| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 05/04/2004 | US6730978 Single crystal, dual wafer, tunneling sensor and a method of making same |
| 05/04/2004 | US6730866 High-frequency, liquid metal, latching relay array |
| 05/04/2004 | US6730615 High reflector tunable stress coating, such as for a MEMS mirror |
| 05/04/2004 | US6730535 Silicon device manufacturing method, silicon device, and optical component |
| 04/29/2004 | WO2004036952A2 Membrane and method for the production thereof |
| 04/29/2004 | WO2003104141A8 Method for forming a released microstructure suitable for a microelectromechanical device |
| 04/29/2004 | WO2003102966A3 Method of forming atomic force microscope tips |
| 04/29/2004 | WO2003102631A3 Bulk silicon mirrors with hinges underneath |
| 04/29/2004 | US20040082247 Fibrous micro-composite material |
| 04/29/2004 | US20040081802 Component and method of manufacturing same |
| 04/29/2004 | US20040081391 2-D actuator and manufacturing method thereof |
| 04/29/2004 | US20040080806 Continuously variable analog micro-mirror device |
| 04/29/2004 | US20040080240 Microelectromechanical system with stiff coupling |
| 04/29/2004 | US20040080004 Micromechanical component and corresponding production method |
| 04/28/2004 | EP1412731A1 Micromechanical component |
| 04/28/2004 | EP1412722A2 Fluid property sensors |
| 04/28/2004 | EP1412550A2 Support with getter-material for microelectronic, microoptoelectronic or micromechanical device |
| 04/28/2004 | EP1412282A2 Multi-directional thermal actuator |
| 04/28/2004 | EP1412087A1 Microfabricated two-pin liquid sample dispensing system |
| 04/28/2004 | EP1200865A4 Micro-machined mirror device |
| 04/28/2004 | CN1492569A Displacement continuously variable static micro electromechanical device |
| 04/27/2004 | US6728018 Light control device |
| 04/22/2004 | WO2004034007A2 Fibre optic based semiconductor micro sensors for sensing pressure or temperature, fabrication methods of said sensors, and a method of securing an optical fibre to a silicon block |
| 04/22/2004 | WO2004033365A2 Method of forming a sensor for detecting motion |
| 04/22/2004 | WO2004033364A2 Methods for forming coatings on mems devices |
| 04/22/2004 | WO2004033363A1 Micro-actuator device and optical switch system using the same |
| 04/22/2004 | WO2003106326A3 Micro-electro-mechanical system (mems) variable capacitor apparatuses and related methods |
| 04/22/2004 | WO2003068668A3 Micromechnical component and method for producing the same |
| 04/22/2004 | US20040077164 Method for monolithically integrating silicon carbide microelectromechanical devices with electronic circuitry |
| 04/22/2004 | US20040077119 Mems element manufacturing method |
| 04/22/2004 | US20040076008 Electrostatic drive type mems element, manufacturing method thereof, optical mems element, optical modulation element, glv device, and laser display |
| 04/22/2004 | US20040075881 Thermally actuated micro mirror and electronic device |
| 04/22/2004 | US20040075522 Microstructure and its fabrication method |
| 04/22/2004 | US20040075514 Microswitch and method of manufacturing the same |
| 04/22/2004 | US20040075158 Variable capacitance capacitor device |
| 04/22/2004 | US20040075140 Microsensor and single chip integrated microsensor system |
| 04/22/2004 | US20040074301 Sensor structure and a silicon sensor. According to the method, into a single-crystal silicon wafer (10) is formed by etched opening at least one spring element configuration (7) and at least one seismic mass (8) connected to said spring |
| 04/22/2004 | US20040074234 Thermomechanical in-plane microactuator |
| 04/22/2004 | DE10247189A1 Verfahren und Vorrichtung METHOD AND DEVICE |
| 04/22/2004 | DE10196678T5 Herstellungsverfahren für einen Dünnfilmstrukturkörper Manufacturing method of a thin-film structure body |
| 04/22/2004 | DE10196677T5 Elektrodenstruktur und Verfahren zum Herstellen eines Dünnschicht-Strukturkörpers Electrode structure and method of manufacturing a thin-film structure body |
| 04/22/2004 | DE10196676T5 Substrat und Herstellungsverfahren dafür sowie Dünnschicht-Strukturkörper Substrate and manufacturing method thereof as well as thin-film structural body |
| 04/22/2004 | DE10196643T5 Herstellungsverfahren für einen Dünnschicht-Strukturkörper Manufacturing method of a thin-film structure body |
| 04/21/2004 | EP1411024A2 2-D actuator and manufacturing method thereof |
| 04/21/2004 | EP1410552A2 Hybrid circuit having nanotube electromechanical memory |
| 04/21/2004 | EP1410436A2 Parallel, individually addressable probes for nanolithography |
| 04/21/2004 | EP1410433A2 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 04/21/2004 | EP1410429A2 Electromechanical memory array using nanotube ribbons and method for making same |
| 04/21/2004 | EP1410398A2 Electromechanical memory having cell selection circuitry constructed with nanotube technology |
| 04/21/2004 | EP1410397A2 Nanotube films and articles |
| 04/21/2004 | EP1410047A1 Micromechanical component |
| 04/21/2004 | EP1409156A2 Methods of nanotube films and articles |
| 04/21/2004 | CN1490240A Two-dimensional excitation set and manufacturing method thereof |
| 04/20/2004 | US6724125 Methods and apparatus for diffractive optical processing using an actuatable structure |
| 04/20/2004 | US6724023 Field effect transistor, especially for use as a sensor element or acceleration sensor |
| 04/20/2004 | US6723659 Micromirror unit fabrication method and micromirror unit made by the same |
| 04/20/2004 | US6722582 Liquid droplet spray device |
| 04/20/2004 | US6722197 Coupled micromachined structure |
| 04/15/2004 | WO2004032210A2 Monolithic structures including alignment and/or retention fixtures for accepting components |
| 04/15/2004 | WO2004031822A1 Variable optical attenuator |
| 04/15/2004 | WO2003102218A3 Hybrid microcantilever sensors |
| 04/15/2004 | WO2003059805A3 Micro device |
| 04/15/2004 | WO2003049514A3 Miniature rf and microwave components and methods for fabricating such components |
| 04/15/2004 | WO2003045837A3 Stress control of semiconductor microstructures for thin film growth |
| 04/15/2004 | WO2003012491A3 Mems mirror |
| 04/15/2004 | US20040072452 Microelectronic contact structures, and methods of making same |
| 04/15/2004 | US20040072386 Micromachine manufacturing method |
| 04/15/2004 | US20040072048 Configuration for wire-free supply of electric power to a large number of sensors and/or actuators,sensor or actuator for this purpose and system for a machine having a large number of sensors and/or actuators |
| 04/15/2004 | US20040071863 Contacting the surface of the MEMS device with one or more precursor compounds of the formula SiXR3, wherein each R is independently an organic group, and X is selected from group of Cl and OR', wherein R' is independently an alkyl group |
| 04/15/2004 | US20040070888 Micro-actuator for hard-disk drive, and manufacturing process thereof |
| 04/15/2004 | US20040070858 Mirror assembly with elevator lifter |
| 04/15/2004 | US20040070816 Optical deflector and method of producing same |
| 04/15/2004 | US20040070310 Device comprising a variable-rigidity mobile structure preferably with electrostatic control |
| 04/15/2004 | US20040069743 Method of fabricating an ink jet printhead chip with active and passive nozzle chamber structures |
| 04/15/2004 | US20040069742 Fabrication of a reflective spatial light modulator |
| 04/14/2004 | EP1408336A2 Accelerometer with mass support springs having predetermined vibration modes |
| 04/14/2004 | EP1407498A2 Actuator system |
| 04/14/2004 | EP1407250A2 3d array of integrated cells for the sampling and detection of air bound chemical and biological species |
| 04/14/2004 | EP1185482A4 Thermal actuator shaped for more uniform temperature profile |
| 04/14/2004 | CN1145800C Semiconductor device and sensor |
| 04/13/2004 | US6721098 Triple electrode MOEMS tunable filter and fabrication process therefor |
| 04/13/2004 | US6721020 Thermal actuator with spatial thermal pattern |
| 04/13/2004 | US6720851 Micro electromechanical switches |
| 04/13/2004 | US6720635 Electronic component |
| 04/13/2004 | US6720201 MEMS device and fabrication method thereof |
| 04/13/2004 | US6718825 Methods and systems for reducing stick-down within MEMS structures |
| 04/13/2004 | US6718824 Semiconductor dynamic quantity detecting sensor and manufacturing method of the same |
| 04/13/2004 | US6718764 System and method for microstructure positioning using metal yielding |
| 04/08/2004 | WO2004028956A2 Method and micromechanical component |
| 04/08/2004 | WO2003082732A3 Packaging microelectromechanical systems |
| 04/08/2004 | WO2003069776A3 Tunable bulk acoustic wave mems microresonator |
| 04/08/2004 | WO2003046508A3 High surface area substrates for microarrays and methods to make same |
| 04/08/2004 | WO2003014009A3 A microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in mems |
| 04/08/2004 | US20040067346 Multiple-level actuators and clamping devices |
| 04/08/2004 | US20040066258 MEMS device with integral packaging |
| 04/08/2004 | US20040065932 Sensor with at least one micromechanical structure and method for production thereof |
| 04/08/2004 | US20040065931 Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method |
| 04/08/2004 | US20040065638 Method of forming a sensor for detecting motion |
| 04/08/2004 | US20040065637 Surfactant-enhanced protection of micromechanical components from galvanic degradation |
| 04/08/2004 | DE10244785A1 Verfahren und mikromechanisches Bauelement Procedures and micromechanical component |