| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 02/18/2003 | US6521313 Method for producing a diaphragm sensor unit and diaphragm sensor unit |
| 02/18/2003 | US6520778 Microelectronic contact structures, and methods of making same |
| 02/18/2003 | US6520197 Continuous laminar fluid mixing in micro-electromechanical systems |
| 02/18/2003 | US6520017 Micromechanical spin angular acceleration sensor |
| 02/13/2003 | WO2003012859A1 Electrode structure, and method for manufacturing thin-film structure |
| 02/13/2003 | WO2003012853A1 Substrate and method for producing the same, and thin film structure |
| 02/13/2003 | WO2003012491A2 Mems mirror |
| 02/13/2003 | WO2003012420A1 Micromechanical component |
| 02/13/2003 | WO2003012171A1 Electro ceramic mems structure with controlled actuator gap |
| 02/13/2003 | WO2003011747A1 Method for the fabrication of suspended porous silicon microstructures and application in gas sensors |
| 02/13/2003 | WO2002095800A3 A method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants |
| 02/13/2003 | WO2002079814A3 Method for fabricating a through-wafer optical mems device having an anti-reflective coating |
| 02/13/2003 | US20030032293 High sensitive micro-cantilever sensor and fabricating method thereof |
| 02/13/2003 | US20030032215 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS |
| 02/13/2003 | US20030030023 High temperature micro-machined valve |
| 02/13/2003 | US20030029705 Bistable actuation techniques, mechanisms, and applications |
| 02/13/2003 | US20030029238 Isolated resonator gyroscope |
| 02/13/2003 | DE10151130C1 Production of micromechanical component having moving structure comprises preparing component with structure embedded in layer, partially exposing embedded structure by forming recess in layer, and further processing |
| 02/12/2003 | CN1397091A Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compound used therefor |
| 02/12/2003 | CN1397004A Angular rate sensor |
| 02/11/2003 | US6519075 Packaged MEMS device and method for making the same |
| 02/11/2003 | US6518690 Piezoelectric/electrostrictive film type elements and process for producing the same |
| 02/11/2003 | US6516671 Grain growth of electrical interconnection for microelectromechanical systems (MEMS) |
| 02/06/2003 | WO2003010878A2 Mems element having perpendicular portion formed from substrate |
| 02/06/2003 | WO2003010828A1 Method for manufacturing thin-film structure |
| 02/06/2003 | WO2003010545A1 Micromechanical component |
| 02/06/2003 | WO2002050874A3 Mems device having an actuator with curved electrodes |
| 02/06/2003 | WO2001065302A9 Optical switch array using rolling shutter optical switch elements |
| 02/06/2003 | US20030027370 Process for fabricating a microelectromechanical optical component |
| 02/06/2003 | US20030026547 Actuator mechanism for precision alignment of optical components |
| 02/06/2003 | US20030025168 Systems with high density packing of micromachines |
| 02/06/2003 | US20030024328 Force detector and acceleration detector and method of manufacturing the same |
| 02/05/2003 | EP1281665A2 Systems with high density packing of micromachines |
| 02/05/2003 | EP1281664A1 Method of manufacture of an optical microelectromechanical device |
| 02/05/2003 | EP0824702B1 Gimballed vibrating wheel gyroscope having strain relief features |
| 02/04/2003 | US6515751 Mechanically resonant nanostructures |
| 02/04/2003 | US6515382 Actuators and apparatus |
| 02/04/2003 | US6515277 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 02/04/2003 | US6514786 Method of manufacturing acceleration sensor |
| 02/04/2003 | US6513908 Pusher actuation in a printhead chip for an inkjet printhead |
| 01/31/2003 | CA2394108A1 Procedure for manufacturing a microelectromechanical optical component |
| 01/30/2003 | WO2003009402A2 Actuator system |
| 01/30/2003 | WO2003009318A2 Support with getter-material for microelectronic, microoptoelectronic or micromechanical device |
| 01/30/2003 | WO2003009317A2 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 01/30/2003 | WO2002068849A9 Microfluidic valve and microactuator for a microvalve |
| 01/30/2003 | US20030022470 Parallel, individually addressable probes for nanolithography |
| 01/30/2003 | US20030022428 Electromechanical memory having cell selection circuitry constructed with nanotube technology |
| 01/30/2003 | US20030021966 Electromechanical memory array using nanotube ribbons and method for making same |
| 01/30/2003 | US20030021523 Hybrid MEMS fabrication method and new optical MEMS device |
| 01/30/2003 | US20030021141 Hybrid circuit having nanotube electromechanical memory |
| 01/30/2003 | US20030021004 Method for fabricating a through-wafer optical MEMS device having an anti-reflective coating |
| 01/30/2003 | US20030019833 Microfabricated elastomeric valve and pump systems |
| 01/30/2003 | US20030019832 Staggered torsional electrostatic combdrive and method of forming same |
| 01/29/2003 | EP0951617B1 Micropump with a built-in intermediate part |
| 01/29/2003 | EP0702796B1 Microelectromechanical lateral accelerometer |
| 01/29/2003 | CN1394276A Grain growth of electrical interconnection for microelectromechanical systems (MEMS) |
| 01/28/2003 | US6512432 Microswitch and method of fabricating a microswitch with a cantilevered arm |
| 01/28/2003 | US6512322 Longitudinal piezoelectric latching relay |
| 01/28/2003 | US6511913 Method for manufacturing a membrane |
| 01/28/2003 | US6511894 MEMS relay and method of fabricating the same |
| 01/28/2003 | US6511859 IC-compatible parylene MEMS technology and its application in integrated sensors |
| 01/23/2003 | WO2003007049A1 Photonic mems and structures |
| 01/23/2003 | WO2002042716A3 Wafer eutectic bonding of mems gyros |
| 01/23/2003 | US20030016906 Optical switch |
| 01/23/2003 | US20030016436 Fabry-Perot cavity manufactured with bulk micro-machining process applied on supporting substrate |
| 01/23/2003 | US20030016428 Light deflector, method of manufacturing light deflector, optical device using light deflector, and torsion oscillating member |
| 01/23/2003 | US20030015043 Force detector and acceleration detector and method of manufacturing the same |
| 01/22/2003 | EP1278083A2 Optical switch |
| 01/22/2003 | EP1277696A2 Spring with conductive coating |
| 01/22/2003 | EP1277277A2 Method and subsystem for processing signals utilizing a plurality of vibrating micromechanical devices |
| 01/22/2003 | EP1277033A2 Micromechanical component and balancing method |
| 01/22/2003 | EP1200198B1 Actuator component for a microspray and its production process |
| 01/22/2003 | CN1392951A Thermal displacement element and radiation detector using element |
| 01/22/2003 | CN1099614C Method for providing sacrificial spacer for micro-mechanical devices |
| 01/21/2003 | US6510222 Miniature connector array |
| 01/21/2003 | US6509620 Flexure coupling block for motion sensor |
| 01/21/2003 | US6509619 Detectors |
| 01/21/2003 | US6509605 Flash memory cell having a flexible element |
| 01/21/2003 | US6508947 Method for fabricating a micro-electro-mechanical fluid ejector |
| 01/21/2003 | US6508125 Electrostatic capacitance type acceleration sensor, electrostatic capacitance type angular acceleration sensor and electrostatic actuator |
| 01/21/2003 | US6508124 Microelectromechanical structure insensitive to mechanical stresses |
| 01/21/2003 | US6508122 Microelectromechanical system for measuring angular rate |
| 01/16/2003 | WO2003005420A2 Method and apparatus for fabricating structures using chemically selective endpoint detection |
| 01/16/2003 | WO2002058137A3 Composite microelectronic spring structure and method for making same |
| 01/16/2003 | WO2002028766A3 Method of trimming micro-machined electromechanical sensors (mems) devices |
| 01/16/2003 | WO2002004991A3 Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same |
| 01/16/2003 | WO2001087765A3 Micromechanical component and method for producing the same |
| 01/16/2003 | US20030013246 Method of manufacturing a dual wafer tunneling gyroscope |
| 01/16/2003 | US20030013046 Use of sacrificial layers in the manufacturing of chemical reactor structures and the application of such structures |
| 01/16/2003 | US20030012866 Acts as a positive electron beam resist, is transparent to ultraviolet light and depolymerizes when heated; forming nano-fluidic devices |
| 01/16/2003 | US20030012488 MEMS-based noncontacting free-space optical switch |
| 01/16/2003 | US20030012487 Optical switch based on rotating vertical micro-mirror |
| 01/16/2003 | US20030011866 Compliant mechanism and method of forming same |
| 01/16/2003 | US20030011864 Tilt mirror fabry-perot filter system, fabrication process therefor, and method of operation thereof |
| 01/16/2003 | US20030010746 Use of an organic dielectric as a sacrificial layer |
| 01/16/2003 | US20030010638 Nanopump devices and methods |
| 01/16/2003 | US20030010615 Microspring with conductive coating deposited on tip after release |
| 01/16/2003 | US20030010131 Grain growth of electrical interconnection for microelectromechanical systems (mems) |
| 01/15/2003 | EP1275997A2 Light deflector, method of manufacturing light deflector, optical device using light deflector, and torsion oscillating member |
| 01/15/2003 | EP1275201A2 Method and apparatus for filtering signals in a subsystem including a power amplifier utilizing a bank of vibrating micromechanical apparatus |