| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 05/02/2006 | US7038830 Micro-oscillation element |
| 05/02/2006 | US7038826 Movable micro-body |
| 05/02/2006 | US7038355 Tunable microresonator on an insulating beam deformable by the difference in thermal expansion coefficients |
| 05/02/2006 | US7038301 Contact switch for high frequency application |
| 05/02/2006 | US7037438 Method for production of a semiconductor component and a semiconductor component produced by said method |
| 05/02/2006 | US7036373 MEMS gyroscope with horizontally oriented drive electrodes |
| 05/02/2006 | US7036312 MEMS actuators |
| 04/27/2006 | WO2006043542A1 Electromechanical switch |
| 04/27/2006 | WO2005078508A3 Method and apparatus for scanning a beam of light |
| 04/27/2006 | WO2005078506A3 High performance mems scanner |
| 04/27/2006 | WO2004099629A3 Vertical displacement device |
| 04/27/2006 | DE102004051468A1 Verfahren zum Montieren von Halbleiterchips und entsprechende Halbleiterchipanordnung A method for mounting semiconductor chips and corresponding semiconductor chip system |
| 04/26/2006 | EP1650158A1 Silicon-on-insulator substrate, its fabrication method and MEMS floating structure formed therein |
| 04/26/2006 | CN1764843A Bending beam accelerometer with differential capacitive pickoff |
| 04/26/2006 | CN1764595A Micro-electro-mechanical systems (MEMS) device and system and method of producing the same |
| 04/26/2006 | CN1762786A System and method for protecting microelectromechanical systems array using structurally reinforced back-plate |
| 04/25/2006 | US7035591 Ceramic microelectromechanical structure |
| 04/25/2006 | US7034981 Optical modulator, display device and manufacturing method for same |
| 04/25/2006 | US7033000 Tapered multi-layer thermal actuator and method of operating same |
| 04/20/2006 | WO2006040654A2 Microsystem and method for positioning a second element with respect to a first element in a microsystem |
| 04/20/2006 | US20060082379 Parallel, individually addressable probes for nanolithography |
| 04/20/2006 | DE19615329B4 Verfahren zur Herstellung einer verformbaren Spiegelvorrichtung A method of manufacturing a deformable mirror device |
| 04/20/2006 | DE10318995B4 Verfahren zur Herstellung von durchgängigen Membranen A process for producing continuous membranes |
| 04/20/2006 | DE102004050764A1 Micromechanical component, specifically for membrane sensor, comprising substrate and membrane with height modulation over cavity in the substrate to improve mechanical robustness |
| 04/20/2006 | CA2580441A1 Microsystem and method for positioning a second element with respect to a first element in a microsystem |
| 04/19/2006 | EP1647522A2 Nanoelectromechanical transistors and switch systems |
| 04/19/2006 | EP1057068B1 Deflectable micro-mirror |
| 04/18/2006 | US7031041 Micro-oscillating element provided with torsion bar |
| 04/18/2006 | US7030537 Movable MEMS-based noncontacting device |
| 04/18/2006 | US7030536 Micromachined ultrasonic transducer cells having compliant support structure |
| 04/18/2006 | US7030416 Micro electro mechanical system apparatus |
| 04/18/2006 | US7029101 Tapered multi-layer thermal actuator and method of operating same |
| 04/13/2006 | WO2006038395A1 Electronic apparatus using anodic bonded structure |
| 04/13/2006 | DE4431478B4 Aufhängung für mikromechanische Struktur und mikromechanischer Beschleunigungssensor Suspension for micromechanical structure and micro-mechanical acceleration sensor |
| 04/13/2006 | DE4339190B4 Halbleiter-Beschleunigungsmesser Semiconductor accelerometer |
| 04/13/2006 | DE102004048608A1 Erhöhung der Haftkraft einer Klebeverbindung in Gehäusen Increase the adhesive strength of an adhesive bond in enclosures |
| 04/12/2006 | EP1646145A1 Electromechanical filter and electric circuit and electric apparatus employing it |
| 04/12/2006 | EP1645902A2 Selectable capacitance circuit |
| 04/12/2006 | EP1645847A1 Temperature compensated micro-electromechanical device and method of temperature compensation in a micro-electromechanical device |
| 04/12/2006 | EP1121619B1 Membrane-actuated charge controlled mirror |
| 04/11/2006 | US7027282 Method and arrangement for controlling micromechanical element |
| 04/11/2006 | US7027205 Methods and apparatus for selectively updating memory cell arrays |
| 04/11/2006 | US7026899 Push/pull actuator for microstructures |
| 04/11/2006 | US7026697 Microstructures comprising a dielectric layer and a thin conductive layer |
| 04/11/2006 | US7026695 Method and apparatus to reduce parasitic forces in electro-mechanical systems |
| 04/11/2006 | US7026602 Electromagnetic radiation detectors having a microelectromechanical shutter device |
| 04/11/2006 | US7025619 Sockets for microassembly |
| 04/11/2006 | US7025323 Low power integrated pumping and valving arrays for microfluidic systems |
| 04/06/2006 | WO2006036903A1 Methods for visually inspecting interferometric modulators for defects |
| 04/06/2006 | WO2006036642A2 Method of making a reflective display device using thin film transistor production techniques |
| 04/06/2006 | WO2006036601A2 Process control monitors for the fabrication interferometric modulators |
| 04/06/2006 | WO2006036560A2 Mems switches with deforming membranes |
| 04/06/2006 | WO2006036542A1 Interferometric optical modulator using filler material and method |
| 04/06/2006 | WO2006036518A2 Method of fabricating a free-standing microstructure |
| 04/06/2006 | WO2006036435A1 Controlling electromechanical behavior of structures within a microelectromechanical systems device |
| 04/06/2006 | WO2006036399A1 Mirror and mirror layer for optical modulator and method |
| 04/06/2006 | WO2006035762A1 Method for fabricating resonance vibration device |
| 04/06/2006 | WO2006013137A3 Method for etching a layer on a substrate |
| 04/06/2006 | US20060072224 Magnetically actuated microelectromechanical systems actuator |
| 04/06/2006 | US20060070440 Isolated resonator gyroscope with a drive and sense plate |
| 04/06/2006 | DE102004044982A1 Drucksensorvorrichtung und Verfahren zum Herstellen derselben Pressure sensing device and methods for manufacturing the same |
| 04/06/2006 | CA2581936A1 Mirror and mirror layer for optical modulator and method |
| 04/06/2006 | CA2581670A1 Controlling electromechanical behavior of structures within a microelectromechanical systems device |
| 04/05/2006 | EP1643290A1 Monolithic MEMS device having a balanced cantilever plate |
| 04/05/2006 | EP1643288A2 Inverse interferometric modulator device |
| 04/05/2006 | EP1642158A1 High energy, low energy density, radiation-resistant optics used with micro-electromechanical devices |
| 04/05/2006 | EP1641710A2 Micromechanical apparatus and method of forming a micromechanical device layer |
| 04/05/2006 | EP1641709A2 Method for separating a useful layer and component obtained by said method |
| 04/05/2006 | EP1410436A4 Parallel, individually addressable probes for nanolithography |
| 04/05/2006 | CN1757080A Micro-electromechanical inductive switch |
| 04/05/2006 | CN1249760C Static relay and communication device using static relay |
| 04/05/2006 | CN1249398C Method for measuring tunnelling current between elongate conductors |
| 04/04/2006 | US7023603 Micro-mirror device including dielectrophoretic microemulsion |
| 04/04/2006 | US7023304 Micro-magnetic latching switch with relaxed permanent magnet alignment requirements |
| 04/04/2006 | US7023124 Micro-actuator array, micro-actuator device, optical switch, array, and optical switch system |
| 04/04/2006 | US7022249 Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method |
| 04/04/2006 | US7022245 Fabrication of a reflective spatial light modulator |
| 03/30/2006 | WO2006033271A1 High frequency circuit device |
| 03/30/2006 | WO2006032729A1 A capacitive sensor and a method for manufacturing the capacitive sensor |
| 03/30/2006 | US20060068564 Micromachined electromechanical device |
| 03/30/2006 | US20060066934 Double-electret mems actuator |
| 03/30/2006 | US20060066680 Micro-electromechanical liquid ejection device with motion amplification |
| 03/30/2006 | DE19704359B4 Halbleitersensor für eine physikalische Größe und Verfahren zu seinem Betrieb Semiconductor sensor for a physical quantity and method for its operation |
| 03/30/2006 | DE19619921B4 Verfahren zum Herstellen einer Halbleitervorrichtung mit Funktionselement und Schutzkappe A method of manufacturing a semiconductor device having a functional element and cap |
| 03/30/2006 | DE102005043645A1 Halbleitersensor für eine physikalische Grösse und Verfahren zur Herstellung eines solchen A semiconductor sensor for a physical quantity and methods for producing such |
| 03/30/2006 | DE10035564B4 Mikromechanisches Gehäuse Micromechanical housing |
| 03/29/2006 | EP1640781A2 Scanning device and fabrication method thereof |
| 03/29/2006 | EP1640777A2 System and method for implementation of interferometric modulator displays |
| 03/29/2006 | EP1640775A1 Interferometric modulator display having patterned spacers for backplates and method of making the same |
| 03/29/2006 | EP1640772A1 System and method of providing MEMS device with anti-stiction coating |
| 03/29/2006 | EP1640771A1 Interferometric modulator with a thermal actuator as driving element |
| 03/29/2006 | EP1640768A1 Method of selective etching using etch stop layer |
| 03/29/2006 | EP1640335A2 Packaging device for electromechanical integrated microsystems und its method of fabrication |
| 03/29/2006 | EP1640318A2 Methods of fabricating interferometric modulators by selectively removing a material |
| 03/29/2006 | EP1640317A2 Methods of fabricating interferometric modulators by selectively removing a material |
| 03/29/2006 | EP1640316A2 Device and method for display memory using manipulation of mechanical response |
| 03/29/2006 | EP1640315A2 System and method of providing a regenerating protective coating in a MEMS device |
| 03/29/2006 | EP1640314A2 Method and device for compensating for color shift as a function of angle of view |
| 03/29/2006 | EP1640313A2 Apparatus and method for reducing perceived color shift |
| 03/29/2006 | CN1753832A An accelerometer |