| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 02/26/2002 | US6351580 Microelectromechanical devices having brake assemblies therein to control movement of optical shutters and other movable elements |
| 02/26/2002 | US6351054 Compounded AC driving signal for increased reliability and lifetime in touch-mode electrostatic actuators |
| 02/26/2002 | US6351051 Microelectromechanical systems actuttor using a time-varying magnetic field |
| 02/21/2002 | WO2001082475A3 Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device |
| 02/21/2002 | WO2000070630A3 High performance mems thin-film teflon® electret microphone |
| 02/21/2002 | US20020021055 Micro-actuator and manufacturing method thereof |
| 02/21/2002 | US20020021053 Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature |
| 02/21/2002 | US20020020053 Deposited thin films and their use in separation and sacrificial layer applications |
| 02/21/2002 | DE10038099A1 Mikromechanisches Bauelement Micromechanical component |
| 02/20/2002 | EP1180848A1 Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly |
| 02/20/2002 | EP1180494A2 Thin film resonators fabricated on membranes created by front side releasing |
| 02/20/2002 | EP1180493A2 Micro-actuator and manufacturing method thereof |
| 02/20/2002 | CN1336271A Making process of soft magnetic rubber executor for micro robot |
| 02/20/2002 | CN1079607C Actuator, method for driving same, compact machine tool using actuator |
| 02/20/2002 | CN1079311C Micromechanical device having contacting elements and method for preventing said elements being adhering |
| 02/14/2002 | WO2002013343A2 Tunable distributed feedback laser |
| 02/14/2002 | WO2002012925A2 Micromirror elements, package for the micromirror elements, and protection system therefor |
| 02/14/2002 | WO2002012906A1 Micromechanical component |
| 02/14/2002 | WO2002012117A1 Assembly having a variable capacitance |
| 02/14/2002 | WO2002012116A2 Bonded wafer optical mems process |
| 02/14/2002 | WO2002012115A2 Methods for reducing the curvature in boron-doped silicon micromachined structures |
| 02/14/2002 | WO2002012114A2 Ceramic microelectromechanical structure |
| 02/14/2002 | WO2001056920A3 Micro-electromechanical system device |
| 02/14/2002 | WO2001056633A3 Single-use therapeutic substance delivery device with infusion rate control |
| 02/14/2002 | WO2001048527A3 Micromirror |
| 02/14/2002 | US20020019064 By patterning a thick functional material film in high aspect ratio with a simple and practical manufacturing method using a silicon layer for a mask pattern; for Micro Electro Mechanic Systems (MEMS) |
| 02/14/2002 | US20020018964 Method of fabricating a suspended micro-structure with a sloped support and a suspended microstructure fabricated by the method |
| 02/14/2002 | US20020018613 Rolling shutter optical switch device with latch electrode and slits in shutter |
| 02/14/2002 | US20020018334 MEMS device members having portions that contact a substrate and associated methods of operating |
| 02/14/2002 | US20020017660 Process for manufacturing integrated chemical microreactors of semiconductor material |
| 02/14/2002 | US20020017134 Inertia sensor and method of fabricating the same |
| 02/14/2002 | DE10134558A1 Semiconductor sensor for dynamic parameters, has restricted Q factor for flexible elements |
| 02/14/2002 | DE10036437A1 Micromechanical acceleration sensor, and manufacturing method, based on use of MIS transistors in which a gate electrode moves relative to the channel region with the distance variation producing a measurable signal |
| 02/14/2002 | DE10004393C1 Mikrorelais Microrelay |
| 02/13/2002 | EP1179139A1 Micromechanic pump |
| 02/13/2002 | EP1178888A1 Actuator control in a micro electro-mechanical liquid ejection device |
| 02/13/2002 | EP0939862B1 Miniature valve for filling the reservoir of an apparatus for the transdermal administration of medicine |
| 02/12/2002 | US6346735 Semiconductor sensor structure and method of manufacturing the same |
| 02/12/2002 | US6346429 Method for fabricating integrated sensors |
| 02/12/2002 | US6345502 Micromachined parylene membrane valve and pump |
| 02/07/2002 | WO2002011189A2 A tunneling sensor or switch and a method of making same |
| 02/07/2002 | WO2002011188A2 A mem sensor and a method of making same |
| 02/07/2002 | WO2002010702A2 Micro-machined absolute pressure sensor |
| 02/07/2002 | WO2002010684A2 Three-axes sensor and a method of making same |
| 02/07/2002 | WO2002010065A1 Micromechanical devices |
| 02/07/2002 | WO2002010064A2 A mem gyroscope and a method of making same |
| 02/07/2002 | WO2002010063A2 A tunneling sensor or switch and a method of making same |
| 02/07/2002 | WO2001080286A3 Deposited thin films and their use in separation and sarcrificial layer applications |
| 02/07/2002 | US20020016095 Spring structure with self-aligned release material |
| 02/07/2002 | US20020014816 Piezoelectric/electrostrictive film type elements and process for producing the same |
| 02/07/2002 | US20020014673 Method of making membrane integrated circuits |
| 02/07/2002 | US20020014126 Force detector and acceleration detector and method of manufacturing the same |
| 02/07/2002 | DE10035344A1 Shadow mask for local processing of substrate has micromechanical structure opening facilitating local processing |
| 02/07/2002 | CA2410707A1 Micro-machined absolute pressure sensor |
| 02/06/2002 | EP1076767B1 Microvalve |
| 02/05/2002 | US6344417 Method for micro-mechanical structures |
| 01/31/2002 | WO2002007884A2 Methods for liquid metering in microchannels |
| 01/31/2002 | WO2001020948A3 Mems digital-to-acoustic transducer with error cancellation |
| 01/31/2002 | US20020013555 Bistable microvalve and microcatheter system |
| 01/31/2002 | US20020013070 Spring structure with self-aligned release material |
| 01/31/2002 | US20020013054 Single crystal silicon micro-actuator/mirror and method therefor |
| 01/31/2002 | US20020012744 Re-coating MEMS devices using dissolved resins |
| 01/31/2002 | US20020012180 Dual axis micro-machined mirror device |
| 01/31/2002 | US20020011758 MEMS microactuators located in interior regions of frames having openings therein and methods of operating same |
| 01/31/2002 | US20020011117 Micro-machined mechanical structure and device incorporating the structure |
| 01/31/2002 | US20020011112 Micromechanical component |
| 01/30/2002 | EP1176635A2 Spring structure and method |
| 01/30/2002 | EP1176620A1 Micromachine switch and method of manufacture thereof |
| 01/30/2002 | EP1176029A2 Ink jet recording element and printing method |
| 01/30/2002 | EP1175600A1 Integrated optoelectronic thin-film sensor and method of producing same |
| 01/30/2002 | EP1175371A1 Actuator element |
| 01/30/2002 | EP0829012B1 Method of producing a semiconductor transducer |
| 01/30/2002 | CN1333861A Piezoelectric micropump |
| 01/30/2002 | CN1333178A Microcomputer electric actuator with wave shape beam structure |
| 01/29/2002 | US6343178 Micromachined voltage controlled optical attenuator |
| 01/29/2002 | US6342667 Thermal isolation structure for a micro thermopile and method for making the same |
| 01/29/2002 | US6342430 Trench isolation for micromechanical devices |
| 01/29/2002 | US6342427 Method for forming micro cavity |
| 01/24/2002 | WO2002007482A2 Micro electro mechanical system controlled organic led and pixel arrays and method of using and of manufacturing same |
| 01/24/2002 | WO2002007300A1 Compliant apparatus and method |
| 01/24/2002 | WO2002006152A2 System and method for constraining totally released microcomponents |
| 01/24/2002 | US20020009821 Method for improving mechanical strength in micro electro mechanical systems and devices produced thereof |
| 01/24/2002 | US20020009374 Micro pump |
| 01/24/2002 | US20020009256 Variable optical attenuator and beam splitter |
| 01/24/2002 | US20020008922 Actuator and micromirror for fast beam steering and method of fabricating the same |
| 01/24/2002 | US20020008296 Integrated sensor having plurality of released beams for sensing acceleration and associated methods |
| 01/24/2002 | DE10032579A1 Verfahren zur Herstellung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement A process for producing a semiconductor device as well as a product produced by the process semiconductor device |
| 01/23/2002 | EP1173893A2 Polycrystalline silicon germanium films for forming micro-electromechanical systems |
| 01/23/2002 | EP1173773A1 Dynamically balanced microelectromechanical devices |
| 01/23/2002 | EP1021815B1 Micromechanical electrostatic relay and method for the production thereof |
| 01/17/2002 | WO2002005413A2 Mems actuator with lower power consumption and lower cost simplified fabrication |
| 01/17/2002 | WO2002005012A2 Optical mems switching array with embedded beam-confining channels and method of operating same |
| 01/17/2002 | WO2002004991A2 Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same |
| 01/17/2002 | US20020006682 Micromechanical component and appropriate manufacturing method |
| 01/17/2002 | US20020005976 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
| 01/17/2002 | US20020005729 Method and system for probing, testing, burn-in, repairing and programming of integrated circuits in a closed environment using a single apparatus |
| 01/17/2002 | US20020005530 Field effect transistor, especially for use as a sensor element or acceleration sensor, and method for its manufacture |
| 01/17/2002 | DE10029012A1 Mikrostruktur und Verfahren zu deren Herstellung Microstructure and methods for their preparation |
| 01/16/2002 | EP1172680A2 Method for coating micro-electromechanical systems (MEMS) |
| 01/16/2002 | EP1171378A1 A method of manufacturing a thermal bend actuator |