| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 01/08/2004 | WO2004003622A1 Bipolar operation of light-modulating array |
| 01/08/2004 | WO2004003621A1 Micro-support structures |
| 01/08/2004 | WO2004003620A1 Reduced formation of asperities in contact micro-structures |
| 01/08/2004 | WO2004003619A1 Mems structure with mechanical overdeflection limiter |
| 01/08/2004 | WO2004002878A2 Microfluidic devices and methods with electrochemically actuated sample processing |
| 01/08/2004 | WO2004002745A1 Ink jet printhead chip with predetermined micro-electromechanical systems height |
| 01/08/2004 | WO2002090242A3 Electroacoustic transducer for generating or detecting ultrasound, transducer array and method for the production of the transducer or the transducer array |
| 01/08/2004 | US20040005258 Having intersecting channel-like voids parallel to the major axis of said template; used to produce micro- and nano-scale filaments and particles, e.g., polymerizing acetylene and decomposing polyacetylene to form carbon nanotubes |
| 01/08/2004 | US20040005114 Electrostatic drive mirror apparatus |
| 01/08/2004 | US20040004520 Temperature compensation mechanism for a micromechanical ring resonator |
| 01/08/2004 | US20040004413 Piezoelectric actuator, liquid jetting head incorporating the same, piezoelectric element, and method of manufacturing the same |
| 01/08/2004 | US20040004364 Diode-type nanotweezers and nanomanipulator device using the same |
| 01/08/2004 | US20040004001 Method of and apparatus for forming three-dimensional structures integral with semiconductor based circuitry |
| 01/08/2004 | CA2490887A1 Microfluidic devices and methods with electrochemically actuated sample processing |
| 01/07/2004 | EP1377517A1 A unitary flexible and mechanically and chemically robust microsystem and a method for producing same |
| 01/07/2004 | CN1466775A Electrode structure, and method for manufacturing thin-film structure |
| 01/07/2004 | CN1466773A Substrate and method for producing same, and thin film structure |
| 01/06/2004 | US6674141 Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same |
| 01/06/2004 | US6674140 Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor |
| 01/06/2004 | US6673254 Methods for fabricating a micro heat barrier |
| 01/06/2004 | US6672706 Wide format pagewidth inkjet printer |
| 01/06/2004 | US6672338 Active slender tubes and method of making the same |
| 01/06/2004 | US6672161 Semiconductor dynamic quantity sensor |
| 01/06/2004 | US6671939 Method for producing a piezoelectric/electrostrictive device |
| 01/02/2004 | EP1376189A2 Switching apparatus |
| 01/02/2004 | EP1376087A1 High temperature resonant integrated microstructure sensor |
| 01/02/2004 | EP1375916A1 Micro pump |
| 01/02/2004 | EP1375416A1 Micro-electro-mechanical device, in particular micro-actuator for hard-disk drive, and manufacturing process thereof |
| 01/02/2004 | EP1374267A1 Torsion spring for electro-mechanical switches and a cantilever-type rf micro-electromechanical switch incorporating the torsion spring |
| 01/02/2004 | EP1373129A2 Method for producing micromechanic sensors and sensors produced by said method |
| 01/02/2004 | EP1373128A1 Micro electromechanical switches |
| 01/02/2004 | EP1373127A1 Micro electromechanical switches |
| 01/02/2004 | EP1373126A1 Micro electromechanical switches |
| 01/01/2004 | US20040002215 Whole wafer MEMS release process |
| 01/01/2004 | US20040001667 Switching apparatus |
| 01/01/2004 | US20040001264 Micro-support structures |
| 01/01/2004 | US20040001263 MEMS structure with mechanical overdeflection limiter |
| 01/01/2004 | US20040000696 Stiff cantilever beam coupling to flexible structure; high frequency |
| 12/31/2003 | WO2004001481A1 Micromirror unit, method for fabricating the same and optical switch comprising it |
| 12/31/2003 | WO2004000720A1 Fabrication of a reflective spatial light modulator |
| 12/31/2003 | WO2004000717A2 A micro-electromechanical variable capactitor |
| 12/30/2003 | US6671078 Electrostatic zipper actuator optical beam switching system and method of operation |
| 12/30/2003 | US6669454 Microfluidic actuation method and apparatus |
| 12/30/2003 | US6669332 Printhead chip having a plurality of nozzle arrangements that each incorporate a motion transmitting structure |
| 12/30/2003 | US6669256 Nanotweezers and nanomanipulator |
| 12/30/2003 | US6668628 Scanning probe system with spring probe |
| 12/25/2003 | US20030235992 Method for manufacturing electric capacitance type acceleration sensor |
| 12/25/2003 | US20030234179 Methods of and apparatus for molding structures using sacrificial metal patterns |
| 12/24/2003 | WO2003107016A1 Monolithic silicon acceleration sensor |
| 12/24/2003 | WO2003106955A1 Sensor and method for producing a sensor |
| 12/24/2003 | WO2003106927A2 Passive temperature compensation technique for mems devices |
| 12/24/2003 | WO2003106328A2 Micromechanical component and corresponding production method |
| 12/24/2003 | WO2003106327A1 Component and method for producing the same |
| 12/24/2003 | WO2003106326A2 Micro-electro-mechanical system (mems) variable capacitor apparatuses and related methods |
| 12/24/2003 | WO2003075062A8 Optical switch with 3d waveguides |
| 12/24/2003 | WO2003066515A3 Microengineered electrical connectors |
| 12/24/2003 | WO2002090243A3 Thick sandwich wafer for mems fabrication |
| 12/24/2003 | CN1463470A Method of mfg. electronic device |
| 12/24/2003 | CA2484323A1 Passive temperature compensation technique for mems devices |
| 12/23/2003 | US6667558 Module and method of making same |
| 12/23/2003 | US6667245 CMOS-compatible MEM switches and method of making |
| 12/23/2003 | US6667219 Methods for forming void regions, dielectric regions and capacitor constructions |
| 12/23/2003 | US6666979 Dry etch release of MEMS structures |
| 12/23/2003 | US6666561 Continuously variable analog micro-mirror device |
| 12/23/2003 | US6666543 Printhead chip that incorporates covering formations for actuators of the printhead chip |
| 12/23/2003 | CA2340059C Micromechanical sensor and method for producing same |
| 12/23/2003 | CA2324836C Mems optical isolators |
| 12/23/2003 | CA2322122C Micro-electro-mechanical optical device |
| 12/18/2003 | WO2003105198A1 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 12/18/2003 | WO2003105175A1 Switch |
| 12/18/2003 | WO2003104141A1 Method for forming a released microstructure suitable for a microelectromechanical device |
| 12/18/2003 | WO2003081725A3 A miniaturized contact spring |
| 12/18/2003 | WO2003050854A3 Chemical reactor templates: sacrificial layer fabrication and template use |
| 12/18/2003 | WO2002071371A3 Fabrication integration of micro-components |
| 12/18/2003 | US20030232458 Method and geometry for reducing drift in electrostatically actuated devices |
| 12/18/2003 | US20030230793 Support for microelectronic, microoptoelectronic or micromechanical devices |
| 12/18/2003 | US20030230143 Monolithic silicon acceleration sensor |
| 12/18/2003 | CA2465815A1 Switch |
| 12/17/2003 | EP1371993A2 Acceleration sensor and manufacturing method for the same |
| 12/17/2003 | EP1371605A2 Optical micro systems |
| 12/17/2003 | CN1462482A Method for manufacturing thin-film structure |
| 12/17/2003 | CN1462257A Connection member, microswitch, method for manufacturing connection member, and method for manufacturing microswitch |
| 12/16/2003 | US6665109 Compliant mechanism and method of forming same |
| 12/16/2003 | US6664707 Miniature device with translatable member |
| 12/16/2003 | US6664706 Electrostatically-controllable diffraction grating |
| 12/16/2003 | US6663821 Bistable microvalve and microcatheter system |
| 12/16/2003 | US6663789 Bonded substrate structures and method for fabricating bonded substrate structures |
| 12/16/2003 | US6663225 Fluid ejecting device having a laminated thermal bend actuator |
| 12/16/2003 | US6663078 Microvalve |
| 12/16/2003 | US6662658 Whiffletree accelerometer |
| 12/16/2003 | US6662654 Z-axis accelerometer |
| 12/11/2003 | WO2003103334A1 An acoustically active element formed in a multi-layer circuit-board structure, a method for forming acoustically active element in a multi-layer circuit-board structure, and a multi-layer circuit-board structure |
| 12/11/2003 | WO2003102989A1 Microelectromechanical rf switch |
| 12/11/2003 | WO2003102966A2 Method of forming atomic force microscope tips |
| 12/11/2003 | WO2003102631A2 Bulk silicon mirrors with hinges underneath |
| 12/11/2003 | WO2003102540A2 Micro machined polymer beam structure method and resulting device for spring applications |
| 12/11/2003 | WO2003102218A2 Hybrid microcantilever sensors |
| 12/11/2003 | WO2003101888A2 Fluorochemical treatment for silicon articles |
| 12/11/2003 | WO2003101304A1 Embedded piezoelectric microcantilever sensors |
| 12/11/2003 | WO2003043189A3 Method for gap adjustment of two mechanical elements of a substantially planar micro-mechanical structure and corresponding electromechanical resonator |