| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 01/06/2005 | US20050001704 Electromagnetostrictive actuator |
| 01/06/2005 | US20050000932 Multi-metal layer MEMS structure and process for making the same |
| 01/06/2005 | US20050000816 Multilater; dielectric and electroconductive layers |
| 01/06/2005 | US20050000311 Actuator system |
| 01/05/2005 | EP1493712A2 Method of fabricating silicon-based MEMS devices |
| 01/05/2005 | EP1493711A1 Process for the obtainment of a semiconductor device comprising a suspended micro-system and corresponding device |
| 01/05/2005 | EP1244900B1 Grain growth of electrical interconnection for microelectromechanical systems (mems) |
| 01/05/2005 | EP0886781B1 Micromachined device with enhanced dimensional control |
| 01/05/2005 | CN1182920C Sensor for microfluid handling system |
| 01/04/2005 | US6838896 Method and system for probing, testing, burn-in, repairing and programming of integrated circuits in a closed environment using a single apparatus |
| 01/04/2005 | US6838385 Method for manufacturing electric capacitance type acceleration sensor |
| 01/04/2005 | US6838304 MEMS element manufacturing method |
| 12/30/2004 | US20040266050 Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor |
| 12/30/2004 | US20040266049 Micro device and process for producing it |
| 12/30/2004 | US20040265150 Magnetic membrane system |
| 12/30/2004 | US20040264878 Method of enlarging a travel of piezoelectric sensor and MEMS switch employing the same |
| 12/30/2004 | US20040263938 Optical scanner with curved mirror and method of manufacturing the same |
| 12/30/2004 | US20040263936 Optical deflection apparatus and manufacturing method thereof, optical deflection array, imaging apparatus, and image projection display apparatus |
| 12/30/2004 | US20040262257 Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void |
| 12/30/2004 | US20040261412 Thermal actuator |
| 12/30/2004 | DE10323559A1 Mikromechanische Vorrichtung, Drucksensor und Verfahren Micromechanical device, pressure sensor and method |
| 12/29/2004 | WO2004113990A1 Form variable mirror element, method for producing form variable mirror element, form variable mirror unit and optical pick-up |
| 12/29/2004 | WO2004087561A3 Novel sacrificial layers for use in fabrications of microelectromechanical devices |
| 12/29/2004 | WO2004006295A3 Spring loaded bi-stable mems switch |
| 12/29/2004 | EP1491950A1 Micro device and process for producing it |
| 12/29/2004 | EP1491871A1 Pressure sensor and method for fabricating the same |
| 12/29/2004 | EP1490887A2 Microscale sensor element and related device and method of manufacture |
| 12/29/2004 | EP1490721A2 Double-electret mems actuator |
| 12/29/2004 | EP1490294A1 Nanotube relay device |
| 12/28/2004 | US6836424 Hybrid circuit having nanotube electromechanical memory |
| 12/28/2004 | US6836029 Micro-electromechanical switch having a conductive compressible electrode |
| 12/28/2004 | US6835932 Thermal displacement element and radiation detector using the element |
| 12/28/2004 | US6835591 Methods of nanotube films and articles |
| 12/28/2004 | US6835588 Micro inertia sensor and method of manufacturing the same |
| 12/28/2004 | US6835587 Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same |
| 12/23/2004 | WO2004071941A3 Method for producing a micromechanical device and a micromechanical device |
| 12/23/2004 | WO2004063090A3 High displacement bistable micro actuator |
| 12/23/2004 | WO2004050546A3 System for sensorless control in a permanent magnet machine |
| 12/23/2004 | WO2004028956A3 Method and micromechanical component |
| 12/23/2004 | US20040259370 Vapor phase etching MEMS devices |
| 12/23/2004 | US20040259357 Surface treatment method, semiconductor device, method of fabricating semiconductor device, and treatment apparatus |
| 12/23/2004 | US20040259286 Micromechanical sensors and methods of manufacturing same |
| 12/23/2004 | US20040258350 Electrode configuration for piano MEMs micromirror |
| 12/23/2004 | US20040257171 Air-gap type FBAR, duplexer using the FBAR, and fabricating methods thereof |
| 12/23/2004 | US20040256689 Apparatus and method of forming a device layer |
| 12/23/2004 | US20040256684 Method for producing micromechanical structures and a micromechanical structure |
| 12/23/2004 | US20040255697 Force detector and acceleration detector and method of manufacturing the same |
| 12/23/2004 | US20040255675 Accelerometer with folded beams |
| 12/23/2004 | US20040255672 Coupled micromachined structure |
| 12/23/2004 | DE10324960A1 Kapazitiver Drucksensor A capacitive pressure sensor |
| 12/22/2004 | EP1489450A1 Optical device |
| 12/22/2004 | EP1489044A1 Micro actuator and optical switch using the actuator |
| 12/22/2004 | EP1488500A2 Method and apparatus for actuation of a two-axis mems device using three actuation elements |
| 12/22/2004 | EP1488271A1 A microelectromechanical systems device and method for fabricating same |
| 12/22/2004 | EP1488270A1 Micro light modulator arrangement |
| 12/22/2004 | EP1487960A2 Microfluidics apparatus and methods of use therefor |
| 12/22/2004 | EP1487738A2 Silicon carbide microelectromechanical devices with electronic circuitry |
| 12/22/2004 | EP1196788B1 Merged-mask micro-machining process |
| 12/22/2004 | CN1557016A Electromechanical memory array using nanotube ribbons and method for making same |
| 12/22/2004 | CN1556996A Nanotube films and articles |
| 12/22/2004 | CN1556756A 一种键盘 A keyboard |
| 12/21/2004 | US6833957 Tunable filter, manufacturing method thereof and optical switching device comprising the tunable filter |
| 12/21/2004 | US6833719 Apparatus for evaluating electrical characteristics |
| 12/21/2004 | US6833570 Structure comprising an insulated part in a solid substrate and method for producing same |
| 12/21/2004 | US6833112 High performance system for the parallel and selective dispensing of micro-droplets, and transportable cartridge and dispensing kit using said system |
| 12/21/2004 | US6833080 Optical switch with mobile components and method for making same |
| 12/21/2004 | US6832523 Micromechanical component and manufacturing method |
| 12/16/2004 | WO2004042785A3 Functional bimorph composite nanotapes and methods of fabrication |
| 12/16/2004 | WO2004013039A3 Low temperature plasma si or sige for mems applications |
| 12/16/2004 | US20040253760 Method to fabricate a highly perforated silicon diaphragm with controlable thickness and low stress |
| 12/16/2004 | US20040253123 Integrated electrostatic peristaltic pump method and apparatus |
| 12/16/2004 | US20040252936 Microsystem switches |
| 12/16/2004 | US20040252164 Microactuator and fluid transfer apparatus using the same |
| 12/16/2004 | US20040251794 Fibre-reinforced microactuator |
| 12/16/2004 | US20040251793 Micromachine and method of fabricating the same |
| 12/16/2004 | US20040251781 Tunable microresonator on an insulating beam deformable by the difference in thermal expansion coefficients |
| 12/16/2004 | US20040251439 Micro-actuator, fabrication method thereof, and micro-actuating valve |
| 12/16/2004 | US20040251229 Manufacturing method for membrane member |
| 12/16/2004 | DE10311487B3 Verbundelement und seine Verwendung Composite element and its use |
| 12/15/2004 | EP1486815A1 Mems device and its manufacturing method, optical modulator, glv device and its manufacturing method, and laser display |
| 12/15/2004 | EP1486682A2 Micro-actuator, fabrication method thereof and micro-actuating valve |
| 12/15/2004 | EP1485758A1 A method for fabricating a structure for a microelectromechanical systems (mems) device |
| 12/15/2004 | EP1485328A1 A method for integrating microparticles into mems |
| 12/15/2004 | CN1555339A Micro-actuator, micro-actuator device, optical switch and optical switch array |
| 12/14/2004 | US6832015 Switching apparatus |
| 12/14/2004 | US6831765 Tiltable-body apparatus, and method of fabricating the same |
| 12/14/2004 | US6831542 Micro-electromechanical inductive switch |
| 12/14/2004 | US6831531 Time base comprising an integrated micromechanical tuning fork resonator |
| 12/14/2004 | US6831394 Backing material for micromachined ultrasonic transducer devices |
| 12/14/2004 | US6831391 Microelectromechanical system for tilting a platform |
| 12/14/2004 | US6831390 Microelectromechanical system with stiff coupling |
| 12/14/2004 | US6830950 Integrated method for release and passivation of MEMS structures |
| 12/14/2004 | US6830944 Piezoelectric bimorphs as microelectromechanical building blocks and constructions made using same |
| 12/14/2004 | US6830395 User interface with integrated printing |
| 12/14/2004 | US6829937 Monolithic silicon acceleration sensor |
| 12/09/2004 | WO2004107014A1 Electromagnetic radiation detectors having a microelectromecanical shutter device |
| 12/09/2004 | WO2004106879A1 Capacitive pressure sensor |
| 12/09/2004 | US20040249285 Micro ultrasonic transducer building on flexible base substrate |
| 12/09/2004 | US20040247362 Keyboard |
| 12/09/2004 | US20040247237 Use of applied force to improve mems switch performance |