| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 02/03/2005 | US20050024429 Print assembly for a wide format pagewidth inkjet printer, having a plurality of printhead chips |
| 02/03/2005 | US20050023929 Micro-actuator and method making the same |
| 02/03/2005 | US20050023547 MEMS having a three-wafer structure |
| 02/03/2005 | US20050023144 Methods for electrochemically fabricating multi-layer structures including regions incorporating maskless, patterned, multiple layer thickness depositions of selected materials |
| 02/03/2005 | DE10002363B4 Verfahren zur Herstellung einer mikromechanischen Struktur A process for producing a micromechanical structure |
| 02/02/2005 | EP1502282A2 Micro electro-mechanical system method |
| 02/02/2005 | CN1575506A Method of fabricating micro-electromechanical switches on cmos compatible substrates |
| 02/02/2005 | CN1572719A MEMS device and method of forming MEMS device |
| 02/02/2005 | CN1572717A Micro-actuator, fabrication method thereof and micro-actuating valve |
| 02/02/2005 | CN1572716A Micromachine and method of fabricating the same |
| 02/02/2005 | CN1572715A Micromachine production method |
| 02/01/2005 | US6850349 Vibrator and manufacturing method thereof |
| 02/01/2005 | US6850133 Electrode configuration in a MEMS switch |
| 02/01/2005 | US6849912 Vertical transistor comprising a mobile gate and a method for the production thereof |
| 02/01/2005 | US6849170 With flexible hinge member connecting the microplatform to the support member allowing relative movement between them; improved mechanical strength, rigidity, low deformation, and high planarity. |
| 02/01/2005 | US6848780 Printing mechanism for a wide format pagewidth inkjet printer |
| 02/01/2005 | US6848320 Mechanical deformation amount sensor |
| 02/01/2005 | US6848175 Method of forming an out-of-plane structure |
| 01/27/2005 | US20050019974 Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same |
| 01/27/2005 | US20050018004 Print engine controller for high volume pagewidth printing |
| 01/27/2005 | US20050017276 Electronic device with thin film structure |
| 01/27/2005 | US20050016949 Method for producing cavities having optically transparent wall |
| 01/27/2005 | US20050016288 Micromechanical apparatus, pressure sensor, and method |
| 01/27/2005 | US20050016271 Microstructure with movable mass |
| 01/26/2005 | EP1499855A2 Passive temperature compensation technique for mems devices |
| 01/26/2005 | EP1499560A1 Device for protecting a chip and method for operating a chip |
| 01/26/2005 | EP1499500A1 Translation to rotation conversion in an inkjet printhead |
| 01/25/2005 | US6847756 Optical switching matrix and method of fabricating such a matrix |
| 01/25/2005 | US6847152 Microelectromechnical system for tilting a platform |
| 01/25/2005 | US6847114 Micro-scale interconnect device with internal heat spreader and method for fabricating same |
| 01/25/2005 | US6846691 Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby |
| 01/25/2005 | US6846088 Shock protectors for micro-mechanical systems |
| 01/25/2005 | US6845962 Thermally actuated microvalve device |
| 01/25/2005 | US6845669 Non-resonant four degrees-of-freedom micromachined gyroscope |
| 01/25/2005 | US6845668 Gyroscope |
| 01/22/2005 | CA2474099A1 Electrostatic comb drive actuator, and optical controller using the electrostatic comb drive actuator |
| 01/20/2005 | WO2004081741A3 Integrated microfluidic control employing programmable tactile actuators |
| 01/20/2005 | WO2004070776A3 Methods for transferring supercritical fluids in microelectronic and other industrial processes |
| 01/20/2005 | WO2004041998A3 Nanomechanichal energy, force, and mass sensors |
| 01/20/2005 | WO2004036952A3 Membrane and method for the production thereof |
| 01/20/2005 | WO2004018349A3 Microstructure comprising a surface which is functionalised through the localised deposit of a thin layer and production method thereof |
| 01/20/2005 | US20050014374 Gap tuning for surface micromachined structures in an epitaxial reactor |
| 01/20/2005 | US20050014317 Method for forming inductor in semiconductor device |
| 01/20/2005 | US20050014306 Micromachined electromechanical device |
| 01/20/2005 | US20050013580 Variable optical attenuator |
| 01/20/2005 | US20050013533 Micro mirror arrays and microstructures with solderable connection sites |
| 01/20/2005 | US20050013455 MEMS digital-to-acoustic transducer with error cancellation |
| 01/20/2005 | US20050012975 Al2O3 atomic layer deposition to enhance the deposition of hydrophobic or hydrophilic coatings on micro-electromechcanical devices |
| 01/20/2005 | US20050012165 Semiconductor device |
| 01/20/2005 | US20050012040 Method of fabrication of an infrared radiation detector and infrared detector device |
| 01/20/2005 | US20050011191 Unilateral thermal buckle beam actuator |
| 01/19/2005 | EP1498764A2 Micro mirror arrays and microstructures with solderable connection sites |
| 01/19/2005 | EP1498763A1 Variable optical attenuator |
| 01/19/2005 | EP1497485A1 Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles |
| 01/19/2005 | EP1165432A4 Thermal bend actuator and paddle structure for ink jet nozzle |
| 01/19/2005 | CN1568529A Snap action thermal switch |
| 01/19/2005 | CN1568436A Stress tuned blazed grating light valve |
| 01/19/2005 | CN1568420A Isolated resonator gyroscope |
| 01/19/2005 | CN1568284A Micromachine and production method thereof |
| 01/19/2005 | CN1567021A Micromirror array for projection tv |
| 01/19/2005 | CN1567020A Projection display and packaged micromirror array for the projection display |
| 01/19/2005 | CN1567019A Projection TV with improved micromirror array |
| 01/19/2005 | CN1567018A Micromirror with micromirror element arrays |
| 01/18/2005 | US6844960 Microelectromechanical device with continuously variable displacement |
| 01/18/2005 | US6844959 Spatial light modulators with light absorbing areas |
| 01/18/2005 | US6844657 Microelectromechanical system and method for producing displacement multiplication |
| 01/18/2005 | US6844214 Microelectromechanical system based sensors, sensor arrays, sensing systems, sensing methods and methods of fabrication |
| 01/18/2005 | US6843576 Continuously variable analog micro-mirror device |
| 01/18/2005 | US6843574 Gimbaled micromechanical rotation system |
| 01/13/2005 | WO2004065830A9 Integrated surface-machined micro flow controller method and apparatus |
| 01/13/2005 | WO2004056547A3 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure |
| 01/13/2005 | US20050009315 Method for manufacturing micro electro-mechanical systems using solder balls |
| 01/13/2005 | US20050007933 Wavelength-tunable optical filter |
| 01/13/2005 | US20050007557 Rear projection TV with improved micromirror array |
| 01/13/2005 | US20050007218 Micro-magnetic latching switch with relaxed permanent magnet alignment requirements |
| 01/13/2005 | US20050006612 Flow control valve and flow control valve apparatus using the same |
| 01/13/2005 | US20050006009 Active slender tubes and method of making the same |
| 01/13/2005 | US20050005676 Resonant sensor and sensing system |
| 01/12/2005 | EP1496269A2 Flow control valve and flow control valve apparatus using the same |
| 01/12/2005 | EP1495482A2 Complex microdevices and appparatus and methods for fabricating such devices |
| 01/12/2005 | EP1494869A1 Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead |
| 01/12/2005 | EP1494868A1 Pusher actuation in a printhead chip for an inkjet printhead |
| 01/12/2005 | EP1494866A1 Discrete air and nozzle chambers in a printhead chip for an inkjet printhead |
| 01/12/2005 | EP1494864A1 Wide format pagewidth inkjet printer |
| 01/12/2005 | EP1494863A1 A print assembly for a wide format pagewidth printer |
| 01/12/2005 | EP1494862A1 Processing of images for high volume pagewidth printing |
| 01/12/2005 | CN1565061A Anchors for micro-electro-mechanical systems (MEMS) devices |
| 01/12/2005 | CN1564780A Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor |
| 01/12/2005 | CN1564779A A microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in microelectromechanical system |
| 01/12/2005 | CN1184656C Multi-position power switch for microcomputer |
| 01/11/2005 | US6841840 Capacitive dynamic quantity sensor |
| 01/11/2005 | US6841838 Microelectromechanical tunneling gyroscope and an assembly for making a microelectromechanical tunneling gyroscope therefrom |
| 01/11/2005 | US6841079 Reaction product of silicon and fluorinated olefin |
| 01/11/2005 | US6840642 Thermally actuated micro mirror and electronic device |
| 01/11/2005 | US6839962 Method of producing micromechanical structures |
| 01/06/2005 | WO2005002307A1 Cooler for electronic equipment |
| 01/06/2005 | WO2005001859A2 Micromechanical apparatus and method of forming a micromechanical device layer |
| 01/06/2005 | US20050003566 Micromachine production method |
| 01/06/2005 | US20050002084 Micro-electro-mechanical systems torsional drive |
| 01/06/2005 | US20050001828 Charge control of micro-electromechanical device |