Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
10/2003
10/21/2003US6635509 Wafer-level MEMS packaging
10/21/2003US6635506 Method of fabricating micro-electromechanical switches on CMOS compatible substrates
10/21/2003US6635158 Electro ceramic MEMS structure with controlled actuator gap
10/21/2003US6634232 Acceleration sensor with limited movability in the vertical direction
10/21/2003US6634231 Accelerometer strain isolator
10/16/2003WO2003085442A1 Component comprising at least one cell including a mems structure
10/16/2003WO2003035542A3 Method of fabricating vertical actuation comb drives
10/16/2003WO2003027002A3 Method for the production of a micromechanical structure
10/16/2003WO2002100771A3 Low-temperature patterned wafer bonding with photosensitive benzocylobutene (bcb) and 3d microelectromechanical systems fabrication
10/16/2003US20030194179 Mems reconfigurable optical grating
10/16/2003US20030194172 Optical switching matrix and method of fabricating such a matrix
10/16/2003US20030193012 Optically controlled MEM switches
10/16/2003US20030192476 Sputtered spring films with low stress anisotropy
10/15/2003EP1353443A2 Spring contact
10/15/2003EP1352877A2 Wafer-level MEMS packaging
10/15/2003EP1352414A2 A tunneling sensor or switch and a method of making same
10/15/2003EP1352408A1 Micro-magnetic latching switch with relaxed permanent magnet alignment requirements
10/15/2003EP1352252A2 Accelerometer whose seismic mass is shaped as whiffletree
10/15/2003EP1352214A2 Suspended mircomachined structure
10/15/2003EP1002216B1 Microscope for compliance measurement
10/15/2003CN1448333A 静电激励器 Static actuator
10/14/2003US6632698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS
10/14/2003US6632374 Method for an optical switch on a silicon on insulator substrate
10/14/2003US6632373 Method for an optical switch on a substrate
10/14/2003US6632178 Fabrication of capacitive micromachined ultrasonic transducers by micro-stereolithography
10/14/2003US6631979 Thermal actuator with optimized heater length
10/14/2003US6631638 Fluid flow sensor
10/11/2003CA2423210A1 Matrix of optical switches and process for the manufacture of said matrix
10/09/2003WO2003083550A1 Optical device
10/09/2003WO2003083425A1 Pressure sensor and method for fabricating the same
10/09/2003WO2003083424A1 Pressure sensor and method for fabricating the same
10/09/2003WO2003082732A2 Packaging microelectromechanical systems
10/09/2003WO2003082731A1 Micro actuator and optical switch using the actuator
10/09/2003WO2003053843A3 Metal alloy elements in micromachined devices
10/09/2003WO2003036767A3 Parallel, individually addressable probes for nanolithography
10/09/2003WO2003031321A3 Hybrid mems fabrication method and new optical mems device
10/09/2003WO2003031319A3 Micromechanical components with reduced static friction
10/09/2003WO2003031317A3 Micromechanical sensor having a self-test function and optimization method
10/09/2003WO2003009402A3 Actuator system
10/09/2003WO2002098788A3 Applications of a strain-compensated heavily doped etch stop for silicon structure formation
10/09/2003US20030190817 Electrode structure, and method for manufacturing thin-film structure
10/09/2003US20030190776 Module and method of making same
10/09/2003US20030189620 Fluid ejecting device having a laminated thermal bend actuator
10/09/2003US20030189389 Method and apparatus for actuation of a two-axis MEMS device using three actuation elements
10/09/2003US20030189351 Nanotweezers and nanomanipulator
10/09/2003US20030189350 Nanotweezers and nanomanipulator
10/09/2003US20030188958 Micro-electro mechanical system
10/08/2003EP1351256A2 Scanning probe system with spring probe
10/08/2003EP1350758A2 Electrostatic bimorph actuator
10/08/2003EP1350276A2 Piezoelectric micro-transducers, methods of use and manufacturing methods for same
10/08/2003EP1350078A1 Micromechanical flow sensor with a tensile coating
10/08/2003EP1350029A2 Valves and pumps for microfluidic systems and method for making microfluidic systems
10/08/2003CN1447120A Acceleration transducer
10/08/2003CN1447093A Micro inertia sensor and its mfg. method
10/07/2003US6630871 Center-mass-reduced microbridge structures for ultra-high frequency MEM resonator
10/07/2003US6630367 Single crystal dual wafer, tunneling sensor and a method of making same
10/07/2003US6629820 Microfluidic flow control device
10/07/2003US6629460 Isolated resonator gyroscope
10/07/2003US6629341 Positioning monolithic wafers on backing sheets, joining using adhesives, then slicing into fibers and covering with conductive films having electrodes patterns; strain activators
10/02/2003WO2003081968A1 A method for integrating microparticles into mems
10/02/2003WO2003081725A2 A miniaturized contact spring
10/02/2003WO2003081315A1 Micro light modulator arrangement
10/02/2003WO2003081204A2 Microscale sensor element and related device and method of manufacture
10/02/2003WO2003040338A3 Micro-scale interconnect device with internal heat spreader and method for fabricating same
10/02/2003WO2003023363A3 Microcantilever apparatus and methods for detection of enzymes
10/02/2003WO2002076880A3 Method for producing micromechanic sensors and sensors produced by said method
10/02/2003US20030186672 Nano-electromechanical filter
10/02/2003US20030186480 Method for manufacturing thin-film structure
10/02/2003US20030186228 Portable sensor array system
10/02/2003US20030185140 High density data storage module
10/02/2003US20030184889 Mirror assembly with elevator lifter
10/02/2003US20030184745 Positioning device for microtiter plates
10/02/2003US20030184189 Electrostatic bimorph actuator
10/02/2003US20030183916 Packaging microelectromechanical systems
10/02/2003US20030183887 MEMS device and fabrication method thereof
10/02/2003US20030183761 Scanning probe system with spring probe and actuation/sensing structure
10/02/2003US20030183009 Micro inertia sensor and method of manufacturing the same
10/02/2003US20030182993 Scanning probe system with spring probe
10/02/2003CA2479861A1 Microscale sensor element and related device and method of manufacture
10/01/2003EP1348967A2 Acceleration sensor
10/01/2003EP1347937A2 Micromechanical component and corresponding production method
10/01/2003CN1446379A Thin-film structure and method for manufacturing the same and accelertion sensor and method for manufacturing the same
10/01/2003CN1445090A Piezoelectric actuator, liquid spray nozzle containing it, piezoelectric element and its making method
10/01/2003CN1123027C Mini-type mechanical acceleration switch
09/2003
09/30/2003US6628851 MEMS reconfigurable optical grating
09/30/2003US6628183 Micro-electro mechanical system having single anchor
09/30/2003US6628177 Micromechanical resonator device and micromechanical device utilizing same
09/30/2003US6628041 Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same
09/30/2003US6627965 Micromechanical device with an epitaxial layer
09/30/2003US6626417 Microfluidic valve and microactuator for a microvalve
09/30/2003US6626037 Thermal flow sensor having improved sensing range
09/30/2003US6625874 Depositing layers of sacrificial material on substrate containing electrical drive circuitry, defining deposition areas for actuator arms and cross-arm, depositing actuator layer, selectively etching to form actuator arms
09/25/2003WO2003079384A2 Double-electret mems actuator
09/25/2003WO2003078305A1 Nanotube relay device
09/25/2003WO2003078299A1 Process for manufacturing mems
09/25/2003WO2003031318A3 Method for producing cavities having an optically transparent wall
09/25/2003WO2003009318A3 Support with getter-material for microelectronic, microoptoelectronic or micromechanical device
09/25/2003WO2003009317A3 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices
09/25/2003WO2002090245A3 Methods of forming microstructure devices
09/25/2003WO2002030809A3 Micromachined component and method of manufacture
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