Patents
Sitemap › B81 - Micro-structural technology › B81B - Micro-structural devices or systems, e.g. micro-mechanical devices › B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
11/2005
11/30/2005EP1368690A4 Microelectromechanical mirror and mirror array
11/30/2005EP1009971B1 Micromachined gyros
11/30/2005CN1703932A Membrane and method for the production of the same
11/30/2005CN1703637A Variable optical attenuator
11/30/2005CN1703369A Microactuator device and optical switching system using the same
11/30/2005CN1702489A Rotary-type comb-drive actuator and variable optical attenuator using the same
11/29/2005US6970340 Capacitor apparatus of the capacity variable type
11/29/2005US6970060 Micro relay of which movable contact remains separated from ground contact in non-operating state
11/29/2005US6969635 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
11/29/2005US6969630 Method of making an integrated electromechanical switch and tunable capacitor
11/29/2005US6969629 Method for manufacturing micro-structural unit
11/29/2005US6969628 Microstructure and method for the production thereof
11/29/2005US6969425 Methods for reducing the curvature in boron-doped silicon micromachined structures
11/24/2005WO2005110915A1 Reduction of etching charge damage in manufacture of microelectromechanical devices
11/24/2005US20050260793 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
11/24/2005US20050260792 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
11/24/2005US20050260782 Conductive etch stop for etching a sacrificial layer
11/24/2005US20050257829 Double-effect pyrotechnic micro-actuator for microsystem and microsystem using same
11/23/2005EP1597761A2 Packaged microchip with thermal stress relief
11/23/2005CN1701438A Packaged microchip
11/23/2005CN1700986A Buckle resistant thermal bend actuators
11/23/2005CN1228236C Micro switch
11/22/2005US6968101 Electrode configuration for piano MEMs micromirror
11/22/2005US6968100 MEMS waveguide shuttle optical latching switch
11/22/2005US6967362 Flexible MEMS transducer and manufacturing method thereof, and flexible MEMS wireless microphone
11/17/2005WO2005109076A1 Electrostatic drive type mems mirror scanner
11/17/2005WO2005109009A1 Micromechanical sensor
11/17/2005WO2005107947A1 A valve for a microfluidic device
11/17/2005WO2005049884A3 Method for depositing silicon carbide and ceramic films
11/17/2005US20050255007 Microfluidic device, method for testing reagent and system for testing reagent
11/17/2005US20050254673 High performance MEMS thin-film teflon electret microphone
11/17/2005US20050254195 Capacitor apparatus of the capacity variable type
11/17/2005US20050253571 MEMS waveform generator and adiabatic logic circuits using the same
11/17/2005US20050253240 Micromechanical component and corresponsing production method
11/17/2005US20050253209 Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same
11/17/2005US20050253206 Microstructure comprising a surface which is functionalised through the localised deposit of a thin layer and production method thereof
11/17/2005US20050252302 Micromechanical piezoresistive pressure sensor device
11/17/2005US20050252293 Magnetic MEMS device and method of forming thereof
11/17/2005DE102004021693A1 Mikromechanischer Sensor Micromechanical sensor
11/16/2005EP1596240A2 Magnetically actuated microelectromechanical systems actuator
11/16/2005EP1596203A1 Magnetic micro-electromechanical sytem (MEMS) sensor and method for its manufacture
11/16/2005EP1594799A2 Method for producing a micromechanical device and a micromechanical device
11/16/2005EP1386085B1 Pyrotechnic microactuators for microsystems
11/16/2005EP1360143B1 Method for producing surface micromechanical structures, and sensor
11/16/2005EP1141554B1 Electrostatic/pneumatic actuators for active surfaces
11/16/2005CN1696759A Micro-mirror element
11/16/2005CN1227746C Method for manufacturing thin-film structure
11/16/2005CN1227152C Thermal bend actuator for micro-electro-mechanical device
11/15/2005US6965711 Light intercepting device and optical switch apparatus
11/15/2005US6964894 Apparatus and method of forming a device layer
11/10/2005WO2005107070A1 Electromechanical filter
11/10/2005WO2005107067A1 Filter and transmitter/receiver
11/10/2005WO2005035436A3 Mems device annealing by laser
11/10/2005US20050250235 Controlling electromechanical behavior of structures within a microelectromechanical systems device
11/10/2005US20050249966 Method of manufacture for microelectromechanical devices
11/10/2005US20050248862 Light deflector, light deflection array, image forming apparatus, and image projection display apparatus
11/10/2005US20050248621 Micro-electromechanical fluid ejection device with actuator guide formations
11/10/2005US20050248424 Composite beam microelectromechanical system switch
11/10/2005US20050247989 Method for integrating micro and nanoparticles into MEMS and apparatus including the same
11/09/2005EP1593164A2 Devices having vertically-disposed nanofabric articles and methods of making the same
11/09/2005EP1592993A1 Bi-stable micro-actuator and optical switch
11/09/2005EP1592642A2 Methods and structure for improving wafer bow control
11/09/2005EP1592551A2 Nanofabric articles and methods of making the same
11/09/2005EP1436147A4 A keyboard
11/09/2005EP1207958B1 Sensor for microfluid handling system
11/09/2005CN1695233A Three beam MEMS device and correlation method
11/09/2005CN1694842A Thermoelastic actuator design.
11/09/2005CN1693936A Open hole-based diffractive light modulator
11/09/2005CN1693181A Integrated driver electronics for mems device using high voltage thin film transistors
11/09/2005CN1693180A Miniature plate electrostatic driver and mfg. method thereof
11/09/2005CN1226650C Microelectromechanical optical switch and method of manufacture thereof
11/09/2005CN1226145C Piezoelectric actuator, liquid spray nozzle containing it, piezoelectric element and its making method
11/08/2005US6962830 Global mechanical stop
11/03/2005WO2005103793A1 A micro-electro-mechanical two dimensional mirror with articulated suspension structures for hight fill factor arrays
11/03/2005WO2005102909A1 Actuator
11/03/2005US20050245011 Micromachine and method of manufacturing the micromachine
11/03/2005US20050243404 Capacitively coupled micromirror
11/03/2005US20050243403 Open hole-based diffractive light modulator
11/03/2005US20050242687 Piezoelectric-driven MEMS device and method for manufacturing the same
11/03/2005US20050241944 Membrane and method for the production of the same
11/03/2005DE4341271B4 Beschleunigungssensor aus kristallinem Material und Verfahren zur Herstellung dieses Beschleunigungssensors Acceleration sensor of crystalline material and method for producing this acceleration sensor
11/03/2005DE19801484B4 Meßelement und damit ausgerüsteter Luftmassenmesser Measuring element and thus equipped air mass meter
11/03/2005DE102005016615A1 Sensor für eine physikalische Größe mit vielen Durchgangslöchern Sensor for a physical quantity with many through-holes
11/03/2005DE102004018408A1 Kapazitiver Drucksensor und Verfahren zur Herstellung A capacitive pressure sensor and A process for preparing
11/03/2005DE102004017944A1 Micromechanical component for use in e.g. thermal acceleration sensor, has cavern formed in substrate, and membrane removed from component through cavern, where cavern is closed at rear side of substrate through foil
11/03/2005CA2526231A1 A micro-electro-mechanical two dimensional mirror with articulated suspension structures for high fill factor arrays
11/02/2005EP1591824A2 Microactuator
11/02/2005EP1590644A1 Micromechanical component and method for production thereof
11/02/2005EP1590588A1 Integrated surface-machined micro flow controller method and apparatus
11/02/2005EP1590307A2 Methods for transferring supercritical fluids in microelectronic and other industrial processes
11/02/2005EP1379802A4 Microfluidic valve and microactuator for a microvalve
11/02/2005CN1690766A Micro-oscillation element
11/02/2005CN1690764A Microactuator
11/02/2005CN1689959A Thermal driven mini-type actuator
11/02/2005CN1225400C Surface-micromachined absolute pressure sensor and a method for manufacturing thereof
11/01/2005US6961257 Content addressable control system
11/01/2005US6961228 Capacitor apparatus of the capacity variable type
11/01/2005US6960971 Microelectro mechanical system switch
11/01/2005US6960814 Reflecting device and method of fabricating the same
11/01/2005US6960488 Method of fabricating a microfabricated high aspect ratio device with electrical isolation
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