| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 10/05/2005 | CN1221832C Optical scanning head and its making process |
| 10/05/2005 | CN1221468C Micro electromechanical switches |
| 10/04/2005 | US6952041 Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same |
| 10/04/2005 | US6951824 Method for manufacturing a micromechanical component and a component that is manufactured in accordance with the method |
| 10/04/2005 | US6951768 Single crystal, dual wafer, tunneling sensor or switch with substrate protrusion and a method of making same |
| 10/02/2005 | CA2501012A1 Interlaced array of piano mems micromirrors |
| 09/29/2005 | WO2005090082A1 Actuator, liquid drop discharge head, ink cartridge, inkjet recording device, micro pump, optical modulation device, and substrate |
| 09/29/2005 | WO2005089465A2 Electromechanical three-trace junction devices |
| 09/29/2005 | US20050214976 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| 09/29/2005 | US20050214969 Method for forming a chamber in an electronic device and device formed thereby |
| 09/29/2005 | US20050213878 Microactuator device and optical switching system using the same |
| 09/29/2005 | US20050213876 Optical device |
| 09/29/2005 | US20050213788 Acoustically active element formed in a multi-layer circuit-board structure, a method for forming acoustically active element in a multi-layer circuit-board structure, and a multi-layer circuit-board structure |
| 09/29/2005 | US20050213230 Optical scanning device and method of manufacturing the same |
| 09/29/2005 | US20050211505 Nanostructured liquid bearing |
| 09/29/2005 | US20050210988 Method of making piezoelectric cantilever pressure sensor array |
| 09/29/2005 | US20050210978 Sensor having integrated actuation and detection means |
| 09/29/2005 | US20050210967 Method of fabricating a surface probing device and probing device produced thereby |
| 09/29/2005 | DE19933418B4 Verfahren zur Herstellung von mikromechanischen Bauelementen A process for preparing micromechanical components |
| 09/29/2005 | DE102005003888A1 Gelenkkonstruktion für eine Mikrospiegelvorrichtung Joint construction for a micromirror device |
| 09/29/2005 | DE102004011026A1 Adaptives optisches Element mit einem Polymeraktor Adaptive optical element comprising a polymer actuator |
| 09/28/2005 | EP1580528A1 Nanostructured liquid bearing |
| 09/28/2005 | EP1580161A1 Method for forming a chamber in an electronic device and device formed thereby |
| 09/28/2005 | EP1578685A2 Method of forming semiconductor devices through epitaxy |
| 09/28/2005 | EP1578579A2 Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure |
| 09/28/2005 | EP1461828A4 Method of fabricating micro-electromechanical switches on cmos compatible substrates |
| 09/28/2005 | CN1675728A Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation |
| 09/28/2005 | CN1675126A Low temperature plasma Si or SiGe for MEMS applications |
| 09/28/2005 | CN1673665A Measurements using tunnelling current between elongate conductors |
| 09/28/2005 | CN1672929A Method for forming a chamber in an electronic device and device formed thereby |
| 09/28/2005 | CN1221035C Method for making thin-film constitution |
| 09/27/2005 | US6950596 Variable optical attenuator |
| 09/27/2005 | US6950224 Electrostatic movable micro mirror chip |
| 09/27/2005 | US6949996 Actuator |
| 09/27/2005 | US6949869 Piezoelectric actuator, liquid jetting head incorporating the same, piezoelectric element, and method of manufacturing the same |
| 09/27/2005 | US6949866 Systems and methods for overcoming stiction |
| 09/27/2005 | US6949397 Fabrication of silicon micro mechanical structures |
| 09/27/2005 | US6949385 Thermal microvalves |
| 09/27/2005 | US6949202 Apparatus and method for flow of process gas in an ultra-clean environment |
| 09/22/2005 | WO2005069748A3 Mems nanoindenter |
| 09/22/2005 | US20050206999 Optical attenuator element, and variable optical equalizer and optical amplifier that use this optical attenuator element |
| 09/22/2005 | US20050206987 Mirror rocking member for optical deflector |
| 09/22/2005 | US20050206986 Micro-actuator utilizing electrostatic and lorentz forces, and micro-actuator device, optical switch and optical switch array using the same |
| 09/22/2005 | US20050206243 Microelectromechanical system able to switch between two stable positions |
| 09/22/2005 | US20050205515 Process for producing structural body and etchant for silicon oxide film |
| 09/22/2005 | US20050204821 Micromechanical component having a diaphragm, and method for manufacturing such a component |
| 09/22/2005 | US20050204816 Semiconductor dynamic quantity sensor |
| 09/22/2005 | DE19954091B4 Thermische Isolierungsstruktur für Mikrothermosäule und Herstellungsverfahren dafür Thermal insulation structure for micro thermopile and production method thereof |
| 09/22/2005 | DE102005005551A1 Micro-mechanical component for pressure sensor, has sacrificial layer in which cavern is formed, and comprising entry channel with openings in related top and bottom layers, where openings do not overlap, such that channel is misaligned |
| 09/22/2005 | DE102004010295A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 09/21/2005 | EP1576207A2 Methods of and apparatus for molding structures |
| 09/21/2005 | EP1576206A2 Method of and apparatus for forming three-dimensional structures |
| 09/21/2005 | EP1454333A4 Mems device having a trilayered beam and related methods |
| 09/21/2005 | EP1428255A4 Microelectronic mechanical system and methods |
| 09/21/2005 | CN1672081A Bulk silicon mirrors with hinges underneath |
| 09/21/2005 | CN1671617A Three-dimensional structure element and method of manufacturing the element, optical switch, and micro device |
| 09/21/2005 | CN1670568A Optical attenuator element, and variable optical equalizer and optical amplifier |
| 09/20/2005 | US6947719 Nano-electromechanical filter |
| 09/20/2005 | US6947188 High stroke pixel for a deformable mirror |
| 09/20/2005 | US6946398 Method for fabricating a micro machine |
| 09/20/2005 | US6946315 Manufacturing methods of MEMS device |
| 09/20/2005 | US6946200 Methods for reducing the curvature in boron-doped silicon micromachined structures |
| 09/19/2005 | CA2497624A1 Optical attenuator element, and variable optical equalizer and optical amplifier that use this optical attenuator element |
| 09/15/2005 | WO2005085930A1 Adaptive optical element comprising a polymer actuator |
| 09/15/2005 | WO2005085126A1 Hermetically sealed package for optical, electronic, opto-electronic and other devices |
| 09/15/2005 | WO2005085125A1 Micro actuator and device having micro actuator |
| 09/15/2005 | US20050202667 Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates |
| 09/15/2005 | US20050202660 Electrochemical fabrication process including process monitoring, making corrective action decisions, and taking appropriate actions |
| 09/15/2005 | US20050202585 Micro-machined electromechanical system (mems) accelerometer device having arcuately shaped flexures |
| 09/15/2005 | US20050200985 Micro-support structures |
| 09/15/2005 | US20050200938 MEMS device for an adaptive optics mirror |
| 09/15/2005 | US20050199973 Differential pressure sensor |
| 09/15/2005 | US20050199970 Electromechanical resonator and method for fabricating such a resonator |
| 09/15/2005 | DE10393265T5 Mikrovorrichtung und Verfahren zu deren Herstellung A micro-device and process for their preparation |
| 09/14/2005 | EP1574475A2 Integrated driver electronics for MEMS device using high voltage thin film transistors |
| 09/14/2005 | EP1572578A2 Method for making a planar suspended microstructure, using a sacrificial layer of polymer material and resulting component |
| 09/14/2005 | EP1572576A2 Microfluidic devices and methods with electrochemically actuated sample processing |
| 09/14/2005 | EP1572575A2 Encapsulated microstructure and method of producing one such microstructure |
| 09/14/2005 | EP1572574A1 Method and device for capturing charged molecules traveling in a flow stream |
| 09/14/2005 | CN1669219A Microelectromechanical apparatus and methods for surface acous tic wave switching |
| 09/14/2005 | CN1669177A Miniature RF and microwave components and methods for fabricating such components |
| 09/14/2005 | CN1668957A Optical MEMS switching array with embedded beam-confining channels and method of operating same |
| 09/14/2005 | CN1668528A Fluorochemical treatment for silicon articles |
| 09/14/2005 | CN1668247A Embedded piezoelectric microcantilever sensors |
| 09/13/2005 | US6943928 Electromagnetic actuator, manufacturing method, and optical scanner using the electromagnetic actuator |
| 09/13/2005 | US6943495 Micro electro mechanical system controlled organic LED and pixel arrays and method of using and of manufacturing same |
| 09/13/2005 | US6943448 Multi-metal layer MEMS structure and process for making the same |
| 09/13/2005 | US6943384 Semiconductor optoelectronic device with electrically adjustable transfer function |
| 09/13/2005 | US6942921 Nanotube films and articles |
| 09/13/2005 | US6942811 Method for achieving improved selectivity in an etching process |
| 09/13/2005 | US6942750 Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabrication |
| 09/09/2005 | WO2005083765A1 Semiconductor device |
| 09/09/2005 | WO2005082774A2 Method for making a planar cantilever mems switch |
| 09/08/2005 | US20050196933 Single crystal silicon sensor with additional layer and method of producing the same |
| 09/08/2005 | US20050196099 MEMS-based actuator devices using electrets |
| 09/08/2005 | US20050195466 Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit |
| 09/08/2005 | US20050195056 Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method |
| 09/08/2005 | US20050194840 Microminiature moving device and method of making the same |
| 09/08/2005 | US20050194677 Hermetically sealed package for optical, electronic, opto-electronic and other devices |
| 09/08/2005 | US20050194662 Semiconductor component and micromechanical structure |