| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 08/26/2004 | CA2515742A1 Nanofabric articles and methods of making the same |
| 08/26/2004 | CA2515724A1 Devices having vertically-disposed nanofabric articles and methods of making the same |
| 08/26/2004 | CA2514611A1 Bi-stable micro-actuator and optical switch |
| 08/25/2004 | EP1450131A2 Isolated resonator gyroscope with a drive and sense plate |
| 08/25/2004 | EP1449810A2 Method for manufacturing micro-electro-mechanical system using solder balls |
| 08/25/2004 | EP1448379A1 Fibre-reinforced microactuator |
| 08/24/2004 | US6781744 Amplification of MEMS motion |
| 08/24/2004 | US6781735 Fabry-Perot cavity manufactured with bulk micro-machining process applied on supporting substrate |
| 08/24/2004 | US6781732 Electromagnetically actuated micromirror actuator and fabrication method thereof |
| 08/24/2004 | US6781280 Slider displacement direction conversion mechanism in electrostatic actuator |
| 08/24/2004 | US6781279 Micro-actuator with interdigitated combs perpendicular to a base |
| 08/24/2004 | US6780786 Method for producing a porous silicon film |
| 08/24/2004 | US6780767 Semiconductor component in a wafer assembly |
| 08/24/2004 | US6780570 Method of fabricating a suspended micro-structure with a sloped support |
| 08/24/2004 | US6779408 Force detector |
| 08/24/2004 | US6779247 Selective removal of sacrificial thin film with adhesive side beneath electrical connecting elements to form windows; etching; depositing dielectric covering |
| 08/19/2004 | WO2004070776A2 Methods for transferring supercritical fluids in microelectronic and other industrial processes |
| 08/19/2004 | WO2004070338A1 Micromechanical component and method for production thereof |
| 08/19/2004 | WO2004058628A3 Encapsulated microstructure and method of producing one such microstructure |
| 08/19/2004 | WO2003076330A3 Silicon carbide microelectromechanical devices with electronic circuitry |
| 08/19/2004 | WO2002082047A8 High throughput screening of crystallization of materials |
| 08/19/2004 | US20040161909 Electronic component and method for its production |
| 08/19/2004 | US20040160302 Actuator and switch |
| 08/19/2004 | US20040159833 Nanotube films and articles |
| 08/19/2004 | US20040159631 Fabrication of a reflective spatial light modulator |
| 08/19/2004 | DE10305442A1 A process for preparation of a micromechanical device with a substrate, a membrane, and a hollow space by etching useful in electronics for thermal decoupling between structural elements and substrates |
| 08/19/2004 | DE10303927A1 Sonde für ein optisches Nahfeldmikroskop mit verbesserter Streulichtunterdrückung und Verfahren zu deren Herstellung Probe for an optical near-field microscope having improved stray light rejection, and methods for their preparation |
| 08/18/2004 | EP1446844A2 Curved electro-active actuators |
| 08/18/2004 | EP1350029A4 Valves and pumps for microfluidic systems and method for making microfluidic systems |
| 08/18/2004 | EP1274648B1 Micromechanical component and method for producing the same |
| 08/18/2004 | EP1183566B1 Micromachined electrostatic actuator with air gap |
| 08/18/2004 | EP0933012B1 Device for positioning and retaining micro-building-blocks |
| 08/18/2004 | CN1522223A Sacrificial layer technique to make gaps in mems applications |
| 08/17/2004 | US6778306 Surface micromachined optical system with reinforced mirror microstructure |
| 08/17/2004 | US6778305 Surface micromachined optical system with reinforced mirror microstructure |
| 08/17/2004 | US6777629 Micro electro-mechanical system with one or more moving parts method and apparatus |
| 08/17/2004 | US6777284 Method of manufacturing an electronic device |
| 08/17/2004 | US6777258 Conductive etch stop for etching a sacrificial layer |
| 08/17/2004 | US6776476 Ink jet printhead chip with active and passive nozzle chamber structures |
| 08/12/2004 | WO2004068591A1 Method for fabricating semiconductor device and acceleration sensor |
| 08/12/2004 | WO2004068502A2 Probe for an optical near field microscope with improved scattered light suppression and method for producing the same |
| 08/12/2004 | WO2004068501A2 Probe for an optical near field microscope and method for producing the same |
| 08/12/2004 | WO2004068075A1 Methods and systems for reducing stick-down within mems structures |
| 08/12/2004 | US20040157426 Fabrication of advanced silicon-based MEMS devices |
| 08/12/2004 | US20040155736 Electrostatic RF MEMS switches |
| 08/12/2004 | US20040155306 MEMS device and fabrication method thereof |
| 08/12/2004 | US20040155243 Optical device having movable portion and method for manufacturing the same |
| 08/12/2004 | DE19610782B4 Verfahren zur Herstellung von mikromechanischen Strukturen Process for the preparation of micro-mechanical structures |
| 08/11/2004 | EP1444864A1 Micro-mechanical sensors and method for production thereof |
| 08/11/2004 | EP1444779A2 Method for gap adjustment of two mechanical elements of a substantially planar micro-mechanical structure and corresponding electromechanical resonator |
| 08/11/2004 | EP1444543A1 Digital optical switch apparatus and process for manufacturing same |
| 08/11/2004 | EP1226437B1 Cantilever sensors and transducers |
| 08/11/2004 | CN1519877A Contact switch and appts. provided with contact switch |
| 08/11/2004 | CN1161015C Corner irrigation system |
| 08/10/2004 | US6775050 Micromirror actuator |
| 08/10/2004 | US6774535 Micromechanical platform pivotal on a compliant member |
| 08/10/2004 | US6774533 Electrostatic impact driving microactuator |
| 08/10/2004 | US6774445 Actuator |
| 08/10/2004 | US6773401 Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components |
| 08/10/2004 | US6772632 Mass production type acceleration sensor to be used for small-sized household electronic devices and a manufacturing method |
| 08/05/2004 | WO2004065968A1 Micromachined capacitive lateral accelerometer device and monolithic, three-axis accelerometer having same |
| 08/05/2004 | WO2004065830A1 Integrated surface-machined micro flow controller method and apparatus |
| 08/05/2004 | WO2004065290A2 Integrated electrostatic peristaltic pump method and apparatus |
| 08/05/2004 | WO2003076331A3 Method for producing micro-mechanical components and components produced according to said method |
| 08/05/2004 | US20040152276 Device, and substrate on which circuit and antenna are formed |
| 08/05/2004 | US20040152228 Method for producing micromechanic sensors and sensors produced by said method |
| 08/05/2004 | US20040150869 Mems device and methods for manufacturing thereof, light modulation device, glv device and methods for manufacturing thereof, and laser display |
| 08/05/2004 | US20040150413 Scanning microscope; detector for scanning sample; electrode; dielectric; conductive wire |
| 08/05/2004 | US20040150068 Membrane 3D IC fabrication |
| 08/05/2004 | US20040150057 Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby |
| 08/05/2004 | US20040149558 Micro device |
| 08/05/2004 | US20040149035 Non-resonant four degrees-of-freedom micromachined gyroscope |
| 08/05/2004 | US20040148777 Valve integrally associated with microfluidic liquid transport assembly |
| 08/05/2004 | US20040148771 Micro-electromechanical structure resonator frequency adjustment using radient energy trimming and laser/focused ion beam assisted deposition |
| 08/05/2004 | DE19935819B4 Relais und Verfahren zu dessen Herstellung Relay and process for its preparation |
| 08/05/2004 | DE10304835A1 Laminated microelectromechanical component, e.g. rotation rate sensor, micro swing mirror, acceleration sensor, comprises electric conductive structure integrated in functional layer |
| 08/05/2004 | DE10302720A1 Mikrofluidischer Schalter zum Anhalten des Flüssigkeitsstroms während eines Zeitintervalls A microfluidic switch for stopping the flow of liquid during a time interval |
| 08/05/2004 | DE10302518A1 Microstructure creation method for generating an area-by-area microstructure e.g. for infrared sensor elements, using a functional material to create it on an unsupported area of a membrane or on a coating |
| 08/05/2004 | DE10297163T5 Betätigungsglied und Schalter Actuator and switch |
| 08/04/2004 | EP1443017A2 Multi-metal layer MEMS structure and process for making the same |
| 08/04/2004 | EP1443016A2 Micro-Fabricated device and method of making same |
| 08/04/2004 | EP1441976A2 Micromechanical component and method for producing same |
| 08/04/2004 | EP1240529B1 Method for producing micromechanical structures |
| 08/04/2004 | CN1517743A Optical modulator, display device and its manufacturing method |
| 08/04/2004 | CN1517296A Flexible micro-electromechanical system changer and its manufacturing method and radio loud-speaker |
| 08/04/2004 | CN1517295A Manufacturing method of flexible micro-electromechanical system changer |
| 08/04/2004 | CN1160186C Nano-scale composition, compound structure, its manufacturing and application |
| 08/03/2004 | US6771158 Micro electromechanical differential actuator |
| 08/03/2004 | US6770569 Low temperature plasma Si or SiGe for MEMS applications |
| 08/03/2004 | US6770506 Release etch method for micromachined sensors |
| 08/03/2004 | US6770504 Methods and structure for improving wafer bow control |
| 07/29/2004 | WO2004064090A2 Methods and structure for improving wafer bow control |
| 07/29/2004 | WO2004063090A2 High displacement bistable micro actuator |
| 07/29/2004 | WO2004063089A2 Recessed microstructure device and fabrication method thereof |
| 07/29/2004 | WO2004034007A3 Fibre optic based semiconductor micro sensors for sensing pressure or temperature, fabrication methods of said sensors, and a method of securing an optical fibre to a silicon block |
| 07/29/2004 | WO2004017351A3 Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation |
| 07/29/2004 | US20040147132 Flexible MEMS transducer manufacturing method |
| 07/29/2004 | US20040147057 Method for producing a semiconductor component and a semiconductor component produced according to this method |
| 07/29/2004 | US20040147056 Micro-fabricated device and method of making |
| 07/29/2004 | US20040147055 Photoelectric conversion device and manufacturing mehtod therefor |