B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
11/2002
11/07/2002	WO2002088018A2 Multi-directional thermal actuator
11/07/2002	WO2002088017A1 Connection member, microswitch, method for manufacturing connection member, and method for manufacturing microwitch
11/07/2002	US20020164879 Methods of forming microstructure devices
11/07/2002	US20020164833 Etch mask patterning; photolithography
11/07/2002	US20020163559 Ink jet printhead chip with predetermined micro-electromechanical systems height
11/07/2002	US20020163053 Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam
11/07/2002	US20020163051 Microstructure devices, methods of forming a microstructure device and a method of forming a MEMS device
11/07/2002	US20020162675 Miniature device with translatable member
11/06/2002	EP1255150A1 Actuator
11/06/2002	EP1254474A1 Microelectromechanical micro-relay with liquid metal contacts
11/06/2002	EP1254473A1 Electronically switching latching micro-magnetic relay and method of operating same
11/06/2002	EP1254249A1 Deposited thin films and their use in detection, attachment, and bio-medical applications
11/05/2002	US6475570 Diluent assisted lubrication of micromechanical devices
11/05/2002	US6475399 Method for fabricating a stencil mask
10/2002
10/31/2002	WO2002086587A1 Compliant mechanism and method of forming same
10/31/2002	WO2002086586A1 Mirror device, optical switch, thin film elastic structure, and thin film elastic structure producing method
10/31/2002	WO2002086584A1 Multichannel optical switch
10/31/2002	WO2002086582A1 Mems-based tunable fabry-perot filters and method of forming same
10/31/2002	WO2002086572A1 Collapse based integrated electrostatic active optical elements and method for manufacture thereof
10/31/2002	WO2002086561A1 Surface micromachined optical system with reinforced mirror microstructure
10/31/2002	WO2002086556A2 Optical wireless communication system with multiple receivers
10/31/2002	WO2002086479A1 Biosensor matrix and method for making same
10/31/2002	WO2001057295A9 Patterning of nanocrystalline diamond films for diamond microstructures useful in mems and other devices
10/31/2002	WO2001055701A9 System and method for the analysis of bodily fluids
10/31/2002	US20020160611 Forming a membrane over the holes of a circuit to avoid the holes reducing the surface area available on the platform; ultrahigh density data storage applications; Micro-Electro-Mechanical Systems (MEMS)
10/31/2002	US20020160583 MEMS relay and mehtod of fabricating the same
10/31/2002	US20020160549 MEMS micro-relay with coupled electrostatic and electromagnetic actuation
10/31/2002	US20020159170 Micromirror unit and method of making the same
10/31/2002	US20020158924 Processing of images for high volume pagewidth printing
10/31/2002	US20020158547 Latchable microelectromechanical structures using non-newtonian fluids, and methods of operating same
10/31/2002	US20020158480 Nanotweezers and nanomanipulator
10/31/2002	US20020158293 Micro structure for vertical displacement detection and fabricating method thereof
10/31/2002	US20020158040 Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate
10/31/2002	US20020158039 Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void
10/30/2002	EP1253108A2 Method of fabricating suspended microstructures
10/30/2002	EP1252640A1 Microrelay
10/30/2002	EP1252028A2 Temporary bridge for micro machined structures
10/29/2002	US6473545 Micromechanical optical switch
10/29/2002	US6473361 Electromechanical memory cell
10/29/2002	US6472739 Encapsulated microelectromechanical (MEMS) devices
10/29/2002	US6472290 Isolation in micromachined single crystal silicon using deep trench insulation
10/29/2002	US6472244 Manufacturing method and integrated microstructures of semiconductor material and integrated piezoresistive pressure sensor having a diaphragm of polycrystalline semiconductor material
10/29/2002	US6470747 Dynamical quantity sensor
10/24/2002	WO2002084754A2 Piezoelectric micro-transducers, methods of use and manufacturing methods for same
10/24/2002	WO2002084732A2 Method of manufacturing an electronic device
10/24/2002	WO2002084374A1 Mems mirrors with precision clamping mechanism
10/24/2002	WO2002084335A2 Light transmissive substrate for an optical mems device
10/24/2002	WO2002084303A1 Device for measuring an acceleration and/or a yaw rate
10/24/2002	WO2002084118A1 Micro pump
10/24/2002	WO2001070625A3 Micromechanical component and balancing method
10/24/2002	WO2001055703A9 Method of preparing a sensor array
10/24/2002	WO2001055702A9 Portable sensor array system
10/24/2002	US20020155711 Micromechanical part and method for its manufacture
10/24/2002	US20020155635 Ion beam modification of residual stress gradients in thin film polycrystalline silicon membranes
10/24/2002	US20020154422 Surface micromachined optical system with reinforced mirror microstructure
10/24/2002	US20020154374 Vibrator and manufacturing method thereof
10/24/2002	US20020154194 Translation to rotation conversion in an inkjet printhead
10/24/2002	US20020154193 Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead
10/24/2002	US20020154189 Print assembly for a wide format pagewidth printer
10/24/2002	US20020154184 High volume pagewidth printing
10/24/2002	US20020153486 Thermal displacement element and radiation detector using the element
10/24/2002	DE10118340A1 Measurement of acceleration or rotation using a micro-mechanical sensor that has a flat measurement body attached by fastening elements and springs to a substrate so that movement of the spring elements and measurement body is limited
10/24/2002	DE10118200A1 Gas sensor element used, e.g., in biomedical analysis comprises a first and second metallic electrodes, nanotubes connecting the electrodes together, and a unit for determining the electrical resistance between the electrodes
10/24/2002	CA2426823A1 Piezoelectric micro-transducers, methods of use and manufacturing methods for same
10/23/2002	EP1251382A1 Vibrator and manufacturing method thereof
10/23/2002	EP1251099A2 Method of improving mechanical strength in micro electro mechanical systems and devices produced thereof
10/23/2002	EP1250565A1 Angular rate sensor
10/22/2002	US6469603 Electronically switching latching micro-magnetic relay and method of operating same
10/22/2002	US6469602 Electronically switching latching micro-magnetic relay and method of operating same
10/22/2002	US6469421 Piezoelectric device and production method thereof
10/22/2002	US6467879 Method and apparatus for preventing degradation of electrostatically actuated devices
10/17/2002	WO2002082101A1 Micromechanical capacitive acceleration sensor
10/17/2002	WO2002082100A1 Method for manufacturing a silicon sensor and a silicon sensor
10/17/2002	WO2002082096A2 Sensor
10/17/2002	WO2002082047A2 High throughput screening of crystallization of materials
10/17/2002	WO2002081363A2 Method for producing a semiconductor component and a semiconductor component produced according to this method
10/17/2002	WO2002063657A9 Microelectronic mechanical system (mems) switch and method of fabrication
10/17/2002	US20020149648 Discrete air and nozzle chambers in a printhead chip for an inkjet printhead
10/17/2002	US20020149647 Pusher actuation in a printhead chip for an inkjet printhead
10/17/2002	US20020149294 Actuator
10/17/2002	US20020149293 Miniature device with bossed suspension member
10/17/2002	US20020149292 Miniature device with increased insulative spacing and method for making same
10/17/2002	US20020149072 Actuator
10/17/2002	US20020149071 MEMS device having flexures with non-linear restoring force
10/17/2002	US20020148964 Electromagnetic radiation detectors having a micromachined electrostatic chopper device
10/17/2002	DE10117486A1 Verfahren zur Herstelung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement A process for Herstelung a semiconductor device as well as a product produced by the process semiconductor device
10/17/2002	DE10117257A1 Mikromechanischer kapazitiver Beschleunigungssensor The micromechanical capacitive acceleration sensor
10/17/2002	DE10116931A1 Sensor Sensor
10/17/2002	CA2442914A1 High throughput screening of crystallization of materials
10/16/2002	EP1248952A2 Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same
10/16/2002	CN1374249A Bending cantilever beam executor and its making process
10/15/2002	US6465929 Microelectromechanical system actuator for extended linear motion
10/15/2002	US6465855 Micromachined structure with a deformable membrane and method for making same
10/15/2002	US6465782 Strongly textured atomic ridges and tip arrays
10/15/2002	US6465355 Method of fabricating suspended microstructures
10/15/2002	US6465280 In-situ cap and method of fabricating same for an integrated circuit device
10/15/2002	US6464341 Dual action thermal actuator and method of operating thereof
10/10/2002	WO2002080255A1 Electrostatically actuated micro-electro-mechanical devices and method of manufacture
10/10/2002	WO2002079853A1 Electrostatically actuated micro-electro-mechanical devices and method of manufacture
10/10/2002	WO2002079814A2 Method for fabricating a through-wafer optical mems device having an anti-reflective coating

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