Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
09/2003
09/25/2003WO2002025349A3 Multi-axis magnetically actuated device
09/25/2003US20030181853 Extruding polymeric materials through die head, mixing with filler materials so that various materials having individual properties become incorporated at various locations along length and circumference of parison, blow molding article
09/25/2003US20030180981 Thin-film structure and method for manufacturing the same, and acceleration sensor and method for manufacturing the same
09/25/2003US20030178913 Electrostatically operated device
09/25/2003US20030178912 Electrostatically operated device
09/25/2003US20030178635 Perpendicular torsion micro-electromechanical switch
09/25/2003US20030177853 Nonlinear mechanical modulator and actuation systems thereof
09/25/2003US20030177832 Acceleration sensor
09/24/2003EP1347264A1 Method of fabricating a probe for SPM
09/24/2003EP1346948A2 Electrostatically operated optical switching or attenuating devices
09/24/2003EP1346947A2 Electrostatically operated optical switching or attenuating devices
09/24/2003EP1346828A2 Piezoelectric actuator, liquid jetting head incorporating the same, piezoelectric element, and method of manufacturing the same
09/24/2003EP1346445A2 Tunable distributed feedback laser
09/24/2003EP1346382A2 Mems-switched stepped variable capacitor and method of making same
09/24/2003EP1346241A2 Mems reconfigurable optical grating
09/24/2003EP1345844A2 Soi/glass process for forming thin silicon micromachined structures
09/24/2003EP1345843A2 System and method for constraining totally released microcomponents
09/24/2003EP1345842A2 Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method
09/24/2003EP1345841A1 Valve integrally associated with microfluidic liquid transport assembly
09/24/2003EP1345551A2 Microfabricated elastomeric valve and pump systems
09/24/2003CN1444738A Micromirror elements, package for micromirror elements, and projection system therefor
09/23/2003US6625343 Optical switch
09/19/2003CA2422985A1 Electrostatically operated device
09/19/2003CA2422384A1 Electrostatically operated device
09/18/2003WO2003076977A2 Method and apparatus for actuation of a two-axis mems device using three actuation elements
09/18/2003WO2003076878A1 Membrane sensor comprising a reinforcing layer in the edge area of the membrane
09/18/2003WO2003076331A2 Method for producing micro-mechanical components and components produced according to said method
09/18/2003WO2003076330A2 Silicon carbide microelectromechanical devices with electronic circuitry
09/18/2003US20030176071 Method for manufacturing semiconductor device
09/18/2003US20030176007 Microstructure and method for the production thereof
09/18/2003US20030176006 Method for manufacturing semiconductor device
09/18/2003US20030175530 Anodic bonding structure, fabricating method thereof, and method of manufacturing optical scanner using the same
09/18/2003US20030174931 Compliant push/pull connector microstructure
09/18/2003US20030174291 Reflecting device and method of fabricating the same
09/18/2003US20030173866 Microelectromechanical system & method for producing displacement multiplication
09/18/2003US20030173865 Microelectromechanical system with stiff coupling
09/18/2003US20030173864 Heat pumped parametric MEMS device
09/18/2003US20030173647 MEMS devices on a nanometer scale
09/18/2003US20030173611 Vertical transistor comprising a mobile gate and a method for the production thereof
09/18/2003US20030173330 Micromechanical component and method for producing the same
09/17/2003EP1344746A2 MEMS device and fabrication method thereof
09/17/2003EP1344745A2 Anodic bonding structure, fabricating method thereof, and method of manufacturing optical scanner using the same
09/17/2003EP1344310A1 Device comprising a variable-rigidity mobile structure preferably with electrostatic control
09/17/2003EP1344309A1 Electrostatic device
09/17/2003EP1343587A2 Device for receiving and discharging liquid substances
09/17/2003CN1442891A Soft type encapsulating structure and its making method
09/17/2003CN1442710A 可变光学衰减器 Variable Optical Attenuator
09/16/2003US6621392 Micro electromechanical switch having self-aligned spacers
09/16/2003US6621104 Integrated optoelectronic thin-film sensor and method of producing same
09/16/2003US6620712 Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications
09/16/2003US6620644 Method for manufacturing a thin-layer component, in particular a thin-layer high-pressure sensor
09/16/2003US6620478 Circular disk containing microchannel/microcavity structures
09/16/2003US6619311 Microfluidic regulating device
09/12/2003WO2003075062A2 Optical switch with 3d waveguides
09/12/2003WO2003041133A3 Electrothermal self-latching mems switch and method
09/11/2003US20030169996 Variable optical attenuator
09/11/2003US20030169146 RF microelectromechanical systems device
09/11/2003US20030168929 Micro-electromechanical structure resonator frequency adjustment using radient energy trimming and laser/focused ion beam assisted deposition
09/11/2003US20030168659 Stress control of semiconductor microstructures for thin film growth
09/11/2003US20030167831 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
09/10/2003EP1343189A2 RF microelectromechanical device
09/10/2003EP1342789A2 Cantilever apparatus and method for detecting microorganisms
09/10/2003CN1441749A System and method for constraining totally released microcomponents
09/10/2003CN1441276A Method for producing silicon part and silicon part, and optical part using said silicon part
09/10/2003CN1440924A Microelectronic mechanism system structure and its producing method
09/09/2003US6618184 Device for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor
09/09/2003US6617750 Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise
09/09/2003US6617657 Process for manufacture of micro electromechanical devices having high electrical isolation
09/09/2003US6617191 Method for anodizing silicon substrates for surface type acceleration sensors
09/09/2003US6617185 System and method for latching a micro-structure and a process for fabricating a micro-latching structure
09/09/2003US6617098 Includes the application of a plurality of layers of masking material that are patterned to provide a plurality of etching masks; particularly making micro-machined movable structures.
09/09/2003US6616895 Solid state membrane channel device for the measurement and characterization of atomic and molecular sized samples
09/04/2003WO2003073151A1 A microelectromechanical systems device and method for fabricating same
09/04/2003WO2003023818A3 Electromechanical memory having cell selection circuitry constructed with nanotube technology
09/04/2003WO2003022732A3 Method for the production of a membrane
09/04/2003WO2003021298A3 Mems comb-finger actuator
09/04/2003US20030166342 Integrated method for release and passivation of MEMS structures
09/04/2003US20030166310 Method of reinforcing a mechanical microstructure
09/04/2003US20030166039 Apparatus and method for detecting microorganisms
09/04/2003US20030165074 Hybrid circuit having nanotube electromechanical memory
09/04/2003US20030164042 Electronic microcomponent, sensor and actuator incorporating same
09/03/2003CN1439906A Optical controller
09/02/2003US6614581 Methods and apparatus for providing a multi-stop micromirror
09/02/2003US6613241 MEMS elements with integrated porous membranes and method of making the same
09/02/2003US6612535 MEMS valve
09/02/2003US6612029 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
08/2003
08/28/2003WO2003071613A2 Low cost bending actuator with two-dimensional motion
08/28/2003WO2003071334A1 Mems device and its manufacturing method, optical modulator, glv device and its manufacturing method, and laser display
08/28/2003WO2003071331A1 Folded longitudinal torsional hinge for gimbaled mems mirror hinge
08/28/2003WO2003070625A2 Thin film encapsulation of mems devices
08/28/2003WO2003021613A3 Electromechanical memory array using nanotube ribbons and method for making same
08/28/2003WO2002088631A3 Non-resonant four degrees-of-freedom micromachined gyroscope
08/28/2003US20030162318 Silicon device manufacturing method, silicon device, and optical component
08/28/2003US20030161021 Light control device
08/28/2003US20030160543 Microelectromechanical generator using bubbles
08/28/2003US20030160540 Systems and methods for overcoming stiction
08/28/2003US20030160538 Semiconductor device
08/28/2003US20030159509 Gyroscope and fabrication method thereof
08/27/2003EP1338912A1 Mirror rocking member for optical deflector
08/27/2003EP1338907A1 Light control device
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