| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 04/07/2004 | EP1406020A2 Vibrating pumping stage for vacuum pumps, and vacuum pump with vibrating pumping stages |
| 04/07/2004 | EP0981725B1 High temperature resonant integrated microstructure sensor |
| 04/07/2004 | CN1488066A Micromachined silicon gyro using tuned accelerometer |
| 04/06/2004 | US6717325 Method and apparatus for actuation of a two-axis MEMS device using three actuation elements |
| 04/06/2004 | US6717227 MEMS devices and methods of manufacture |
| 04/06/2004 | US6716253 Force detector |
| 04/06/2004 | US6716002 Micro pump |
| 04/06/2004 | US6715733 High temperature micro-machined valve |
| 04/01/2004 | WO2004026758A1 Driver and method of producing the same |
| 04/01/2004 | WO2004026757A2 Controlling electromechanical behavior of structures within a microelectromechanical systems device |
| 04/01/2004 | WO2003079384A3 Double-electret mems actuator |
| 04/01/2004 | WO2002067293A9 Microelectromechanical systems (mems) device including an analog or a digital |
| 04/01/2004 | WO2002043089A9 Electronic device including multiple capacitance value mems capacitor and associated methods |
| 04/01/2004 | US20040062590 Keyboard with an internal printer |
| 04/01/2004 | US20040062588 Keyboard that incorporates a printing mechanism |
| 04/01/2004 | US20040062510 Variable optical attenuator |
| 04/01/2004 | US20040061962 Shock protectors for micro-mechanical systems |
| 04/01/2004 | US20040061961 Articulating hinge; optical routing; electrically controlled |
| 04/01/2004 | US20040061543 Flexible MEMS transducer and manufacturing method thereof, and flexible MEMS wireless microphone |
| 04/01/2004 | US20040061414 Split spring for MEMS devices |
| 04/01/2004 | US20040061106 Micro electro mechanical system apparatus |
| 04/01/2004 | US20040060355 For measuring the acceleration of a platform along a fixed axis; emicromachined device is bonded to a CMOS chip containing a matching photodiodes array aligned with the grid and their readout electronics; noise equivalent displacement |
| 04/01/2004 | CA2499208A1 Controlling electromechanical behavior of structures within a microelectromechanical systems device |
| 03/31/2004 | EP1403518A2 Microfluidic device made at least partially of an elastic material |
| 03/31/2004 | EP1403214A2 Flexible MEMS transducer manufacturing method |
| 03/31/2004 | EP1403213A2 Floating entrance guard for preventing electrical short circuits |
| 03/31/2004 | EP1403212A2 Flexible mems transducer and manufacturing method thereof, and flexible mems wireless microphone |
| 03/31/2004 | EP1403211A2 Surfactant-enhanced protection of micromechanical components from galvanic degradation |
| 03/31/2004 | EP1403210A2 Microelectromechanical device with continuously variable displacement |
| 03/31/2004 | EP1307398B1 Assembly having a variable capacitance |
| 03/31/2004 | CN1486277A Surface-micromachined absolute pressure sensor and a method for manufacturing thereof |
| 03/31/2004 | CN1485873A Electrostatic rf mems switches |
| 03/30/2004 | US6714625 Lithography device for semiconductor circuit pattern generation |
| 03/30/2004 | US6714565 Optically tunable Fabry Perot microelectromechanical resonator |
| 03/30/2004 | US6714337 Method and device for modulating a light beam and having an improved gamma response |
| 03/30/2004 | US6714105 Micro electro-mechanical system method |
| 03/30/2004 | US6713829 Single unit position sensor |
| 03/30/2004 | US6713695 RF microelectromechanical systems device |
| 03/30/2004 | US6713403 Method for manufacturing semiconductor device |
| 03/30/2004 | US6713367 Self-aligned vertical combdrive actuator and method of fabrication |
| 03/30/2004 | US6713327 Stress controlled dielectric integrated circuit fabrication |
| 03/30/2004 | US6713298 Device for detecting particles in fluid |
| 03/30/2004 | US6713235 On top of supports on a base spaced away |
| 03/25/2004 | WO2004025726A2 Method for selectively covering a micro machined surface |
| 03/25/2004 | WO2004025128A1 Liquid delivery device |
| 03/25/2004 | WO2004024618A1 Microdevice and manufacturing method |
| 03/25/2004 | WO2003081725B1 A miniaturized contact spring |
| 03/25/2004 | WO2003070625A3 Thin film encapsulation of mems devices |
| 03/25/2004 | WO2003065050A3 Method of manufacturing an accelerometer |
| 03/25/2004 | WO2002091402A3 Bistable magnetic actuator |
| 03/25/2004 | US20040059449 Selecting a material for use as the expansive element |
| 03/25/2004 | US20040058532 Controlling electromechanical behavior of structures within a microelectromechanical systems device |
| 03/25/2004 | US20040058469 Microelectromechanical device with continuously variable displacement |
| 03/25/2004 | US20040057101 Reduced formation of asperities in contact micro-structures |
| 03/25/2004 | US20040056742 Electrostatic device |
| 03/25/2004 | US20040055382 Interior support structure fixed to substrates; anchoring detector fingers; stress resistance; reduce bending, twisting |
| 03/25/2004 | US20040055151 Micro systems |
| 03/25/2004 | DE19716480B4 Verfahren zum Herstellen einer Vorrichtung mit einem Hohlraum zur Aufnahme eines Lichtwellenleiters A method of manufacturing a device having a cavity for receiving an optical fiber |
| 03/25/2004 | CA2498669A1 Method for selectively covering a micro machined surface |
| 03/24/2004 | EP1254474B1 Microelectromechanical micro-relay with liquid metal contacts |
| 03/24/2004 | CN1484611A Production device and production method for silicon-based structure |
| 03/24/2004 | CN1483660A Micro-piezoelectric driver for MEMS |
| 03/24/2004 | CN1143135C Miniature mechanical appts. |
| 03/24/2004 | CN1143121C Method for making angular rate sensor |
| 03/23/2004 | US6711318 Optical switch based on rotating vertical micro-mirror |
| 03/23/2004 | US6710417 Armor coated MEMS devices |
| 03/23/2004 | US6710311 Buried channel in semiconductor body; trenches extending from surface in fluid connection; resist reservoir |
| 03/23/2004 | US6709886 Method of fabricating micromachined devices |
| 03/23/2004 | US6709604 Parylene micro check valve and fabrication method thereof |
| 03/23/2004 | US6708492 Resonant thermal out-of-plane buckle-beam actuator |
| 03/23/2004 | US6708491 Direct acting vertical thermal actuator |
| 03/18/2004 | WO2004022478A1 Soi polysilicon trench refill perimeter oxide anchor scheme |
| 03/18/2004 | WO2004022477A1 Microchip with thermal stress relief means |
| 03/18/2004 | WO2003071613A3 Low cost bending actuator with two-dimensional motion |
| 03/18/2004 | WO2003055791A3 Improved etch process for etching microstructures |
| 03/18/2004 | WO2003016203A3 Method for producing a semiconductor component and associated semiconductor component, especially a membrane sensor |
| 03/18/2004 | US20040053507 Method for fabricating a micro machine |
| 03/18/2004 | US20040053435 Electronic device and method for fabricating the electronic device |
| 03/18/2004 | US20040053434 Microelectronic mechanical system and methods |
| 03/18/2004 | US20040053322 System and method for the analysis of bodily fluids |
| 03/18/2004 | US20040052657 Micromachined fluidic device and method for making same |
| 03/18/2004 | US20040052447 Optical switch device |
| 03/18/2004 | US20040050161 Micromechanical component and method for producing the same |
| 03/18/2004 | DE10241066A1 Halbleiterbauelement und Verfahren Semiconductor device and method |
| 03/17/2004 | CN1482483A 光学开关器件 Optical switching devices |
| 03/16/2004 | US6707308 Measurements using tunnelling current between elongate conductors |
| 03/16/2004 | US6707176 Non-linear actuator suspension for microelectromechanical systems |
| 03/16/2004 | US6707121 Micro electro mechanical systems and devices |
| 03/16/2004 | US6706402 Nanotube films and articles |
| 03/16/2004 | US6706202 Method for shaped optical MEMS components with stressed thin films |
| 03/16/2004 | US6705165 High voltage drive circuitry aligned with MEMS array |
| 03/11/2004 | WO2004021382A2 Micro-electromechanical switch performance enhancement |
| 03/11/2004 | WO2004020329A1 Microelectromechanical system comb actuator and manufacturing method thereof |
| 03/11/2004 | WO2004020328A1 Thermal movement sensor |
| 03/11/2004 | WO2003043095A3 Anchors for micro-electro-mechanical systems (mems) devices |
| 03/11/2004 | WO2003031316A3 Mems structure with surface potential control |
| 03/11/2004 | WO2002099504A3 Resonance scanner |
| 03/11/2004 | US20040048449 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 03/11/2004 | US20040048430 Semiconductor component and method |
| 03/11/2004 | US20040048410 SOI polysilicon trench refill perimeter oxide anchor scheme |