Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
07/2003
07/29/2003CA2323025C Non-volatile mems micro-relays using magnetic actuators
07/24/2003WO2003060923A1 Microstructures
07/24/2003WO2003060474A2 Microscale electrophoresis devices for biomolecule separation and detection
07/24/2003WO2003059805A2 Micro device
07/24/2003WO2003022733A3 Nanotube films and articles
07/24/2003US20030139040 Nonstick layer for a micromechanical component
07/24/2003US20030138986 Microelectronic mechanical system and methods
07/24/2003US20030138588 Methods for reducing the curvature in boron-doped silicon micromachined structures
07/24/2003US20030138191 Optical switch with mobile components and method for making same
07/24/2003US20030137560 Thermal actuator with optimized heater length
07/24/2003US20030137389 Direct acting vertical thermal actuator with controlled bending
07/24/2003US20030136178 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
07/24/2003CA2450451A1 Micro device
07/23/2003EP1329319A1 Thermal actuator with optimized heater length
07/22/2003US6597048 Electrostatically charged microstructures
07/22/2003US6596648 Material removal method for forming a structure
07/22/2003US6596642 Material removal method for forming a structure
07/22/2003US6596147 Methods of overplating surfaces of microelectromechanical structure
07/22/2003US6595787 Low cost integrated out-of-plane micro-device structures and method of making
07/22/2003US6595056 Micromachined silicon gyro using tuned accelerometer
07/17/2003WO2003058730A1 Methods of making electromechanical three-trace junctions devices
07/17/2003WO2003058652A2 Electromechanical three-trace junction devices
07/17/2003WO2002084754A3 Piezoelectric micro-transducers, methods of use and manufacturing methods for same
07/17/2003WO2002062698A3 Method for producing surface micromechanical structures, and sensor
07/17/2003WO2001043450A3 Switching device and method of fabricating the same
07/17/2003US20030134445 Systems and methods for thermal isolation of a silicon structure
07/17/2003US20030132824 High-speed MEMS switch with high-resonance-frequency beam
07/17/2003US20030132822 Micro-electromechanical actuators
07/17/2003US20030132493 High-vacuum packaged microgyroscope and method for manufacturing the same
07/17/2003US20030132444 Semiconductor device and method of fabricating the same
07/17/2003US20030132090 Push/pull actuator for microstructures
07/17/2003CA2471380A1 Methods of making electromechanical three-trace junction devices
07/17/2003CA2471378A1 Electromechanical three-trace junction devices
07/16/2003EP1226090A4 Gas sensor and fabrication method thereof
07/16/2003EP0900385B1 Electrostatic drive for accelerometer
07/16/2003CN1430703A Micromachined fluidic device and method for making same
07/16/2003CN1430577A Improved thermal bend actuator
07/16/2003CN1429762A Cantilever with step-type structure and its manufacture method
07/15/2003US6594060 Electromechanical conformal grating device with improved optical efficiency and contrast
07/15/2003US6594059 Tilt mirror fabry-perot filter system, fabrication process therefor, and method of operation thereof
07/15/2003US6594058 Rolling shutter optical switch device with mirror on shutter and open aperture optical port
07/15/2003US6593672 MEMS-switched stepped variable capacitor and method of making same
07/15/2003US6591678 Semiconductor dynamic quantity sensor for detecting dynamic quantity in two axes with X-shaped mass portion
07/10/2003WO2003055791A2 Improved etch process for etching microstructures
07/10/2003WO2003055789A1 Mems element manufacturing method
07/10/2003WO2003055788A1 Electrostatic drive mems element, manufacturing method thereof, optical mems element, optical modulation element, glv device, and laser display
07/10/2003WO2003025628A3 Enhance thermal stability through optical segmentation
07/10/2003WO2003020634A3 A method of fabrication of a sensor
07/10/2003US20030129845 Methods for reducing the curvature in boron-doped silicon micromachined structures
07/10/2003US20030129374 Self-aligned micro hinges
07/10/2003US20030127699 Method for producing a diaphragm sensor unit and diaphragm sensor unit
07/10/2003US20030127698 Cantilever having step-up structure and method for manufacturing the same
07/10/2003US20030127692 Strongly textured atomic ridge and dot MOSFETs, sensors and filters
07/09/2003EP1325886A1 Method of reinforcing a mechanical microstructure
07/09/2003EP1325885A2 Self-aligned micro hinges
07/09/2003EP1325884A2 MEMS structure having a blocked-sacrificial layer support/anchor and a fabrication method of the same
07/09/2003EP1325515A1 Dual position linear displacement micromechanism
07/08/2003US6591027 Bi-stable micro-actuator and optical switch
07/08/2003US6590313 MEMS microactuators located in interior regions of frames having openings therein and methods of operating same
07/08/2003US6590267 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
07/08/2003US6588884 Tri-layer thermal actuator and method of operating
07/03/2003WO2003055271A1 Micro-mechanical sensors and method for production thereof
07/03/2003WO2003054938A1 Method of fabricating micro-electromechanical switches on cmos compatible substrates
07/03/2003WO2003053843A2 Metal alloy elements in micromachined devices
07/03/2003US20030124837 Methods of making electromechanical three-trace junction devices
07/03/2003US20030124786 Method of manufacturing acceleration sensor
07/03/2003US20030124761 Method for depositing polycrystalline sige suitable for micromachining and devices obtained thereof
07/03/2003US20030124758 Insulating micro-structure and method of manufacturing same
07/03/2003US20030124462 Removing sacrificial layers during the process of fabricating micro-mechanical devices with a solution of super- critical carbon dioxide. A mixture of super-critical carbon dioxide with other solvents, co-solvents and surfactants is used for
07/03/2003US20030124325 Electromechanical three-trace junction devices
07/03/2003US20030123125 Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same
07/03/2003US20030122448 Generator for use in a microelectromechanical system
07/03/2003US20030122205 MEMS structure having a blocked-sacrificial layer support/anchor and a fabrication method of the same
07/03/2003US20030121260 Unilateral thermal buckle-beam actuator
07/02/2003EP1324395A2 Heating element for microfluidic and micromechanical applications
07/02/2003EP1323668A2 Generator for use in a microelectromechanical system
07/02/2003EP1322951A2 Microfabricated ultrasound array for use as resonant sensors
07/02/2003EP1322936A2 Microfluidic devices and methods of use
07/02/2003EP1322545A2 Method of trimming micro-machined electromechanical sensors (mems) devices
07/02/2003CN1427749A Deposited thin film and their use in separation and sarcrificial layer applications
07/01/2003US6587613 Hybrid MEMS fabrication method and new optical MEMS device
07/01/2003US6587253 Enhance thermal stability through optical segmentation
07/01/2003US6586841 Mechanical landing pad formed on the underside of a MEMS device
07/01/2003US6586738 Electromagnetic radiation detectors having a micromachined electrostatic chopper device
07/01/2003US6586691 Acceleration switch
07/01/2003US6586315 Whole wafer MEMS release process
06/2003
06/26/2003WO2003052364A1 Method for producing a microstructure
06/26/2003WO2003052081A2 Proportional micromechanical valve
06/26/2003US20030119221 Trilayered beam MEMS device and related methods
06/26/2003US20030119220 Micromechanical piezoelectric device
06/26/2003US20030118387 User interface with integrated printing
06/26/2003US20030118278 Micromirror actuator and manufacturing method thereof
06/26/2003US20030118277 Digital optical switch apparatus and process for manufacturing same
06/26/2003US20030117257 Electrothermal self-latching MEMS switch and method
06/26/2003US20030117038 Switching arrangement for a radiation guide
06/26/2003US20030116900 Flexural device-based suspension having high compliance in a direction of travel and low compliance in a direction orthogonal thereto
06/26/2003US20030116851 Micro-scale interconnect device with internal heat spreader and method for fabricating same
06/26/2003US20030116848 MEMS device having a trilayered beam and related methods
06/26/2003US20030116815 Separating silicon wafer into narrow gap; controlling width; etching
06/26/2003US20030116813 Multilayer; substrate, doped layer, covering; monolithic integrated circuit
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