Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
08/2003
08/27/2003EP1338553A2 Torsion spring for mems structure
08/27/2003EP1337757A1 Valves activated by electrically active polymers or by shape-memory materials, device containing same and method for using same
08/27/2003EP1337458A1 Surface-micromachined absolute pressure sensor and a method for manufacturing thereof
08/27/2003EP0823039B1 Micromachined acceleration and coriolis sensor
08/26/2003US6611178 Nanometer-order mechanical vibrator, production method thereof and measuring device using it
08/26/2003US6611140 Magnetic sensing unit for detecting nanometer scale displacements or flections
08/26/2003US6610556 Method for manufacturing a microintegrated structure with buried connections, in particular an integrated microactuator for a hard-disk drive unit
08/22/2003CA2418575A1 Light control device
08/21/2003WO2003069776A2 Tunable bulk acoustic wave mems microresonator
08/21/2003WO2003069720A1 Micromachine vibration filter
08/21/2003WO2003069646A1 Microswitch with a micro-electromechanical system
08/21/2003WO2003069413A1 A method for fabricating a structure for a microelectromechanical systems (mems) device
08/21/2003WO2003068670A2 Microfluidic valve and system therefor
08/21/2003WO2003068669A1 Deflectable microstructure and method of manufacturing the same through bonding of wafers
08/21/2003WO2003068668A2 Micromechnical component and method for producing the same
08/21/2003WO2002068319A3 Bi-stable micro-actuator and optical switch
08/21/2003WO2001074707A3 Multi-layer, self-aligned vertical comb-drive electrostatic actuators and fabrication methods
08/21/2003US20030156785 Optical routers
08/21/2003US20030156451 MEMS devices and methods of manufacture
08/21/2003US20030155995 Micro relay of which movable contact remains separated from ground contact in non-operating state
08/21/2003US20030155940 Method for forming cantilever beam probe card and probe card formed
08/21/2003US20030155841 MEMS devices and methods for inhibiting errant motion of MEMS components
08/21/2003US20030155643 Thin film encapsulation of MEMS devices
08/21/2003US20030155632 Multilayer; silver, silica, silicon and silicon oxynitride layers
08/21/2003US20030155221 Electrostatic actuator
08/21/2003CA2475805A1 Microfluidic valve and system therefor
08/21/2003CA2473836A1 Deflectable microstructure and method of manufacturing the same through bonding of wafers
08/20/2003EP1336206A2 Strain/electrical potential transducer
08/20/2003EP1335878A1 Microstructure component
08/20/2003EP1116063A4 A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
08/19/2003US6608714 Bi-directional, single material thermal actuator
08/19/2003US6607934 Micro-electromechanical process for fabrication of integrated multi-frequency communication passive components
08/14/2003WO2003067662A1 Stiction alleviation using passivation layer patterning
08/14/2003WO2003066515A2 Microengineered electrical connectors
08/14/2003WO2003065976A2 Microfluidics apparatus and methods of use therefor
08/14/2003WO2002064496A3 Method for forming microelectronic spring structures on a substrate
08/14/2003WO2002033458A3 Process for integrating dielectric optical coatings into microelectromechanical devices
08/14/2003WO2002025358A3 Variable transmission multi-channel optical switch
08/14/2003WO2002011189A3 A tunneling sensor or switch and a method of making same
08/14/2003US20030153116 Encapsulation of MEMS devices using pillar-supported caps
08/14/2003US20030153115 Micromachined device having electrically isolated components and a method for making the same
08/14/2003US20030152872 Stacking layers on substrate; patterning; forming apertures;depositing photosensitive materials; radiation
08/14/2003US20030151446 Mems analog frequency divider
08/14/2003US20030151421 Method and apparatus for probing, testing, burn-in, repairing and programming of integrated circuits in a closed environment using a single apparatus
08/14/2003US20030151104 Single crystal, dual wafer, tunneling sensor or switch with substrate protrusion and a method of making same
08/14/2003US20030150267 Isolated resonator gyroscope with a drive and sense plate
08/14/2003US20030150253 Microchemical component and balancing method
08/14/2003CA2464880A1 Microfluidics apparatus and methods of use therefor
08/13/2003EP1335398A1 Micro-electrical-mechanical switch
08/13/2003EP1334832A2 Tri-layer thermal actuator and method of operating
08/13/2003EP1334831A2 Dual actuation thermal actuator and method of operating thereof
08/13/2003EP1334060A1 Micromechanical component and corresponding production method
08/13/2003EP1179139B1 Micromechanic pump
08/13/2003EP0981710A4 Low-power thermopneumatic microvalve
08/13/2003CN1436357A Method and arrangement for controlling micromechanical element
08/13/2003CN1436150A Microstructure and method for production thereof
08/13/2003CN1436099A High-performance system for parallel and selective dispensing of micro-droplets
08/12/2003US6606428 Angular-precision enhancement in free-space micromachined optical switches
08/12/2003US6605849 MEMS analog frequency divider
08/12/2003US6605487 Method for the manufacture of micro-mechanical components
08/12/2003US6605339 Micro heat barrier
08/12/2003US6605043 Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components
08/12/2003US6604863 Actuator mechanism for precision alignment of optical components
08/07/2003WO2003065434A1 Method of treating surface, semiconductor device, process for producing semiconductor device, and apparatus for treatment
08/07/2003WO2003065052A2 Method of manufacturing an accelerometer
08/07/2003WO2003065050A2 Method of manufacturing an accelerometer
08/07/2003WO2003064316A1 Integrated structure on a mobile piece, in particular an integrated optical structure
08/07/2003WO2003064315A2 Microtechnically produced swiveling platform with magnetic drive and stop positions
08/07/2003US20030149363 Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components
08/07/2003US20030148550 Method of fabricating micro-electromechanical switches on cmos compatible substrates
08/07/2003US20030148401 Comprises substrate containing coatings such as silica and titania and dopants such as lithium oxide and sodium oxide for use on surface of bioreactor; analysis/sequencing biopolymers; microfluidics
08/07/2003US20030146464 Stiction alleviation using passivation layer patterning
08/06/2003EP1333503A2 Process for a monolithically-integrated micromachined sensor and circuit
08/06/2003EP1333008A2 Systems and methods for thermal isolation of a silicon structure
08/06/2003EP1332547A1 Electrostatic/pneumatic actuators for active surfaces
08/06/2003EP1332399A2 Mems-based wavelength equalizer
08/05/2003US6603591 Microminiature movable device
08/05/2003US6602428 Method of manufacturing sensor having membrane structure
08/05/2003US6601452 Semiconductor pressure sensor having rounded corner portion of diaphragm
07/2003
07/31/2003WO2003063223A1 Method for making a gas permeable enclosure for micromachine devices
07/31/2003WO2003062899A1 Optical switch and production method therefor, information transmission device using it
07/31/2003WO2003062135A1 A sensor
07/31/2003WO2003062134A1 'low power silicon thermal sensors and microfluidic devices based on the use of porous silicon sealed air cavity technology or microchannel technology'
07/31/2003WO2002036486A3 Electrostatically actuated electromagnetic radiation shutter
07/31/2003WO2002013343A3 Tunable distributed feedback laser
07/31/2003US20030141562 Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same
07/31/2003US20030141561 Method for producing a micromechanical component, and a component produced according to said method
07/31/2003US20030140698 High voltage drive circuitry aligned with MEMS array
07/31/2003US20030140627 Thermal bend actuator
07/30/2003EP1331201A2 Resonant thermal out-of-plane buckle-beam acuator
07/30/2003EP1330867A1 Actuating member and method for producing the same
07/30/2003EP1330672A2 Gimbaled micro-mirror positionable by thermal actuators
07/30/2003EP1330411A1 Thermoelastic actuator design
07/30/2003EP1311863A4 Accelerometer with folded beams
07/30/2003CN1116613C Method and apparatus for probing, testing, burning, repairing and programming of integrated circuits in closed environment using single apparatus
07/29/2003US6600851 Electrostatically actuated micro-electro-mechanical system (MEMS) device
07/29/2003US6600587 Surface micromachined optical system with reinforced mirror microstructure
07/29/2003US6600389 Tapered structures for generating a set of resonators with systematic resonant frequencies
07/29/2003US6600201 Systems with high density packing of micromachines
07/29/2003US6599840 Material removal method for forming a structure
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