| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 09/22/2004 | EP1460462A1 Mems optical latching switch |
| 09/22/2004 | EP1460456A1 Adjustable compound microlens apparatus with MEMS controller |
| 09/22/2004 | EP1460038A2 Electromechanical system having a controlled atmosphere, and method of fabricating same |
| 09/22/2004 | EP1460036A1 Mems element manufacturing method |
| 09/22/2004 | EP1460035A1 Electrostatic drive mems element, manufacturing method thereof, optical mems element, optical modulation element, glv device, and laser display |
| 09/22/2004 | EP1459398A1 Methods of making electromechanical three-trace junctions devices |
| 09/22/2004 | EP1459334A2 Electromechanical three-trace junction devices |
| 09/22/2004 | CN1530727A Micromirror device including dielectrophoresis liquid |
| 09/22/2004 | CN1530679A Micromirror device with light angle enlarge |
| 09/21/2004 | US6795603 Optical switch |
| 09/21/2004 | US6795225 Micromirror unit with torsion connector having nonconstant width |
| 09/21/2004 | US6794965 Micro-magnetic latching switch with relaxed permanent magnet alignment requirements |
| 09/21/2004 | US6794793 Microelectromechnical system for tilting a platform |
| 09/21/2004 | US6794737 Spring structure with stress-balancing layer |
| 09/21/2004 | US6794725 Amorphous silicon sensor with micro-spring interconnects for achieving high uniformity in integrated light-emitting sources |
| 09/21/2004 | US6794261 Methods of forming void regions, dielectric regions and capacitor constructions |
| 09/21/2004 | US6794196 Deposited thin films and their use in detection, attachment and bio-medical applications |
| 09/21/2004 | US6794119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device |
| 09/21/2004 | US6793974 Selecting a material for use as the expansive element |
| 09/21/2004 | US6793753 Method of making a microfabricated elastomeric valve |
| 09/16/2004 | WO2004079373A1 Capacitive acceleration sensor |
| 09/16/2004 | WO2004078638A2 Micro-electromechanical inductive switch |
| 09/16/2004 | WO2004055885A3 Encapsulation of mems devices using pillar-supported caps |
| 09/16/2004 | US20040181630 Devices having horizontally-disposed nanofabric articles and methods of making the same |
| 09/16/2004 | US20040177699 Semiconductor pressure sensor |
| 09/16/2004 | DE102004010670A1 Halbleiterdrucksensor mit einem Diaphragma A semiconductor pressure sensor comprising a diaphragm |
| 09/15/2004 | EP1457804A1 Electrostatic driving device for a flexible thin film and manufacturing method of the same |
| 09/15/2004 | EP1457803A1 Micro-mirror device with angle amplification |
| 09/15/2004 | EP1457801A1 Micro-mirror device including dielectrophoretic liquid |
| 09/15/2004 | EP1456699A2 Microsystem switches |
| 09/15/2004 | EP1294635A4 Improved thermal bend actuator |
| 09/15/2004 | EP1247131B1 Micromirror |
| 09/15/2004 | CN1529890A MEMS-switched stepped variable capacitor and method of making same |
| 09/14/2004 | US6791742 MEMS structure with raised electrodes |
| 09/14/2004 | US6791730 Surface micromachined optical system with reinforced mirror microstructure |
| 09/14/2004 | US6791235 Systems and methods for overcoming stiction |
| 09/14/2004 | US6791233 Semiconductor device |
| 09/14/2004 | US6791108 Protective fullerene (C60) packaging system for microelectromechanical systems applications |
| 09/14/2004 | US6790699 Method for manufacturing a semiconductor device |
| 09/14/2004 | US6790698 Process for integrating dielectric optical coatings into micro-electromechanical devices |
| 09/14/2004 | US6789423 Micro inertia sensor and method of manufacturing the same |
| 09/10/2004 | WO2004077073A1 Integrated monolithic tri-axial micromachined accelerometer |
| 09/10/2004 | WO2004076340A1 An accelerometer |
| 09/10/2004 | WO2004064090A3 Methods and structure for improving wafer bow control |
| 09/10/2004 | WO2003101888A3 Fluorochemical treatment for silicon articles |
| 09/09/2004 | US20040175856 Devices having vertically-disposed nanofabric articles and methods of marking the same |
| 09/09/2004 | US20040175855 Technique for fabricating mems devices having diaphragms of ''floatting'' regions of single crystal material |
| 09/09/2004 | US20040174757 Content addressable control system |
| 09/09/2004 | US20040174237 Electromagnetic drive type actuator |
| 09/09/2004 | US20040173872 Microelectro mechanical system switch |
| 09/09/2004 | US20040173027 Semiconductor pressure sensor having diaphragm |
| 09/09/2004 | DE10307561A1 Meßanordnung zur kombinierten Abtastung und Untersuchung von mikrotechnischen, elektrische Kontakte aufweisenden Bauelementen Measuring arrangement for combined sampling and analysis of micro-technical, electrical contacts having components |
| 09/08/2004 | EP1454349A2 Trilayered beam mems device and related methods |
| 09/08/2004 | EP1454333A1 Mems device having a trilayered beam and related methods |
| 09/08/2004 | EP1453759A2 Metal alloy elements in micromachined devices |
| 09/08/2004 | CN1527793A Method for forming microelectronic spring structures on a substrate |
| 09/08/2004 | CN1527039A Semiconductor pressure sensor with diaphragm |
| 09/08/2004 | CN1526479A Liquid flow micro switch for cutting-off liquid flow during the time interval |
| 09/08/2004 | CN1165749C Air quality flowmeter |
| 09/08/2004 | CN1165700C Moving slender pipe and mehtod for producing the same pipe |
| 09/07/2004 | US6788840 Bi-stable micro-actuator and optical switch |
| 09/07/2004 | US6788175 Anchors for micro-electro-mechanical systems (MEMS) devices |
| 09/07/2004 | US6788086 Scanning probe system with spring probe |
| 09/07/2004 | US6787969 Damped micromechanical device |
| 09/07/2004 | US6787968 To prevent a polymer cantilever from sticking to the substrate |
| 09/07/2004 | US6787804 Semiconductor acceleration sensor |
| 09/07/2004 | US6787438 Device having one or more contact structures interposed between a pair of electrodes |
| 09/07/2004 | US6787387 Electronic device and method for fabricating the electronic device |
| 09/07/2004 | US6786661 Keyboard that incorporates a printing mechanism |
| 09/07/2004 | US6786570 Ink supply arrangement for a printing mechanism of a wide format pagewidth inkjet printer |
| 09/02/2004 | WO2004075247A2 Electronic components comprising adjustable-capacitance micro-electro-mechanical capacitors |
| 09/02/2004 | WO2004075204A2 Measuring system for the combined scanning and analysis of microtechnical components comprising electrical contacts |
| 09/02/2004 | WO2004074168A2 Packaged microchip with thermal stress relief |
| 09/02/2004 | WO2004034007A9 Fibre optic based semiconductor micro sensors for sensing pressure or temperature, fabrication methods of said sensors, and a method of securing an optical fibre to a silicon block |
| 09/02/2004 | US20040168728 Device for receiving and discharging liquid substances |
| 09/01/2004 | EP1452844A1 Epitaxial seal (episeal) pressure sensor |
| 09/01/2004 | EP1452481A2 Fabrication of advanced silicon-based MEMS devices |
| 09/01/2004 | EP1451584A2 High surface area substrates for microarrays and methods to make same |
| 08/31/2004 | US6785117 Capacitive device |
| 08/31/2004 | US6784771 MEMS optical mirror array |
| 08/31/2004 | US6784028 Methods of making electromechanical three-trace junction devices |
| 08/31/2004 | US6784011 Method for manufacturing thin-film structure |
| 08/31/2004 | US6782756 Micromechanical component and equalization method |
| 08/31/2004 | US6782749 Micromechanical component |
| 08/26/2004 | WO2004072705A1 Bi-stable micro-actuator and optical switch |
| 08/26/2004 | WO2004072335A2 Devices having vertically-disposed nanofabric articles and methods of making the same |
| 08/26/2004 | WO2004072334A2 Nanofabric articles and methods of making the same |
| 08/26/2004 | WO2004071942A1 Mems element and method of producing the same, and diffraction type mems element |
| 08/26/2004 | WO2004071941A2 Method for producing a micromechanical device and a micromechanical device |
| 08/26/2004 | WO2004049017A3 Spatial light modulators with light absorbing areas |
| 08/26/2004 | WO2004033365A3 Method of forming a sensor for detecting motion |
| 08/26/2004 | US20040165034 Printing mechanism for a wide format pagewidth inkjet printer |
| 08/26/2004 | US20040164825 Micro-electromechanical inductive switch |
| 08/26/2004 | US20040164423 Microstructures comprising a dielectric layer and a thin conductive layer |
| 08/26/2004 | US20040164368 High reflector tunable stress coating, such as for a MEMS mirror |
| 08/26/2004 | US20040164289 Electromechanical three-trace junction devices |
| 08/26/2004 | US20040164068 Process for manufacturing integrated chemical microreactors of semiconductor material |
| 08/26/2004 | US20040163476 Episeal pressure sensor and method for making an episeal pressure sensor |
| 08/26/2004 | US20040163226 Method for manufacturing a micro-actuator |
| 08/26/2004 | DE10303961A1 Sonde für ein optisches Nahfeldmikroskop und Verfahren zu deren Herstellung Probe for an optical near-field microscope and processes for their preparation |