Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
12/2003
12/11/2003US20030228411 Method for integrating micro- and nanoparticles into MEMS and apparatus including the same
12/11/2003US20030227700 Micro mirror unit and method of making the same
12/11/2003US20030227538 Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image
12/11/2003US20030227361 Microelectromechanical rf switch
12/11/2003US20030227114 Torsion spring for MEMS structure
12/11/2003US20030227035 Micromachine and manufacturing method therefor
12/11/2003US20030226818 Reaction product of silicon and fluorinated olefin
12/11/2003CA2487715A1 Fluorochemical treatment for silicon articles
12/10/2003EP1369730A1 Micro mirror unit including mirror substrate and wiring substrate spaced by conductive spacer
12/10/2003EP1368690A1 Microelectromechanical mirror and mirror array
12/10/2003EP1075602B1 Microvalve battery
12/09/2003US6661955 Kinematic and non-kinematic passive alignment assemblies and methods of making the same
12/09/2003US6661070 Micromechanical and microoptomechanical structures with single crystal silicon exposure step
12/09/2003US6660648 Process for manufacture of semipermeable silicon nitride membranes
12/09/2003US6658728 Method for fabricating a spring structure on a substrate
12/04/2003WO2003100969A1 Method of producing a microsystem structure with lateral gaps and corresponding microsystem structure
12/04/2003WO2003089957A3 Micro piezoelectric actuator and method for fabricating same
12/04/2003WO2003052081A3 Proportional micromechanical valve
12/04/2003WO2003017722A3 Micro-electro mechanical system and method of making
12/04/2003WO2003002450A3 Sacrificial layer technique to make gaps in mems applications
12/04/2003US20030223681 Optical switch with 3D waveguides
12/04/2003US20030223679 Piano MEMs micromirror
12/04/2003US20030223535 Lithography device for semiconductor circuit pattern generator
12/04/2003US20030223174 Spring loaded bi-stable MEMS switch
12/04/2003US20030223103 Micromirror actuator
12/04/2003US20030222738 Miniature RF and microwave components and methods for fabricating such components
12/04/2003US20030222635 Movement actuator/sensor systems
12/04/2003US20030222050 Solid state membrane channel device for the measurement and characterization of atomic and molecular sized samples
12/03/2003EP1366518A1 In-situ cap and method of fabricating same for an integrated circuit device
12/03/2003CN1459643A Micro-mirror surface unit containing mirror surface base plate and wiring substrate isolated with conductive lining
12/02/2003US6658179 Monolithic reconfigurable optical multiplexer systems and methods
12/02/2003US6658177 Switching device and method of fabricating the same
12/02/2003US6657764 Very large angle integrated optical scanner made with an array of piezoelectric monomorphs
12/02/2003US6657525 Microelectromechanical RF switch
12/02/2003US6657324 Micromachine switch and method of manufacture thereof
12/02/2003US6656368 Nonstick layer for a micromechanical component
12/02/2003US6655964 Low cost integrated out-of-plane micro-device structures and method of making
12/02/2003US6655923 Micromechanic pump
12/02/2003US6655834 Sensor, in particular thermal sensor, and method for manufacturing a largely self-supporting membrane
12/02/2003US6655011 Method for fabricating a switch structure
11/2003
11/28/2003CA2429508A1 Piano mems micromirror
11/27/2003WO2003097238A1 Device for the actively-controlled and localised deposition of at least one biological solution
11/27/2003WO2003060474A3 Microscale electrophoresis devices for biomolecule separation and detection
11/27/2003WO2003005420A3 Method and apparatus for fabricating structures using chemically selective endpoint detection
11/27/2003WO2002067293A3 Microelectromechanical systems (mems) device including an analog or a digital
11/27/2003WO2002065187A3 Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method
11/27/2003WO2002065186A3 Pivoting optical micromirror, array for such micromirrors and method for making same
11/27/2003US20030219220 System and method for precise positioning of microcomponents
11/27/2003US20030218793 Micro mirror unit including mirror substrate and wiring substrate spaced by conductive spacer
11/27/2003US20030218283 Damped micromechanical device
11/27/2003US20030218244 Miniaturized contact spring
11/27/2003US20030218182 Strees-controlled dielectric integrated circuit
11/27/2003US20030217597 Inertia force sensor
11/26/2003EP1365271A1 Electrostatic microactuator device and installation with such devices
11/26/2003EP1365222A2 High temperature resonant integrated microstructure sensor
11/26/2003EP1363851A2 Micromachined component and method of manufacture
11/26/2003EP1363850A2 Bi-stable micro-actuator and optical switch
11/25/2003US6654155 Single-crystal-silicon ribbon hinges for micro-mirror and MEMS assembly on SOI material
11/25/2003US6653702 Semiconductor pressure sensor having strain gauge and circuit portion on semiconductor substrate
11/25/2003US6653239 Thermal isolation using vertical structures
11/25/2003US6652052 Processing of images for high volume pagewidth printing
11/25/2003US6651325 Method for forming cantilever beam probe card and probe card formed
11/20/2003WO2003095710A2 Methods of and apparatus for electrochemically fabricating structures
11/20/2003WO2003095709A2 Multistep release method for electrochemically fabricated structures
11/20/2003WO2003095708A2 Methods of and apparatus for molding structures
11/20/2003WO2003095707A2 Method of and apparatus for forming three-dimensional structures
11/20/2003WO2003095706A2 Electrochemically fabricated hermetically sealed microstructures
11/20/2003WO2003095356A2 Micro electro-mechanical system apparatus and method
11/20/2003WO2003076977A3 Method and apparatus for actuation of a two-axis mems device using three actuation elements
11/20/2003WO2003036737A3 Stiffened surface micromachined structures and process for fabricating the same
11/20/2003WO2002057179A3 Fabrication of silicon micro mechanical structures
11/20/2003WO2002022493A8 Direct acting vertical thermal actuator with controlled bending
11/20/2003WO2002022492A8 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
11/20/2003US20030215974 Enhancement of membrane characteristics in semiconductor device with membrane
11/20/2003US20030214639 Micromirrors with OFF-angle electrodes and stops
11/20/2003US20030214045 Miniaturized contact spring
11/20/2003US20030213693 A capillary microchannels are formed by etching and removing photoresist layer; use for potentiostatic detection of fluid samples, monitoring the current through the sieving matrix; medical diagnostic testing
11/19/2003EP1362005A2 Method for forming microelectronic spring structures on a substrate
11/19/2003CN1457319A Gyroscope and fabrication method thereof
11/19/2003CN1456912A Photoswitch
11/18/2003US6650806 Compliant push/pull connector microstructure
11/18/2003US6650527 Article comprising a casimir force modulator and methods therefor
11/18/2003US6650459 Galvano-micromirror and its manufacture process
11/18/2003US6650455 Photonic mems and structures
11/18/2003US6649989 Micromechanical diaphragm
11/18/2003US6649987 MEMS hybrid structure having flipped silicon with external standoffs
11/18/2003US6649947 Surface-micromachined rotatable member having a low-contact-area hub
11/18/2003US6649852 Micro-electro mechanical system
11/18/2003US6649403 Method of preparing a sensor array
11/18/2003US6648453 Ink jet printhead chip with predetermined micro-electromechanical systems height
11/18/2003US6647766 For thermomechanical writing and thermal readout of binary information in a storage media
11/13/2003WO2003093167A1 Device for protecting a chip and method for operating a chip
11/13/2003WO2003042721A3 Trilayered beam mems device and related methods
11/13/2003WO2002090244A3 Microstructure devices, methods of forming a microstructure device and a method of forming a mems device
11/13/2003WO2000067063A8 Moveable microelectromechanical mirror structures
11/13/2003US20030211761 Low cost integrated out-of-plane micro-device structures and method of making
11/13/2003US20030211650 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor
11/13/2003US20030210853 Optical switch
11/13/2003US20030210849 Bi-stable micro-actuator and optical switch
11/13/2003US20030210511 Capacitive device
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