Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
03/2003
03/20/2003CA2454845A1 Nanotube films and articles
03/19/2003EP1293820A2 Micromirror device using interdigitated cantilevers and applications thereof
03/19/2003EP1292529A1 Vertical transistor comprising a mobile gate and a method for the production thereof
03/19/2003EP1036433B1 Electrostatic microactuators, active three-dimensional microcatheters using same and method for making same
03/18/2003US6535663 Microelectromechanical device with moving element
03/18/2003US6535091 Microelectronic mechanical systems (MEMS) switch and method of fabrication
03/18/2003US6534838 Semiconductor device and method of fabricating the same
03/18/2003US6534249 Method of making low cost integrated out-of-plane micro-device structures
03/18/2003US6533947 Microelectromechanical mirror and mirror array
03/18/2003CA2133335C Modulating a light beam
03/13/2003WO2003021842A2 Hybrid circuit having nanotube electromechanical memory
03/13/2003WO2003021613A2 Electromechanical memory array using nanotube ribbons and method for making same
03/13/2003WO2003021298A2 Mems comb-finger actuator
03/13/2003WO2003020634A2 A method of fabrication of a sensor
03/13/2003WO2003020633A1 Micro device and its manufacturing method
03/13/2003WO2002096796A3 Membrane for micro-electro-mechanical switch, and methods of making and using it
03/13/2003WO2002084335A3 Light transmissive substrate for an optical mems device
03/13/2003WO2002057180A3 Soi/glass process for forming thin silicon micromachined structures
03/13/2003WO2002055198A3 Microfluidic flow control devices
03/13/2003WO2002043615A3 Microfabricated elastomeric valve and pump systems
03/13/2003US20030049951 Microelectronic contact structures, and methods of making same
03/13/2003US20030049879 Method of making a mems element having perpendicular portion formed from substrate
03/13/2003US20030049878 Micromechanical component and corresponding production method
03/13/2003US20030048244 Micromirror device using interdigitated cantilevers and applications thereof
03/13/2003US20030048036 MEMS comb-finger actuator
03/13/2003US20030047740 Semiconductor device and method of fabricating the same
03/13/2003US20030047533 Method for removing a sacrificial material with a compressed fluid
03/13/2003CA2454834A1 Electromechanical memory array using nanotube ribbons and method for making same
03/13/2003CA2454366A1 Hybrid circuit having nanotube electromechanical memory
03/12/2003EP1291317A2 Ceramic MEMS device
03/12/2003EP1290788A2 Method and apparatus for selecting at least one desired channel utilizing a bank of vibrating micromechanical apparatus
03/12/2003EP1289876A1 Microstructure and method for the production thereof
03/12/2003EP1289660A1 High-performance system for parallel and selective dispensing of micro-droplets
03/12/2003EP1289658A2 Valve for use in microfluidic structures
03/12/2003CN1103115C Integrated microstructures of semiconductor material and method of fabricating same
03/11/2003US6532093 Integrated micro-opto-electro-mechanical laser scanner
03/11/2003US6531947 Direct acting vertical thermal actuator with controlled bending
03/11/2003US6531861 Movement actuator/sensor systems
03/11/2003US6531668 High-speed MEMS switch with high-resonance-frequency beam
03/11/2003US6531417 Thermally driven micro-pump buried in a silicon substrate and method for fabricating the same
03/11/2003US6531332 Surface micromachining using a thick release process
03/06/2003WO2003019690A1 Piezoelectric functional part and method of manufacturing the part
03/06/2003US20030045040 Method for the production of a field-effect structure and field-effect structure
03/06/2003US20030045019 Method of fabrication of a micro-channel based integrated sensor for chemical and biological materials
03/06/2003US20030044106 Mems element having perpendicular portion formed from substrate
03/06/2003US20030043157 Photonic MEMS and structures
03/06/2003US20030042561 Micromechanical device and method of manufacture thereof
03/06/2003US20030042117 High-speed mems switch with high-resonance-frequency beam
03/05/2003EP1288697A2 Display device and method for producing the same
03/05/2003EP1288696A1 Optical scanner and method of fabricating the same
03/05/2003EP1287905A1 Liquid droplet spray device
03/05/2003EP1042774B1 Micro electro-mechanical systems relay
03/04/2003US6529310 Deflectable spatial light modulator having superimposed hinge and deflectable element
03/04/2003US6528887 Conductive equipotential landing pads formed on the underside of a MEMS device
03/04/2003US6528724 Microdevice and its production method
03/04/2003US6527374 Translation to rotation conversion in an inkjet printhead
02/2003
02/27/2003WO2003017722A2 Micro-electro mechanical system and method of making
02/27/2003WO2003017482A1 Mechanical resonator device having phenomena-dependent electrical stiffness
02/27/2003WO2003017301A1 Snap action thermal switch
02/27/2003WO2003017294A1 Thin film electromagnet and switching device comprising it
02/27/2003WO2003016965A1 Stress tuned blazed grating light valve
02/27/2003WO2003016919A1 Micro-machined electromechanical system (mems) accelerometer device having arcuately shaped flexures
02/27/2003WO2003016206A2 System and method for precise positioning of microcomponents
02/27/2003WO2003016204A1 Actuator and switch
02/27/2003WO2003016203A2 Method for producing a semiconductor component and associated semiconductor component, especially a membrane sensor
02/27/2003WO2002057715A3 Suspended mircomachined structure
02/27/2003WO2002037161A3 Mems-based wavelength equalizer
02/27/2003US20030039089 Optical scanner and method of fabricating the same
02/27/2003US20030039021 MEMS mirror
02/27/2003US20030038693 Optical deflector
02/27/2003US20030038558 Micro-actuator and method of manufacturing the actuator
02/27/2003US20030037614 Filter-based method and system for measuring angular speed of an object
02/27/2003CA2457121A1 Mechanical resonator device having phenomena-dependent electrical stiffness
02/26/2003EP1285491A2 Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices
02/25/2003US6525884 Optical beam splitter that can be manufactured by micromechanical means
02/25/2003US6525396 Integrated circuits; air gap thickness
02/25/2003US6525352 Method to reduce release time of micromachined devices
02/25/2003US6524923 Integrated adjustable capacitor
02/25/2003US6523961 Projection system and mirror elements for improved contrast ratio in spatial light modulators
02/25/2003US6523560 Microvalve with pressure equalization
02/25/2003CA2238205C Vibration wave detecting method and vibration wave detector
02/20/2003WO2003015183A1 Method for manufacturing thin-film structure
02/20/2003WO2003014789A2 Microsystem switches
02/20/2003WO2003014668A1 Isolated resonator gyroscope
02/20/2003WO2003014009A2 A microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in mems
02/20/2003WO2002081363A3 Method for producing a semiconductor component and a semiconductor component produced according to this method
02/20/2003WO2002053290A3 Valves and pumps for microfluidic systems and method for making microfluidic systems
02/20/2003US20030036215 MEMS device made of transition metal-dielectric oxide materials
02/20/2003US20030036214 Micro-machined electromechanical system (MEMS) accelerometer device having arcuately shaped flexures
02/20/2003US20030035195 Enhance thermal stability through optical segmentation
02/20/2003US20030035192 Micromirror unit fabrication method and micromirror unit made by the same
02/20/2003US20030035189 Stress tuned blazed grating light valve
02/20/2003US20030034870 Snap action thermal switch
02/20/2003US20030034239 Micro-electro mechanical system
02/20/2003US20030033700 Piezoelectric/electrostrictive film type elements and process for producing the same
02/19/2003EP1283957A1 Micromachined fluidic device and method for making same
02/19/2003EP1149393B1 Apparatus and method for operating a micromechanical switch
02/19/2003CN1397816A 光学开关 Optical Switch
02/18/2003US6522801 Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor
02/18/2003US6522452 Latchable microelectromechanical structures using non-newtonian fluids, and methods of operating same
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