| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 03/10/2005 | US20050052496 Tapered multi-layer thermal actuator and method of operating same |
| 03/10/2005 | US20050052092 Micromechanical component and method for producing same |
| 03/10/2005 | US20050051841 Stress-controlled dielectric integrated circuit |
| 03/10/2005 | US20050050971 Overcoating wafer with silicon-germanium material; then buffer layer; then silicon-boron layer |
| 03/09/2005 | EP1513177A1 Switch |
| 03/09/2005 | EP1412087A4 Microfabricated two-pin liquid sample dispensing system |
| 03/09/2005 | CN1592942A 开关 Switch |
| 03/09/2005 | CN1592101A Temperature compensation mechanism for a micromechanical ring resonator |
| 03/09/2005 | CN1592069A 致动器 Actuator |
| 03/08/2005 | US6864767 Microelectromechanical micro-relay with liquid metal contacts |
| 03/08/2005 | US6864618 Method for operating a microelectromechanical system using a stiff coupling |
| 03/08/2005 | US6863832 Method for producing a torsion spring |
| 03/08/2005 | US6862934 Tuning fork gyroscope |
| 03/08/2005 | US6862925 Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever |
| 03/03/2005 | WO2005020482A2 Thermal-mechanical signal processing |
| 03/03/2005 | WO2005020434A2 Shell type actuator |
| 03/03/2005 | WO2005019793A2 Sensor platform using a horizontally oriented nanotube element |
| 03/03/2005 | WO2005019351A2 Methods for forming composite coatings on mems devices |
| 03/03/2005 | WO2005001859A3 Micromechanical apparatus and method of forming a micromechanical device layer |
| 03/03/2005 | WO2004102229A3 Micromirrors with off-angle electrodes and stops |
| 03/03/2005 | US20050048688 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 03/03/2005 | US20050047010 Thin film electromagnet and switching device comprising it |
| 03/03/2005 | US20050046980 Micro mirror unit and method of making the same |
| 03/03/2005 | US20050046921 Spatial light modulator using an integrated circuit actuator and method of making and using same |
| 03/03/2005 | US20050046918 Tiltable-body apparatus, and method of fabricating the same |
| 03/03/2005 | US20050046917 Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image |
| 03/03/2005 | US20050046311 Method of manufacturing ultrasound transducer device having acoustic backing |
| 03/03/2005 | US20050045920 Micromechanical structure, device including the structure, and methods of forming and using same |
| 03/03/2005 | US20050045276 Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants |
| 03/03/2005 | DE10392348T5 Optischer Schalter mit 3D-Wellenleitern Optical Switch with 3D waveguides |
| 03/03/2005 | DE102004033162A1 MEMS mit Drei-Wafer-Struktur MEMS with three-wafer structure |
| 03/03/2005 | CA2525810A1 Sensor platform using a horizontally oriented nanotube element |
| 03/02/2005 | EP1510864A2 Merged-mask micro-machining process |
| 03/02/2005 | EP1510848A1 Spatial light modulator using an integrated circuit actuator and method of making and using same |
| 03/02/2005 | EP1509939A1 Microelectromechanical rf switch |
| 03/02/2005 | EP1509802A2 Bulk silicon mirrors with hinges underneath |
| 03/02/2005 | EP1509399A1 High volume pagewidth printing |
| 03/02/2005 | EP1509324A1 Device for the actively-controlled and localised deposition of at least one biological solution |
| 03/02/2005 | EP1145417B1 Polymer microactuator array with macroscopic force and displacement |
| 03/01/2005 | US6862127 High performance micromirror arrays and methods of manufacturing the same |
| 03/01/2005 | US6861277 Method of forming MEMS device |
| 02/24/2005 | WO2005017975A2 Anchors for microelectromechanical systems having an soi substrate, and method of fabricating same |
| 02/24/2005 | WO2005017535A1 A three-axis accelerometer |
| 02/24/2005 | WO2004075204A3 Measuring system for the combined scanning and analysis of microtechnical components comprising electrical contacts |
| 02/24/2005 | US20050043628 Backing material for micromachined ultrasonic transducer devices |
| 02/24/2005 | US20050042792 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 02/24/2005 | US20050042791 Micromachined device having electrically isolated components and a method for making the same |
| 02/24/2005 | US20050042117 Optical interference display panel and manufacturing method thereof |
| 02/24/2005 | US20050041915 Charge screening in electrostatically driven devices |
| 02/24/2005 | US20050041909 Light intercepting device and optical switch apparatus |
| 02/24/2005 | US20050041278 Semiconductor device |
| 02/24/2005 | US20050041086 Pagewidth printer that includes a computer-connectable keyboard |
| 02/24/2005 | US20050040907 System and method for processing capacitive signals |
| 02/24/2005 | US20050040808 Microelectricalmechanical system with improved beam suspension |
| 02/24/2005 | US20050040486 Electrostatic RF MEMS switches |
| 02/24/2005 | US20050039530 Micromechanical sensor having a self-test function and optimization method |
| 02/23/2005 | EP1509068A1 Method of making a microstructure using a circuit board |
| 02/23/2005 | EP1508829A2 MEMS deformable mirror |
| 02/23/2005 | EP1508198A1 Method of producing a microsystem structure with lateral gaps and corresponding microsystem structure |
| 02/23/2005 | CN1583541A Microdriver with multilayer drivnig membrane structure and manufacturing method thereof |
| 02/22/2005 | US6859577 Self assembled micro anti-stiction structure |
| 02/22/2005 | US6859113 Temperature compensation mechanism for a micromechanical ring resonator |
| 02/22/2005 | US6858888 Stress control of semiconductor microstructures for thin film growth |
| 02/22/2005 | US6858810 Sensor with failure threshold |
| 02/22/2005 | US6858457 Method of manufacturing acceleration sensor |
| 02/22/2005 | US6857724 Print assembly for a wide format pagewidth printer |
| 02/17/2005 | WO2005015736A1 Electromechanical filter and electric circuit and electric apparatus employing it |
| 02/17/2005 | WO2004033364A8 Methods for forming coatings on mems devices |
| 02/17/2005 | US20050037531 Method for manufacturing micro-structural unit |
| 02/17/2005 | US20050037135 Coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures |
| 02/17/2005 | US20050035682 Micro-oscillation element and method for driving the same |
| 02/17/2005 | DE102004028716A1 Halbleitervorrichtung Semiconductor device |
| 02/16/2005 | CN2679833Y Contact switch and appts. provided with contact switch |
| 02/16/2005 | CN1580863A Micro oscillating element and its driving method |
| 02/16/2005 | CN1580834A Element with variable optical properties |
| 02/15/2005 | US6856447 Methods and apparatus for selectively updating memory cell arrays |
| 02/15/2005 | US6856219 Electrostatic actuator |
| 02/15/2005 | US6856217 Micromechanical resonator device and micromechanical device utilizing same |
| 02/15/2005 | US6856069 Systems and methods for overcoming stiction |
| 02/15/2005 | US6856068 Systems and methods for overcoming stiction |
| 02/15/2005 | US6854317 Embedded piezoelectric microcantilever sensors |
| 02/10/2005 | WO2005012160A2 Method for separating a useful layer and component obtained by said method |
| 02/10/2005 | US20050032266 Micro structure with interlock configuration |
| 02/10/2005 | US20050031288 Thermal actuator and an optical waveguide switch including the same |
| 02/10/2005 | US20050031253 Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same |
| 02/10/2005 | US20050031252 Thermal actuator and an optical waveguide switch including the same |
| 02/10/2005 | US20050030606 Vibrating mirror, optical scanner using vibrating mirror, and image reproducing and forming apparatus |
| 02/10/2005 | US20050030490 Projection display |
| 02/10/2005 | US20050030438 Variable optical-property element |
| 02/10/2005 | US20050029548 Charge control of micro-electromechanical device |
| 02/10/2005 | DE10392426T5 Halbleitervorrichtungs-Herstellungsverfahren und Beschleunigungssensor A semiconductor device manufacturing method and acceleration sensor |
| 02/10/2005 | DE10333995A1 Etching semiconductor material used in the production of a micromechanical acceleration sensor comprises etching defined structures having an etching profile in which the process parameters can be changed during etching |
| 02/09/2005 | EP1183516B1 Platform for chemical or biological analysis with microbalances, analysis device and method using same |
| 02/09/2005 | CN1576945A Wavelength-tunable optical filter |
| 02/09/2005 | CN1576923A Variable optical attenuator |
| 02/09/2005 | CN1576853A 半导体器件 Semiconductor devices |
| 02/09/2005 | CN1188916C Multi-layer piezoelectric device and manufacture thereof |
| 02/09/2005 | CN1188340C Electrostatic actuating microclamp holder |
| 02/08/2005 | US6852968 Surface-type optical apparatus |
| 02/03/2005 | US20050026321 Process for fabricating a semiconductor device having a suspended micro-system and resultant device |