B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
12/2004
12/09/2004	US20040246879 Recording/reproducing head and method of producing the same
12/09/2004	US20040246647 Monolithic integrated circuit arrangement
12/09/2004	US20040245889 Systems and methods for overcoming stiction
12/09/2004	US20040245588 MEMS device and method of forming MEMS device
12/09/2004	US20040245587 Micromachine and production method thereof
12/09/2004	US20040245217 Conductive etch stop for etching a sacrificial layer
12/09/2004	US20040244191 Method of fabrication of micro-devices
12/08/2004	EP1484281A1 MEMS device and method of forming MEMS device
12/08/2004	EP1483196A1 Deflectable microstructure and method of manufacturing the same through bonding of wafers
12/08/2004	EP0870319B1 A method for the manufacturing of micromachined structures
12/08/2004	CN1554119A Parallel, individually addressable probes for nanolithography
12/07/2004	US6829399 Rolling shutter optical switch device with dimples on shutter, annular rim at optical port and shortened shutter attachment edge
12/07/2004	US6829132 Charge control of micro-electromechanical device
12/07/2004	US6829131 MEMS digital-to-acoustic transducer with error cancellation
12/07/2004	US6828888 Micro relay of which movable contact remains separated from ground contact in non-operating state
12/07/2004	US6828887 Bistable microelectromechanical system based structures, systems and methods
12/07/2004	US6828171 Systems and methods for thermal isolation of a silicon structure
12/02/2004	WO2004105046A2 Scanning probe microscopy probe and method for scanning probe contact printing
12/02/2004	WO2004104228A1 Microfluidic protein crystallography
12/02/2004	WO2004083802A3 A cantilever array chemical sensor
12/02/2004	US20040240027 Structure of a structure release and a method for manufacturing the same
12/02/2004	US20040239456 Micro relay of which movable contact remains separated from ground contact in non-operating state
12/02/2004	US20040239455 Switch
12/02/2004	US20040237676 Sensor using electro active curved helix and double helix
12/01/2004	CN1551985A Microstructure with movable mass
12/01/2004	CN1551275A Method for enlarging stoke of piezoelectric sensor and MENS switch using said method
12/01/2004	CN1178272C Semiconductor device, microdrive, microwave and microrelay using the same and manufacture thereof
12/01/2004	CN1178083C Optical switch
11/2004
11/30/2004	US6825491 Integrated variable electrical capacitance device and method for producing said device
11/30/2004	US6823734 Electrostatic spring softening in redundant degree of freedom resonators
11/30/2004	US6823720 Method for chemical sensing using a microfabricated teeter-totter resonator
11/30/2004	US6823717 Hybrid microcantilever sensors
11/30/2004	CA2344487C Flexible, modular, compact fiber optic switch
11/25/2004	WO2004102796A1 Integrated resonators and time base incorporating said resonators
11/25/2004	WO2004102229A2 Micromirrors with off-angle electrodes and stops
11/25/2004	WO2004101427A1 Micro actuator, optical device, variable optical attenuator, and optical switch
11/25/2004	US20040235296 Control of stress in metal films by controlling the atmosphere during film deposition
11/25/2004	US20040234736 Control of stress in metal films by controlling the temperature during film deposition
11/25/2004	US20040233553 Form variable mirror element and method for producing form variable mirror element and form variable mirror unit and optical pick-up
11/25/2004	US20040233503 Transmissive spatial light modulator and method of manufacturing the same
11/25/2004	US20040233392 Projection TV with improved micromirror array
11/25/2004	US20040233251 Ink jet printhead chip with planar actuators
11/25/2004	US20040232504 Stress control of semiconductor microstructures for thin film growth
11/25/2004	US20040232502 High-aspect-ratio-microstructure (HARM)
11/25/2004	US20040232500 Sensor arrangement,in particular a micro-mechanical sensor arrangement
11/25/2004	US20040232110 Selective etching method
11/25/2004	US20040232106 Method of manufacturing a mirror and a mirror device
11/25/2004	US20040231422 Acceleration sensor and manufacturing method for the same
11/25/2004	US20040231420 Integrated monolithic tri-axial micromachined accelerometer
11/25/2004	DE10360915A1 Hochfrenquenz-Verriegelungsrelais mit Biegeschalterschiene Hochfrenquenz latching relay with bending switch rail
11/25/2004	DE10360914A1 Verriegelungsrelais mit Schalterschiene Latching relay with switch rail
11/25/2004	DE10359506A1 Hochfrequenz-Flüssigmetall-Verriegelungsrelaisarray High-frequency liquid metal latching relay array
11/25/2004	DE10318995A1 Etching permeable membranes made from semipermeable membranes by electrochemical etching of macro-pores on a plane side of a flat semiconductor
11/24/2004	EP1480263A1 Method of treating surface, semiconductor device, process for producing semiconductor device, and apparatus for treatment
11/24/2004	EP1479905A2 Shape memory thin film micro-actuator, and method for producing the same
11/24/2004	EP1479646A2 Electrode configuration for pivotable MEMS micromirror
11/24/2004	CN2658933Y Micro-electromechanical system switch with separated driving voltage passage and radio frequency signal
11/24/2004	CN1549443A Temperature compensation mechanism for a micromechanical ring resonator
11/23/2004	US6822933 High density data storage module
11/23/2004	US6820988 Bulk silicon mirrors with hinges underneath
11/23/2004	US6820495 Strain/electrical potential transducer
11/18/2004	WO2004099861A2 Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
11/18/2004	WO2004099629A2 Vertical displacement device
11/18/2004	US20040229440 Micro-actuator, variable optical attenuator provided with micro-actuator and method for manufacturing the same
11/18/2004	US20040228962 Scanning probe microscopy probe and method for scanning probe contact printing
11/18/2004	US20040228734 Valves and pumps for microfluidic systems and method for making microfluidic systems
11/18/2004	US20040228015 Micromirror unit with torsion connector having nonconstant width
11/18/2004	US20040227428 Electrostatic bimorph actuator
11/18/2004	US20040227427 Shape memory thin micro-actuator, and method for producing the same
11/18/2004	US20040227075 Scanning probe microscopy probe and method for scanning probe contact printing
11/18/2004	US20040226464 Scanning probe microscopy probe and method for scanning probe contact printing
11/18/2004	US20040226374 Capacitive acceleration sensor
11/18/2004	US20040226370 Electrostatic spring softening in redundant degree of freedom resonators
11/18/2004	US20040226369 Vertical MEMS gyroscope by horizontal driving and fabrication method thereof
11/18/2004	CA2524483A1 Radiation sensor, wafer, sensor module, and method for the production of a radiation sensor
11/17/2004	EP1476908A2 Low cost bending actuator with two-dimensional motion
11/17/2004	EP1476780A1 Folded longitudinal torsional hinge for gimbaled mems mirror hinge
11/17/2004	EP1476394A2 Thin film encapsulation of mems devices
11/17/2004	EP1476393A2 Microfluidic valve and system therefor
11/17/2004	EP1208403B1 Method of manufacture of a micromechanical optical switch
11/16/2004	US6819822 Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing
11/16/2004	US6819820 Use of applied force to improve MEMS switch performance
11/16/2004	US6818959 MEMS devices with voltage driven flexible elements
11/16/2004	US6818843 Microswitch with a micro-electromechanical system
11/16/2004	US6817725 Micro mirror unit and method of making the same
11/16/2004	US6817702 Tapered multi-layer thermal actuator and method of operating same
11/11/2004	WO2004097910A2 Multi-stable micro electromechanical switches and methods of fabricating same
11/11/2004	WO2004097355A1 Honeycomb- structured electromagnetic radiation thermal detector
11/11/2004	WO2004096696A1 Method of manufacturing a micro-mechanical element
11/11/2004	WO2004056698A3 Method for making a planar suspended microstructure, using a sacrificial layer of polymer material and resulting component
11/11/2004	WO2003050852A3 Complex microdevices and appparatus and methods for fabricating such devices
11/11/2004	US20040224523 Method of fabricating anti-stiction micromachined structures
11/11/2004	US20040223686 Movable MEMS-based noncontacting device
11/11/2004	US20040223240 Micromirror array
11/11/2004	US20040223088 Projection TV with improved micromirror array
11/11/2004	US20040222809 System for probing, testing, burn-in, repairing and programming of integrated circuits
11/11/2004	US20040221658 Movement actuator/sensor systems
11/11/2004	DE10314875A1 Temperature-resistant electronic sensor/actuator has element fixed in housing on stack of layers with different thermal expansion coefficient to stepwise adapt element coefficient to that of housing
11/11/2004	CA2524388A1 Multi-stable micro electromechanical switches and methods of fabricating same
11/10/2004	EP1475856A1 Micromachine vibration filter

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