elastic beam and including the mems sensor |
| 02/03/2015 | US8946831 Low frequency response microphone diaphragm structures and methods for producing the same |
| 01/29/2015 | WO2015012094A1 Optical interference sensor, and measurement system using same |
| 01/29/2015 | WO2015010545A1 High-sensitivity terahertz microfluidic channel sensor and manufacturing method thereof |
| 01/29/2015 | US20150028437 Strain decoupled sensor |
| 01/29/2015 | US20150028436 Apparatus Comprising and a Method for Manufacturing an Embedded MEMS Device |
| 01/29/2015 | US20150028434 Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer |
| 01/29/2015 | US20150028432 Assembly and packaging of mems device |
| 01/28/2015 | EP2829508A2 Encapsulation structure including a mechanically-reinforced cover with getter effect |
| 01/28/2015 | EP2829507A1 Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer |
| 01/28/2015 | CN102712461B 非易失性纳米机电系统器件 Nonvolatile NEMS devices |
| 01/28/2015 | CN102695978B 振动反射镜元件及振动反射镜元件的制造方法 Method for producing vibrating mirror element and the oscillating mirror element |
| 01/27/2015 | US8941452 Electromechanical microsystems with air gaps |
| 01/27/2015 | US8941192 MEMS actuator device deployment |
| 01/27/2015 | US8940586 Mechanism for MEMS bump side wall angle improvement |
| 01/27/2015 | US8939645 Methods and systems for micro bearings |
| 01/27/2015 | US8939029 MEMS sensor with movable Z-axis sensing element |
| 01/22/2015 | WO2015009360A1 Non-symmetric arrays of mems digital variable capacitor with uniform operating characteristics |
| 01/22/2015 | WO2015008422A1 Sensor |
| 01/22/2015 | US20150021745 Reactive ion etching |
| 01/22/2015 | US20150021719 Functional device, electronic apparatus, and moving object |
| 01/22/2015 | US20150021717 Reducing microelectromechanical systems stiction by formation of a silicon carbide layer |
| 01/22/2015 | US20150020590 Optomechanical accelerometer |
| 01/22/2015 | DE102014214154A1 Ein MEMS-Bauelement A MEMS device |
| 01/22/2015 | DE102014109913A1 Halbleitervorrichtung, mikro-elektromechanischen Resonator und Verfahren zur Herstellung einer Halbleitervorrichtung A semiconductor device, micro-electro-mechanical resonator and method for making a semiconductor device |
| 01/22/2015 | DE102013211970A1 Mikro-elektromechanischer Resonator und Verfahren zum Herstellen eines mikro-elektromechanischen Resonators Micro-electro-mechanical resonator and method for producing a micro-electromechanical resonator, |
| 01/21/2015 | EP2827183A1 Mirror drive device and driving method thereof |
| 01/21/2015 | EP2827182A1 Mirror drive device and driving method thereof |
| 01/20/2015 | US8937513 Micro-scale system to provide thermal isolation and electrical communication between substrates |
| 01/15/2015 | US20150014799 Electronic device, method of manufacturing electronic device, physical quantity sensor, electronic apparatus, moving object |
| 01/15/2015 | US20150014798 Assembly for a mems environmental sensor device having improved resistance, and corresponding manufacturing process |
| 01/15/2015 | US20150014797 Mems device having a microphone structure, and method for the production thereof |
| 01/15/2015 | US20150014796 Device with MEMS Structure and Ventilation Path in Support Structure |
| 01/15/2015 | US20150014794 Integrated Circuit Provided with a Device for Detecting its Spatial Orientation and/or a Modification of this Orientation |
| 01/15/2015 | DE102014213386A1 Vorrichtung mit MEMS-Struktur und Lüftungsweg in Stützstruktur Device with MEMS structure and air vent in support structure |
| 01/15/2015 | DE102013213717A1 MEMS-Bauelement mit einer Mikrofonstruktur und Verfahren zu dessen Herstellung MEMS device having a microphone structure and process for its preparation |
| 01/15/2015 | DE102013212202A1 Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements Micromechanical component and process for producing a micromechanical component |
| 01/14/2015 | EP2822892A2 Atomic layer deposition strengthening members and method of manufacture |
| 01/14/2015 | CN204097077U 一种mems器件结构 One kind mems device structure |
| 01/14/2015 | CN104276540A 微机械部件及微机械部件的制造方法 Method of manufacturing micro-mechanical components and micro-mechanical components |