| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 04/13/2005 | CN1197108C Electronic devices including micromechanical switches |
| 04/12/2005 | US6879016 Microcomponent having intra-layer electrical isolation with mechanical robustness |
| 04/12/2005 | US6878566 Method of reinforcing a mechanical microstructure |
| 04/12/2005 | US6877385 Contact type micro piezoresistive shear-stress sensor |
| 04/12/2005 | US6877316 Electro-thermal scratch drive actuator |
| 04/07/2005 | WO2005031299A2 Sensor platform using a non-horizontally oriented nanotube element |
| 04/07/2005 | WO2004072334A3 Nanofabric articles and methods of making the same |
| 04/07/2005 | WO2003102966A8 Method of forming atomic force microscope tips |
| 04/07/2005 | US20050074973 Method of fabricating a surface-type optical apparatus |
| 04/07/2005 | US20050074919 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 04/07/2005 | US20050074913 Stiction resistant release process |
| 04/07/2005 | US20050073536 Wide format pagewidth printer |
| 04/07/2005 | US20050073380 Dual position linear displacement micromechanism |
| 04/07/2005 | US20050073218 Curved electro-active actuators |
| 04/07/2005 | US20050072926 "Low power silicon thermal sensors and microfluidic devices based on the use of porous sealed air cavity technology or microchannel technology" |
| 04/07/2005 | US20050072681 Making multi-layer structures from a structural material (e.g. nickel) configured to define a desired structure and from a sacrificial material (e.g. copper) that surrounds the structure; sacrificial material is removed by multi-stage etching |
| 04/07/2005 | US20050072147 Micro-fluidic actuator |
| 04/07/2005 | CA2526946A1 Sensor platform using a non-horizontally oriented nanotube element |
| 04/06/2005 | EP1520446A1 An acoustically active element formed in a multi-layer circuit-board structure, a method for forming acoustically active element in a multi-layer circuit-board structure, and a multi-layer circuit-board structure |
| 04/06/2005 | EP1520321A1 Miniature rf and microwave components and methods for fabricating such components |
| 04/06/2005 | EP1520201A1 Method and apparatus for controlling deformable actuators |
| 04/06/2005 | EP1301346A4 Buckle resistant thermal bend actuators |
| 04/06/2005 | EP1194994B1 Assembly for the wireless supply of electric energy to a number of sensors and/or actuators, and sensor or actuator therefor |
| 04/06/2005 | CN1603225A Mems device and method of forming mems device |
| 04/05/2005 | US6876485 Micromirrors with asymmetric stopping mechanisms |
| 04/05/2005 | US6876482 MEMS device having contact and standoff bumps and related methods |
| 04/05/2005 | US6876133 Latching relay with switch bar |
| 04/05/2005 | US6876048 Micromechanical component as well as a method for producing a micromechanical component |
| 04/05/2005 | US6876047 MEMS device having a trilayered beam and related methods |
| 04/05/2005 | US6876046 Stiction alleviation using passivation layer patterning |
| 04/05/2005 | US6875936 Micromachine switch and its production method |
| 04/05/2005 | CA2294819C Thermal microvalves |
| 03/31/2005 | WO2005029555A2 Nanostructure augmentation of surfaces for enhanced thermal transfer |
| 03/31/2005 | WO2005028549A2 Nano-composite materials for thermal management applications |
| 03/31/2005 | WO2005028359A1 Process for fabricating a micro-electro-mechanical system with movable components |
| 03/31/2005 | US20050070119 Method to make a weight compensating/tuning layer on a substrate |
| 03/31/2005 | US20050069687 Apparatus and method for making a tensile diaphragm with a compressive region |
| 03/31/2005 | US20050069246 Micro-optic device and method of manufacturing same |
| 03/31/2005 | US20050068608 Selective isotropic etch for titanium-based materials |
| 03/31/2005 | US20050068371 Ink jet printhead incorporating a plurality of nozzle arrangement having backflow prevention mechanisms |
| 03/31/2005 | DE10303927B4 Sonde für ein optisches Nahfeldmikroskop mit verbesserter Streulichtunterdrückung und Verfahren zu deren Herstellung Probe for an optical near-field microscope having improved stray light rejection, and methods for their preparation |
| 03/31/2005 | DE102004037833A1 Micro-electro-mechanical system scanning mirror device for laser printer, has springs that connect beam structure which is supporting scanning mirror by several support attachment, to stationary support structure |
| 03/30/2005 | EP1519213A1 Bimorphically actuated, oscillating micromirror |
| 03/30/2005 | EP1518822A2 Complex microdevices and apparatus and methods for fabricating such devices |
| 03/30/2005 | EP1517794A1 Ink jet printhead chip with predetermined micro-electromechanical systems height |
| 03/30/2005 | EP1461816A4 Mems device having contact and standoff bumps and related methods |
| 03/30/2005 | EP1242826B1 Acceleration sensor with limited movability in the vertical direction |
| 03/29/2005 | US6873223 MEMS millimeter wave switches |
| 03/29/2005 | US6872902 MEMS device with integral packaging |
| 03/29/2005 | CA2272326C Miniature valve for filling the reservoir of an apparatus for the transdermal administration of medicine |
| 03/24/2005 | WO2005026817A1 Optical scanner device |
| 03/24/2005 | WO2004097910A3 Multi-stable micro electromechanical switches and methods of fabricating same |
| 03/24/2005 | WO2004083110A3 Sensor element with self-supporting bar structures made of group iii nitride based semiconductors |
| 03/24/2005 | WO2004018349B1 Microstructure comprising a surface which is functionalised through the localised deposit of a thin layer and production method thereof |
| 03/24/2005 | US20050065741 Sensor platform using a non-horizontally oriented nanotube element |
| 03/24/2005 | US20050063759 Printer and keyboard combination |
| 03/24/2005 | US20050063758 Combination keyboard and printer apparatus |
| 03/24/2005 | US20050063210 Hybrid circuit having nanotube electromechanical memory |
| 03/24/2005 | US20050063038 Oscillating micromirror with bimorph actuation |
| 03/24/2005 | US20050062138 Semiconductor structure with electrically isolated sidewall electrodes and method for fabricating the structure |
| 03/24/2005 | US20050062121 Sensor device having thin membrane and method of manufacturing the same |
| 03/24/2005 | US20050061770 MEMS digital-to-acoustic transducer with error cancellation |
| 03/24/2005 | DE19609114B4 Winkelgeschwindigkeitssensor Angular velocity sensor |
| 03/24/2005 | DE10303961B4 Sonde für ein optisches Nahfeldmikroskop und Verfahren zu deren Herstellung Probe for an optical near-field microscope and processes for their preparation |
| 03/23/2005 | EP1516167A1 Sensor and method for producing a sensor |
| 03/23/2005 | EP1515909A1 Component and method for producing the same |
| 03/23/2005 | EP1410433B1 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 03/23/2005 | CN1599939A Microstructures |
| 03/23/2005 | CN1599806A Support for microelectronic, microoptoelectronic or micromechanical devices |
| 03/23/2005 | CN1193926C 静电激励器 Electrostatic actuator |
| 03/22/2005 | US6870654 Structure of a structure release and a method for manufacturing the same |
| 03/22/2005 | US6869815 Electro-mechanical device having a charge dissipation layer and a method of manufacture therefor |
| 03/22/2005 | CA2304655C Thermal arched beam microelectromechanical structure |
| 03/17/2005 | WO2005023698A1 Micro-mechanical device comprising a suspended element which is connected to a support by means of a pier, and production method thereof |
| 03/17/2005 | US20050058856 For use as the expansive element in a thermoelastic design, micro-electomechanical system |
| 03/17/2005 | US20050058834 Nanotube films and articles |
| 03/17/2005 | US20050058491 Keyboard printer print media transport assembly |
| 03/17/2005 | US20050058490 Computer keyboard with integral printer |
| 03/17/2005 | US20050058489 Small footprint computer system |
| 03/17/2005 | US20050057885 Method of eliminating brownian noise in micromachined varactors |
| 03/17/2005 | US20050057752 Method of detecting attracting force between substrates, and near-field exposure method and apparatus |
| 03/16/2005 | EP1514123A1 Monolithic silicon acceleration sensor |
| 03/16/2005 | EP1514110A2 An apparatus and method for two-dimensional electron gas actuation and transduction for gaas nems |
| 03/16/2005 | EP1514096A2 Hybrid microcantilever sensors |
| 03/16/2005 | EP1513764A1 Fabrication of a reflective spatial light modulator |
| 03/16/2005 | EP1513763A2 Fluorochemical treatment for silicon articles |
| 03/16/2005 | EP1454349A4 Trilayered beam mems device and related methods |
| 03/16/2005 | EP1198695B1 Method for producing a torsion spring |
| 03/16/2005 | EP1108203B1 Micromechanical component protected against environmental influences |
| 03/16/2005 | CN1193407C Anti-adsorption method for drying crystal wafer using centrifugal force and apparatus thereof |
| 03/15/2005 | US6867443 Parallel, individually addressable probes for nanolithography |
| 03/15/2005 | US6867061 Method for producing surface micromechanical structures, and sensor |
| 03/15/2005 | US6866255 Sputtered spring films with low stress anisotropy |
| 03/15/2005 | US6865951 Semiconductor pressure sensor |
| 03/10/2005 | US20050054136 Fabrication of diaphragms and "floating" regions of single crystal semiconductor for MEMS devices |
| 03/10/2005 | US20050054128 Electro-mechanical device having a charge dissipation layer and a method of manufacture therefor |
| 03/10/2005 | US20050053525 detectors comprising patterned carbon nanotubes having electrical properties on support structures so that it may be exposed to fluids and control circuits; analysis apparatus |
| 03/10/2005 | US20050053504 Micropump check valve device and method of manufacturing the same |
| 03/10/2005 | US20050052723 Electrostatic comb drive actuator, and optical controller using the electrostatic comb drive actuator |
| 03/10/2005 | US20050052498 Tapered multi-layer thermal actuator and method of operating same |