| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 05/17/2005 | US6892579 Acceleration sensor |
| 05/17/2005 | US6892576 Reducing offset in accelerometers |
| 05/12/2005 | WO2005043573A2 A method of manufacturing an electronic device and electronic device |
| 05/12/2005 | WO2005043572A1 Radio-frequency microelectromechanical systems and a method of manufacturing such systems |
| 05/12/2005 | WO2005043174A1 Out-of-plane compensation suspension for an accelerometer |
| 05/12/2005 | WO2005042400A1 Electronic device |
| 05/12/2005 | US20050101139 System and method for producing a reduced substrate micro-electro-mechanical systems (MEMS) device |
| 05/12/2005 | US20050101112 Methods of nanotubes films and articles |
| 05/12/2005 | US20050100748 Ultra-hard low friction coating based on AlMgB14 for reduced wear of MEMS and other tribological components and system |
| 05/12/2005 | US20050100269 Micro actuator and optical switch using the actuator |
| 05/12/2005 | US20050099671 Optical deflector array |
| 05/12/2005 | US20050099252 RF-MEMS switch and its fabrication method |
| 05/12/2005 | US20050098840 Micromechanical structural element having a diaphragm and method for producing such a structural element |
| 05/11/2005 | EP1529301A2 Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation |
| 05/11/2005 | EP1529300A1 Electrode configuration in a mems switch |
| 05/11/2005 | EP1529297A1 Micromechanical switch |
| 05/11/2005 | EP1121619A4 Membrane-actuated charge controlled mirror |
| 05/11/2005 | CN1615537A Chemical reactor templates: sacrificial layer fabrication and template use |
| 05/11/2005 | CN1614458A Diffractive thin-film piezoelectric micromirror and method of producing the same |
| 05/10/2005 | US6891655 High energy, low energy density, radiation-resistant optics used with micro-electromechanical devices |
| 05/10/2005 | US6891650 Micromirror unit fabrication method and micromirror unit made by the same |
| 05/10/2005 | US6891454 Switch |
| 05/10/2005 | US6891387 System for probing, testing, burn-in, repairing and programming of integrated circuits |
| 05/10/2005 | US6891240 Electrode design and positioning for controlled movement of a moveable electrode and associated support structure |
| 05/10/2005 | US6889567 3D array integrated cells for the sampling and detection of air bound chemical and biological species |
| 05/10/2005 | CA2262684C Tunneling sensor with linear force rebalance |
| 05/10/2005 | CA2243347C Method and apparatus for using an array of grating light valves to produce multicolor optical images |
| 05/06/2005 | WO2005020434A3 Shell type actuator |
| 05/06/2005 | WO2004099861A3 Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
| 05/06/2005 | WO2004072335A3 Devices having vertically-disposed nanofabric articles and methods of making the same |
| 05/06/2005 | WO2003095709A3 Multistep release method for electrochemically fabricated structures |
| 05/05/2005 | US20050096878 Micro-electromechanical switch performance enhancement |
| 05/05/2005 | US20050094964 Tunable filter, manufacturing method thereof and optical switching device comprising the tunable filter |
| 05/05/2005 | US20050094931 Optical switch and production method therefor, information transmission device using it |
| 05/05/2005 | US20050094297 Optical tunable filter and method for manufacturing the optical tunable filter |
| 05/05/2005 | US20050094296 Light deflector |
| 05/05/2005 | US20050094243 Microelectromechanical device with continuously variable displacement |
| 05/05/2005 | US20050093793 Methods and apparatus for selectively updating memory cell arrays |
| 05/05/2005 | US20050092107 Out-of-plane compensation suspension for an accelerometer |
| 05/04/2005 | EP1528422A1 Light deflector |
| 05/04/2005 | EP1528038A1 Diffractive thin-film piezoelectric micromirror and method of producing the same |
| 05/04/2005 | EP1528037A1 Micromachine and production method therefor |
| 05/04/2005 | EP1527466A1 Microfabricated relay with multimorph actuator and electrostatic latch mechanism |
| 05/04/2005 | EP1527465A1 Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism |
| 05/04/2005 | CN1613180A Center-mass-reduced microbridge structures for ultra-high frequency MEM resonator |
| 05/04/2005 | CN1613154A MEMS device having contact and standoff bumps and related methods |
| 05/04/2005 | CN1613128A MEMS device having a trilayered beam and related methods |
| 05/03/2005 | US6888979 MEMS mirrors with precision clamping mechanism |
| 05/03/2005 | US6888658 Method and geometry for reducing drift in electrostatically actuated devices |
| 05/03/2005 | US6888656 Optical deflector |
| 05/03/2005 | US6887732 Microstructure devices, methods of forming a microstructure device and a method of forming a MEMS device |
| 05/03/2005 | US6887396 Micromirror unit and method of making the same |
| 05/03/2005 | US6887391 Fabrication and controlled release of structures using etch-stop trenches |
| 05/03/2005 | US6886395 Method of fabricating a surface probing device and probing device produced thereby |
| 04/28/2005 | WO2005038817A1 Bridge-shaped micro component comprising a bimetallic flexural element |
| 04/28/2005 | WO2004025726A3 Method for selectively covering a micro machined surface |
| 04/28/2005 | US20050088720 Frequency tunable resonant scanner |
| 04/28/2005 | US20050088715 Actuator |
| 04/28/2005 | US20050088383 Methods and apparatus for selectively updating memory cell arrays |
| 04/28/2005 | US20050088261 Method of making a micromechanical device |
| 04/28/2005 | US20050087024 Micromechanical flow sensor with tensile coating |
| 04/27/2005 | EP1526399A1 Frequency tunable resonant scanner |
| 04/27/2005 | CN1610644A Fabrication of a reflective spatial light modulator |
| 04/27/2005 | CN1609449A Method for driving pump |
| 04/27/2005 | CN1198756C Microstructure and method for production thereof |
| 04/26/2005 | US6885537 Capacitor apparatus of the capacity variable type |
| 04/26/2005 | US6884636 Method of fabrication of an infrared radiation detector and infrared detector device |
| 04/26/2005 | US6883215 Piezoelectric/electrostrictive device and method of manufacturing same |
| 04/26/2005 | CA2368129C Micromachined electrostatic actuator with air gap |
| 04/21/2005 | WO2005035436A2 Mems device annealing by laser |
| 04/21/2005 | US20050085000 Manufacturing methods of MEMS device |
| 04/21/2005 | US20050083158 System that includes an electrode configuration in a MEMS switch |
| 04/21/2005 | US20050082946 Actuator Device |
| 04/21/2005 | US20050082641 Flexible and elastic dielectric integrated circuit |
| 04/21/2005 | US20050082626 Membrane 3D IC fabrication |
| 04/21/2005 | US20050081632 Accelerometer |
| 04/21/2005 | US20050081631 Tuning fork gyroscope |
| 04/20/2005 | EP1524881A1 Microphone |
| 04/20/2005 | EP1524545A2 MEMS device and method of forming MEMS device |
| 04/20/2005 | EP1524544A1 Optical module, optical branch insert device, and optical transmission device |
| 04/20/2005 | CN1607648A A method to make a weight compensating/tuning layer on a substrate |
| 04/19/2005 | US6882461 Micro electro mechanical system display cell and method for fabricating thereof |
| 04/19/2005 | US6882264 Electrothermal self-latching MEMS switch and method |
| 04/19/2005 | US6882083 Miniature device with bossed suspension member |
| 04/19/2005 | US6880914 Inkjet pagewidth printer for high volume pagewidth printing |
| 04/19/2005 | US6880235 Method of forming a beam for a MEMS switch |
| 04/14/2005 | WO2005034344A1 A method to make a weight compensating/tuning layer on a substrate |
| 04/14/2005 | WO2004105046A3 Scanning probe microscopy probe and method for scanning probe contact printing |
| 04/14/2005 | WO2004074168A3 Packaged microchip with thermal stress relief |
| 04/14/2005 | US20050079711 Hollow tip array with nanometer size openings and formation thereof |
| 04/14/2005 | US20050079684 Method of manufacturing an accelerometer |
| 04/14/2005 | US20050079648 Method to change the profiles of released membranes |
| 04/14/2005 | US20050078931 Multi-channel variable optical attenuator and fabrication method thereof |
| 04/14/2005 | US20050077633 Anodic bonding structure, fabricating method thereof, and method of manufacturing optical scanner using the same |
| 04/14/2005 | US20050076719 Capacitive sensor |
| 04/13/2005 | EP1522521A1 Capacitive sensor |
| 04/13/2005 | EP1444864B1 Micro-mechanical sensors and method for production thereof |
| 04/13/2005 | CN1605870A Acceleration sensor and manufacturing method for the same |
| 04/13/2005 | CN1605560A Capacitive sensor |
| 04/13/2005 | CN1197170C Semiconductor structure and its producing method |