| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 02/05/2004 | US20040023429 Low temperature plasma Si or SiGe for MEMS applications |
| 02/05/2004 | US20040022681 For use in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems |
| 02/05/2004 | US20040021924 Movable micro-body |
| 02/05/2004 | US20040021186 Used for an acceleration sensor; capable of reducing a stress difference generating between an oxide film on thermal shrinkage |
| 02/05/2004 | US20040021184 Micromechanical component |
| 02/05/2004 | US20040021151 Microswitch with a micro-electromechanical system |
| 02/05/2004 | US20040020968 Compliant apparatus and method |
| 02/05/2004 | US20040020897 Method for manufacturing thin-film structure |
| 02/05/2004 | US20040020782 Depositing portion of a layer onto the substrate; forming a plurality of layers such that each successive layer is formed adjacent to and adhered to a previously deposited layer |
| 02/05/2004 | US20040020518 Providing enclosed pressure vessel containing supercritical carbon dioxide; adding a second fluid to vessel, forming an interface between supercritical fluid and second fluid; displacing supercritical fluid from vessel with pressure |
| 02/05/2004 | US20040020303 Surface-micromachined absolute pressure sensor and a method for manufacturing thereof |
| 02/05/2004 | US20040020265 3D array of integrated cells for the sampling and detection of air bound chemical and biological species |
| 02/05/2004 | DE10259176A1 Structural body used in a mass flow sensor or sensor or actuator component comprises a porous region delimited by a material acting as a porous stop during the conversion of silicon into porous silicon or porous silicon oxide |
| 02/05/2004 | DE10231729A1 Component used in micro-mechanical structures has a surface micro-mechanical structure formed in a functional layer connected to a substrate via an insulating layer which is attacked by the process of removing the first sacrificial layer |
| 02/05/2004 | CA2492538A1 Valve assembly for microfluidic devices, and method for opening and closing same |
| 02/04/2004 | EP1387481A1 Micromachined moving device |
| 02/04/2004 | EP1387196A1 Optical switch device with improved fibre positioning system |
| 02/04/2004 | EP1386347A2 Microelectromechanical system (mens) device |
| 02/04/2004 | EP1386085A1 Pyrotechnic microactuators for microsystems |
| 02/04/2004 | CN1137484C Head actuator in disk driving system |
| 02/03/2004 | US6686807 Time base comprising an integrated micromechanical ring resonator |
| 02/03/2004 | US6686639 High performance MEMS device fabricatable with high yield |
| 02/03/2004 | US6686638 Micromechanical component including function components suspended movably above a substrate |
| 02/03/2004 | US6684699 Micromechanical device |
| 02/03/2004 | US6684698 Micromachined devices |
| 02/03/2004 | US6684638 Microactuator arrangement |
| 02/03/2004 | US6684469 Electrostatic activators comprising multilayer sheets having electroconductive thin films, dielectrics and electrodes, bonded at spacings using adhesives to form three-dimensional microstructure cells |
| 01/29/2004 | WO2004010449A1 Bimorph switch, method of producing the bimorph switch, electronic circuit, and method of producing the electronic circuit |
| 01/29/2004 | WO2004010150A2 Reducing offset in accelerometers |
| 01/29/2004 | WO2003037782A3 Micromechanical component and method for producing same |
| 01/29/2004 | US20040018749 Method of decreasing brittleness of single crystals, semiconductor wafers, and solid-state devices |
| 01/29/2004 | US20040017625 Bulk silicon mirrors with hinges underneath |
| 01/28/2004 | EP1385189A2 Switch |
| 01/28/2004 | EP1384612A2 Mechanical deformation amount sensor |
| 01/28/2004 | EP1383707A2 Fabrication of silicon micro mechanical structures |
| 01/28/2004 | CN1471736A Piezoelectric functional part and method of manufacturing the part |
| 01/28/2004 | CN1470897A Heat-driven micro reflecting-mirror and electronic apparatus |
| 01/27/2004 | US6683358 Silicon integrated accelerometer |
| 01/27/2004 | US6682981 Stress controlled dielectric integrated circuit fabrication |
| 01/27/2004 | US6682871 Microelectromechanical optical switch and method of manufacture thereof |
| 01/27/2004 | US6682199 Variable geometry mirror having high-precision, high geometry controllability |
| 01/22/2004 | WO2004008635A1 Microelectromechanical apparatus and methods for surface acous tic wave switching |
| 01/22/2004 | WO2004008220A1 Optical module, optical branch insert device, and optical transmission device |
| 01/22/2004 | WO2004007349A1 Use of an organic dielectric as a sacrificial layer |
| 01/22/2004 | WO2003095356A3 Micro electro-mechanical system apparatus and method |
| 01/22/2004 | WO2003092048A3 Micro electro-mechanical system method |
| 01/22/2004 | US20040013867 Method for fabricating a semiconductor device |
| 01/22/2004 | US20040012464 Microelectromechanical apparatus and methods for surface acoustic wave switching |
| 01/22/2004 | US20040012460 Electromagnetically actuated micromirror actuator and fabrication method thereof |
| 01/22/2004 | US20040012301 Actuating member and method for producing the same |
| 01/22/2004 | US20040012299 Assembly having a variable capacitance |
| 01/22/2004 | US20040012298 MEMS device having electrothermal actuation and release and method for fabricating |
| 01/22/2004 | US20040012062 Mechanical deformation amount sensor |
| 01/22/2004 | US20040012061 Decreased stiction |
| 01/22/2004 | US20040012060 Miniature electrostatic actuation device and installation comprising such devices |
| 01/21/2004 | EP1382565A1 Production device and production method for silicon-based structure |
| 01/21/2004 | EP1382066A2 Method of manufacturing an electronic device |
| 01/21/2004 | EP1381904A1 Multichannel optical switch |
| 01/21/2004 | EP1381852A1 Biosensor matrix and method for making same |
| 01/21/2004 | EP1381523A1 Freestanding polymer mems structures with anti stiction |
| 01/21/2004 | CN1469100A Mechanical shape variable detection sensor |
| 01/21/2004 | CN1135614C Semiconductor device structure and method for forming the same structure |
| 01/20/2004 | US6679995 Method of micromechanical manufacturing of a semiconductor element, in particular an acceleration sensor |
| 01/20/2004 | US6679584 High volume pagewidth printing |
| 01/20/2004 | US6679055 Electrothermal quadmorph microactuator |
| 01/15/2004 | WO2004006295A2 Spring loaded bi-stable mems switch |
| 01/15/2004 | WO2004006003A1 A device having a light-absorbing mask a method for fabricating same |
| 01/15/2004 | WO2004005998A1 Method and apparatus for controlling deformable actuators |
| 01/15/2004 | US20040009623 Method for manufacturing a semiconductor device |
| 01/15/2004 | US20040009614 Micromachined apparatus for collection, separation and analysis of polynucleotides, proteins, peptides, receptors, chelators and/or antibodies; high throughput assays; microfluidics |
| 01/15/2004 | US20040008438 Tunable filter, manufacturing method thereof and optical switching device comprising the tunable filter |
| 01/15/2004 | US20040008400 Articulated MEMS electrostatic rotary actuator |
| 01/15/2004 | US20040007970 Micro electro mechanical system controlled organic LED and pixel arrays and method of using and of manufacturing same |
| 01/15/2004 | US20040007470 Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids |
| 01/15/2004 | US20040007468 Multistep release method for electrochemically fabricated structures |
| 01/15/2004 | US20040007449 Add-on, suspended heater for liquid metal micro-switch |
| 01/15/2004 | US20040007063 Micro machined polymer beam structure method and resulting device for spring applications |
| 01/15/2004 | US20040007053 SPM sensor and process for producing same |
| 01/15/2004 | US20040007051 Microscale sensor element and related device and method of manufacture |
| 01/15/2004 | DE10227662A1 Mikromechanisches Bauelement für Beschleunigungs-oder Drehratensensoren und Sensor Micromechanical component of acceleration or angular rate sensors and sensor |
| 01/14/2004 | EP1381042A2 Recording / reproducing head and method of producing the same |
| 01/14/2004 | EP1379884A2 Sensor |
| 01/14/2004 | EP1379802A1 Microfluidic valve and microactuator for a microvalve |
| 01/14/2004 | EP1379463A2 Method for producing a semiconductor component and a semiconductor component produced according to this method |
| 01/14/2004 | EP0928371B1 Integrated electrically operable micro-valve |
| 01/14/2004 | CN1468450A Method for making thin-film constitution |
| 01/14/2004 | CN1468197A Assembly having a variable capacitance |
| 01/14/2004 | CN1467521A Micro mirror unit and method of making the same |
| 01/14/2004 | CN1134596C Micro-machined device for fluids and manufacturing method thereof |
| 01/14/2004 | CA2490975A1 A device having a light-absorbing mask and a method for fabricating same |
| 01/13/2004 | US6678458 System and method for precise positioning of microcomponents |
| 01/13/2004 | US6678084 Methods of making mechanisms in which relative locations of elements are maintained during manufacturing |
| 01/13/2004 | US6677709 Micro electromechanical system controlled organic led and pixel arrays and method of using and of manufacturing same |
| 01/13/2004 | US6677225 System and method for constraining totally released microcomponents |
| 01/13/2004 | US6677214 Semiconductor device and method of fabricating the same |
| 01/13/2004 | US6676106 Flap structure for electrostatic or magnetic applications and method for making same |
| 01/13/2004 | US6675578 Thermal buckle-beam actuator |
| 01/08/2004 | WO2004004061A1 Miniature rf and microwave components and methods for fabricating such components |
| 01/08/2004 | WO2004003981A1 Conductive etch stop for etching a sacrificial layer |
| 01/08/2004 | WO2004003624A1 A method and device for modulating a light beam and having an improved gamma response |