| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 07/27/2005 | CN1212637C Microelectromechanical relay and method for production thereof |
| 07/26/2005 | US6922272 Method and apparatus for leveling thermal stress variations in multi-layer MEMS devices |
| 07/26/2005 | US6922270 Multi-step landing micro-mirror, method for manufacturing the same and multi-step landing micro-mirror array |
| 07/26/2005 | US6921952 Torsion spring for MEMS structure |
| 07/26/2005 | US6921221 Combination keyboard and printer apparatus |
| 07/26/2005 | US6920788 Acceleration sensor |
| 07/21/2005 | WO2005031299A8 Sensor platform using a non-horizontally oriented nanotube element |
| 07/21/2005 | US20050159002 Sputtered spring films with low stress anisotropy |
| 07/21/2005 | US20050158914 Process for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 07/21/2005 | US20050158213 Provided with a sample treating portion in a microchip; microfluid system capable of expanding the application range of samples for treatment, decreasing the amount of samples used, and preventing deterioration of samples with the lapse of time |
| 07/21/2005 | US20050158188 Micropump check valve and method of manufacturing the same |
| 07/21/2005 | US20050157365 Micro light modulator arrangement |
| 07/21/2005 | US20050157066 Inkjet print assembly for high volume pagewidth printing |
| 07/21/2005 | US20050156482 Method for supplying multiple voltages to a movable part of a MEMS device |
| 07/21/2005 | US20050156302 System for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 07/21/2005 | US20050156265 Lithography device for semiconductor circuit pattern generation |
| 07/21/2005 | US20050156129 Proportional micromechanical valve |
| 07/21/2005 | DE10302518B4 Verfahren zur bereichsweisen Erzeugung einer Mikrostruktur auf einem Grundkörper Method for field-wise forming a microstructure on a base body |
| 07/21/2005 | DE102004036035A1 Verfahren zur Herstellung eines Halbleiterbauelements sowie ein Halbleiterbauelement, insbesondere ein Membransensor A process for producing a semiconductor device and a semiconductor device, in particular a membrane sensor |
| 07/21/2005 | DE102004036032A1 Fabrication of semiconductor component, e.g. micro-mechanical diaphragm sensor, by forming second region of second doping above first region of first doping, dissolving semiconductor material in first region, and depositing sealing layer |
| 07/20/2005 | EP1555066A2 Microfluid system |
| 07/20/2005 | EP1554626A1 A device having a light-absorbing mask and a method for fabricating same |
| 07/20/2005 | EP1554218A2 Micromechanical component and corresponding production method |
| 07/20/2005 | EP1463899A4 Proportional micromechanical valve |
| 07/20/2005 | EP0939973B1 Process for manufacturing micromechanical functional elements |
| 07/20/2005 | CN1643701A Semiconductor device manufacturing method and accelerator sensor |
| 07/20/2005 | CN1643659A Surface treatment method, semiconductor device, method of fabricating semiconductor device, and treatment apparatus |
| 07/20/2005 | CN1643433A 光学装置 Optical device |
| 07/20/2005 | CN1643429A Folded longitudinal torsional hinge for gimbaled MEMS mirror hinge |
| 07/20/2005 | CN1643385A Device used for multiple experimental tests on solid materials and a flow control system |
| 07/20/2005 | CN1643358A Pressure sensor and method for fabricating the same |
| 07/20/2005 | CN1642849A Micro actuator and optical switch using the actuator |
| 07/20/2005 | CN1641398A Micro-mirror device with dielectrophoretic micro- emulsions |
| 07/20/2005 | CN1211275C Micro-piezoelectric driver for MEMS |
| 07/20/2005 | CN1211274C Microelectric mechanical system with monoarmature |
| 07/19/2005 | US6919983 Microelectromechanical device with continuously variable displacement |
| 07/19/2005 | US6919980 Mirror rocking member for optical deflector |
| 07/19/2005 | US6919592 Electromechanical memory array using nanotube ribbons and method for making same |
| 07/19/2005 | US6918707 Keyboard printer print media transport assembly |
| 07/19/2005 | CA2344737C Encapsulated mems band-pass filter for integrated circuits and method of fabrication thereof |
| 07/14/2005 | WO2005064780A1 Method for producing comb drive devices using etch buffers |
| 07/14/2005 | WO2005063613A1 Micro-oscillating member, light-deflector, and image-forming apparatus |
| 07/14/2005 | WO2005043573A3 A method of manufacturing an electronic device and electronic device |
| 07/14/2005 | US20050155048 Method and apparatus for detecting an electronic product being placed vertically of horizontally |
| 07/14/2005 | US20050152639 Optical switch and fabrication method thereof |
| 07/14/2005 | US20050152017 Micro-mirror device including dielectrophoretic microemulsion |
| 07/14/2005 | US20050151446 System and method for moving an object employing piezo actuators |
| 07/14/2005 | US20050151442 Micromechanical electrostatic resonator |
| 07/14/2005 | US20050151385 Self-cleaning adhesive structure and methods |
| 07/14/2005 | CA2562682A1 Method for producing comb drive devices using etch buffers |
| 07/13/2005 | EP1553048A1 Nanometric mechanical oscillator |
| 07/13/2005 | EP1553047A1 Nanometric mechanical oscillator |
| 07/13/2005 | EP1552721A2 Micromachined ultrasonic transducers and method of fabrication |
| 07/13/2005 | EP1552610A1 Microelectromechanical apparatus and methods for surface acoustic wave switching |
| 07/13/2005 | EP1552264A2 Fibre optic based semiconductor micro sensors for sensing pressure or temperature, fabrication methods of said sensors, and a method of securing an optical fibre to a silicon block |
| 07/13/2005 | EP1551754A2 Microstructure comprising a surface which is functionalised through the localised deposit of a thin layer and production method thereof |
| 07/13/2005 | EP1551554A1 Microfluidic devices, methods, and systems |
| 07/13/2005 | EP1315993A4 Micromirror elements, package for the micromirror elements, and protection system therefor |
| 07/13/2005 | CN1637457A Optical switch and fabrication method thereof |
| 07/13/2005 | CN1210597C Photoswitch |
| 07/12/2005 | US6917459 MEMS device and method of forming MEMS device |
| 07/12/2005 | US6917086 Trilayered beam MEMS device and related methods |
| 07/12/2005 | US6916728 Method for forming a semiconductor structure through epitaxial growth |
| 07/07/2005 | WO2005062332A1 Mems switch |
| 07/07/2005 | WO2005061991A1 Micro-machined vibrating structure and associated micro-gyroscope |
| 07/07/2005 | WO2005061376A1 Method for containing a device and a corresponding device |
| 07/07/2005 | WO2005029555A3 Nanostructure augmentation of surfaces for enhanced thermal transfer |
| 07/07/2005 | US20050147502 Method of driving pump |
| 07/07/2005 | US20050146247 Curved micromachined ultrasonic transducer arrays and related methods of manufacture |
| 07/07/2005 | US20050146240 Micromachined ultrasonic transducer cells having compliant support structure |
| 07/07/2005 | US20050145961 MEMS passivation with transition metals |
| 07/07/2005 | US20050145606 Low cost actuator with 2 dimensional motion |
| 07/07/2005 | US20050145279 Integrated microvalve and method for manufacturing a microvalve |
| 07/07/2005 | US20050145053 Linear to angular movement converter |
| 07/07/2005 | DE10392441T5 Eine miniaturisierte Kontaktfeder A miniaturized contact spring |
| 07/07/2005 | DE10356507A1 Resilient micromechanical substrate structure, for e.g. sensitive thermal- or chemical sensors, comprises membrane attached to opening by resilient bridging sections |
| 07/06/2005 | EP1550894A1 Optical device with a mobile optical element interacting with a optical guiding structure |
| 07/06/2005 | EP1550349A2 Membrane and method for the production thereof |
| 07/06/2005 | EP1549768A1 Microfluidic protein crystallography |
| 07/06/2005 | EP1509399A4 High volume pagewidth printing |
| 07/06/2005 | EP1474817B1 Microswitch with a micro-electromechanical system |
| 07/06/2005 | EP1254249A4 Deposited thin films and their use in detection, attachment, and bio-medical applications |
| 07/05/2005 | US6915080 Method and apparatus for aligning optical wireless links |
| 07/05/2005 | US6914871 Hinge is resistant against pivoting of a mirror body for effective prevention thereof from being damaged |
| 07/05/2005 | US6914329 Micro cooling and power supply structure |
| 07/05/2005 | US6914245 Infrared light detection array and method of producing the same |
| 07/05/2005 | US6913942 Sacrificial layers for use in fabrications of microelectromechanical devices |
| 07/05/2005 | US6913941 SOI polysilicon trench refill perimeter oxide anchor scheme |
| 07/05/2005 | US6913363 Variable geometry mirror having high-precision, high geometry controllability |
| 07/05/2005 | US6912902 Bending beam accelerometer with differential capacitive pickoff |
| 06/30/2005 | WO2005059624A1 Optical scanner and image formation device using the same |
| 06/30/2005 | US20050142688 Episeal pressure sensor and method for making an episeal pressure sensor |
| 06/30/2005 | US20050142684 Method for fabricating a structure for a microelectromechanical system (MEMS) device |
| 06/30/2005 | US20050142597 For confining liquids inside the channels for use in biological tests such as cell purification, lysis, amplification or purification, and analysis of the resulting amplified or purified product |
| 06/30/2005 | US20050141398 Optical device with a mobile optical element capable of interacting with an optical guide structure |
| 06/30/2005 | US20050140987 Vertical displacement device |
| 06/30/2005 | US20050139940 Methods for depositing, releasing and packaging microelectromechanical devices on wafer substrates |
| 06/30/2005 | US20050139577 Microelectromechanical system comb actuator and manufacturing method thereof |
| 06/30/2005 | US20050139542 Stiffened surface micromachined structures and process for fabricating the same |
| 06/30/2005 | DE19536228B4 Mikroelektronischer, integrierter Sensor und Verfahren zur Herstellung des Sensors Micro-electronic, integrated sensor and method for manufacturing the sensor |