| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 06/05/2002 | EP1211726A1 Single-crystal-silicon flexible ribbon for micro-mirror and MEMS assembly on silicon-on-insulator (SOI) material |
| 06/05/2002 | EP1211707A2 Multiposition micro electromechanical switch |
| 06/05/2002 | EP1211544A2 A variable optical attenuator and beam splitter |
| 06/05/2002 | EP1211219A2 Process for manufacturing micromechanical and microoptomechanical structures with backside metalization |
| 06/05/2002 | EP1211218A2 Micro-device assembly with electrical capabilities |
| 06/05/2002 | EP1211072A2 Thermal actuator |
| 06/05/2002 | EP1210627A1 Flexible, modular, compact fiber optic switch improvements |
| 06/04/2002 | US6399516 Plasma etch techniques for fabricating silicon structures from a substrate |
| 06/04/2002 | US6399410 Method of anodizing silicon substrate and method of producing acceleration sensor |
| 06/04/2002 | US6399406 Encapsulated MEMS band-pass filter for integrated circuits and method of fabrication thereof |
| 06/04/2002 | US6399177 Deposited thin film void-column network materials |
| 06/04/2002 | US6397880 Microvalve battery |
| 05/30/2002 | WO2002043163A2 Strain/electrical potential transducer |
| 05/30/2002 | WO2002043089A2 Electronic device including multiple capacitance value mems capacitor and associated methods |
| 05/30/2002 | WO2002042716A2 Wafer eutectic bonding of mems gyros |
| 05/30/2002 | WO2001046489A9 Ion beam modification of residual stress gradients in thin film polycrystalline silicon membranes |
| 05/30/2002 | US20020064957 Method of manufacturing a microstructure |
| 05/30/2002 | US20020064647 Single-crystal-silicon ribbon hinges for micro-mirror and mems assembly on SOI material |
| 05/30/2002 | US20020064337 MEMS mirrors with precision clamping mechanism |
| 05/30/2002 | US20020064192 Tunable distributed feedback laser |
| 05/30/2002 | US20020063610 Multiposition micro electromechanical switch |
| 05/30/2002 | US20020063370 Chuck for microscopic contacts |
| 05/30/2002 | US20020063339 Micro-device assembly with electrical capabilities |
| 05/30/2002 | US20020062645 Micromachined parylene mambrane valve and pump |
| 05/29/2002 | EP1209507A2 Optical switch |
| 05/29/2002 | EP1208403A1 Microelectromechanical optical switch and method of manufacture thereof |
| 05/29/2002 | EP1208002A1 Deposited thin film void-column network materials |
| 05/29/2002 | EP1207958A1 Sensor for microfluid handling system |
| 05/29/2002 | EP0956449B1 Microejection pump |
| 05/29/2002 | DE10055421A1 Verfahren zur Erzeugung einer mikromechanischen Struktur und mikromechanische Struktur Method for producing a micromechanical structure and micromechanical structure |
| 05/28/2002 | US6396620 Electrostatically actuated electromagnetic radiation shutter |
| 05/28/2002 | US6396371 Microelectromechanical micro-relay with liquid metal contacts |
| 05/28/2002 | US6396368 CMOS-compatible MEM switches and method of making |
| 05/28/2002 | US6396174 Method for manufacturing a microintegrated structure with buried connections, in particular an integrated microactuator for a hard-disk drive unit |
| 05/28/2002 | US6396054 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 05/28/2002 | US6395574 Micromechanical component and appropriate manufacturing method |
| 05/23/2002 | WO2002041622A2 Method and apparatus for micro-machined sensors using enhanced modulated integrative differential optical sensing |
| 05/23/2002 | US20020061662 Fabrication and application of nano-manipulators with induced growth |
| 05/23/2002 | US20020060830 Optical deflector |
| 05/23/2002 | US20020060714 High-density inkjet nozzle array for an inkjet printhead |
| 05/23/2002 | US20020059829 Semiconductor dynamic quantity sensor for detecting dynamic quantity in two axes with X-shaped mass portion |
| 05/23/2002 | DE10056716A1 Microstructured component used as a micromechanical sensor element comprises a microstructure with a layer system consisting of a hermetically sealed layer and a polymer layer |
| 05/23/2002 | DE10054247A1 Betätigungselement und Verfahren zu seiner Herstellung Actuating element and process for its preparation |
| 05/22/2002 | EP1207416A1 Optical deflector |
| 05/22/2002 | EP1207378A1 Semiconductor pressure sensor and pressure sensing device |
| 05/22/2002 | CN1349870A Drive device and its driving method, and small machine tool using same |
| 05/21/2002 | US6392777 Opto-mechanical device |
| 05/21/2002 | US6392221 Micro-electro-mechanical optical device |
| 05/21/2002 | US6392220 Micromachined members coupled for relative rotation by hinges |
| 05/21/2002 | US6391741 Fabrication process for microstructure protection systems related to hard disk reading unit |
| 05/21/2002 | US6391673 Method of fabricating micro electro mechanical system structure which can be vacuum-packed at wafer level |
| 05/21/2002 | US6390791 Micro pump comprising an inlet control member for its self-priming |
| 05/21/2002 | US6389902 Micromechanical sensor and method for its production |
| 05/16/2002 | WO2002038492A1 Microstructure component |
| 05/16/2002 | WO2002038491A1 Surface-micromachined absolute pressure sensor and a method for manufacturing thereof |
| 05/16/2002 | WO2002019509A3 Comb drive assembly having comb drive fingers with varying cross-sections and methods of making same |
| 05/16/2002 | WO2001055952A8 Method and system for collecting and transmitting chemical information |
| 05/16/2002 | US20020058422 Stiction-free microstructure releasing method for fabricating MEMS device |
| 05/16/2002 | US20020057484 Optical switch |
| 05/16/2002 | DE10055081A1 Micro-component used as a sensor element comprises a glass body provided with an electrically conducting coating on its side facing a microstructure |
| 05/16/2002 | DE10054246A1 Operating element acting as artificial muscle uses elastomer body provided with opposing electrode devices |
| 05/16/2002 | DE10053111A1 Production of field effect structure used in electronic devices comprises preparing substrate with gate region arranged between drain and source, and producing a germanium sacrificial layer |
| 05/16/2002 | DE10052419A1 Production of micromechanical component comprises applying auxiliary layer and membrane layer on substrate, applying spacer layer, back-etching spacer layer, etching auxiliary layer and applying sealing layer |
| 05/15/2002 | EP1205782A2 Optically tunable Fabry-Perot micro-electromechanical resonator |
| 05/15/2002 | EP1204842A1 Apparatus and method for visually identifying micro-forces with a palette of cantilever array blocks |
| 05/14/2002 | US6388789 Multi-axis magnetically actuated device |
| 05/14/2002 | US6388300 Semiconductor physical quantity sensor and method of manufacturing the same |
| 05/14/2002 | US6387713 Method for manufacturing microfabrication apparatus |
| 05/14/2002 | US6386507 Microelectromechanical valves including single crystalline material components |
| 05/10/2002 | WO2002037892A2 Operating element |
| 05/10/2002 | WO2002037661A1 Electrostatic/pneumatic actuators for active surfaces |
| 05/10/2002 | WO2002037660A1 Actuating member and method for producing the same |
| 05/10/2002 | WO2002037162A2 Gimbaled micro-mirror positionable by thermal actuators |
| 05/10/2002 | WO2002037161A2 Mems-based wavelength equalizer |
| 05/10/2002 | WO2002036486A2 Electrostatically actuated electromagnetic radiation shutter |
| 05/10/2002 | WO2002036485A1 Valve integrally associated with microfluidic liquid transport assembly |
| 05/10/2002 | WO2002036484A1 Micromechanical component and corresponding production method |
| 05/10/2002 | CA2427822A1 Electrostatic/pneumatic actuators for active surfaces |
| 05/10/2002 | CA2427234A1 Mems-based wavelength equalizer |
| 05/10/2002 | CA2426421A1 Gimbaled micro-mirror positionable by thermal actuators |
| 05/09/2002 | US20020055260 CMOS-compatible MEM switches and method of making |
| 05/09/2002 | US20020055253 Method for producing a micromechanical structure and a micromechanical structure |
| 05/09/2002 | US20020054835 Chemico-mechanical microvalve and devices comprising the same |
| 05/09/2002 | US20020054424 Photonic mems and structures |
| 05/09/2002 | US20020054422 Packaged MEMs device and method for making the same |
| 05/09/2002 | US20020054412 Optical wireless communication system with multiple receivers |
| 05/09/2002 | US20020054411 Method and apparatus for aligning opotical wireless links |
| 05/08/2002 | EP1203749A1 Nanometer-order mechanical vibrator, production method thereof and measuring device using it |
| 05/08/2002 | EP1203748A1 Microdevice and its production method |
| 05/08/2002 | EP1203391A1 Microelectromechanic relay and method for the production thereof |
| 05/08/2002 | EP1203208A1 Thermal isolation using vertical structures |
| 05/08/2002 | DE10054484A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 05/08/2002 | DE10053326A1 Micro-mechanical component for sensing dew point contains membrane and porous material thermal insulating zone membrane support |
| 05/07/2002 | US6384517 Piezoelectric and internal electrode layers of gold, with one of palladium, platinum and rhodium alternately stacked; moisture resistance |
| 05/07/2002 | US6384353 Micro-electromechanical system device |
| 05/07/2002 | US6383832 Applying polyimide onto a semiconductor, forming silicon nitride resist, and etching; miniaturization of electret condenser microphones and other devices while maintaining performance |
| 05/07/2002 | US6382588 Microvalve |
| 05/02/2002 | WO2002035275A1 Actuator |
| 05/02/2002 | WO2002011188A3 A mem sensor and a method of making same |
| 05/02/2002 | WO2002010063A3 A tunneling sensor or switch and a method of making same |