| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
|---|
| 06/08/2005 | CN1625474A Discrete air and nozzle chambers in a printhead chip for an inkjet printhead |
| 06/08/2005 | CN1625473A Wide format pagewidth inkjet printer |
| 06/08/2005 | CN1625472A A print assembly for a wide format pagewidth printer |
| 06/08/2005 | CN1625471A Processing of images for high volume pagewidth printing |
| 06/08/2005 | CN1625046A Micromechanical electrostatic resonator |
| 06/08/2005 | CN1624500A Optical tunable filter and method of manufacturing the same |
| 06/08/2005 | CN1205112C Improved thermal bend actuator |
| 06/07/2005 | US6904191 MXN cantilever beam optical waveguide switch |
| 06/07/2005 | US6903637 Connecting member, a micro-switch, a method for manufacturing a connecting member, and a method for manufacturing a micro-switch |
| 06/07/2005 | US6902984 Methods of forming void regions, dielectric regions and capacitor constructions |
| 06/07/2005 | US6902947 Integrated method for release and passivation of MEMS structures |
| 06/07/2005 | US6901804 Method of manufacturing a membrane sensor |
| 06/02/2005 | WO2005050839A1 Electromechanical filter |
| 06/02/2005 | WO2005050666A2 An oscillating probe with a virtual probe tip |
| 06/02/2005 | WO2005049884A2 Method for depositing silicon carbide and ceramic films |
| 06/02/2005 | US20050118832 Removal of MEMS sacrificial layers using supercritical fluid/chemical formulations |
| 06/02/2005 | US20050118813 Removal of MEMS sacrificial layers using supercritical fluid/chemical formulations |
| 06/02/2005 | US20050118742 Method for reducing the adhesive properties of MEMS and anti-adhesion-coated device |
| 06/02/2005 | US20050118733 Production of microscopic and nanoscopic coils, transformers and capacitors by rolling or folding over conductive layers during the removal of auxiliary layers from a substrate |
| 06/02/2005 | US20050118074 Methods and devices for storing and dispensing liquids |
| 06/02/2005 | US20050117235 Micro mirror and method for fabricating the same |
| 06/02/2005 | US20050117196 Spatial light modulator, spatial light modulator array, and exposure apparatus |
| 06/02/2005 | DE102004006156A1 Embossing process for preparation of a microcapacity ultrasonic transducer by provision of a substrate having electrical conductivity useful in applications involving the piezoelectric effect |
| 06/02/2005 | DE10063991B4 Verfahren zur Herstellung von mikromechanischen Bauelementen A process for preparing micromechanical components |
| 06/02/2005 | CA2546081A1 Method for depositing silicon carbide and ceramic films |
| 06/01/2005 | EP1536267A1 Two-dimensional optical deflector |
| 06/01/2005 | EP1536227A2 Quantitative biopolymer detecting system using monolithic piezoelectric cantilever by resonant frequency shift, method for fabricating the same system and method for detecting biopolymer quantitatively using the same system |
| 06/01/2005 | EP1535665A1 Integrated chemical microreactor with separated channels for confining liquids inside the channels and manufacturing process thereof |
| 06/01/2005 | EP1535297A1 Diaphragm activated micro-electromechanical switch |
| 06/01/2005 | EP1534624A1 Microchip with thermal stress relief means |
| 06/01/2005 | EP1534433A1 Valve assembly for microfluidic devices, and method for opening and closing same |
| 06/01/2005 | CN1623240A Curved electro-active actuators |
| 06/01/2005 | CN1623122A Method for fabricating a structure for a microelectromechanical system (MEMS) device |
| 06/01/2005 | CN1623111A Micro light modulator arrangement |
| 05/31/2005 | US6901204 Microelectromechanical system (MEMS) variable optical attenuator |
| 05/31/2005 | US6900925 Optical deflector and method of producing same |
| 05/31/2005 | US6900578 High frequency latching relay with bending switch bar |
| 05/31/2005 | US6900510 MEMS devices and methods for inhibiting errant motion of MEMS components |
| 05/31/2005 | US6900072 Method for making a micromechanical device by using a sacrificial substrate |
| 05/31/2005 | US6900071 Substrate and method for producing the same, and thin film structure |
| 05/31/2005 | US6899137 Microfabricated elastomeric valve and pump systems |
| 05/26/2005 | WO2005047954A1 Mems structure with raised electrodes |
| 05/26/2005 | US20050112882 Microfabricated elastomeric valve and pump systems |
| 05/26/2005 | US20050112791 Method and apparatus for fabricating commercially feasible and structurally robust nanotube-based nanomechanical devices |
| 05/26/2005 | US20050112621 Quantitative biopolymer detecting system using monolithic piezoelectric cantilever by resonant frequency shift, method for fabricating the same system and method for detecting biopolymer quantitatively using the same system |
| 05/26/2005 | US20050111787 Two-dimensional optical deflector |
| 05/26/2005 | US20050110842 Printhead chip that incorporates micro-mechanical translating mechanisms |
| 05/26/2005 | US20050110838 Printhead chip that incorporates pivotal micro-mechanical ink ejecting mechanisms |
| 05/26/2005 | US20050110110 Integrated released beam layer structure fabricated in trenches and manufacturing method thereof |
| 05/26/2005 | US20050110051 Surface processing method for a chip device and a chip device formed by he method |
| 05/26/2005 | CA2535634A1 Nanotube-based switching elements with multiple controls and circuits made from same |
| 05/25/2005 | EP1532658A1 Conductive etch stop for etching a sacrificial layer |
| 05/25/2005 | EP1532637A2 Method of forming atomic force microscope tips |
| 05/25/2005 | EP1532069A1 Thermal movement sensor |
| 05/25/2005 | EP1531731A1 Embedded piezoelectric microcantilever sensors |
| 05/25/2005 | EP1386347A4 Microelectromechanical system (mens) device |
| 05/25/2005 | EP1230574A4 A deflectable spatial light modulator having superimposed hinge and deflectable element |
| 05/25/2005 | DE10348335A1 Brückenförmiges Mikrobauteil mit einem bimetallischen Biegeelement Bridge type micro-component with bimetallic bending element |
| 05/25/2005 | CN1620722A Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 05/25/2005 | CN1620626A Optical switch and production method therefor, information transmission device using |
| 05/25/2005 | CN1620618A Mems可重新配置的光学光栅 Mems reconfigurable optical grating |
| 05/25/2005 | CN1620402A Low power silicon thermal sersors and microfluidic devices based on the use of porus silicon sealed air cavity technology or microchannel technology |
| 05/25/2005 | CN1619351A Micro-optic device and method of manufacturing same |
| 05/25/2005 | CN1618724A Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof |
| 05/25/2005 | CN1618722A Mems having a three-wafer structure |
| 05/25/2005 | CN1618612A Liquid injector with micro-mechanoelectric device |
| 05/25/2005 | CN1202984C Micro bridge resonator temp ecompensation structure |
| 05/24/2005 | US6897551 Support for microelectronic, microoptoelectronic or micromechanical devices |
| 05/24/2005 | US6897539 Method for directing an optical beam and a method for manufacturing an apparatus for directing an optical beam |
| 05/24/2005 | US6897538 Micro-machined electromechanical system (MEMS) accelerometer device having arcuately shaped flexures |
| 05/24/2005 | US6897537 Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods |
| 05/24/2005 | US6897083 Micro-electromechanical actuator and methods of use and fabrication |
| 05/24/2005 | US6896850 For measurement of biological materials from biological fluids; diabetes monitoring |
| 05/24/2005 | US6896238 Extended range diaphragm valve and method for making same |
| 05/19/2005 | WO2005046051A1 Micro-resonator and communication apparatus |
| 05/19/2005 | WO2005045505A1 High performance micromirror arrays and methods of manufacture the same |
| 05/19/2005 | WO2005044721A1 Mems devices with unreleased thin film components |
| 05/19/2005 | WO2005044720A1 Layout measures for limiting the propagation of surface cracks in mems |
| 05/19/2005 | WO2005017975A3 Anchors for microelectromechanical systems having an soi substrate, and method of fabricating same |
| 05/19/2005 | WO2004089814A3 Thermal actuator |
| 05/19/2005 | US20050106892 Etching method |
| 05/19/2005 | US20050106774 Surface processes in fabrications of microstructures |
| 05/19/2005 | US20050106772 MEMS device and method of forming MEMS device |
| 05/19/2005 | US20050106320 Silicon carbide and other films and method of deposition |
| 05/19/2005 | US20050105157 Diffractive thin-film piezoelectric micromirror and method of producing the same |
| 05/19/2005 | US20050104694 Low-voltage and low-power toggle type-SPDT RF MEMS switch actuated by combination of electromagnetic and electrostatic forces |
| 05/19/2005 | US20050104144 Method and apparatus to reduce parasitic forces in electro-mechanical systems |
| 05/19/2005 | US20050103097 Sensor |
| 05/19/2005 | DE20122373U1 Projection system for projecting a colored picture has micro-mirrors in a structure for reflecting light and electrodes to cause deflection in a micro-mirror plate |
| 05/19/2005 | DE20122372U1 Chip for a system to project colored pictures separates from a wafer with a section of micro-mirrors set out in a two-dimensional structure |
| 05/19/2005 | DE20122371U1 Projection display device for projecting a colored picture has micro-mirrors in a structure for reflecting light and electrodes to cause deflection in a micro-mirror plate |
| 05/19/2005 | DE20122370U1 Bundled micro-mirror field for a projection display device projects a colored picture with micro-mirrors in a structure for reflecting light and electrodes to cause deflection in a micro-mirror plate |
| 05/18/2005 | EP1531145A2 Etching method |
| 05/18/2005 | CN1616341A Etching method |
| 05/18/2005 | CN1616340A Micromachined electromechanical device |
| 05/17/2005 | US6895161 Variable optical attenuator |
| 05/17/2005 | US6894819 Micromirror actuator and method of manufacturing the same |
| 05/17/2005 | US6894576 Temperature compensation mechanism for a micromechanical ring resonator |
| 05/17/2005 | US6894383 Bulk acoustic resonance or radio frequency filter; bonding to membrane then support structure |
| 05/17/2005 | US6892582 Semiconductor pressure sensor and pressure sensing device |