| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 10/10/2002 | WO2002079080A1 Production device and production method for silicon-based structure |
| 10/10/2002 | WO2002079079A1 Micro electromechanical switches |
| 10/10/2002 | WO2002079078A1 Micro electromechanical switches |
| 10/10/2002 | WO2002079077A1 Micro electromechanical switches |
| 10/10/2002 | WO2002079076A1 Mems device members having portions that contact a substrate and associated mehtods of operating |
| 10/10/2002 | WO2002058092A9 Micro-magnetic latching switch with relaxed permanent magnet alignment requirements |
| 10/10/2002 | WO2002049763A3 Device for receiving and discharging liquid substances |
| 10/10/2002 | WO2002017482A3 Micromechanical resonator and filter using the same |
| 10/10/2002 | US20020146330 Micropump |
| 10/10/2002 | US20020146200 Electrostatically actuated micro-electro-mechanical devices and method of manufacture |
| 10/10/2002 | US20020145532 Configuration for wire-free supply of electric power to a large number of sensors and/or actuatiors, sensor or actuator for this purpose and system for a machine having a large number of sensors and/or actuators |
| 10/10/2002 | US20020145231 High throughput screening of crystallization of materials |
| 10/10/2002 | US20020144738 Microfabricated elastomeric valve and pump systems |
| 10/09/2002 | EP1247131A2 Micromirror |
| 10/09/2002 | CN1373891A Magnetic sensing of motion in microfabricated device |
| 10/08/2002 | US6462392 Micromechanical cap structure and the respective manufacturing method |
| 10/08/2002 | US6461967 Material removal method for forming a structure |
| 10/08/2002 | US6461888 Lateral polysilicon beam process |
| 10/08/2002 | US6461337 Electrostatic microactuators, active three-dimensional microcatheters using same and method for making same |
| 10/03/2002 | WO2002077613A2 Fluid property sensors |
| 10/03/2002 | WO2002076881A1 Method for making a structure with micromachined membrane |
| 10/03/2002 | WO2002076880A2 Method for producing micromechanic sensors and sensors produced by said method |
| 10/03/2002 | WO2002076879A1 A unitary flexible and mechanically and chemically robust microsystem and a method for producing same |
| 10/03/2002 | US20020141690 Mirror for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor |
| 10/03/2002 | US20020141038 Microminiature movable device |
| 10/03/2002 | US20020141036 Device for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor |
| 10/03/2002 | US20020140533 Method of producing an integrated type microswitch |
| 10/03/2002 | US20020139947 Extended range diaphragm valve and method for making same |
| 10/03/2002 | US20020139190 High-precision integrated semiconductor peizoresistive detector devices and methods using the same |
| 10/03/2002 | US20020139171 Micromechanical component and manufacturing method |
| 10/02/2002 | EP1245969A2 Electromechanical conformal grating device with improved optical efficiency and contrast |
| 10/02/2002 | EP1245529A2 Microminiature movable device |
| 10/02/2002 | EP1245528A1 A unitary flexible microsystem and a method for producing same |
| 10/02/2002 | EP1244900A1 Grain growth of electrical interconnection for microelectromechanical systems (mems) |
| 10/02/2002 | DE10114036A1 Verfahren zur Herstellung von mikromechanischen Sensoren und damit hergestellte Sensoren A process for producing micromechanical sensors and sensors produced thereby |
| 10/01/2002 | US6459523 Galvano-micromirror and its manufacture process |
| 10/01/2002 | US6458698 Controlled-stress stable metallization for electronic and electromechanical devices |
| 10/01/2002 | US6458615 Method of fabricating micromachined structures and devices formed therefrom |
| 10/01/2002 | US6458513 Forming cavities, masking and etching silicon substrate to form three dimensional structure |
| 10/01/2002 | US6457795 Actuator control in a micro electro-mechanical device |
| 10/01/2002 | US6457360 High-precision integrated semiconductor peizoresistive detector devices and methods using the same |
| 09/26/2002 | WO2002075794A2 A method for making a micromechanical device by using a sacrificial substrate |
| 09/26/2002 | WO2002075426A1 Microelectromechanical mirror and mirror array |
| 09/26/2002 | WO2002057824A3 Across-wafer optical mems device and protective lid having across-wafer light-transmissive portions |
| 09/26/2002 | WO2002056061A3 Optical mems device and package having a light-transmissive opening or window |
| 09/26/2002 | WO2002037892A3 Operating element |
| 09/26/2002 | WO2001011411A9 Microelectromechanical optical switch and method of manufacture thereof |
| 09/26/2002 | US20020136667 For measurement of biological materials from biological fluids; diabetes monitoring |
| 09/26/2002 | US20020136485 Apparatus and method for micro-electromechanical systems two-dimensional large movement electrostatic comb drive |
| 09/26/2002 | US20020135864 Silicon micromachined optical device |
| 09/26/2002 | US20020135855 Apparatus and method for 2-dimensional steered-beam nxm optical switch using single-axis mirror arrays |
| 09/26/2002 | US20020135440 Micromechanical tunable capacitor and an integrated tunable resonator |
| 09/26/2002 | US20020135047 Integrated adjustable capacitor |
| 09/26/2002 | US20020135033 Micro-mirror and a method for fabricating the same |
| 09/25/2002 | EP1243915A1 Apparatus for evaluating electrical characteristics |
| 09/25/2002 | EP1243902A1 Spectrophotometer with electrostatic microshutter |
| 09/25/2002 | EP1242826A1 Acceleration sensor with limited movability in the vertical direction |
| 09/25/2002 | EP0869850B1 Forming electrical conduits through holes |
| 09/24/2002 | US6456420 Microelectromechanical elevating structures |
| 09/24/2002 | US6454421 Dual axis micro machined mirror device |
| 09/19/2002 | WO2002073691A1 In-situ cap and method of fabricating same for an integrated circuit device |
| 09/19/2002 | WO2002073645A1 Torsion spring for electro-mechanical switches and a cantilever-type rf micro-electromechanical switch incorporating the torsion spring |
| 09/19/2002 | US20020132490 Microstructure having a membrane and a wedge beneath and methods for manufacture of same |
| 09/19/2002 | US20020132389 Method for making a micromechanical device by using a sacrificial substrate |
| 09/19/2002 | US20020132387 Electronic microcomponent of the variable capacitor or microswitch type, and process for fabricating such a component |
| 09/19/2002 | US20020132113 Method and system for making a micromachine device with a gas permeable enclosure |
| 09/19/2002 | US20020132101 Deposited thin film void-column network materials |
| 09/19/2002 | US20020131682 Microelectromechanical mirror and mirror array |
| 09/19/2002 | US20020131679 Microelectromechanical mirror and mirror array |
| 09/18/2002 | EP1241508A2 Electrostatically controlled optical microshutter and microshutter matrix with simplified control |
| 09/18/2002 | EP1241507A2 An electrostatically-controlled optical micro-shutter with non-transparent fixed electrode |
| 09/18/2002 | EP1240530A1 Micromechanical structure, in particular for an acceleration sensor |
| 09/18/2002 | EP1240529A2 Method for producing micromechanical structures |
| 09/18/2002 | CN1370284A Microelectromechanical optical switch and method of manufacture thereof |
| 09/17/2002 | US6451668 Method of producing calibration structures in semiconductor substrates |
| 09/17/2002 | US6450654 Polysilicon microelectric reflectors |
| 09/17/2002 | US6450033 Semiconductor physical quantity sensor |
| 09/17/2002 | US6450031 Semiconductor physical quantity sensor |
| 09/17/2002 | US6450029 Capacitive physical quantity detection device |
| 09/17/2002 | US6450025 Micro-heater and airflow sensor using the same |
| 09/12/2002 | WO2002071371A2 Fabrication integration of micro-components |
| 09/12/2002 | WO2002063657A8 Microelectronic mechanical system (mems) switch and method of fabrication |
| 09/12/2002 | WO2002016256A3 Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby |
| 09/12/2002 | US20020128593 Valve integrally associated with microfluidic liquid transport assembly |
| 09/12/2002 | US20020127760 Method and apparatus for micro electro-mechanical systems and their manufacture |
| 09/12/2002 | US20020127736 Microfluidic devices and methods of use |
| 09/12/2002 | US20020126387 Optical multilayer structure material and process for producing the same, light switching device, and image display apparatus |
| 09/12/2002 | US20020125790 MEMS actuator with lower power consumption and lower cost simplified fabrication |
| 09/12/2002 | US20020125208 MEMS sensor structure and microfabrication process therefor |
| 09/12/2002 | US20020125117 Microelectromechanical system (MEMS) digital electrical isolator |
| 09/12/2002 | US20020125030 High-Q micromechanical device and method of tuning same |
| 09/12/2002 | DE10161047A1 Verfahren zur Herstellung eines Sensors mit Membranstruktur A method for producing a sensor with membrane structure |
| 09/11/2002 | CN1369039A Microfabricated elastomeric valve and pump systems |
| 09/10/2002 | US6449079 Deflectable micro-mirror |
| 09/10/2002 | US6448691 Piezoelectric/electrostrictive device and method of manufacturing same |
| 09/10/2002 | US6448624 Semiconductor acceleration sensor |
| 09/10/2002 | US6448622 Germanium silicides and transistor layers |
| 09/10/2002 | US6448604 Integrated adjustable capacitor |
| 09/10/2002 | US6447688 Method for fabricating a stencil mask |
| 09/10/2002 | US6447126 Support post architecture for micromechanical devices |