Patents
Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
02/2006
02/09/2006WO2006013741A1 Tortional resonator and filter using this
02/09/2006WO2006013301A1 High-deformation composite microresonator
02/09/2006WO2006013119A1 Microstructured sensor and method for production thereof
02/09/2006WO2005114840A3 Mems waveform generator and adiabatic logic circuits using the same
02/09/2006WO2005078772A8 Method and apparatus for making a mems scanner
02/09/2006US20060030842 Probe for an optical near field microscope with improved scattered light suppression and method for producing the same
02/09/2006US20060027891 Sacrificial layer technique to make gaps in MEMS applications
02/09/2006US20060027839 Micromachine and manufacturing method
02/09/2006US20060027523 Micromachined fluidic device and method for making same
02/09/2006DE10352383B4 Halbleiterchip mit integriertem Mikrosensor Semiconductor chip with integrated micro-sensor
02/08/2006EP1623203A2 Sensor platform using a non-horizontally oriented nanotube element
02/08/2006EP1623188A1 Quantum tunnelling transducer device
02/08/2006EP1558915A4 Multiplex illuminator and device reader for microcantilever array
02/08/2006EP1289660B1 High-performance system for parallel and selective dispensing of micro-droplets
02/08/2006CN1732393A High energy, low energy density, radiation-resistant optics used with micro-electromechical devices
02/08/2006CN1732123A Method of forming semiconductor devices through epitaxy
02/08/2006CN1240993C Angular rate sensor
02/07/2006US6996051 Data storage module suspension system having primary and secondary flexures
02/07/2006US6995890 Interference display unit
02/07/2006US6995885 Vibrating mirror, optical scanner using vibrating mirror, and image reproducing and forming apparatus
02/07/2006US6995633 Micromachine vibration filter
02/07/2006US6995495 2-D actuator and manufacturing method thereof
02/07/2006US6995440 MEMS switch having hexsil beam and method of integrating MEMS switch with a chip
02/07/2006US6995040 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
02/07/2006US6995034 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
02/07/2006US6994950 Method for integrating micro- and nanoparticles into MEMS and apparatus including the same
02/07/2006US6994420 Print assembly for a wide format pagewidth inkjet printer, having a plurality of printhead chips
02/07/2006US6994314 Valves activated by electrically active polymers or by shape-memory materials, device containing same and method for using same
02/07/2006US6994115 Thermally actuated microvalve device
02/07/2006US6994030 Pyrotechnic microactuators for microsystems
02/02/2006WO2006012104A1 Mems gyroscope with horizontally oriented drive electrodes
02/02/2006WO2006011449A1 Mems filter device and manufacturing method thereof
02/02/2006US20060023995 Vertical offset structure and method for fabricating the same
02/02/2006US20060021651 Liquid delivery device
02/01/2006EP1620352A2 Multi-stable micro electromechanical switches and methods of fabricating same
02/01/2006EP1620350A1 A micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays
02/01/2006EP1620349A2 Mems actuators
02/01/2006EP1620256A2 Nanofiber surfaces for use in enhanced surface area applications
02/01/2006EP1509802A4 Bulk silicon mirrors with hinges underneath
02/01/2006CN1729086A Micro-mechanical thermo structure and method for manufacturing such micro-mechanical structure
02/01/2006CN1727029A Active mode mixer for microflow and mixing method
02/01/2006CN1239939C Electromechanical conformal optical grating device having improved optical efficiency and contrast
01/2006
01/31/2006US6992474 Movement actuator/sensor systems
01/31/2006US6991957 Micro-machined electromechanical system (MEMS) accelerometer device having arcuately shaped flexures
01/31/2006US6991953 Microelectronic mechanical system and methods
01/26/2006WO2006007830A1 Production of a thin piezoelectric and pyroelectric layer on a substrate
01/26/2006WO2005089465A3 Electromechanical three-trace junction devices
01/26/2006US20060019027 Method for forming microelectronic spring structures on a substrate
01/26/2006US20060018053 Data storage module suspension system
01/26/2006US20060018048 Method and apparatus for controlling deformable actuators
01/26/2006US20060017689 Light modulator with concentric control-electrode structure
01/26/2006US20060016055 Piezoelectric composite apparatus and a method for fabricating the same
01/26/2006DE4444647B4 Verfahren zur Detektion und Impulsspektrometrie submikroskopischer Partikel mittels Kraftsensoren Method for the detection of submicroscopic particles and Impulsspektrometrie using force sensors
01/26/2006DE112004000353T5 Kapazitiver Beschleunigungssensor Capacitive Accelerometer
01/25/2006EP1619165A2 Electrostatically driven carbon nanotube gripping apparatus
01/25/2006EP1619164A2 Vertical offset structure and method for fabricating the same
01/25/2006EP1618427A2 Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
01/25/2006EP1618064A1 Method of manufacturing a micro-mechanical element
01/25/2006EP1448379B1 Fibre-reinforced microactuator
01/25/2006EP1144973B1 Method of producing calibration structures in semiconductor substrates
01/25/2006CN1238758C Variable light attenuator of micro electromechanical system
01/25/2006CN1238749C Magnetic actuator
01/25/2006CN1238721C Sample analyzing method
01/25/2006CN1238686C Mechanical shape variable detection sensor
01/25/2006CN1238684C Apparatus and method for controlling fluid in micro-machined boiler
01/24/2006US6990265 Monolithic reconfigurable optical multiplexer systems and methods
01/24/2006US6989921 Magnetically actuated micro-electro-mechanical apparatus and method of manufacture
01/24/2006US6988841 Pagewidth printer that includes a computer-connectable keyboard
01/24/2006US6988788 Ink jet printhead chip with planar actuators
01/24/2006US6988787 Ink ejection mechanism having a thermal actuator that undergoes rectilinear motion
01/24/2006US6988317 Valve integrally associated with microfluidic liquid transport assembly
01/19/2006US20060014392 Method for producing a semiconductor component and a semiconductor component produced according to the method
01/19/2006US20060012844 Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image
01/19/2006US20060012343 Micro-electromechanical variable capactor
01/19/2006DE102004030380A1 Mikromechanische Membran- oder Brückenstruktur, insbesondere mikromechanischer Sensor oder Aktor, und Verfahren zum Selbsttest einer solchen Micromechanical membrane or bridge structure, in particular micromechanical sensor or actuator, and method for self-testing of such
01/18/2006EP1617227A2 Inertial sensor
01/18/2006EP1616159A1 Honeycomb-structured electromagnetic radiation thermal detector
01/18/2006EP1615850A2 Thermal actuator
01/18/2006EP1207958B8 Sensor for microfluid handling system
01/18/2006CN1723571A Controlling electromechanical behavior of structures within a microelectromechanical systems device
01/18/2006CN1721993A System and method for moving an object employing piezo actuators
01/17/2006US6987901 Optical switch with 3D waveguides
01/17/2006US6987435 Micro-electromechanical actuators
01/17/2006US6986613 Keyboard
01/12/2006WO2005101434A3 Low consumption and low actuation voltage microswitch
01/12/2006US20060008201 Electrode configuration for piano mems micromirror
01/12/2006US20060007515 Surface lubrication in microstructures
01/12/2006US20060006484 Functional material for micro-mechanical systems
01/12/2006US20060006376 Strongly textured atomic ridge nanowindows
01/12/2006DE102004011145B4 Microphone e.g. semiconductor-condenser microphone, for use in mobile phone, has membrane structure with boundary region, which is not movable due to pressure, on which carrier is attached, where region and opposing structure have recesses
01/11/2006EP1613969A1 Micromechanical component having an adjustable resonance frequency
01/11/2006EP1613548A2 Method for manufacturing an electro-mechanical component and an electro.mechanical component, such as a strained si fin-fet
01/11/2006CN1720193A Micromachine and method of producing the same
01/10/2006US6985651 Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same
01/10/2006US6985650 Thermal actuator and an optical waveguide switch including the same
01/10/2006US6983594 Shape memory thin micro-actuator, and method for producing the same
01/05/2006DE102004029084A1 Force sensor, has closure diaphragm for locking recess to form cavity that is filled with transmitting medium which transforms influencing force on closure diaphragm to deform sensor diaphragm
01/05/2006DE10122928B4 Kapazitiver elektrostatischer Beschleunigungssensor, Verwendung des kapazitivenelektrostatischen Beschleunigungssensors in einem Winkelbeschleunigungssensor und in einem elektrostatischen Auslöser Electrostatic capacitive acceleration sensor using the acceleration sensor kapazitivenelektrostatischen at an angle acceleration sensor, and in an electrostatic shutter
01/05/2006DE10061205B4 Mikromechanischer Mikrowellenschalter Micromechanical microwave switch
01/04/2006EP1611581A2 Methods and apparatus for selectively updating memory cell arrays
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