Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
11/2005
11/01/2005US6959583 Passive temperature compensation technique for MEMS devices
10/2005
10/27/2005WO2005101434A2 Low consumption and low actuation voltage microswitch
10/27/2005WO2005100236A1 Method of packaging mems device in vacuum state and mems device vacuum-packaged using the same
10/27/2005WO2005100235A1 Piezoresistive microcantilever sensor
10/27/2005WO2005099901A1 Microfluid sample delivery system
10/27/2005US20050239231 Method for making a microelectromechanical system using a flexure protection layer
10/27/2005US20050238282 Three-demensional structure element and method of manufacturing the element, optical switch, and micro device
10/27/2005US20050236935 Microswitch and method for manufacturing the same
10/27/2005US20050236928 Microactuator
10/27/2005US20050236682 Method of manufacturing MEMS device
10/26/2005EP1589059A1 Conductive polymer composite structure
10/26/2005EP1588383A2 Probe for an optical near field microscope and method for producing the same
10/26/2005EP1588382A2 Probe for an optical near field microscope with improved scattered light suppression and method for producing the same
10/26/2005EP1283957B1 Micromachined fluidic device and method for making same
10/26/2005CN1688504A Method for selectively covering a micro machined surface
10/25/2005US6958566 Mechanical resonator device having phenomena-dependent electrical stiffness
10/25/2005US6958255 Micromachined ultrasonic transducers and method of fabrication
10/25/2005US6958124 SPM sensor and process for producing it
10/25/2005US6958123 Method for removing a sacrificial material with a compressed fluid
10/20/2005WO2005099087A1 A μ-FLAP TYPE NANO/MICRO MECHANICAL DEVICE AND FABRICATION METHOD THEREOF
10/20/2005WO2005098845A1 Flexible indented membrane
10/20/2005US20050233492 Method of fabricating silicon-based mems devices
10/20/2005US20050232676 Computer system having integrated printer and keyboard
10/20/2005US20050232675 Printer within a computer keyboard
10/20/2005US20050231794 Micromechanical device and method of manufacture thereof
10/20/2005US20050231793 Deflection mirror, a deflection mirror manufacturing method, an optical writing apparatus, and an image formation apparatus
10/20/2005US20050231787 Micro-oscillation element
10/20/2005US20050231310 Electromagnetic actuator, manufacturing method and optical scanner using the electromagnetic actuator
10/20/2005US20050230839 Fabrication of silicon micro-mechanical structures
10/20/2005US20050230710 Nanotube relay device
10/20/2005US20050230708 Sensor with at least one micromechanical structure, and method for producing it
10/20/2005US20050230257 Microdevice with movable microplatform and process for making thereof
10/20/2005US20050229839 High throughput screening of crystallization of materials
10/20/2005US20050229711 Capacitive pressure sensor and method of manufacture
10/20/2005US20050229706 MEM structure having reduced spring stiction
10/20/2005US20050229704 Physical quantity sensor having multiple through holes
10/19/2005EP1586933A1 Light scanner and image-forming apparatus
10/19/2005EP1585900A2 Integrated electrostatic peristaltic pump method and apparatus
10/19/2005CN1683234A Method of packaging MEMS device in vacuum state and MEMS device vacuum-packaged using the same
10/19/2005CN1683233A Stepping omnibearing nano moving platform
10/18/2005US6955084 Isolated resonator gyroscope with compact flexures
10/13/2005WO2005095997A1 Force sensor
10/13/2005WO2005094535A2 A torsional hinged mirror assembly with central spines and perimeter ridges to reduce flexing
10/13/2005WO2005069057A9 Optical components and production therof
10/13/2005US20050227508 Microengineered electrical connectors
10/13/2005US20050227477 Method for fabricating semiconductor device and acceleration sensor
10/13/2005US20050227428 Process for manufacturing mems
10/13/2005US20050227401 Method of packaging MEMS device in vacuum state and MEMS device vacuum-packaged using the same
10/13/2005US20050226742 Microfabricated elastomeric valve and pump systems
10/13/2005US20050226668 Keyboard for a computer system
10/13/2005US20050226667 Pagewidth printer and computer keyboard combination
10/13/2005US20050225921 Micro-switching device and method of manufacturing micro-switching device
10/13/2005US20050225822 Optical deflector having neutral surface of bending in movable member in different plane from neutral surface of bending in elastic support member
10/13/2005US20050225413 Microelectromechanical structures, devices including the structures, and methods of forming and tuning same
10/13/2005US20050225213 Piezoelectric micro-transducers, methods of use and manufacturing methods for same
10/13/2005US20050224453 Method for selectively covering a micro machined surface
10/13/2005DE102005010393A1 Halbleitersensor zur Erfassung einer dynamischen Grösse A semiconductor sensor for detecting a dynamic amount
10/13/2005DE102004015122A1 Sensor mit integriertem Antriebs- und Detektionsmittel Sensor with integrated driving and sensing means
10/12/2005EP1585219A1 A micro-flap type nano/micro mechanical device and fabrication method thereof
10/12/2005EP1584105A2 Encapsulation of mems devices using pillar-supported caps
10/12/2005CN1682315A Sensor with suspending arm and optical resonator
10/12/2005CN1682116A Reducing offset in accelerometers
10/12/2005CN1681733A Micromachine and method of manufacturing the micromachine
10/12/2005CN1681141A Piezo-electric/electrostrictive membrane type element
10/12/2005CN1680186A Interlaced array of piano mems micromirrors
10/11/2005US6954301 Low-voltage electromechanical device including a tiltable microplatform, method of tilting same, array of such devices and method of setting dimple-to-substrate spacing
10/11/2005US6954297 Micro-mirror device including dielectrophoretic liquid
10/11/2005US6954294 Tunable filter, manufacturing method thereof and optical switching device comprising the tunable filter
10/11/2005US6953982 Flexible skin incorporating MEMS technology
10/11/2005US6953977 Micromechanical piezoelectric device
10/11/2005US6953753 Method for manufacturing semiconductor device
10/11/2005US6953751 Micro device and process for producing it
10/11/2005US6953295 Small footprint computer system
10/11/2005US6953268 Light modulating device and exposure apparatus using the same
10/11/2005US6952965 Vertical MEMS gyroscope by horizontal driving
10/06/2005WO2005093491A1 Light scanner and image forming device having same
10/06/2005WO2005092782A1 Single crystal silicon sensor with additional layer and method of producing the same
10/06/2005WO2005092781A1 Mems-based actuator devices using electrets
10/06/2005WO2005081288A3 Mechanical sensor with pyramid socket suspension
10/06/2005US20050221528 Microelectronic mechanical system and methods
10/06/2005US20050220394 Micromirror element and optical switch
10/06/2005US20050219675 Tip-tilt-piston actuator
10/06/2005US20050218757 Piezoelectric/electrostrictive film-type device
10/06/2005US20050218488 Electronic component having micro-electrical mechanical system
10/06/2005DE19929734B4 Mikrofluidvorrichtung Microfluidic device
10/06/2005DE102004011145A1 Microphone e.g. semiconductor-condenser microphone, for use in mobile phone, has membrane structure with boundary region, which is not movable due to pressure, on which carrier is attached, where region and opposing structure have recesses
10/06/2005DE102004011144A1 Drucksensor und Verfahren zum Betreiben eines Drucksensors Pressure sensor and method of operating a pressure sensor
10/05/2005EP1583104A2 Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same
10/05/2005EP1582896A1 Optical switching device
10/05/2005CN1679140A Conductive etch stop for etching a sacrificial layer
10/05/2005CN1679130A Micro-electromechanical switch performance enhancement
10/05/2005CN1678940A A method and device for modulating a light beam and having an improved gamma response
10/05/2005CN1678939A Micro-support structures
10/05/2005CN1678938A Bipolar operation of light-modulating array
10/05/2005CN1678513A Microchip with thermal stress relief means
10/05/2005CN1678512A Thermal movement sensor
10/05/2005CN1677705A Electronic component, electronic component module and mfg. method for said electronic component
10/05/2005CN1677686A Micro-switching device and method of manufacturing micro-switching device
10/05/2005CN1677158A Micromirror element and optical switch
10/05/2005CN1677157A Optical device
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