Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
08/2005
08/18/2005US20050179343 Wide frequency range electromechanical actuator
08/18/2005US20050178208 Pressure sensor having a silicon chip on a steel diaphragm
08/18/2005US20050178204 Pyramid socket suspension
08/18/2005US20050178118 Thermal bend actuator with corrugate profile
08/17/2005EP1564183A2 Microconnectors and non-powered microassembly therewith
08/17/2005EP1563333A1 Mems scanning mirror with tunable natural frequency
08/17/2005EP1563193A1 Double-effect pyrotechnic micro-actuator for microsystem and microsystem using same
08/17/2005CN1656644A Spring loaded bi-stable mems switch
08/17/2005CN1656643A Micro electro-mechanical system method
08/17/2005CN1656382A Accelerometer strain isolator
08/17/2005CN1654310A Microconnectors and non-powered microassembly therewith
08/17/2005CN1214971C Two-dimensional excitation set and manufacturing method thereof
08/16/2005US6931172 Optical switch, optical add/drop apparatus, optical transmission system, and method of producing optical switch
08/16/2005US6931171 Micromirror actuator and manufacturing method thereof
08/16/2005US6930873 Micro electromechanical switches
08/16/2005US6930368 MEMS having a three-wafer structure
08/16/2005US6930365 Biosensor matrix and method for making same
08/16/2005US6930364 Microelectronic mechanical system and methods
08/16/2005US6929721 Ion beam modification of residual stress gradients in thin film polycrystalline silicon membranes
08/16/2005US6929030 Microfabricated elastomeric valve and pump systems
08/16/2005US6928879 Episeal pressure sensor and method for making an episeal pressure sensor
08/11/2005US20050176174 Methodof making an integrated circuit
08/11/2005US20050176163 Method of forming a device by removing a conductive layer of a wafer
08/11/2005US20050176034 Microfluidics apparatus and methods of use therefor
08/11/2005US20050173770 Method and apparatus for making a MEMS scanner
08/11/2005US20050173711 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
08/11/2005US20050173233 Micromechanical switch
08/11/2005US20050172739 Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
08/11/2005US20050172722 Pressure sensor and method for fabricating the same
08/11/2005US20050172717 Micromechanical device with thinned cantilever structure and related methods
08/11/2005DE102004003413A1 Verfahren zum Verpacken von Halbleiterchips und entsprechende Halbleiterchipanordnung A method of packaging a semiconductor chip and corresponding semiconductor chip assembly
08/10/2005EP1562207A1 Bistable microelectromechanical system
08/10/2005EP1561724A1 Micromechanical device with thinned cantilever structure and related methods
08/10/2005EP1560787A2 Micro electro-mechanical system device with piezoelectric thin film actuator
08/10/2005EP1317625A4 Micro-fluidic system
08/10/2005CN1652995A Silicon carbide microelectromechanical devices with electronic circuitry
08/10/2005CN1651970A Optical scanning apparatus and image forming apparatus
08/10/2005CN1651968A Spatial light modulator using an integrated circuit actuator and method of making and using same
08/09/2005US6926864 Microfluidics apparatus and methods for use thereof
08/09/2005US6925877 Micromachined devices with apertures
08/09/2005US6925710 Method for manufacturing microelectromechanical combdrive device
08/04/2005WO2005071707A1 Micro relay
08/04/2005WO2005069748A2 Mems nanoindenter
08/04/2005US20050170614 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
08/04/2005US20050170557 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
08/04/2005US20050170547 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
08/04/2005US20050170546 Metod for making a micromechanical device by using a sacrificial substrate
08/04/2005US20050170544 Method for manufacturing MEMS structures
08/04/2005US20050170540 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
08/04/2005US20050169156 Optical deflection device
08/04/2005US20050168849 Method for fabricating an interference display unit
08/04/2005US20050168306 MEMS device with integral packaging
08/04/2005US20050167769 Electrode design and positioning for controlled movement of a moveable electrode and associated support structure
08/04/2005US20050166980 Microfabricated elastomeric valve and pump systems
08/04/2005DE102005002794A1 Mikrospiegelvorrichtung Micromirror device
08/03/2005EP1559987A1 Micromechanical latching switch
08/03/2005EP1558915A2 Multiplex illuminator and device reader for microcantilever array
08/03/2005EP1280617A4 Deposited thin films and their use in separation and sarcrificial layer applications
08/03/2005CN1650383A Diaphragm activated micro electromechanical switch
08/03/2005CN1650214A Micro rocking device having torsion bar
08/03/2005CN1650210A Optical switch with 3D waveguides
08/03/2005CN1649084A Process for producing a movable structure and etchant for silicon oxide film
08/02/2005US6925224 Polysilicon optical router having rotor
08/02/2005US6924966 Spring loaded bi-stable MEMS switch
08/02/2005US6924915 Oscillation device, optical deflector using the oscillation device, and image display device and image forming apparatus using the optical deflector, and method of manufacturing the oscillation device
08/02/2005US6924914 Light deflector, method of manufacturing light deflector, optical device using light deflector, and torsion oscillating member
08/02/2005US6924581 Split spring providing multiple electrical leads for MEMS devices
08/02/2005US6924538 Devices having vertically-disposed nanofabric articles and methods of making the same
08/02/2005US6924537 Semiconductor device including a potential drawing portion formed at a corner
08/02/2005US6924485 Infrared ray detector having a vacuum encapsulation structure
08/02/2005US6923669 Microconnectors and non-powered microassembly therewith
08/02/2005US6923583 Computer Keyboard with integral printer
08/02/2005US6923062 Sensor
08/02/2005US6923061 Physical quantity sensor having beam
07/2005
07/28/2005WO2005069057A1 Optical components and production therof
07/28/2005WO2005068137A1 Self-cleaning adhesive structure and methods
07/28/2005US20050164426 Micro-mirror package
07/28/2005US20050164127 Cleaning photoresist from microelectromechanical devices with supercritical carbon dioxide
07/28/2005US20050164043 High-pressure sensor element with an anti-rotation protection
07/28/2005US20050163428 Optical device
07/28/2005US20050162806 Thermal plastic deformation of RF MEMS devices
07/28/2005US20050162765 Micromirror with rib reinforcement
07/28/2005US20050162730 Micromirror unit and method of making the same
07/28/2005US20050162729 Hinge structure of micromirror device
07/28/2005US20050162724 Torsional hinged mirror assembly with central spines and perimeter ridges to reduce flexing
07/28/2005US20050162244 Switch
07/28/2005US20050162040 Tunable bulk acoustic wave mems microresonator
07/28/2005US20050161751 MEMS device having compact actuator
07/28/2005US20050161749 Apparatus and method for vacuum-based nanomechanical energy force and mass sensors
07/28/2005US20050161430 Method of forming atomic force microscope tips
07/28/2005DE10359217A1 Elektrische Durchkontaktierung von HL-Chips Electrical through-HL-chips
07/28/2005DE102004063740A1 Mikrobearbeitete Ultraschalltransducerzellen mit nachgiebiger Stützstruktur Micromachined Ultraschalltransducerzellen with resilient support structure
07/28/2005DE102004063707A1 Gekrümmte mikrobearbeitete Ultraschalltransducerarrays und zugehörige Herstellungsverfahren Curved micromachined ultrasound transducer and associated manufacturing processes
07/28/2005DE102004008009A1 Integriertes Mikroventil und Verfahren zum Herstellen eines Mikroventils Integrated micro-valve and method of making a microvalve
07/28/2005DE102004008008A1 Sensor for determining fluid flow, has fluid channel in functional layers to guide fluid flow, and insulation layer at its walls, where fluid flow is determined based on resistance value of layers in measurement zone
07/27/2005EP1556307A1 Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith
07/27/2005EP1425548A4 Microcantilever apparatus and methods for detection of enzymes
07/27/2005EP1227307B1 Thermal displacement element and radiation detector using the element
07/27/2005CN2712888Y Micro-acoustic unit for ultrasonic location and distance measurement
07/27/2005CN1647356A Method and apparatus for actuation of a two-axis MEMS device using three actuation elements
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