| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 03/29/2006 | CN1753718A Component separating device, method of producing the device, and method of separating component by using the device |
| 03/29/2006 | CN1752794A Locally deformable mirror comprising electroactive material whose thickness can be varied by means of electrical effects |
| 03/28/2006 | US7019955 MEMS digital-to-acoustic transducer with error cancellation |
| 03/28/2006 | US7019324 Strongly textured atomic ridge and dot MOSFETs, sensors and filters |
| 03/28/2006 | US7018862 Micromachined electromechanical device |
| 03/28/2006 | US7018550 Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void |
| 03/28/2006 | US7018052 Projection TV with improved micromirror array |
| 03/28/2006 | US7017593 Pipe washing method and pipe washing apparatus |
| 03/28/2006 | US7017410 Isolated resonator gyroscope with a drive and sense plate |
| 03/23/2006 | WO2006031846A2 Self-assembled monolayers on the surface of gold coated microcantilevers for application to chemical sensing and method of operation |
| 03/23/2006 | WO2005023698A8 Micro-mechanical device comprising a suspended element which is connected to a support by means of a pier, and production method thereof |
| 03/23/2006 | DE102005043906A1 Sensor vom kapazitiven Typ für eine physikalische Größe, der einen Sensorchip und einen Schaltkreischip aufweist The capacitance type sensor for a physical quantity that has a sensor chip and a circuit chip |
| 03/23/2006 | DE102005034927A1 Gelenkkonstruktion für eine Mikrospiegelvorrichtung Joint construction for a micromirror device |
| 03/23/2006 | DE102004036433A1 Mikromechanisches Bauteil und Verfahren zur Herstellung eines solchen Bauteils Micromechanical element and process for producing such a component |
| 03/23/2006 | CA2580593A1 Self-assembled monolayers on the surface of gold coated microcantilevers for application to chemical sensing and method of operation |
| 03/22/2006 | EP1637914A1 Locally deformable mirror comprising electroactive material whose thickness can be varied by means of electrical effects |
| 03/22/2006 | EP1637498A1 MOS transistor with deformable gate |
| 03/22/2006 | EP1414738B1 Micro-machined ultrasonic transducer (mut) substrate that limits the lateral propagation of acoustic energy |
| 03/22/2006 | EP1334060B1 Micromechanical component and corresponding production method |
| 03/22/2006 | CN1246911C Method for manufacturing thin-film structure |
| 03/22/2006 | CN1246214C Thermal actuator shaped for more uniform temp.distribution |
| 03/21/2006 | US7016095 Method for fabricating an interference display unit |
| 03/21/2006 | US7015620 Method for supplying multiple voltages to a movable part of a MEMS device |
| 03/21/2006 | US7015056 Electro-mechanical device having a charge dissipation layer and a method of manufacture therefor |
| 03/21/2006 | US7014165 Flow control valve and flow control valve apparatus using the same |
| 03/16/2006 | US20060057031 For use in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems |
| 03/16/2006 | US20060055756 Wide format printer with a plurality of printhead integrated circuits |
| 03/16/2006 | US20060055001 Semiconductor device having multiple substrates |
| 03/16/2006 | US20060054984 MOS transistor with a deformable gate |
| 03/16/2006 | US20060054972 Component and method for producing the same |
| 03/16/2006 | US20060054228 Microfabricated elastomeric valve and pump systems |
| 03/16/2006 | US20060053871 Embedded piezoelectric microcantilever sensors |
| 03/16/2006 | DE102004044222A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 03/16/2006 | DE102004037902A1 Verfahren zur Abscheidung einer Anti-Haftungsschicht A method of depositing an anti-adhesive layer |
| 03/15/2006 | EP1634110A1 Electromagnetic radiation detectors having a microelectromecanical shutter device |
| 03/14/2006 | US7012731 Packaged micromirror array for a projection display |
| 03/14/2006 | US7012726 MEMS devices with unreleased thin film components |
| 03/14/2006 | US7012322 Method for reducing harmonic distortion in comb drive devices |
| 03/14/2006 | US7011415 Yokeless hidden hinge digital micromirror device |
| 03/14/2006 | US7011378 Proportional micromechanical valve |
| 03/09/2006 | WO2006025456A1 Bimorph element, bimorph switch, mirror element, and process for producing them |
| 03/09/2006 | WO2006025210A1 Micromachine device |
| 03/09/2006 | US20060050373 Probe for an optical near field microscope and method for producing the same |
| 03/09/2006 | US20060050189 Polymer actuator |
| 03/09/2006 | US20060050108 Ink jet printhead chip with predetermined micro-electromechanical systems height |
| 03/09/2006 | US20060049895 Micromachine and method of producing the same |
| 03/09/2006 | US20060049471 Encapsulated microstructure and method of producing one such microstructure |
| 03/09/2006 | DE102005041577A1 Sensor für eine physikalische Grösse Sensor for a physical quantity |
| 03/09/2006 | DE102004043357A1 Mikromechanisches Sensorelement The micromechanical sensor element |
| 03/09/2006 | DE102004043356A1 Sensorelement mit getrenchter Kaverne Sensor element with getrenchter cavern |
| 03/08/2006 | EP1631851A2 Micromirrors with off-angle electrodes and stops |
| 03/08/2006 | EP1631812A2 Sensor platform using a horizontally oriented nanotube element |
| 03/08/2006 | EP1305258B1 Ceramic microelectromechanical structure |
| 03/08/2006 | CN1745326A SLM addressing methods |
| 03/07/2006 | US7010188 Electrode configuration for piano MEMs micromirror |
| 03/07/2006 | US7009747 Micro-mirror and a method for fabricating the same |
| 03/07/2006 | US7009745 Coating for optical MEMS devices |
| 03/07/2006 | US7009154 for DNA-amplification process (polymerase chain reaction process) wherein precise temperature control in the various phases is required |
| 03/07/2006 | US7008817 Method for manufacturing micro electro-mechanical systems using solder balls |
| 03/07/2006 | US7008812 Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation |
| 03/07/2006 | US7007471 Unilateral thermal buckle beam actuator |
| 03/02/2006 | US20060046329 Method for manufacturing a silicon sensor and a silicon sensor |
| 03/01/2006 | EP1629507A2 Scanning probe microscopy probe and method for scanning probe contact printing |
| 03/01/2006 | EP1332547B1 Electrostatic/pneumatic actuators for active surfaces |
| 03/01/2006 | EP1252028A4 Temporary bridge for micro machined structures |
| 03/01/2006 | CN1244141C Thin film structural body and producing method thereof |
| 02/28/2006 | US7006275 Packaged micromirror array for a projection display |
| 02/28/2006 | US7005775 Microfabricated torsional drive utilizing lateral electrostatic force |
| 02/28/2006 | US7005314 Sacrificial layer technique to make gaps in MEMS applications |
| 02/28/2006 | US7005078 Micromachined fluidic device and method for making same |
| 02/28/2006 | US7004184 Compositions and methods for liquid metering in microchannels |
| 02/23/2006 | WO2005050666A3 An oscillating probe with a virtual probe tip |
| 02/23/2006 | US20060040505 Method for manufacturing a micro-electromechanical device and micro-electromechanical device obtained therewith |
| 02/23/2006 | US20060039442 Thermal movement sensor |
| 02/23/2006 | US20060038301 Micro structure with interlock configuration |
| 02/23/2006 | US20060037932 Method and micromechanical component |
| 02/22/2006 | EP1627675A1 Component separating device, method of producing the device, and method of separating component by using the device |
| 02/22/2006 | CN1243277C Variable light attennator of micro electromechanical system |
| 02/22/2006 | CN1242913C Gyroscope and fabrication method thereof |
| 02/22/2006 | CN1242912C Actuator element |
| 02/21/2006 | US7002787 Capacitor apparatus of the capacity variable type |
| 02/21/2006 | US7002730 Mirror device, optical switch, thin film elastic structure, and thin elastic structure producing method |
| 02/21/2006 | US7002215 Floating entrance guard for preventing electrical short circuits |
| 02/21/2006 | US7000473 MEM structure having reduced spring stiction |
| 02/16/2006 | WO2006017009A2 Surface lubrication microstructures |
| 02/16/2006 | WO2006015901A1 Method for depositing a nonstick coating |
| 02/16/2006 | WO2005078509A3 Mems scanning system with improved performance |
| 02/16/2006 | US20060033975 Photonic MEMS and structures |
| 02/16/2006 | DE102004037304A1 Mikrostrukturierter Sensor und Verfahren zu seiner Herstellung Microstructured sensor and method for its preparation |
| 02/15/2006 | EP1626283A1 Micro-electromechanical structure, in particular accelerometer, with improved insensitivity to thermomechanical stresses |
| 02/15/2006 | EP1625659A1 Integrated resonators and time base incorporating said resonators |
| 02/15/2006 | CN1733591A Beam switch structures and methods |
| 02/15/2006 | CN1242285C Micro mirror unit and method of making the same |
| 02/15/2006 | CN1241826C System and method for constraining totally released micro-components |
| 02/14/2006 | US6999650 Optical switch |
| 02/14/2006 | US6999236 Optical-interference type reflective panel and method for making the same |
| 02/14/2006 | US6998763 Ceramic device |
| 02/14/2006 | US6998059 Method for manufacturing a silicon sensor and a silicon sensor |
| 02/14/2006 | US6997040 Gas sensor and fabrication method thereof |
| 02/09/2006 | WO2006014203A1 Functional material for micro-mechanical systems |