Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
06/2005
06/30/2005DE10355395A1 Manufacturing method of microstructured component, e.g. pressure sensor, rotary plate sensor, or mass flow sensor with underetched structure etc., with at least following process steps
06/29/2005EP1548939A2 Duplexer and method of fabrication
06/29/2005EP1548855A2 System and method for moving an object employing piezo actuators
06/29/2005EP1548487A1 Micro-actuators with dielectrophoretic micro- emulsions
06/29/2005EP1547969A2 Integrated released beam layer structure fabricated in trenches and manufacturing method thereof
06/29/2005EP1547968A2 Process for producing a movable structure and etchant for silicon oxide film
06/29/2005EP1546777A1 Variable optical attenuator
06/29/2005EP1546029A1 Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device
06/29/2005EP1546028A2 Method for selectively covering a micro machined surface
06/29/2005EP1546027A2 Method and micromechanical component
06/29/2005EP1451584A4 High surface area substrates for microarrays and methods to make same
06/29/2005CN1633719A Low cost actuator with 2 dimensional motion
06/29/2005CN1633616A A microelectromechanical systems device and method for fabricating same
06/29/2005CN1208235C 微型机械结构 Micromechanical structures
06/28/2005US6912090 Adjustable compound microlens apparatus with MEMS controller
06/28/2005US6912082 Integrated driver electronics for MEMS device using high voltage thin film transistors
06/28/2005US6912078 Electrostatically actuated micro-electro-mechanical devices and method of manufacture
06/28/2005US6911891 Bistable actuation techniques, mechanisms, and applications
06/28/2005US6911682 Electromechanical three-trace junction devices
06/28/2005US6910379 Out-of-plane compensation suspension for an accelerometer
06/28/2005CA2366527C Electrostatically actuated micro-electro-mechanical system (mems) device
06/23/2005WO2005057772A1 Actuator element and production method therefor
06/23/2005WO2005044721A8 Mems devices with unreleased thin film components
06/23/2005WO2005020482A3 Thermal-mechanical signal processing
06/23/2005US20050136621 Method for reducing harmonic distortion in comb drive devices
06/23/2005US20050136565 Fabrication of movable micromechanical components employing low-cost, high-resolution replication technology method
06/23/2005US20050136548 Apparatus for detection and analysis of nucleic acids in blood; gene expression analysis; discriminating between the components of mixtures comprising, toxins, bacteria and food
06/23/2005US20050134951 Micro-oscillating element provided with torsion bar
06/23/2005US20050134401 Duplexer fabricated with monolithic FBAR and isolation part and a method thereof
06/23/2005US20050133880 Electrical through-plating of semiconductor chips
06/23/2005US20050133698 Optical apparatus and image production apparatus
06/23/2005US20050132814 Semiconductor pressure sensor and pressure sensing device
06/23/2005US20050132798 Method for gyroscope using SMS wafer and gyroscope fabricated by the same
06/23/2005DE10350536B3 Method for reducing effect of substrate potential on output signal of micromechanical sensor e.g. capacitive acceleration sensor, using application of opposite voltages to capacitor outer electrodes during compensation clock
06/22/2005EP1544165A2 Method for gyroscope using SMS wafer and gyroscope fabricated by the same
06/22/2005EP1544163A2 Method for producing semiconductor device and a semiconductor device, more especially a membrane sensor
06/22/2005EP1544162A1 Micromachine and method of manufacturing the micromachine
06/22/2005EP1544161A1 Three-dimensional structure element and method of manufacturing the element, optical switch, and micro device
06/22/2005EP1375916B1 Micro pump
06/22/2005EP1346241B1 Mems reconfigurable optical grating
06/22/2005CN1630923A Microswitch with a micro-electromechanical system
06/22/2005CN1207744C Bistable electromagnetic microdriver and mfg. method thereof
06/22/2005CN1207593C Micro-mirror surface unit containing mirror surface base plate and wiring substrate isolated with conductive lining
06/21/2005US6908793 Method for fabricating a semiconductor device
06/21/2005US6908781 Method and apparatus for protecting wiring and integrated circuit device
06/21/2005US6908201 Micro-support structures
06/16/2005WO2005054117A1 Micromechanical component and method for producing the same
06/16/2005US20050130551 Microstructures
06/16/2005US20050130351 Methods for maskless lithography
06/16/2005US20050129353 Optical deflector
06/16/2005US20050129352 Optical path control device
06/16/2005US20050128609 Optical deflector
06/16/2005US20050128552 Torsional vibrator, optical deflector and image forming apparatus
06/16/2005US20050127786 System and method for moving an object employing piezo actuators
06/16/2005US20050127588 Microtechnically produced swiveling platform with magnetic drive and stop positions
06/16/2005DE102004028538A1 Verfahren zur Reduzierung der adhäsiven Eigenschaften von MEMS und antihaftbeschichtete Vorrichtung Method for reducing the adhesive properties of MEMS and non-stick coated apparatus
06/15/2005EP1542059A1 Micro rocking device having tosion bar
06/15/2005EP1542058A1 Diffraction grating-optical modulation apparatus with an improved heat stability
06/15/2005EP1540738A2 Controlling electromechanical behavior of structures within a microelectromechanical systems device
06/15/2005EP1540677A2 Resonant sensor and sensing system
06/15/2005EP1540661A1 Sensor with cantilever and optical resonator
06/15/2005EP1540405A1 A method and device for modulating a light beam and having an improved gamma response
06/15/2005EP1540404A1 Micro-support structures
06/15/2005EP1540355A2 Reducing offset in accelerometers
06/15/2005EP1407498B1 Actuator system
06/15/2005CN1628032A Ink jet printhead chip with predetermined micro-electromechanical systems height
06/15/2005CN1627178A Optical appts. and image generator
06/15/2005CN1206156C Bandpass filter of packaged microelectronic machinery system with integrated circuit and its manufacturing method
06/14/2005US6907153 Rolling shutter optical switch device with latch electrode and slits in shutter
06/14/2005US6906850 Capacitively coupled micromirror
06/14/2005US6906849 Micro-mirror element
06/14/2005US6906847 Spatial light modulators with light blocking/absorbing areas
06/14/2005US6906845 Micro-mechanical device having anti-stiction layer and method of manufacturing the device
06/14/2005US6906394 Method of manufacturing semiconductor device capable of sensing dynamic quantity
06/14/2005US6906392 Micromechanical component
06/14/2005US6905657 Apparatus for the distribution of liquid samples
06/14/2005US6905615 Method of manufacturing a micromechanical component
06/14/2005US6905613 Use of an organic dielectric as a sacrificial layer
06/14/2005US6905555 Methods for transferring supercritical fluids in microelectronic and other industrial processes
06/09/2005WO2005052371A1 Cooling device for an integrated circuit
06/09/2005WO2005012160A3 Method for separating a useful layer and component obtained by said method
06/09/2005WO2004093083A3 Methods and apparatus for selectively updating memory cell arrays
06/09/2005WO2004032210A3 Monolithic structures including alignment and/or retention fixtures for accepting components
06/09/2005US20050124159 Deflectable microstructure and method of manufacturing the same through bonding of wafers
06/09/2005US20050122604 Optical deflector
06/09/2005US20050122602 Optical deflector
06/09/2005US20050122191 Optical tunable filter and method of manufacturing the same
06/09/2005US20050122001 Microelectromechanical apparatus and methods for surface acoustic wave switching
06/09/2005US20050121090 Thermally actuated microvalve device
06/09/2005DE10352001A1 Mikromechanisches Bauelement mit einer Membran und Verfahren zur Herstellung eines solchen Bauelements Micromechanical component with a membrane and method for producing such a component
06/08/2005EP1538747A1 Micromechanical electrostatic resonator
06/08/2005EP1538476A1 Micro mirror
06/08/2005EP1538475A1 Optical deflector
06/08/2005EP1538474A1 Optical deflector
06/08/2005EP1538473A1 Optical deflector array
06/08/2005EP1537590A2 Micro-electromechanical switch performance enhancement
06/08/2005CN1625481A High volume pagewidth printing
06/08/2005CN1625480A Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead
06/08/2005CN1625478A Translation to rotation conversion in an inkjet printhead
06/08/2005CN1625476A Pusher actuation in a printhead chip for an inkjet printhead
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