| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 09/08/2005 | US20050194348 Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates |
| 09/08/2005 | US20050193827 Micromechanical component and corresponding method for its manufacture |
| 09/08/2005 | DE102004035386B3 Application of piezoelectric or pyroelectric thin-film layer on substrate incorporating pyroelectric ceramic powder |
| 09/08/2005 | DE102004008510A1 Measurement method for small forces or force effects, e.g. for forces less than 1 micro-Newton, in which the deflection of the free end of an optical fiber is measured by detecting the position of light emitted from it |
| 09/07/2005 | EP1571586A2 Method of making piezoelectric cantilever pressure sensor array |
| 09/07/2005 | EP1571472A1 Optical switch and production method thereof |
| 09/07/2005 | EP1569865A2 Production of microelectromechanical systems (MEMS) using the high-temperature silicon fusion bonding of wafers |
| 09/07/2005 | EP1254473B1 Electronically switching latching micro-magnetic relay and method of operating same |
| 09/07/2005 | CN1666138A A device having a light-absorbing mask and a method for fabricating same |
| 09/07/2005 | CN1665964A Multi-step release method for electrochemically fabricated structures |
| 09/06/2005 | US6940632 Micromechanical structure, in particular for an acceleration sensor |
| 09/06/2005 | US6940630 Vertical displacement device |
| 09/06/2005 | US6940207 Micromachined moving device controlled by a varying—amplitude AC drive signal |
| 09/06/2005 | US6940139 Micromechanical device and method of manufacture thereof |
| 09/06/2005 | US6939809 Method for release of surface micromachined structures in an epitaxial reactor |
| 09/06/2005 | US6939474 Method for forming microelectronic spring structures on a substrate |
| 09/06/2005 | US6938485 Capacitive acceleration sensor |
| 09/06/2005 | US6938484 Micromachined capacitive lateral accelerometer device and monolithic, three-axis accelerometer having same |
| 09/01/2005 | WO2005081288A2 Mechanical sensor with pyramid socket suspension |
| 09/01/2005 | WO2004089811A3 Method for manufacturing an electro-mechanical component and an electro-mechanical component, such as a strained si fin-fet |
| 09/01/2005 | US20050191790 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 09/01/2005 | US20050191789 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 09/01/2005 | US20050191495 Nanotube films and articles |
| 09/01/2005 | US20050190526 Capacitor apparatus of the capacity variable type |
| 09/01/2005 | US20050190426 Optical scanning apparatus and image apparatus having the same |
| 09/01/2005 | US20050190023 Micro-switching element fabrication method and micro-switching element |
| 09/01/2005 | DE10392851T5 Mikroelektromechanischer variabler Kondensator The microelectromechanical variable capacitor |
| 09/01/2005 | DE102004015444A1 Micromechanical semiconductor component produced by forming a partially oxidised porous layer in a semiconductor substrate |
| 09/01/2005 | DE102004006698A1 Mikromechanischer Sensor Micromechanical sensor |
| 09/01/2005 | DE102004002908A1 Halbleiterbauelement sowie mikromechanische Struktur Semiconductor device and micro-mechanical structure |
| 09/01/2005 | CA2498374A1 Optical device and production method thereof |
| 08/31/2005 | EP1568655A1 Micromachine and method of producing the same |
| 08/31/2005 | EP1218755B1 Micromechanical spring structure, especially for a rotational speed sensor |
| 08/31/2005 | CN1661769A Micro-switching element fabrication method and micro-switching element |
| 08/31/2005 | CN1660691A Fluid actuating apparatus and method for manufacturing a fluid actuating apparatus, and electrostatically-actuated fluid discharge apparatus and process for producing an electrostatically-actuated flu |
| 08/31/2005 | CN1660690A Thermal bend actuator with corrugate profile |
| 08/31/2005 | CN1216792C Micro electromechanical switches |
| 08/30/2005 | US6937121 Magnetic actuator |
| 08/30/2005 | US6936950 Micro-actuator utilizing electrostatic and Lorentz forces, and micro-actuator device, optical switch and optical switch array using the same |
| 08/30/2005 | US6936902 Sensor with at least one micromechanical structure and method for production thereof |
| 08/30/2005 | US6936183 Etch process for etching microstructures |
| 08/30/2005 | US6935759 Folded longitudinal torsional hinge for gimbaled MEMS mirror |
| 08/30/2005 | US6935617 Valve assembly for microfluidic devices, and method for opening and closing the same |
| 08/30/2005 | US6935165 Microscale sensor element and related device and method of use |
| 08/25/2005 | WO2005078815A1 Wide frequency range electromechanical actuator |
| 08/25/2005 | WO2005078772A2 Method and apparatus for making a mems scanner |
| 08/25/2005 | WO2005078523A1 Polymer pattern and metal film pattern, metal pattern, plastic mold using thereof, and method of the forming the same |
| 08/25/2005 | WO2005078509A2 Mems scanning system with improved performance |
| 08/25/2005 | WO2005078508A2 Method and apparatus for scanning a beam of light |
| 08/25/2005 | WO2005078507A1 Mems scanner adapted to a laser printer |
| 08/25/2005 | WO2005078506A2 High performance mems scanner |
| 08/25/2005 | WO2005077816A1 Method of forming a device by removing a conductive layer of a wafer |
| 08/25/2005 | WO2005077815A1 Micromechanical sensor |
| 08/25/2005 | WO2004094300A3 Mems actuators |
| 08/25/2005 | US20050186703 Method for packaging semiconductor chips and corresponding semiconductor chip system |
| 08/25/2005 | US20050185240 Light deflector, method of manufacturing light deflector and torsion oscillating member |
| 08/25/2005 | US20050184836 Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making the same |
| 08/25/2005 | US20050183950 Fluid actuating apparatus and method for manufacturing a fluid actuating apparatus, and electrostatically-actuated fluid discharge apparatus and process for producing an electrostatically-actuated fluid discharge apparatus |
| 08/25/2005 | US20050183938 Head electrode region for a reliable metal-to-metal contact micro-relay MEMS switch |
| 08/25/2005 | US20050183609 Micromechanical latching switch |
| 08/25/2005 | DE10392981T5 Bimorpher Schalter, Herstellungsverfahren für einen bimorphen Schalter, elektronische Schaltung und Herstellungsverfahren für eine elektronische Schaltung Bimorph switch manufacturing method of a bimorph switches, electronic circuit, and manufacturing method for an electronic circuit |
| 08/25/2005 | DE102004033475A1 Corrosion protection for micromechanical sensor elements, e.g. for a pressure sensor, comprises a passivating agent that at least partially covers electrical components and a material layer applied to the top of the passivator |
| 08/25/2005 | DE102004006201A1 Drucksensor mit Siliziumchip auf einer Stahlmembran Pressure sensor with silicon chip on a steel membrane |
| 08/25/2005 | DE102004003414A1 Hochdrucksensorelement mit Verdrehschutz High pressure sensor element with twist |
| 08/24/2005 | EP1566956A1 Optical scanning apparatus and image forming apparatus |
| 08/24/2005 | CN1659925A An acoustically active element formed in a multi-layer circuit-board structure, a method for forming acoustically active element in a multi-layer circuit-board structure, and a multi-layer circuit-boa |
| 08/24/2005 | CN1659684A Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/24/2005 | CN1657401A 差动压力传感器 Differential Pressure Sensor |
| 08/24/2005 | CN1215968C Micro-structure and method for protecting structures material in manufacturing period |
| 08/23/2005 | US6934439 Piano MEMs micromirror |
| 08/23/2005 | US6934063 MEMS mirror |
| 08/23/2005 | US6933808 Microelectromechanical apparatus and methods for surface acoustic wave switching |
| 08/23/2005 | US6933715 Sensor system for sensing movement |
| 08/23/2005 | US6933659 Fiber-reinforced microactuator |
| 08/23/2005 | US6933164 Method of fabrication of a micro-channel based integrated sensor for chemical and biological materials |
| 08/23/2005 | US6933004 Control of stress in metal films by controlling the temperature during film deposition |
| 08/23/2005 | US6931935 Surface-micromachined absolute pressure sensor and a method for manufacturing thereof |
| 08/23/2005 | US6931928 Microstructure with movable mass |
| 08/18/2005 | WO2005076247A1 Mechanical structure including a layer of polymerised liquid crystal and method of manufacturing such |
| 08/18/2005 | WO2005076246A1 Mechanical shutter with polymerised liquid crystal layer |
| 08/18/2005 | WO2005075605A1 Flexible foil moveable by non-mechanical means |
| 08/18/2005 | WO2005075604A1 Flexible foil moveable by means of light |
| 08/18/2005 | WO2005028549A3 Nano-composite materials for thermal management applications |
| 08/18/2005 | WO2004065290A3 Integrated electrostatic peristaltic pump method and apparatus |
| 08/18/2005 | WO2003095710A3 Methods of and apparatus for electrochemically fabricating structures |
| 08/18/2005 | WO2003095708A3 Methods of and apparatus for molding structures |
| 08/18/2005 | WO2003095707A3 Method of and apparatus for forming three-dimensional structures |
| 08/18/2005 | WO2003095706A3 Electrochemically fabricated hermetically sealed microstructures |
| 08/18/2005 | US20050181658 Microconnectors and non-powered microassembly therewith |
| 08/18/2005 | US20050181636 Sockets for microassembly |
| 08/18/2005 | US20050181532 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/18/2005 | US20050181529 Method for manufacturing a semiconductor component, as well as a semiconductor component, in particular a membrane sensor |
| 08/18/2005 | US20050180686 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/18/2005 | US20050180685 Interlaced array of piano MEMs micromirrors |
| 08/18/2005 | US20050180089 Capacitor apparatus of the capacity variable type |
| 08/18/2005 | US20050179985 Optical deflector and method of producing same |
| 08/18/2005 | US20050179982 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 08/18/2005 | US20050179981 Micromirror device |
| 08/18/2005 | US20050179976 High performance MEMS scanner |
| 08/18/2005 | US20050179974 Optical scanning apparatus and image forming apparatus |