| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 06/08/2004 | US6747338 Composite dielectric with improved etch selectivity for high voltage MEMS structures |
| 06/08/2004 | US6746891 Trilayered beam MEMS device and related methods |
| 06/08/2004 | US6745627 Electrostatic drive for accelerometer |
| 06/08/2004 | US6745567 System and method for positional movement of microcomponents |
| 06/03/2004 | WO2004047190A2 Micro electro-mechanical system device with piezoelectric thin film actuator |
| 06/03/2004 | WO2004018349A9 Microstructure comprising a surface which is functionalised through the localised deposit of a thin layer and production method thereof |
| 06/03/2004 | US20040106275 Method of manufacturing an electronic device |
| 06/03/2004 | US20040105139 Oscillation device, optical deflector using the oscillation device, and image display device and image forming apparatus using the optical deflector, and method of manufacturing the oscillation device |
| 06/03/2004 | US20040104971 Micro-electromechanical device having a laminated thermal bend actuator |
| 06/03/2004 | US20040104454 Semiconductor device and method of producing the same |
| 06/03/2004 | DE10143968B4 Verfahren zum Herstellen eines Vakuumbehälters A method of manufacturing a vacuum vessel |
| 06/03/2004 | DE10134737B4 Aktorsystem Actuator system |
| 06/02/2004 | EP1424583A2 Optical receiver and optical transmitter using a variable optical attenuator, and method for producing a variable optical attenuator |
| 06/02/2004 | EP1423714A1 Microstructure with movable mass |
| 06/02/2004 | EP1423330A2 Method for producing a semiconductor component and associated semiconductor component, especially a membrane sensor |
| 06/02/2004 | CN1152267C Method for producing micro structure |
| 06/01/2004 | US6744335 Micromechanical tunable capacitor and an integrated tunable resonator |
| 06/01/2004 | US6744334 Phase shifter capable of miniaturizing and method of manufacturing the same |
| 06/01/2004 | US6744173 Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods |
| 06/01/2004 | US6743653 Micromachine manufacturing method |
| 06/01/2004 | US6743570 Method of using heat-depolymerizable polycarbonate sacrificial layer to create nano-fluidic devices |
| 06/01/2004 | US6742389 Filter-based method and system for measuring angular speed of an object |
| 05/27/2004 | US20040101422 Vibrating pumping stage for molecular vacuum pumps, and molecular vacuum pump with vibrating pumping stages |
| 05/27/2004 | US20040101245 Variable optical attenuator |
| 05/27/2004 | US20040101234 Systems and methods for overcoming stiction |
| 05/27/2004 | US20040100706 Bulk silicon mirrors with hinges underneath |
| 05/27/2004 | US20040100680 Spatial light modulators with light absorbing areas |
| 05/27/2004 | US20040100677 Spatial light modulators with light blocking/absorbing areas |
| 05/27/2004 | US20040099928 Composite dielectric with improved etch selectivity for high voltage mems structures |
| 05/26/2004 | EP1421429A2 Resonance scanner |
| 05/26/2004 | CN1500063A Micro electromechanical switches |
| 05/26/2004 | CN1500062A Micro electromechanical switches |
| 05/26/2004 | CN1151367C Grain growth of electrical interconnection for microelectromechanical systems (MEMS) |
| 05/25/2004 | US6741377 Reducing contribution of reflected ambient light from inactive areas of microoptical electromechanical apparatus |
| 05/25/2004 | US6740946 Micromechanical device and method of manufacture thereof |
| 05/25/2004 | US6740537 Process for fabricating a microelectromechanical optical component |
| 05/25/2004 | US6739193 Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same |
| 05/25/2004 | US6739190 Micromechanical resonator device |
| 05/25/2004 | US6739189 Micro structure for vertical displacement detection and fabricating method thereof |
| 05/21/2004 | WO2004042785A2 Functional bimorph composite nanotapes and methods of fabrication |
| 05/21/2004 | WO2004041998A2 Nanomechanichal energy, force, and mass sensors |
| 05/21/2004 | WO2003014789A3 Microsystem switches |
| 05/21/2004 | WO2002068849A8 Microfluidic valve and microactuator for a microvalve |
| 05/20/2004 | US20040097066 Method of making an integrated electromechanical switch and tunable capacitor |
| 05/20/2004 | US20040097003 MEMS encapsulated structure and method of making same |
| 05/20/2004 | US20040095659 Micromirror actuator and method of manufacturing the same |
| 05/20/2004 | US20040095629 MEMS structure with raised electrodes |
| 05/20/2004 | US20040095431 Inkjet pagewidth printer for high volume pagewidth printing |
| 05/20/2004 | US20040094815 Especially a tunable radio frequency MEMS switch |
| 05/20/2004 | US20040094086 Production device and production method for silicon-based structure |
| 05/19/2004 | EP1419991A2 Tapered multi-layer thermal actuator and method of operating same |
| 05/19/2004 | EP1419885A2 Thermal actuator with spatial thermal pattern |
| 05/19/2004 | EP1419511A1 Snap action thermal switch |
| 05/19/2004 | EP1419396A1 Micro-machined electromechanical system (mems) accelerometer device having arcuately shaped flexures |
| 05/19/2004 | EP1250565B1 Angular rate sensor |
| 05/19/2004 | DE202004004206U1 Plate shaped body for forming pressure measurement elements has a number of blind holes, the remaining thin area of which forms a pressure membrane for a pressure measurement element that also comprises a bridge circuit |
| 05/19/2004 | CN1498412A Micro-magnetic latching switch with relaxed permanent magnet allgnment requirements |
| 05/19/2004 | CN1150596C Method and device for forming polyparaxylene MEMS |
| 05/18/2004 | US6738600 Ceramic microelectromechanical structure |
| 05/18/2004 | US6737225 Method of undercutting micro-mechanical device with super-critical carbon dioxide |
| 05/18/2004 | US6736982 Micromachined vertical vibrating gyroscope |
| 05/18/2004 | US6736008 Inertia force sensor |
| 05/13/2004 | WO2004016036A3 Micromachined ultrasonic transducers and method of fabrication |
| 05/13/2004 | WO2003081968A8 A method for integrating microparticles into mems |
| 05/13/2004 | WO2002001638A3 Microelectronic packages including reactive components, and methods of fabricating the same |
| 05/13/2004 | US20040091608 Piezoelectric/electrostrictive device and method of manufacturing same |
| 05/13/2004 | US20040090495 Tapered multi-layer thermal actuator and method of operating same |
| 05/13/2004 | US20040090144 Large tilt angle MEM platform |
| 05/13/2004 | US20040090143 Large tilt angle MEM platform |
| 05/13/2004 | US20040090142 Large tilt angle mem platform |
| 05/13/2004 | US20040089903 A method is described for producing surface micromechanical structures having a high aspect ratio, a sacrificial layer being provided between a substrate and a function layer, trenches being provided by a plasma etching |
| 05/12/2004 | EP1417754A1 Mechanical resonator device having phenomena-dependent electrical stiffness |
| 05/12/2004 | EP1417518A1 Stress tuned blazed grating light valve |
| 05/12/2004 | EP1417151A1 Method for the fabrication of suspended porous silicon microstructures and application in gas sensors |
| 05/12/2004 | CN1496333A Fabrication of silicon micro mechanical structures |
| 05/12/2004 | CN1495916A Micro electromechanical system device |
| 05/12/2004 | CN1495455A Mobile equipment for micromaching |
| 05/12/2004 | CN1495293A Surfactant enhanced protection method for preventing micromechanical component from electrically ageing |
| 05/11/2004 | US6735008 MEMS mirror and method of fabrication |
| 05/11/2004 | US6734770 Microrelay |
| 05/11/2004 | US6734597 Thermomechanical in-plane microactuator |
| 05/11/2004 | US6734550 In-situ cap and method of fabricating same for an integrated circuit device |
| 05/11/2004 | US6734512 Electrostatic actuator |
| 05/11/2004 | US6734451 Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same |
| 05/11/2004 | US6734425 Scanning probe system with spring probe and actuation/sensing structure |
| 05/11/2004 | US6733144 Shock protectors for micro-mechanical systems |
| 05/06/2004 | WO2004038485A1 Optical switch and optical device |
| 05/06/2004 | WO2004038354A2 Resonant sensor and sensing system |
| 05/06/2004 | WO2004037713A1 Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith |
| 05/06/2004 | US20040085858 Micromachined ultrasonic transducers and method of fabrication |
| 05/06/2004 | US20040085805 Device selection circuitry constructed with nanotube technology |
| 05/06/2004 | US20040085606 Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method |
| 05/06/2004 | US20040085403 Ink jet printhead chip with active and passive nozzle chamber structures |
| 05/06/2004 | EP1416311A1 Continuously variable analog micro-mirror device |
| 05/06/2004 | EP1416064A2 Method of coating micro-electromechanical devices |
| 05/06/2004 | EP1415127A1 Isolated resonator gyroscope |
| 05/06/2004 | DE10247487A1 Membran und Verfahren zu deren Herstellung Membrane and processes for their preparation |
| 05/06/2004 | CA2496777A1 Resonant sensor and sensing system |
| 05/05/2004 | CN1494170A Capacitive momentum sensor |
| 05/05/2004 | CN1494106A Method and device used for protecting wiring and integrated circuit device |