Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
11/2003
11/13/2003US20030210481 Surface micromachined optical system with reinforced mirror microstructure
11/13/2003US20030210453 Optical device and a movable mirror driving method
11/13/2003US20030210447 Surface micromachined optical system with reinforced mirror microstructure
11/13/2003US20030210446 Surface micromachined optical system with reinforced mirror microstructure
11/13/2003US20030210124 Micro electromechanical switch having self-aligned spacers
11/13/2003US20030210116 Micro electro-mechanical system with one or more moving parts method and apparatus
11/13/2003US20030210115 Bistable microelectromechanical system based structures, systems and methods
11/13/2003US20030209768 Micro-electromechanical actuator and methods of use and fabrication
11/13/2003US20030209076 Z-axis accelerometer
11/13/2003US20030209075 Acceleration sensor and manufacturing method for the same
11/12/2003EP1361469A1 Optical switch
11/12/2003EP1360478A1 Microsensor and single chip integrated microsensor system
11/12/2003EP1360144A1 Gyroscope and fabrication method thereof
11/12/2003EP1360143A2 Method for producing surface micromechanical structures, and sensor
11/11/2003US6647164 Gimbaled micro-mirror positionable by thermal actuators
11/11/2003US6646525 Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same
11/11/2003US6646364 MEMS actuator with lower power consumption and lower cost simplified fabrication
11/11/2003US6646314 Method for producing a micromechanical structure and a micromechanical structure
11/11/2003US6646215 Device adapted to pull a cantilever away from a contact structure
11/11/2003US6645800 Method for the production of a field-effect structure
11/11/2003US6645145 Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components
11/11/2003US6644117 Electro-mechanical component and method for producing the same
11/11/2003CA2299131C Semiconductor device
11/06/2003WO2003092048A2 Micro electro-mechanical system method
11/06/2003WO2003091486A1 Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
11/06/2003WO2003091029A1 Translation to rotation conversion in an inkjet printhead
11/06/2003WO2003075062A3 Optical switch with 3d waveguides
11/06/2003WO2003038920A3 Curved electro-active actuators
11/06/2003WO2003010878A3 Mems element having perpendicular portion formed from substrate
11/06/2003WO2002061487A8 Optical switch based on rotating vertical micro-mirror
11/06/2003WO2002018979A3 Magnetically actuated micro-electro-mechanical apparatus and method of manufacture
11/06/2003US20030207487 Single crystal, dual wafer, tunneling sensor and a method of making same
11/06/2003US20030206356 Silicon mirrors having reduced hinge stress from temperature variations
11/06/2003US20030205739 Single crystal silicon sensor with high aspect ratio and curvilinear structures and associated method
11/06/2003US20030205552 Method of forming a membrane with nanometer scale pores and application to biofiltration
11/06/2003US20030205087 Isolated resonator gyroscope with compact flexures
11/06/2003CA2483009A1 Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
11/05/2003EP1359593A1 SPM sensor and method for its manufacture
11/05/2003EP1359455A2 Micro-mirror device
11/05/2003EP1359388A1 SPM sensor and method for producing the same
11/05/2003EP1359118A2 Microelectromechanical actuator system
11/05/2003EP1358445A1 Micromachined silicon gyro using tuned accelerometer
11/04/2003US6643165 Electromechanical memory having cell selection circuitry constructed with nanotube technology
11/04/2003US6643045 Optical scanner
11/04/2003US6642593 Microelectromechanical switch
11/04/2003US6642154 Method and apparatus for fabricating structures using chemically selective endpoint detection
11/04/2003US6642129 Parallel, individually addressable probes for nanolithography
11/04/2003US6642067 Method of trimming micro-machined electromechanical sensors (MEMS) devices
11/04/2003US6641315 Keyboard
11/04/2003US6641273 MEMS structure with mechanical overdeflection limiter
10/2003
10/30/2003WO2003090261A1 Silicon on insulator standoff and method for manufacture thereof
10/30/2003WO2003089957A2 Micro piezoelectric actuator and method for fabricating same
10/30/2003WO2003027003A3 Methods of nanotube films and articles
10/30/2003US20030202735 Electrode design and positioning for controlled movement of a moveable electrode and associated support structure
10/30/2003US20030202288 Data storage module suspension system
10/30/2003US20030202266 Micro-mirror device with light angle amplification
10/30/2003US20030202265 Micro-mirror device including dielectrophoretic liquid
10/30/2003US20030202264 Micro-mirror device
10/30/2003US20030201852 Micro electro-mechanical system method
10/30/2003US20030201506 Method of manufacturing semiconductor device capable of sensing dynamic quantity
10/30/2003US20030200806 Micromachined devices with apertures
10/30/2003US20030200785 Passive temperature compensation technique for MEMS devices
10/30/2003CA2424638A1 Micro-mirror device
10/29/2003EP1357611A1 Piezoelectric functional part and method of manufacturing the part
10/29/2003EP1357409A1 Optical switch array and method for manufacturing
10/29/2003CN1452202A Bistable electromagnetic microdriver and mfg. method thereof
10/29/2003CN1126173C Semiconductor integrated capacitive acceleration sensor and relative fabrication method
10/29/2003CN1126135C Thermal arched beam microelectromechanicals devices and associated fabrication method
10/28/2003US6639724 Device having a barrier layer located therein and a method of manufacture therefor
10/28/2003US6639722 Stress tuned blazed grating light valve
10/28/2003US6639713 Silicon micromachined optical device
10/28/2003US6639325 Microelectromechanic relay and method for the production thereof
10/28/2003US6639289 Dissolved wafer fabrication process and associated microelectromechanical device having a support substrate with spacing mesas
10/28/2003US6639205 Optically controlled MEM switches
10/28/2003US6638625 Linear nanopositioning translational motion stage based on novel composite materials
10/28/2003US6637901 Mirror assembly with elevator lifter
10/23/2003WO2003087709A1 Nanowire microscope probe tips
10/23/2003WO2003086954A1 Micromachined torsional mirror unit for optical switching and fabrication method therefor
10/23/2003WO2003086770A1 High volume pagewidth printing
10/23/2003WO2003086769A1 Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead
10/23/2003WO2003086767A1 Pusher actuation in a printhead chip for an inkjet printhead
10/23/2003WO2003086766A1 Discrete air and nozzle chambers in a printhead chip for an inkjet printhead
10/23/2003WO2003086764A1 Wide format pagewidth inkjet printer
10/23/2003WO2003086763A1 A print assembly for a wide format pagewidth printer
10/23/2003WO2003086762A1 Processing of images for high volume pagewidth printing
10/23/2003WO2002092496A3 High-performance fully-compliant micro-mechanisms for force/displacement amplification
10/23/2003US20030199172 Methods of nanotube films and articles
10/23/2003US20030198812 Nanotube films and articles
10/23/2003US20030197446 MEMS device having a flexure with integral actuator
10/23/2003US20030197445 Flexure with integral actuator
10/23/2003US20030197176 Silicon on insulator standoff and method for manufacture thereof
10/23/2003US20030196988 Process for producing an SPM sensor
10/23/2003US20030196695 Microfluidic flow control devices
10/23/2003US20030196489 Method of trimming micro-machined electromechanical sensors (MEMS) devices
10/22/2003EP1354849A2 Flexure with integral actuator
10/22/2003EP1354848A2 Mems device having a flexure with integral actuator
10/22/2003CN1450612A Method for forming convex point on back side of single side flexible sustrate
10/21/2003US6636655 MEMS optical switches having obliquely angled inputs and outputs relative to a face thereof and moveable reflectors with parallel positions therein and methods of forming same
10/21/2003US6635940 Micro-electromechanical actuator and methods of use
10/21/2003US6635837 MEMS micro-relay with coupled electrostatic and electromagnetic actuation
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