| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 07/04/2002 | US20020086540 Thermal isolation using vertical structures |
| 07/04/2002 | US20020086456 Bulk micromachining process for fabricating an optical MEMS device with integrated optical aperture |
| 07/04/2002 | US20020086455 Method for the manufacture of micro-mechanical components |
| 07/04/2002 | US20020086149 Thin laminate film structure for electrostatic or magnetic applications and method for making same |
| 07/04/2002 | US20020086101 Diluent assisted lubrication of micromechanical devices |
| 07/04/2002 | US20020084499 Micro-mechanical actuator including auxiliary lever to enlarge travel range of actuated object |
| 07/04/2002 | DE10065026A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 07/04/2002 | DE10065025A1 Micromechanical component such as mass flow sensor for internal combustion engines flexes under pressure to give piezoelectric effect |
| 07/04/2002 | DE10065013A1 Micromechanical component used as an acceleration sensor or rotary sensor comprises a substrate, insulating layers, a micromechanical functional layer with conducting pathways, and a micromechanical functional layer with a trench |
| 07/04/2002 | DE10064494A1 Verfahren zur Herstellung eines Halbleiterbauelements sowie ein nach dem Verfahren hergestelltes Halbleiterbauelement, wobei das Halbleiterbauelement insbesondere eine bewegliche Masse aufweist A process for producing a semiconductor device as well as a product produced by the process semiconductor device, wherein the semiconductor component comprises in particular a movable mass |
| 07/04/2002 | DE10063991A1 Verfahren zur Herstellung von mikromechanischen Bauelementen A process for preparing micromechanical components |
| 07/03/2002 | EP1220256A1 Micro device with thermal actuator |
| 07/03/2002 | EP1218790A2 Microelectromechanical device with moving element |
| 07/03/2002 | EP1218755A1 Micromechanical spring structure, especially for a rotational speed sensor |
| 07/03/2002 | EP1218289A1 Dissolved wafer fabrication process and associated microelectromechanical device having a support substrate with spacing mesas |
| 07/03/2002 | CN1356706A Multi-position power switch for microcomputer |
| 07/02/2002 | US6413880 Strongly textured atomic ridge and dot fabrication |
| 07/02/2002 | US6413793 Method of forming protrusions on single crystal silicon structures built on silicon-on-insulator wafers |
| 07/02/2002 | US6412751 Extended range diaphragm valve and method for making same |
| 06/27/2002 | WO2002051004A1 Time base comprising an integrated micromechanical tuning fork resonator |
| 06/27/2002 | WO2002050990A1 Device comprising a variable-rigidity mobile structure preferably with electrostatic control |
| 06/27/2002 | WO2002050874A2 Mems device having an actuator with curved electrodes |
| 06/27/2002 | WO2002050528A1 Microsensor and single chip integrated microsensor system |
| 06/27/2002 | WO2002049763A2 Device for receiving and discharging liquid substances |
| 06/27/2002 | WO2002005012A3 Optical mems switching array with embedded beam-confining channels and method of operating same |
| 06/27/2002 | WO2001071226A3 Thermally actuated microvalve assembly |
| 06/27/2002 | US20020081866 Thermally driven micro-pump buried in a silicon substrate and method for fabricating the same |
| 06/27/2002 | US20020081861 Silicon-germanium-carbon compositions and processes thereof |
| 06/27/2002 | US20020081821 SOI/glass process for forming thin silicon micromachined structures |
| 06/27/2002 | US20020081765 Thin Micromachined Structures |
| 06/27/2002 | US20020080504 Triple electrode MOEMS tunable filter and fabrication process therefor |
| 06/27/2002 | US20020079743 MEMS-switched stepped variable capacitor and method of making same |
| 06/27/2002 | US20020079550 Conductive equipotential landing pads formed on the underside of a MEMS device |
| 06/27/2002 | DE10161921A1 Halbleitersensor zum Erfassen einer dynamischen Grösse und Verfahren zum Herstellen desselben The same semiconductor sensor for detecting a dynamic amount and methods for making |
| 06/27/2002 | DE10061205A1 Micromechanical microwave switch has coefficients of thermal expansion of membrane, beams and substrate and lengths of membrane and beams matched to compensate thermal effects |
| 06/26/2002 | EP1217735A1 Time base comprising an integrated micromechanical tuning fork resonator |
| 06/26/2002 | EP1216602A2 Mems digital-to-acoustic transducer with error cancellation |
| 06/25/2002 | US6411754 Micromechanical optical switch and method of manufacture |
| 06/25/2002 | US6411589 System and method for forming electrostatically actuated data storage mechanisms |
| 06/25/2002 | US6411427 Structure for an optical switch on a glass substrate |
| 06/25/2002 | US6410912 Method for reducing variations in arrays of micro-machined cantilever structures using ion implantation |
| 06/25/2002 | US6410361 Methods of fabricating in-plane MEMS thermal actuators |
| 06/25/2002 | US6408878 Microfabricated elastomeric valve and pump systems |
| 06/25/2002 | US6408698 Sensors and method for measurement of flow rates and cumulative flow in ducts |
| 06/20/2002 | WO2002049199A1 Electrostatic device |
| 06/20/2002 | WO2002048022A1 Deflection actuator, optical scanning device, light-receiving scanning device, and image pick-up apparatus |
| 06/20/2002 | US20020076191 Micro-electro mechanical based optical attenuator |
| 06/20/2002 | US20020075626 Wide tuning range variable mems capacitor |
| 06/20/2002 | US20020075567 Optical beam splitter that can be manufactured by micromechanical means |
| 06/20/2002 | US20020075554 MEMS mirror and method of fabrication |
| 06/20/2002 | US20020075094 Microelectronic mechanical systems (MEMS) switch and method of fabrication |
| 06/20/2002 | US20020074897 Micro-electromechanical structure resonator frequency adjustment using radient energy trimming and laser/focused ion beam assisted deposition |
| 06/20/2002 | US20020073779 Semiconductor dynamic quantity detecting sensor and manufacturing method of the same |
| 06/20/2002 | CA2430741A1 Electrostatic device |
| 06/19/2002 | EP1215518A1 Mirror rocking member for optical deflector |
| 06/19/2002 | EP1215168A1 Magnetically packaged optical mems device and method for making the same |
| 06/19/2002 | EP1135665A4 Measurements using tunnelling current between elongate conductors |
| 06/18/2002 | US6408122 Probe for irradiating with or detecting light and method for manufacturing the same |
| 06/18/2002 | US6407478 Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature |
| 06/18/2002 | US6406637 Thin film-planar structure and method for producing the same |
| 06/18/2002 | US6406605 Electroosmotic flow controlled microfluidic devices |
| 06/18/2002 | US6406130 Fluid ejection systems and methods with secondary dielectric fluid |
| 06/18/2002 | CA2364291A1 Micro-electromechanical based optical attenuator |
| 06/13/2002 | WO2002016089A3 Fabrication and application of nano-manipulators with induced growth |
| 06/13/2002 | US20020072163 Module and method of making same |
| 06/13/2002 | US20020072143 Method of producing vacuum container |
| 06/13/2002 | US20020072015 Microelectromechanical system (MEMS) membranes; support, MEMS membrane separated from support by electrostatic cavity, tab on the membrane that increases rigidity of the membrane to excessive deflection (snap-down) |
| 06/13/2002 | US20020071785 Integrated micropump analysis chip and method of making the same |
| 06/13/2002 | US20020071627 Variable transmission multi-channel optical switch |
| 06/13/2002 | US20020071171 Article comprising wedge-shaped electrodes |
| 06/13/2002 | US20020071170 Process for fabricating stiction control bumps on optical membrane via conformal coating of etch holes |
| 06/13/2002 | US20020071169 Micro-electro-mechanical-system (MEMS) mirror device |
| 06/13/2002 | US20020071166 Magnetically packaged optical MEMs device and method for making the same |
| 06/13/2002 | US20020070816 Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby |
| 06/13/2002 | US20020070723 Microelectromechanical system with improved beam suspension |
| 06/13/2002 | US20020070634 Freestanding polymer MEMS structures with anti stiction |
| 06/13/2002 | US20020070195 Metal stripes (platinum) sandwiched between first and second insulating layers (silica); metal layer is heat-treated before it is etched into the form of metal stripes, therefor are not deformed during heat treatment of insulating layer |
| 06/13/2002 | US20020069701 Micromechanical resonator device |
| 06/12/2002 | EP1213261A2 A process for fabricating stiction features on an electrostatically driven optical membrane and an electrostatically driven optical membrane |
| 06/12/2002 | EP1213260A2 Process for manufacturing micromechanical and microoptomechanical structures with pre-applied patterning |
| 06/12/2002 | EP1213259A2 Process for manufacturing micromechanical and microoptomechanical structures with single crystal silicon exposure step |
| 06/12/2002 | EP1212532A1 Dual diaphragm pump |
| 06/11/2002 | US6404534 Micro-mirror device and driving method |
| 06/11/2002 | US6404313 Electromagnetic actuator |
| 06/11/2002 | US6404028 Adhesion resistant micromachined structure and coating |
| 06/11/2002 | US6402969 Surface—micromachined rotatable member having a low-contact-area hub |
| 06/11/2002 | US6401545 Micro electro-mechanical system sensor with selective encapsulation and method therefor |
| 06/11/2002 | US6401544 Micromechanical component protected from environmental influences |
| 06/06/2002 | WO2002044566A1 Valves activated by electrically active polymers or by shape-memory materials, device containing same and method for using same |
| 06/06/2002 | WO2002044033A2 Mems device with integral packaging |
| 06/06/2002 | WO2002043615A2 Microfabricated elastomeric valve and pump systems |
| 06/06/2002 | WO2002017481A3 Micromechanical resonator device |
| 06/06/2002 | WO2001092842A3 Manufacture of mems structures in sealed cavity using dry-release mems device encapsulation |
| 06/06/2002 | US20020068430 Methods of forming void regions, dielectric regions and capacitor constructions |
| 06/06/2002 | US20020068370 Method of trimming micro-machined electromechanical sensors (MEMS) devices |
| 06/06/2002 | US20020067533 Integrated micro-opto-electro-mechanical laser scanner |
| 06/06/2002 | US20020067104 Micromirror actuator |
| 06/06/2002 | US20020066659 Method and arrangement for controlling micromechanical element |
| 06/06/2002 | DE10122928A1 Kapazitiver elektrostatischer Beschleunigungssensor, kapazitiver elektrostatischer Winkelbeschleunigungssensor und elektrostatischer Auslöser Capacitive electrostatic acceleration sensor, capacitive electrostatic angular acceleration sensor and electrostatic shutter |
| 06/06/2002 | DE10058864A1 Production of a micromechanical structure used for integrated sensor arrays comprises applying an auxiliary layer and a membrane to a substrate to cover contact surfaces |