| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 01/04/2006 | EP1461286A4 Differential stress reduction in thin films |
| 01/04/2006 | CN1716640A Method for producing variable capacitor of micro electromechanical system |
| 01/04/2006 | CN1716639A Micro electro-mechanical variable capacitor |
| 01/03/2006 | US6983088 Thermal actuator and an optical waveguide switch including the same |
| 01/03/2006 | US6982616 Switch with current potential control |
| 01/03/2006 | US6982515 Dual position linear displacement micromechanism |
| 01/03/2006 | US6982185 Single crystal, dual wafer, tunneling sensor or switch with silicon on insulator substrate and a method of making same |
| 01/03/2006 | US6981727 Diode-type nanotweezers and nanomanipulator device using the same |
| 01/03/2006 | US6981414 Coupled micromachined structure |
| 12/29/2005 | WO2005125007A1 High-frequency element, power supply element, and communication device |
| 12/29/2005 | WO2005124803A1 Arrangement and method for controlling a micromechanical element |
| 12/29/2005 | WO2005123581A1 Ultralyophobe interfaces |
| 12/29/2005 | US20050286113 Photonic MEMS and structures |
| 12/29/2005 | US20050286106 Transmission type spatial light modulator and transmission type spatial light modulation array device |
| 12/29/2005 | US20050284762 Method and device for capturing charged molecules traveling in a flow stream |
| 12/29/2005 | US20050284229 Pressure sensor and method for fabricating the same |
| 12/29/2005 | US20050284222 MEMS gyroscope with horizontally oriented drive electrodes |
| 12/29/2005 | DE102004055247B3 Micro valve with electrostatic drive especially for pneumatic uses has vacuum chamber inlet and outlet channels and valve member held by electrostatic force |
| 12/28/2005 | EP1608590A1 A method for manufacturing a membrane in a (111) surface of a (100) silicium wafer |
| 12/28/2005 | EP1608589A1 Micro-electro-mechanical systems (mems) device and system and method of producing the same |
| 12/28/2005 | CN1714291A Hybrid microcantilever sensors |
| 12/27/2005 | US6979873 Semiconductor device having multiple substrates |
| 12/27/2005 | US6979590 Methods of making electromechanical three-trace junction devices |
| 12/27/2005 | US6979407 Process for producing an SPM sensor |
| 12/27/2005 | US6978613 Thermal bend actuator |
| 12/25/2005 | CA2747236A1 Shape-acceleration measurement device and method |
| 12/22/2005 | WO2005122395A1 Electric machine signal selecting element |
| 12/22/2005 | WO2005121812A1 Multi-axis capacitive transducer and manufacturing method for producing it |
| 12/22/2005 | WO2005082774A3 Method for making a planar cantilever mems switch |
| 12/22/2005 | WO2004055885A8 Encapsulation of mems devices using pillar-supported caps |
| 12/22/2005 | US20050281084 Methods of making electromechanical three-trace junction devices |
| 12/22/2005 | US20050280879 Method and apparatus for scanning a beam of light |
| 12/22/2005 | DE10257097B4 Verfahren zur Herstellung von mikroelektromechanischen Systemen (Microelectromechanical Systems: MEMS) mittels Silizium-Hochtemperatur-Fusionsbonden A process for the manufacture of micro electromechanical systems (Micro Electro Mechanical Systems: MEMS) using high temperature silicon fusion bonding |
| 12/22/2005 | DE10256116B4 Elektronisches Bauteil und Verfahren zur Herstellung desselben Electronic component and method of manufacturing the same |
| 12/22/2005 | DE10209245B4 Vorrichtung und Verfahren zur Detektion von Mikroorganismen Device and method for the detection of microorganisms |
| 12/22/2005 | DE102004038093A1 Anordnung eines mikrooptischen Bauelements auf einem Substrat, Verfahren zur Justierung der Anordnung und optisches System mit der Anordnung Arrangement of a microoptical component on a substrate, method for adjusting the arrangement and optical system having the arrangement |
| 12/22/2005 | DE102004025603A1 Aktor auf der Basis geometrisch anisotroper Nanopartikel Actuator based on geometrically anisotropic nanoparticles |
| 12/21/2005 | EP1608013A1 Method of formation of airgaps around interconnecting line |
| 12/21/2005 | EP1607781A2 Assembly of micro-optical elements on a substrate, method for adjusting the assembly and optical system comprising the assembly |
| 12/21/2005 | EP1606635A1 Bending beam accelerometer with differential capacitive pickoff |
| 12/21/2005 | EP1606600A2 Sensor element with self-supporting bar structures made of group iii nitride based semiconductors |
| 12/21/2005 | CN1232858C Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
| 12/21/2005 | CN1232850C Mobile equipment for micromachining |
| 12/20/2005 | US6977461 System and method for moving an object employing piezo actuators |
| 12/15/2005 | WO2005119309A1 Method of producing reflection mirror and reflection mirror |
| 12/15/2005 | WO2005119233A1 Stress sensor with capture coating for detecting a target substance |
| 12/15/2005 | WO2005019351A3 Methods for forming composite coatings on mems devices |
| 12/15/2005 | US20050277217 Method for manufacturing micro-structural unit |
| 12/15/2005 | US20050276962 Ultralyophobe interfaces |
| 12/15/2005 | US20050276542 Arrangement of a micro-optical component on a substrate, a method for adjustment of the arrangement, and an optical system with the arrangement |
| 12/15/2005 | US20050274182 Micromachined devices |
| 12/15/2005 | DE19539178B4 Halbleiterbeschleunigungssensor und Verfahren zu seiner Herstellung A semiconductor acceleration sensor and method for its preparation |
| 12/14/2005 | EP1605487A1 Micro relay |
| 12/14/2005 | EP1604197A2 A cantilever array chemical sensor |
| 12/14/2005 | EP1603830A1 An accelerometer |
| 12/14/2005 | EP1603829A1 Mems devices on a nanometer scale |
| 12/14/2005 | EP1499560B1 Device for protecting a chip and method for operating a chip |
| 12/14/2005 | EP1444543A4 Digital optical switch apparatus and process for manufacturing same |
| 12/14/2005 | CN1708450A Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith |
| 12/14/2005 | CN1708449A Microactuator provided with displacement detection function, and deformable mirror provided with this microactuator |
| 12/13/2005 | US6975442 Resonance scanner |
| 12/13/2005 | US6975010 MEMS structure having a blocked-sacrificial layer support/anchor and a fabrication method of the same |
| 12/13/2005 | US6975009 Dual-wafer tunneling gyroscope and an assembly for making same |
| 12/13/2005 | US6974712 Method of fabricating a surface-type optical apparatus |
| 12/13/2005 | US6973836 Semiconductor pressure sensor having diaphragm |
| 12/08/2005 | WO2005115910A1 Actuator based on geometrically anisotropic nanoparticles |
| 12/08/2005 | US20050272079 Thermal microvalves |
| 12/08/2005 | US20050270128 Switch |
| 12/08/2005 | US20050269915 Long-stroke, high-resolution nanopositioning mechanism |
| 12/08/2005 | US20050269898 Systems and methods for overcoming stiction |
| 12/08/2005 | CA2552046A1 Actuator on the basis of geometrically anisotropic nanoparticles |
| 12/07/2005 | EP1603173A2 Piezoelectric/Electrostrictive film-type device |
| 12/07/2005 | EP1602896A2 Gyro-sensor comprising a plurality of component units, and fabricating method thereof |
| 12/07/2005 | EP1602624A1 Mems element and method of producing the same, and diffraction type mems element |
| 12/07/2005 | EP1602113A2 Micro-electromechanical inductive switch |
| 12/07/2005 | EP1601874A2 Integrated microfluidic control employing programmable tactile actuators |
| 12/07/2005 | EP1601821A1 Electroplating pcb components |
| 12/07/2005 | CN1705138A Method of manufacturing a micro-electrical-mechanical system |
| 12/07/2005 | CN1230702C Optical switch |
| 12/07/2005 | CN1230376C Manufacture of membrane |
| 12/06/2005 | US6972883 Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image |
| 12/06/2005 | US6972882 Micro-mirror device with light angle amplification |
| 12/06/2005 | US6972650 System that includes an electrode configuration in a MEMS switch |
| 12/06/2005 | US6972447 Semiconductor component having a first earlier structure differing from a second earlier structure |
| 12/01/2005 | WO2005114840A2 Mems waveform generator and adiabatic logic circuits using the same |
| 12/01/2005 | WO2005113421A1 Beam for mems switch |
| 12/01/2005 | US20050266599 Method of manufacturing a micro-electrical-mechanical system |
| 12/01/2005 | US20050266598 Method for fabricating vertical offset structure |
| 12/01/2005 | US20050264825 Sensor with cantilever and optical resonator |
| 12/01/2005 | US20050264131 Rotary-type comb-drive actuator and variable optical attenuator using the same |
| 12/01/2005 | US20050262947 Pressure sensor and method for operating a pressure sensor |
| 12/01/2005 | US20050262942 Apparatus and method for anchoring micromachined structures |
| 12/01/2005 | US20050262941 Gyro-sensor comprising a plurality of component units, and fabricating method thereof |
| 12/01/2005 | DE102004024285A1 Microstructure component for automotive and medical measuring and sensing has membrane supported by pore wall layers in macropores |
| 12/01/2005 | DE102004023063A1 Mikromechanische piezoresistive Drucksensorenvorrichtung Micromechanical piezoresistive pressure sensors device |
| 12/01/2005 | DE102004022831A1 Sensor system for diagnostic and safety system used to provide crash protection in an automobile |
| 12/01/2005 | DE102004022830A1 Sensor system/trigger sensor, suitable for diagnostic safety device, especially accident protection device for motor vehicle, has elastic coupling coating/viscoelastic coupling coating for acoustic wave coupling |
| 12/01/2005 | DE102004022822A1 Motor vehicle sensor, for detecting impact sound, has measured-value sensor for detecting impact sound together with sensing elements coupled to vehicle's structure |
| 12/01/2005 | DE102004022808A1 Sensor system/trigger sensor suitable, for diagnostic safety device, especially accident protection device for motor vehicle, has elastic coupling coating/viscoelastic coupling coating for acoustic wave coupling |
| 11/30/2005 | EP1599736A1 Capacitive acceleration sensor |