| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
|---|
| 07/01/2004 | US20040124945 Switch |
| 07/01/2004 | US20040124483 Adjust accuracy of gap width; multilayer, substrates, dielectric; etching holes; cleaning residues |
| 07/01/2004 | US20040124481 Releasing undercoatings; etching; cleaning residues from surface; vaporization of silica; flushing using hydrogen |
| 07/01/2004 | US20040124085 Microfluidic devices and methods with electrochemically actuated sample processing |
| 07/01/2004 | US20040123664 Acceleration sensor |
| 07/01/2004 | US20040123651 Scanning probe system with spring probe |
| 07/01/2004 | DE10291877T5 Verbindungsstück, Mikroschalter, Verfahren zum Herstellen eines Verbindungsstücks und Verfahren zum Herstellen eines Mikroschalters Connector, micro switch, method for manufacturing a connector and method for manufacturing a micro-switch |
| 06/30/2004 | EP1434031A2 Mems gyroscope and fabrication method thereof |
| 06/30/2004 | CN1508591A Magnetic actuator |
| 06/30/2004 | CN1508547A 加速度传感器 Acceleration sensor |
| 06/29/2004 | US6757459 Piezoelectrically driven, liquid-actuated optical cross-bar switch |
| 06/29/2004 | US6757455 Micromachine and manufacturing method therefor |
| 06/29/2004 | US6757093 Side wall and floor; moveable reflector; optical switching |
| 06/29/2004 | US6756545 Micro-device assembly with electrical capabilities |
| 06/29/2004 | US6756316 Semiconductor pressure transducer structures and methods for making the same |
| 06/29/2004 | US6756285 Multilayer structure with controlled internal stresses and making same |
| 06/29/2004 | US6756247 Integrated large area microstructures and micromechanical devices |
| 06/29/2004 | US6755982 Self-aligned micro hinges |
| 06/24/2004 | WO2004054082A1 Polymer actuator |
| 06/24/2004 | WO2004026757A3 Controlling electromechanical behavior of structures within a microelectromechanical systems device |
| 06/24/2004 | US20040121564 Method of forming semiconductor devices through epitaxy |
| 06/24/2004 | US20040121510 Contact switch and apparatus provided with contact switch |
| 06/24/2004 | US20040121506 Release etch method for micromachined sensors |
| 06/24/2004 | US20040121504 Process for the fabrication of an inertial sensor with failure threshold |
| 06/24/2004 | US20040120858 impermeable membrane having a nano-scale aperture. Polymer molecules travel through the aperture and the electrical characteristics generated by the particular base or monomer occupying the channel at a given time is determined by monitoring |
| 06/24/2004 | US20040120637 Multichannel optical switch |
| 06/24/2004 | US20040120058 Shock protectors for micro-mechanical systems |
| 06/24/2004 | US20040120057 Apparatus, method and system for providing enhanced mechanical protection for thin beams |
| 06/24/2004 | US20040119569 Magnetic actuator |
| 06/24/2004 | US20040119490 Parallel, individually addressable probes for nanolithography |
| 06/24/2004 | US20040119485 Probe finger structure and method for making a probe finger structure |
| 06/24/2004 | US20040119376 Bidirectional and vertical motion actuator and method for manufacturing the same |
| 06/24/2004 | US20040119354 MEMS based motor |
| 06/24/2004 | US20040119125 Semiconductor structure and method of manufacture |
| 06/24/2004 | US20040118481 Micromachined beam; stress-free; curved shape; lithography |
| 06/24/2004 | DE19580372B4 Micro-mechanical oscillation system for angular velocity measurement of land vehicle, ship, aircraft, robot |
| 06/24/2004 | DE10257097A1 Verfahren zur Herstellung von mikroelektromechanischen Systemen (Microelectromechanical Systems: MEMS) mittels Silizium-Hochtemperatur-Fusionsbonden A process for the manufacture of micro electromechanical systems (Micro Electro Mechanical Systems: MEMS) using high temperature silicon fusion bonding |
| 06/23/2004 | EP1432000A1 Millimeter wave switches |
| 06/23/2004 | EP1431985A2 Magnetic actuator |
| 06/23/2004 | EP1431764A2 Acceleration sensor |
| 06/23/2004 | EP1431241A2 Probe finger structure and method for making a probe finger structure |
| 06/23/2004 | EP1431240A2 Apparatus, method and system for providing enhanced mechanical protection for thin beams |
| 06/23/2004 | EP1430599A2 Microbridge structures for ultra-high frequency mem resonator |
| 06/23/2004 | EP1430498A1 A micromechanical switch and method of manufacturing the same |
| 06/23/2004 | EP1429992A1 Flexible structure with integrated sensor/actuator |
| 06/23/2004 | EP1429991A2 A microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in mems |
| 06/23/2004 | CN1506298A Floating entry protective apparatus and method for preventing circuit from short-circuiting |
| 06/22/2004 | US6754243 Tunable distributed feedback laser |
| 06/22/2004 | US6753639 Micro-electromechanical structure resonator frequency adjustment using radiant energy trimming and laser/focused ion beam assisted deposition |
| 06/22/2004 | US6753582 Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation |
| 06/22/2004 | US6753488 Microswitch and method of manufacturing the same |
| 06/22/2004 | US6753201 Method of manufacturing semiconductor device capable of sensing dynamic quantity |
| 06/22/2004 | US6753037 Re-coating MEMS devices using dissolved resins |
| 06/22/2004 | US6752601 Micropump |
| 06/17/2004 | WO2004050546A2 System for sensorless control in a permanent magnet machine |
| 06/17/2004 | WO2004050545A1 Micromachine and method of producing the same |
| 06/17/2004 | WO2004010150A3 Reducing offset in accelerometers |
| 06/17/2004 | US20040115731 Microfluidic protein crystallography |
| 06/17/2004 | US20040114942 Optical receiver and optical transmitter using variable optical attenuator, and method for producing variable optical attenuator |
| 06/17/2004 | US20040114856 Monolithic reconfigurable optical multiplexer systems and methods |
| 06/17/2004 | US20040114259 Mirror device, optical switch, thin film elastic structure, and thin elastic structure producing method |
| 06/17/2004 | US20040113732 Bistable magnetic actuator |
| 06/17/2004 | US20040113715 MEMS millimeter wave switches |
| 06/17/2004 | US20040113524 Backing material for micromachined ultrasonic transducer devices |
| 06/17/2004 | US20040113516 Systems and methods for overcoming stiction |
| 06/17/2004 | US20040113515 Systems and methods for overcoming stiction |
| 06/17/2004 | US20040112937 Microstructure component |
| 06/16/2004 | EP1428255A1 Microelectronic mechanical system and methods |
| 06/16/2004 | EP1331997B1 Microfluidic flow control devices |
| 06/16/2004 | EP1175371A4 Actuator element |
| 06/16/2004 | EP0683921B1 Microstructures and single mask, single-crystal process for fabrication thereof |
| 06/15/2004 | US6750998 Electro-mechanical grating device having a continuously controllable diffraction efficiency |
| 06/15/2004 | US6750775 Integrated sensor having plurality of released beams for sensing acceleration and associated methods |
| 06/15/2004 | US6750659 Inherently stable electrostatic actuator technique which allows for full gap deflection of the actuator |
| 06/15/2004 | US6750596 Generator for use in a microelectromechanical system |
| 06/15/2004 | US6750078 MEMS switch having hexsil beam and method of integrating MEMS switch with a chip |
| 06/15/2004 | US6750077 Semiconductor device and method of fabricating the same |
| 06/15/2004 | US6749308 Micromirror |
| 06/15/2004 | US6748818 High-performance fully-compliant micro-mechanisms for force/displacement amplification |
| 06/10/2004 | WO2004049034A1 Mems scanning mirror with tunable natural frequency |
| 06/10/2004 | WO2004049017A2 Spatial light modulators with light absorbing areas |
| 06/10/2004 | WO2004048787A1 Double-effect pyrotechnic micro-actuator for microsystem and microsystem using same |
| 06/10/2004 | US20040110322 Negative thermal expansion system (NTEs) device for TCE compensation in elastomer composites and conductive elastomer interconnects in microelectronic packaging |
| 06/10/2004 | US20040110318 Method of manufacturing an external force detection sensor |
| 06/10/2004 | US20040109222 Low-voltage electromechanical device including a tiltable microplatform, method of tilting same, array of such devices and method of setting dimple-to-substrate spacing |
| 06/10/2004 | US20040108479 Valves activated by electrically active polymers or by shape-memory materials, device containing same and method for using same |
| 06/10/2004 | US20040107770 Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever |
| 06/09/2004 | EP1426797A1 Variable optical attenuator |
| 06/09/2004 | EP1425764A2 Bistable magnetic actuator |
| 06/09/2004 | EP1425622A2 Enhance thermal stability through optical segmentation |
| 06/09/2004 | EP1425548A2 Microcantilever apparatus and methods for detection of enzymes |
| 06/09/2004 | EP1425241A2 Method for the production of a membrane |
| 06/09/2004 | EP1078167B1 Microvalve |
| 06/09/2004 | CN1503023A Variable light attenuator |
| 06/09/2004 | CN1502545A MEMS encapsulated structure and method of making same |
| 06/09/2004 | CN1153112C Miniature connectory array |
| 06/09/2004 | CN1153010C Integrated electrically operable micro-valve |
| 06/08/2004 | US6747784 Compliant mechanism and method of forming same |
| 06/08/2004 | US6747775 Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same |
| 06/08/2004 | US6747390 Micromirror actuator |