B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
11/2004
11/10/2004	EP1474866A2 Tunable bulk acoustic wave mems microresonator
11/10/2004	EP1474817A1 Microswitch with a micro-electromechanical system
11/10/2004	EP1474355A2 Micromechnical component and method for producing the same
11/10/2004	CN1545612A Sensor using electro active curved helix and double helix
11/09/2004	US6816301 Micro-electromechanical devices and methods of manufacture
11/09/2004	US6816295 MEMS variable optical attenuator
11/09/2004	US6815866 Cantilever having step-up structure and method for manufacturing the same
11/09/2004	US6815865 Switching arrangement for a radiation guide
11/09/2004	US6815782 Miniature electrostatic actuation device and installation comprising such devices
11/09/2004	US6815361 Method of fabricating anti-stiction micromachined structures
11/09/2004	US6815243 Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate
11/09/2004	US6814429 Ink jet printhead incorporating a backflow prevention mechanism
11/09/2004	US6813937 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
11/04/2004	WO2004094302A1 Micro-electro-mechanical systems (mems) device and system and method of producing the same
11/04/2004	WO2004094301A1 A micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
11/04/2004	WO2004094300A2 Mems actuators
11/04/2004	WO2004068502A3 Probe for an optical near field microscope with improved scattered light suppression and method for producing the same
11/04/2004	WO2004068501A3 Probe for an optical near field microscope and method for producing the same
11/04/2004	WO2004063089A3 Recessed microstructure device and fabrication method thereof
11/04/2004	US20040218877 Vertical displacement device
11/04/2004	US20040218341 Charge control of micro-electromechanical device
11/04/2004	US20040218293 Packaged micromirror array for a projection display
11/04/2004	US20040218154 Packaged micromirror array for a projection display
11/04/2004	US20040218149 Projection display
11/04/2004	US20040217919 Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
11/04/2004	US20040217388 A dual-wafer tunneling gyroscope and an assembly for making same
11/04/2004	US20040216989 MEMS switch having hexsil beam and method of integrating MEMS switch with a chip
11/04/2004	US20040216988 Multi-stable micro electromechanical switches and methods of fabricating same
11/04/2004	DE10006931B4 Mikrogyroskop mit drei entgegengesetzt zueinander schwingenden Massen Microgyroscope with three oppositely oscillating masses
11/04/2004	CA2805322A1 Temperature compensation for silicon mems resonator
11/04/2004	CA2523446A1 Mems actuators
11/04/2004	CA2522790A1 A micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
11/03/2004	EP1473691A2 Charge control of micro-electromechanical device
11/03/2004	EP1472546A2 Method of manufacturing an accelerometer
11/03/2004	CN1543431A Micro device
11/03/2004	CN1543048A Charge control of micro-electromechanical device
11/03/2004	CN1174417C Magnetic sensing of motion in microfabricated device
11/02/2004	US6813412 Mems element having perpendicular portion formed from substrate
11/02/2004	US6813059 Reduced formation of asperities in contact micro-structures
11/02/2004	US6813053 Apparatus and method for controlled cantilever motion through torsional beams and a counterweight
11/02/2004	US6812617 MEMS device having a flexure with integral electrostatic actuator
11/02/2004	US6812568 Electrode structure, and method for manufacturing thin-film structure
11/02/2004	US6812056 Technique for fabricating MEMS devices having diaphragms of “floating” regions of single crystal material
11/02/2004	US6812055 MEMS devices and methods of manufacture
11/02/2004	US6811714 Micromachined component and method of manufacture
11/02/2004	US6811612 Patterning of nanocrystalline diamond films for diamond microstructures useful in MEMS and other devices
10/2004
10/28/2004	WO2004093083A2 Methods and apparatus for selectively updating memory cell arrays
10/28/2004	WO2004078638A3 Micro-electromechanical inductive switch
10/28/2004	WO2004047190A3 Micro electro-mechanical system device with piezoelectric thin film actuator
10/28/2004	WO2004033364A3 Methods for forming coatings on mems devices
10/28/2004	WO2004000717A3 A micro-electromechanical variable capactitor
10/28/2004	US20040214367 Electromechanical memory array using nanotube ribbons and method for making same
10/28/2004	US20040214366 Electromechanical memory array using nanotube ribbons and method for making same
10/28/2004	US20040212907 Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
10/28/2004	US20040212028 Thin film membrane structure
10/28/2004	US20040211655 Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam
10/28/2004	US20040211654 Low voltage micro switch
10/28/2004	US20040211243 Embedded piezoelectric microcantilever sensors
10/28/2004	US20040211178 MEMS actuators
10/28/2004	DE10315963A1 Infrared absorbing layer deposition method for a micro-mechanical thermal sensor, e.g. a gas sensor, involves using inkjet printing technology to deposit infrared absorbing ink
10/27/2004	EP1471558A2 Low voltage micro switch
10/27/2004	CN1540700A Low voltage minisize switch
10/27/2004	CN1173398C Micro-relay
10/27/2004	CN1172799C Actuator control in micro electromechanical liquid injection device, its method and injection device
10/26/2004	US6809848 MEMS device
10/26/2004	US6809392 Micromachined device having electrically isolated components and a method for making the same
10/26/2004	US6809384 Method and apparatus for protecting wiring and integrated circuit device
10/26/2004	US6808956 Thin micromachined structures
10/26/2004	US6808953 Gap tuning for surface micromachined structures in an epitaxial reactor
10/26/2004	US6808952 Process for fabricating a microelectromechanical structure
10/26/2004	US6808745 Method of coating micro-electromechanical devices
10/26/2004	US6808640 Micromechanical part and method for its manufacture
10/26/2004	US6808325 Keyboard with an internal printer
10/26/2004	US6808275 Mirror assembly with elevator lifter
10/26/2004	US6807734 Microelectronic contact structures, and methods of making same
10/21/2004	WO2004090556A1 Silicon integrated acceleration sensor
10/21/2004	WO2004089814A2 Thermal actuator
10/21/2004	WO2004089812A1 Process for fabricating micromachine
10/21/2004	WO2004089811A2 Method for manufacturing an electro-mechanical component and an electro-mechanical component, such as a strained si fin-fet
10/21/2004	WO2004060792A3 Method of forming semiconductor devices through epitaxy
10/21/2004	US20040208788 Polymer micro-cantilevers and their methods of manufacture
10/21/2004	US20040207897 Method for fabricating an interference display unit
10/21/2004	US20040207287 Micro-actuator array, micro-actuator device, optical switch, and optical switch system
10/21/2004	US20040207063 Semiconductor component in a wafer assembly
10/21/2004	US20040207034 Capacitive dynamic quantity sensor
10/21/2004	US20040206408 Microfluidic switch for stopping a liquid flow during a time interval
10/21/2004	DE102004015237A1 Sensor mit Vorsprung und Verfahren zu dessen Herstellung Sensor with projection and process for its preparation
10/21/2004	DE102004014444A1 Halbleiteranordnung mit mehreren Substraten A semiconductor device having a plurality of substrates
10/21/2004	DE102004013218A1 Verfahren zum Vergrößern eines Hubs eines piezoelektrischen Sensors, und ein MEMS-Schalter, welcher das selbe nutzt A method for increasing a stroke of a piezoelectric sensor, and a MEMS switch which uses the same
10/21/2004	CA2807591A1 Microfluidic devices and methods of using same
10/21/2004	CA2807564A1 Microfluidic devices and methods of using same
10/20/2004	EP1469599A2 Air gap type FBAR, duplexer using the FBAR, and fabricating methods thereof
10/20/2004	EP1469491A2 Composite element and its application
10/20/2004	EP1468960A2 Tunable bimetallic microresonator formed on an isolated flexible beam
10/20/2004	EP1467948A1 A sensor
10/20/2004	EP1467946A1 "low power silicon thermal sensors and microfluidic devices based on the use of porous silicon sealed air cavity technology or microchannel technology"
10/20/2004	CN1538934A Method for fabrication of suspended porous silicon microstructures and application in gas sensors
10/19/2004	US6806993 Method for lubricating MEMS components
10/19/2004	US6806992 Micro mirror unit including mirror substrate and wiring substrate spaced by conductive spacer
10/19/2004	US6806788 Micromachine switch

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