| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 01/15/2003 | EP1275020A1 Optical switch with mobile components and method for making same |
| 01/15/2003 | EP1274648A1 Micromechanical component and method for producing the same |
| 01/15/2003 | EP1274647A1 Micromechanical component and corresponding production method |
| 01/15/2003 | EP1196788A4 Merged-mask micro-machining process |
| 01/15/2003 | CN1390774A Micro ion pumps used for low-pressure miniature devices |
| 01/15/2003 | CN1098749C Making process of soft magnetic rubber executor for micro robot |
| 01/14/2003 | US6507138 Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement |
| 01/14/2003 | US6506621 Method for producing a diaphragm sensor array and diaphragm sensor array |
| 01/14/2003 | US6506620 Process for manufacturing micromechanical and microoptomechanical structures with backside metalization |
| 01/14/2003 | US6505512 Micromachined devices and connections over a substrate |
| 01/14/2003 | US6505511 Micromachined gyros |
| 01/09/2003 | WO2003002450A2 Sacrificial layer technique to make gaps in mems applications |
| 01/09/2003 | WO2003002247A1 Sacrificial layers in the manufacturing and application of_chemical reactors |
| 01/09/2003 | WO2002019011A3 Micromechanical optical switch and method of manufacture |
| 01/09/2003 | WO2002012115A3 Methods for reducing the curvature in boron-doped silicon micromachined structures |
| 01/09/2003 | US20030008519 Method and apparatus for fabricating structures using chemically selective endpoint detection |
| 01/09/2003 | US20030008506 Anti-stiction method and apparatus for drying wafer using centrifugal force |
| 01/09/2003 | US20030007262 Micromirror unit with torsion connector having nonconstant width |
| 01/09/2003 | US20030007237 Methods and apparatus for providing a multi-stop micromirror |
| 01/09/2003 | US20030006868 Microrelay |
| 01/09/2003 | US20030006777 Inherently stable electrostatic actuator technique which allows for ful gap deflection of the actuator |
| 01/09/2003 | US20030006468 Sacrificial layer technique to make gaps in mems applications |
| 01/09/2003 | US20030006125 Micro electromechanical switches |
| 01/08/2003 | EP1273203A1 Method of manufacturing a membrane sensor |
| 01/08/2003 | EP1273094A2 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods |
| 01/08/2003 | EP1272888A2 Magnetically actuated microelectromechanical systems actuator |
| 01/08/2003 | EP1233927A4 Apparatus and method for forming a membrane with nanometer scale pores |
| 01/08/2003 | CN1389392A Flex coupling block for moving sensor |
| 01/07/2003 | US6504795 Arrangement of micromechanical ultrasound transducers |
| 01/07/2003 | US6504643 Structure for an optical switch on a substrate |
| 01/07/2003 | US6504641 Driver and method of operating a micro-electromechanical system device |
| 01/07/2003 | US6503775 Production method of a micromachine |
| 01/03/2003 | WO2003000422A1 Microfabricated two-pin liquid sample dispensing system |
| 01/03/2003 | WO2002059939A3 Method for fabricating a semiconductor device |
| 01/03/2003 | CA2451201A1 Microfabricated two-pin liquid sample dispensing system |
| 01/02/2003 | US20030002133 Bi-directional, single material thermal actuator |
| 01/02/2003 | US20030001221 Micromechanical component as well as a method for producing a micromechanical component |
| 01/02/2003 | US20030000306 Angular rate sensor |
| 01/02/2003 | EP1271155A1 Micromechanical component comprising a diamond layer, and production process |
| 01/02/2003 | EP1270506A1 Micro-actuator and method of manufacturing the actuator |
| 01/02/2003 | EP1270505A2 Anti-stiction method and apparatus for drying wafer using centrifugal force |
| 01/02/2003 | EP1270504A1 Semiconductor device joint to a wafer |
| 01/02/2003 | EP1269506A1 Microactuator arrangement |
| 01/01/2003 | CN1097676C Piezoelectric micropump |
| 12/31/2002 | US6501725 Method of recording/reproducing an information signal |
| 12/31/2002 | US6501588 Method for an optical switch on a silicon substrate |
| 12/31/2002 | US6501107 Addressable fuse array for circuits and mechanical devices |
| 12/31/2002 | US6500348 Deep reactive ion etching process and microelectromechanical devices formed thereby |
| 12/31/2002 | US6499297 Micromachined parylene membrane valve and pump |
| 12/27/2002 | WO2002103808A1 Thin-film structure and method for manufacturing the same, and acceleration sensor and method for manufacturing the same |
| 12/27/2002 | WO2002103294A1 Sensor using electro active curved helix or double helix |
| 12/27/2002 | WO2002103289A1 Coupled micromachined structure |
| 12/27/2002 | WO2002103210A1 Nanopump devices and methods |
| 12/26/2002 | US20020197862 Semiconductor component in a wafer assembly |
| 12/26/2002 | US20020197762 Micromechanical and microoptomechanical structures with single crystal silicon exposure step |
| 12/26/2002 | US20020197761 Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants |
| 12/26/2002 | US20020197167 Microfluidic flow control device |
| 12/26/2002 | US20020197009 MEMS see-saw array for dynamic gain equalization of DWDM systems |
| 12/26/2002 | US20020197002 Self assembled micro anti-stiction structure |
| 12/26/2002 | US20020196817 Tunable laser |
| 12/26/2002 | US20020196523 Galvano-micromirror and its manufacture process |
| 12/26/2002 | US20020196522 Compliant mechanism and method of forming same |
| 12/26/2002 | US20020196521 Methods of making mechanisms in which relative locations of elements are maintained during manufacturing |
| 12/26/2002 | US20020195681 Selection of materials and dimensions for a micro-electromechanical switch for use in the RF regime |
| 12/26/2002 | US20020195674 Direct acting vertical thermal actuator |
| 12/26/2002 | US20020195673 Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabrication |
| 12/26/2002 | US20020195423 Method for vapor phase etching of silicon |
| 12/26/2002 | US20020194942 High-performance fully-compliant micro-mechanisms for force/displacement amplification |
| 12/26/2002 | US20020194906 Fluid property sensors |
| 12/25/2002 | CN1387696A Time base comprising integrated micromechanical ring resonator |
| 12/25/2002 | CN1387251A Processing method binded by selenide chip for atomic resolution store shuffling device |
| 12/25/2002 | CN1387250A Processing method binded by selenide chip for atomic resolution store shuffling device |
| 12/25/2002 | CN1097168C Micro pump comprising inlet control member for its self-priming |
| 12/24/2002 | US6497141 Parametric resonance in microelectromechanical structures |
| 12/19/2002 | WO2002100771A2 Low-temperature patterned wafer bonding with photosensitive benzocylobutene (bcb) and 3d microelectromechanical systems fabrication |
| 12/19/2002 | WO2002082047A3 High throughput screening of crystallization of materials |
| 12/19/2002 | US20020192852 Micromechanical and microoptomechanical structures with backside metalization |
| 12/19/2002 | US20020191944 Microlamp |
| 12/19/2002 | US20020191897 Micro electromechanical switches |
| 12/19/2002 | US20020191272 System of angular displacement control for micro-mirrors |
| 12/19/2002 | US20020191267 Electrostatic zipper actuator optical beam switching system and method of operation |
| 12/19/2002 | US20020189353 Coupled micromachined structure |
| 12/19/2002 | US20020189350 Micromachined vertical vibrating gyroscope |
| 12/19/2002 | DE10142952A1 Production of micromechanical structure used as sensor or actuator comprises preparing micromechanical structure with micromechnical structural elements, and selectively etching |
| 12/18/2002 | EP1267385A1 Micro ion pump for a low-pressure microdevice microenclosure |
| 12/18/2002 | EP1266229A1 Micromechanical component |
| 12/18/2002 | EP1266142A2 Thermally actuated microvalve assembly |
| 12/18/2002 | CN1385357A Microelectric mechanical system with monoarmature |
| 12/18/2002 | CA2388399A1 Actuator mechanism for precision alignment of optical components |
| 12/17/2002 | US6496351 MEMS device members having portions that contact a substrate and associated methods of operating |
| 12/17/2002 | US6495893 Micro-mechanical actuator including auxiliary lever to enlarge travel range of actuated object |
| 12/17/2002 | US6495389 Method for manufacturing semiconductor pressure sensor having reference pressure chamber |
| 12/17/2002 | US6495387 Electronic devices including micromechanical switches |
| 12/17/2002 | US6494433 Thermally activated polymer device |
| 12/17/2002 | US6494096 Semiconductor physical quantity sensor |
| 12/12/2002 | WO2002099504A2 Resonance scanner |
| 12/12/2002 | WO2002098788A2 Applications of a strain-compensated heavily doped etch stop for silicon structure formation |
| 12/12/2002 | WO2002044033A3 Mems device with integral packaging |
| 12/12/2002 | US20020187648 Material removal method for forming a structure |
| 12/12/2002 | US20020187312 Matrix-free desorption ionization mass spectrometry using tailored morphology layer devices |