| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 03/11/2004 | US20040048403 Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same |
| 03/11/2004 | US20040047546 Electro-mechanical device having a charge dissipation layer and a method of manufacture therefor |
| 03/11/2004 | US20040047051 Variable geometry mirror having high-precision, high geometry controllability |
| 03/11/2004 | US20040046123 Electromagnetic radiation detectors having a microelectromechanical shutter device |
| 03/11/2004 | US20040046119 SPM sensor and process for producing it |
| 03/10/2004 | EP1396469A2 Semiconductor device with regions having different pore structure and method of fabrication |
| 03/10/2004 | EP1395835A1 Accelerometer strain relief structure |
| 03/10/2004 | EP1395516A2 Membrane for micro-electro-mechanical switch, and methods of making and using it |
| 03/10/2004 | CN1481612A Time base comprising integrated micromechanical tuning fork resonator |
| 03/09/2004 | US6704475 Mirror for use with a micro-electro-mechanical system (MEMS) optical device and a method of manufacture therefor |
| 03/09/2004 | US6703916 Micro-device with thermal actuator |
| 03/09/2004 | US6703674 Electrical device |
| 03/09/2004 | US6703257 Piezoelectric/electrostrictive film type elements and process for producing the same |
| 03/09/2004 | US6701779 Perpendicular torsion micro-electromechanical switch |
| 03/04/2004 | WO2004019362A1 Diaphragm activated micro-electromechanical switch |
| 03/04/2004 | WO2004019357A1 Micromechanical switch |
| 03/04/2004 | WO2004018349A2 Microstructure comprising a surface which is functionalised through the localised deposit of a thin layer and production method thereof |
| 03/04/2004 | WO2003031912A3 Tuning fork gyroscope |
| 03/04/2004 | US20040043423 Heat resistant resonant sensors for monitoring adjustments in forces applied to surface membrane and/or surface property changes of sensor membranes; high throughput assay |
| 03/04/2004 | US20040042213 Light modulating device and exposure apparatus using the same |
| 03/04/2004 | US20040041643 Temperature compensation mechanism for a micromechanical ring resonator |
| 03/04/2004 | US20040041254 Packaged microchip |
| 03/04/2004 | US20040041248 Packaged microchip with isolation |
| 03/04/2004 | US20040040828 Micro-electromechanical switch performance enhancement |
| 03/04/2004 | US20040040585 Displacement support coupled to substrate; cantilever structure; cantilever structure; spring; washing interior of pipes; carbon dioxide in aqueous solution |
| 03/04/2004 | US20040040132 Piezoelectric composite apparatus and a method for fabricating the same |
| 03/03/2004 | EP1394555A1 Threshold acceleration sensor |
| 03/03/2004 | EP1394554A1 Process for the fabrication of a threshold acceleration sensor |
| 03/03/2004 | EP1392484A2 High throughput screening of crystalization of materials |
| 03/03/2004 | CN1479964A Electrostatic device |
| 03/02/2004 | US6701037 MEMS-based noncontacting free-space optical switch |
| 03/02/2004 | US6700465 Micro-switching device actuated by low voltage |
| 03/02/2004 | US6700299 Assembly having variable capacitance |
| 03/02/2004 | US6699394 Micromachined parylene membrane valve and pump |
| 03/02/2004 | US6698454 Valve integrally associated with microfluidic liquid transport assembly |
| 03/02/2004 | US6698295 Microstructures comprising silicon nitride layer and thin conductive polysilicon layer |
| 03/02/2004 | US6698287 Microgyro tuning using focused ion beams |
| 03/02/2004 | CA2154357C Microstructures and single-mask, single-crystal process for fabrication thereof |
| 02/26/2004 | WO2004017351A2 Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation |
| 02/26/2004 | WO2004017350A1 Electrode configuration in a mems switch |
| 02/26/2004 | WO2004017329A1 Sensor with cantilever and optical resonator |
| 02/26/2004 | WO2004017119A1 Micro rocking device having tosion bar |
| 02/26/2004 | WO2004016547A1 Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device |
| 02/26/2004 | WO2003106927A3 Passive temperature compensation technique for mems devices |
| 02/26/2004 | WO2002086556A3 Optical wireless communication system with multiple receivers |
| 02/26/2004 | WO2002043089A3 Electronic device including multiple capacitance value mems capacitor and associated methods |
| 02/26/2004 | US20040038195 Microresonant sensors and methods of use thereof |
| 02/26/2004 | US20040037956 Vapor deposition a silane coupling agent on electronics, under control pressure in vacuum chamber; preventing non-uniform coatings |
| 02/26/2004 | US20040037492 Gimbaled micromechanical rotation system |
| 02/26/2004 | US20040036132 Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods |
| 02/26/2004 | DE10336232A1 Kapazitiver Sensor für dynamische Größen Capacitive sensor for dynamic variables |
| 02/25/2004 | EP1391906A2 Electrostatic RF mems switches |
| 02/25/2004 | EP1391420A2 Method and apparatus for protecting wiring and integrated circuit device |
| 02/25/2004 | EP1390794A2 Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method |
| 02/25/2004 | EP1390793A2 Pivoting optical micromirror, array for such micromirrors and method for making same |
| 02/25/2004 | EP1390765A1 Method for manufacturing a silicon sensor and a silicon sensor |
| 02/25/2004 | CN1478054A Micromachined component and method of manufacture |
| 02/24/2004 | US6695457 Bulk silicon mirrors with hinges underneath |
| 02/24/2004 | US6695297 Flexural device-based suspension having high compliance in a direction of travel and low compliance in a direction orthogonal thereto |
| 02/24/2004 | US6694814 Dynamic sensor having capacitance varying according to dynamic force applied thereto |
| 02/19/2004 | WO2004016036A2 Micromachined ultrasonic transducers and method of fabrication |
| 02/19/2004 | WO2004015729A1 Microfabricated relay with multimorph actuator and electrostatic latch mechanism |
| 02/19/2004 | WO2004015728A1 Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism |
| 02/19/2004 | WO2004014784A1 Micromachine and production method therefor |
| 02/19/2004 | WO2003016206A3 System and method for precise positioning of microcomponents |
| 02/19/2004 | WO2002077613A3 Fluid property sensors |
| 02/19/2004 | US20040033639 Integrated method for release and passivation of MEMS structures |
| 02/19/2004 | US20040033372 Micromechanical component and method for producing an anti-adhesive layer on a micromechanical component |
| 02/19/2004 | US20040032705 Electrode configuration in a MEMS switch |
| 02/19/2004 | US20040032185 Micromachined moving device |
| 02/19/2004 | US20040032000 Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation |
| 02/19/2004 | US20040031912 Method of eliminating brownian noise in micromachined varactors |
| 02/19/2004 | US20040031773 Method of fabricating an ink jet printhead |
| 02/19/2004 | US20040031670 Method of actuating a high power micromachined switch |
| 02/19/2004 | DE10235369A1 Micromechanical switch for acceleration sensor system, has spring element for inertia mass deflected by acceleration force to allow inertia mass to contact contact element |
| 02/18/2004 | EP1389307A2 Sensor arrangement, in particular micro-mechanical sensor arrangement |
| 02/18/2004 | CN1476619A Variable capacitance capacitor device |
| 02/18/2004 | CN1476033A 开关 Switch |
| 02/17/2004 | US6694504 Etch mask patterning; photolithography |
| 02/17/2004 | US6693735 MEMS structure with surface potential control |
| 02/12/2004 | WO2004013039A2 Low temperature plasma si or sige for mems applications |
| 02/12/2004 | WO2004013037A1 Three-dimensional structure element and method of manufacturing the element, optical switch, and micro device |
| 02/12/2004 | WO2002088018A3 Multi-directional thermal actuator |
| 02/12/2004 | US20040029108 Immobilization onto coated surface; presence of microforce is measured by deflection of the apparatus |
| 02/12/2004 | US20040028321 Optical switch, optical add/drop apparatus, optical transmission system, and method of producing optical switch |
| 02/12/2004 | US20040027780 Strain/electrical potential transducer |
| 02/12/2004 | US20040027636 Device having a light-absorbing mask and a method for fabricating same |
| 02/12/2004 | US20040027225 Micro electromechanical differential actuator |
| 02/12/2004 | US20040027034 Piezoelectric actuator array and manufacturing method |
| 02/12/2004 | US20040026362 Piezoelectric functional part and method of manufacturing the part |
| 02/12/2004 | US20040025589 Micromechanical component |
| 02/12/2004 | DE10235371A1 Production of a micromechanical device used in integrated optical arrangements comprises preparing an SOI or EOI substrate having a silicon functional layer, forming a trench extending through the functional layer, and further processing |
| 02/11/2004 | EP1388743A2 Optical switch, optical add/drop apparatus, optical transmission system, and method of producing optical switch |
| 02/11/2004 | EP1388369A2 Capillary-channel probes for liquid pickup, transportation and dispense using spring beams |
| 02/05/2004 | WO2004011366A1 Micromachine and method of manufacturing the micromachine |
| 02/05/2004 | WO2004011149A1 Valve assembly for microfluidic devices, and method for opening and closing same |
| 02/05/2004 | WO2004011147A1 Microfluidic devices, methods, and systems |
| 02/05/2004 | WO2003081204A3 Microscale sensor element and related device and method of manufacture |
| 02/05/2004 | WO2003064315A3 Microtechnically produced swiveling platform with magnetic drive and stop positions |
| 02/05/2004 | US20040023509 Electron beam mask substrate, electron beam mask blank, electron beam mask, and fabrication method thereof |