| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 07/29/2004 | US20040146810 Process for forming and acoustically connecting structures on a substrate |
| 07/29/2004 | US20040146409 Micro-pump driven by phase change of a fluid |
| 07/29/2004 | US20040145811 Optical-interference type reflective panel and method for making the same |
| 07/29/2004 | US20040145756 Image processing apparatus for a printing mechanism of a wide format pagewidth inkjet printer |
| 07/29/2004 | US20040145630 Ink supply arrangement for a printing mechanism of a wide format pagewidth inkjet printer |
| 07/29/2004 | US20040145277 MEMS actuator with lower power consumption and lower cost simplified fabrication |
| 07/29/2004 | US20040145056 Multi-metal layer MEMS structure and process for making the same |
| 07/29/2004 | US20040144653 With flexible hinge member connecting the microplatform to the support member allowing relative movement between them; improved mechanical strength, rigidity, low deformation, and high planarity. |
| 07/29/2004 | US20040144242 Pyrotechnic microactuators for microsystems |
| 07/29/2004 | DE10302676A1 Micromechanical pressure sensor has overlapping adjoining epitaxial monocrystalline and polycrystalline silicon regions that enable measurement of pressure induced membrane fluctuations in a piezoresistive manner |
| 07/29/2004 | CA2512699A1 Methods and structure for improving wafer bow control |
| 07/28/2004 | EP1441561A2 Process for forming and acoustically connecting structures on a substrate |
| 07/28/2004 | EP1441131A1 Microfluidic switch to temporarily stop a flow of liquid |
| 07/28/2004 | EP1440035A1 A method of fabrication of micro-devices |
| 07/28/2004 | EP1440034A2 Method for producing cavities having an optically transparent wall |
| 07/28/2004 | EP1392484A4 High throughput screening of crystalization of materials |
| 07/28/2004 | CN1516909A Micromachine vibration filter |
| 07/27/2004 | US6768412 Snap action thermal switch |
| 07/27/2004 | US6768196 Packaged microchip with isolation |
| 07/27/2004 | US6768181 Micro-machined electromechanical sensors (MEMS) devices |
| 07/27/2004 | US6767757 High-vacuum packaged microgyroscope and method for manufacturing the same |
| 07/27/2004 | US6767614 Multiple-level actuators and clamping devices |
| 07/27/2004 | US6767194 Valves and pumps for microfluidic systems and method for making microfluidic systems |
| 07/22/2004 | WO2004061488A1 High energy, low energy density, radiation-resistant optics used with micro-electromehanical devices |
| 07/22/2004 | WO2004060793A1 Multilayer structure and method for manufacturing same, functional structure and method for manufacturing same, and mask for electron beam exposure and method for manufacturing same |
| 07/22/2004 | WO2004060792A2 Method of forming semiconductor devices through epitaxy |
| 07/22/2004 | US20040141894 Micromirror unit fabrication method and micromirror unit made by the same |
| 07/22/2004 | US20040141682 Control apparatus and control method for optical switch using MEMS mirrors |
| 07/22/2004 | US20040140872 Method for improving the power handling capacity of mems switches |
| 07/22/2004 | US20040140862 Miniature RF and microwave components and methods for fabricating such components |
| 07/22/2004 | US20040139794 Method of fabricating a surface probing device and probing device produced thereby |
| 07/21/2004 | EP1439546A1 A nanotube based cantilever arm, a method of operating and manufacturing a nanotube based cantilever arm, and a storage device and a photonic crystal based on an array of nanotube based cantilever arms |
| 07/21/2004 | EP1439307A1 Bubble driven micropump |
| 07/21/2004 | EP1438256A2 Stiffened surface micromachined structures and process for fabricating the same |
| 07/21/2004 | EP1438255A2 Micromechanical sensor having a self-test function and optimization method |
| 07/20/2004 | US6765710 Interference tabs for avoiding snapdown of optical membrane and fabrication process |
| 07/20/2004 | US6765706 Optical deflector |
| 07/20/2004 | US6765300 Micro-relay |
| 07/20/2004 | US6765279 Membrane 3D IC fabrication |
| 07/20/2004 | US6764936 Mechanical landing pad formed on the underside of a MEMS device |
| 07/20/2004 | US6764872 Microelectromechanical switch |
| 07/20/2004 | US6763719 Acceleration sensor |
| 07/15/2004 | WO2004059704A1 Method of manufacturing an oxide beam |
| 07/15/2004 | WO2004059678A1 Push/pull actuator for microstructures |
| 07/15/2004 | WO2004058628A2 Encapsulated microstructure and method of producing one such microstructure |
| 07/15/2004 | WO2004041998A9 Nanomechanichal energy, force, and mass sensors |
| 07/15/2004 | WO2003106328A3 Micromechanical component and corresponding production method |
| 07/15/2004 | WO2003043038A3 Mems device having contact and standoff bumps and related methods |
| 07/15/2004 | US20040137729 Method of making a free standing structure |
| 07/15/2004 | US20040136414 Wavelength-tunable semiconductor optical device |
| 07/15/2004 | US20040136138 Micro electromechanical switches |
| 07/15/2004 | US20040136049 Micro-mechanical device having anti-stiction layer and method of manufacturing the device |
| 07/15/2004 | US20040136044 Coating for optical MEMS devices |
| 07/15/2004 | US20040135219 Fabrication of silicon micro mechanical structures |
| 07/15/2004 | US20040134772 Monolithic structures including alignment and/or retention fixtures for accepting components |
| 07/15/2004 | DE10260860A1 Silicon germanium micro-mechanical layer comprises upper and lower surfaces and doping material whose concentration varies through layer |
| 07/14/2004 | EP1437325A1 MICRO−ACTUATOR, MICRO−ACTUATOR DEVICE, OPTICAL SWITCH AND OPTICAL SWITCH ARRAY |
| 07/14/2004 | EP1436147A1 A keyboard |
| 07/14/2004 | EP1232563B1 Time base comprising an integrated micromechanical ring resonator |
| 07/14/2004 | CN1512255A Variable light attenuator of micro electromechanical system |
| 07/14/2004 | CN1512254A Variable light attennator of micro electromechanical system |
| 07/13/2004 | US6762667 Micro electromechanical switch having self-aligned spacers |
| 07/13/2004 | US6762116 System and method for fabricating microcomponent parts on a substrate having pre-fabricated electronic circuitry thereon |
| 07/13/2004 | US6761829 Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void |
| 07/13/2004 | US6761420 Proportional micromechanical device |
| 07/08/2004 | WO2004056698A2 Method for making a planar suspended microstructure, using a sacrificial layer of polymer material and resulting component |
| 07/08/2004 | WO2004056697A1 Method and device for capturing charged molecules traveling in a flow stream |
| 07/08/2004 | WO2004056547A2 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure |
| 07/08/2004 | WO2004038354A3 Resonant sensor and sensing system |
| 07/08/2004 | WO2003106326B1 Micro-electro-mechanical system (mems) variable capacitor apparatuses and related methods |
| 07/08/2004 | WO2003058652A3 Electromechanical three-trace junction devices |
| 07/08/2004 | US20040132303 Membrane 3D IC fabrication |
| 07/08/2004 | US20040132227 Methods and structure for improving wafer bow control |
| 07/08/2004 | US20040131537 Multilayer ribbon; epitaxial deposits; laser ablation |
| 07/08/2004 | US20040130775 High energy, low energy density, radiation-resistant optics used with micro-electromechical devices |
| 07/08/2004 | US20040130767 Multi-step landing micro-mirror, method for manufacturing the same and multi-step landing micro-mirror array |
| 07/08/2004 | US20040130765 Resonance scanner |
| 07/08/2004 | US20040129989 Sensor with failure threshold |
| 07/08/2004 | US20040129953 Mems devices and methods of manufacture |
| 07/08/2004 | US20040129202 Patterning of nanocrystalline diamond films for diamond microstructures useful in mems and other devices |
| 07/08/2004 | US20040129077 Sensor |
| 07/08/2004 | DE10256116A1 Semiconductor wafer manufacture for micro-electromechanical system, by applying sacrificial layer to active area, leaving openings at edges of active layer, and applying conductive material |
| 07/07/2004 | EP1435336A2 Gap tuning for surface micromachined structures in an epitaxial reactor |
| 07/07/2004 | EP1435335A2 Method for release of surface micromachined structures in an epitaxial reactor |
| 07/07/2004 | CN1511259A Method for manufacturing silicon sensor and silicon sensor |
| 07/07/2004 | CN1511253A Armor coated MEMS devices |
| 07/07/2004 | CN1510742A Negative thermal dilation system device and conductive elastomer in mlcroelectronics seal connection |
| 07/06/2004 | US6760144 Articulated MEMS electrostatic rotary actuator |
| 07/06/2004 | US6759787 Microelectromechanical apparatus for elevating and tilting a platform |
| 07/06/2004 | US6759734 Miniature device with increased insulative spacing and method for making same |
| 07/06/2004 | US6759265 Method for producing diaphragm sensor unit and diaphragm sensor unit |
| 07/06/2004 | US6758983 Staggered torsional electrostatic combdrive and method of forming same |
| 07/06/2004 | US6758107 3D array of integrated cells for the sampling and detection of air bound chemical and biological species |
| 07/01/2004 | WO2004055885A2 Encapsulation of mems devices using pillar-supported caps |
| 07/01/2004 | WO2004021382A3 Micro-electromechanical switch performance enhancement |
| 07/01/2004 | WO2003068670A3 Microfluidic valve and system therefor |
| 07/01/2004 | US20040126920 Micro inertia sensor and method of manufacturing the same |
| 07/01/2004 | US20040126081 Microelectromechanical system (MEMS) variable optical attenuator |
| 07/01/2004 | US20040126080 Microelectromechanical systems (MEMS) variable optical attenuator |
| 07/01/2004 | US20040124951 Micromachine vibration filter |