| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 06/15/2006 | US20060123907 Pyramid socket suspension |
| 06/14/2006 | CN1788222A Micromirrors with off-angle electrodes and stops |
| 06/14/2006 | CN1785794A Method of predetermining micro structure mechanical property |
| 06/13/2006 | US7061098 Electronic component and method for its production |
| 06/13/2006 | US7061063 Microstructure and its fabrication method |
| 06/13/2006 | US7060522 Membrane structures for micro-devices, micro-devices including same and methods for making same |
| 06/08/2006 | WO2006058516A1 Device for gap adjustment |
| 06/08/2006 | WO2005124827A3 Improved method and apparatus for the etching of microstructures |
| 06/08/2006 | WO2005094535A3 A torsional hinged mirror assembly with central spines and perimeter ridges to reduce flexing |
| 06/08/2006 | DE19941363B4 Verfahren zur Herstellung eines Mikroaktorbauteils A method for producing a Mikroaktorbauteils |
| 06/08/2006 | DE102004058103A1 Einrichtung zur Spalteinstellung Means for gap adjustment |
| 06/07/2006 | EP1663850A1 Process for fabricating a micro-electro-mechanical system with movable components |
| 06/07/2006 | EP1476780A4 Folded longitudinal torsional hinge for gimbaled mems mirror hinge |
| 06/07/2006 | EP1116063B1 A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
| 06/07/2006 | CN1784748A Methods and apparatus for selectively updating memory cell arrays |
| 06/07/2006 | CN1784355A Radiation sensor, wafer, sensor module, and method for the production of a radiation sensor |
| 06/07/2006 | CN1258795C Electrostatic driver and its regulating method and device for using said electrostatic driver |
| 06/06/2006 | US7057784 Mirror rocking member for optical deflector |
| 06/06/2006 | US7057783 Light deflector, method of manufacturing light deflector and torsion oscillating member |
| 06/06/2006 | US7057262 High reflector tunable stress coating, such as for a MEMS mirror |
| 06/06/2006 | US7057251 MEMS device made of transition metal-dielectric oxide materials |
| 06/06/2006 | US7057246 Transition metal dielectric alloy materials for MEMS |
| 06/06/2006 | US7056759 Method for making a microelectromechanical system using a flexure protection layer |
| 06/06/2006 | US7056758 Electromechanical memory array using nanotube ribbons and method for making same |
| 06/06/2006 | US7055797 Micro-actuator, fabrication method thereof, and micro-actuating valve |
| 06/01/2006 | WO2006056945A1 An electrophoretic display panel |
| 06/01/2006 | WO2006040654A3 Microsystem and method for positioning a second element with respect to a first element in a microsystem |
| 06/01/2006 | US20060115202 Fibre optic based semiconductor micro sensors for sensing pressure or temperature, fabrication methods of said sensors, and a method of securing an optical fibre to a silicon block |
| 06/01/2006 | US20060113644 Method for reducing harmonic distortion in comb drive devices |
| 05/31/2006 | EP1661245A2 Shell type actuator |
| 05/31/2006 | EP1661240A2 Thermal-mechanical signal processing |
| 05/31/2006 | EP1299761B1 Optical mems switching appray with embedded beam-confining channels and method of operating same |
| 05/31/2006 | EP1272888B1 Magnetically actuated microelectromechanical systems actuator |
| 05/31/2006 | CN1781050A Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
| 05/31/2006 | CN1780786A Micro-oscillating member, light-deflector, and image-forming apparatus |
| 05/30/2006 | US7053730 Fabricating methods for air-gap type FBARs and duplexers including securing a resonating part substrate to a cavity forming substrate |
| 05/30/2006 | US7053519 Electrostatic bimorph actuator |
| 05/30/2006 | US7053488 Micro-mirror package |
| 05/30/2006 | US7053456 Electronic component having micro-electrical mechanical system |
| 05/30/2006 | US7052926 Fabrication of movable micromechanical components employing low-cost, high-resolution replication technology method |
| 05/30/2006 | US7052623 Method for processing silicon using etching processes |
| 05/30/2006 | US7052545 High throughput screening of crystallization of materials |
| 05/30/2006 | CA2320458C Mems variable optical attenuator |
| 05/26/2006 | WO2006054771A1 Nano tweezers and scanning probe microscope having the same |
| 05/26/2006 | WO2006036601A3 Process control monitors for the fabrication interferometric modulators |
| 05/25/2006 | US20060110895 Method of fabricating silicon-based MEMS devices |
| 05/25/2006 | US20060110843 Method of manufacturing an external force detection sensor |
| 05/24/2006 | EP1658232A1 Micro-mechanical device comprising a suspended element which is connected to a support by means of a pier, and production method thereof |
| 05/24/2006 | EP1337757B1 Valves activated by electrically active polymers or by shape-memory materials, device containing same and method for using same |
| 05/24/2006 | DE19503236B4 Sensor aus einem mehrschichtigen Substrat Sensor of a multilayer substrate |
| 05/23/2006 | US7050211 Torsional hinged mirror assembly with central spines and perimeter ridges to reduce flexing |
| 05/23/2006 | US7049915 Bistable magnetic actuator |
| 05/23/2006 | US7049806 Microelectricalmechanical system with improved beam suspension |
| 05/23/2006 | US7049165 Method of manufacturing an external force detection sensor |
| 05/23/2006 | US7049164 Microelectronic mechanical system and methods |
| 05/23/2006 | US7049051 Process for forming and acoustically connecting structures on a substrate |
| 05/23/2006 | US7047808 Accelerometer |
| 05/18/2006 | US20060101912 Micromechanical device with thinned cantilever structure and related methods |
| 05/17/2006 | EP1657553A2 Method of manufacturing an external force detection sensor |
| 05/17/2006 | EP1173773A4 Dynamically balanced microelectromechanical devices |
| 05/17/2006 | CN1773725A MOS transistor with deformable gate |
| 05/16/2006 | US7046873 Optical switch device |
| 05/16/2006 | US7045459 Thin film encapsulation of MEMS devices |
| 05/16/2006 | US7045382 Method for producing micromechanic sensors and sensors produced by said method |
| 05/16/2006 | US7043910 Thermal actuator |
| 05/16/2006 | CA2526731A1 Improved microcantilever stress sensor for fluid analysis |
| 05/11/2006 | US20060098311 Micro-mirror and a method for fabricating the same |
| 05/11/2006 | US20060096947 Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void |
| 05/11/2006 | US20060096944 Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device |
| 05/11/2006 | US20060096078 Device for the actively-controlled and localised deposition of at least one biological solution |
| 05/11/2006 | DE19820816B4 Bondpadstruktur und entsprechendes Herstellungsverfahren Bondpadstruktur and manufacturing method thereof |
| 05/11/2006 | DE102004053261A1 Mikromechanischer Sensor zur chemischen Analyse Micromechanical sensor for chemical analysis |
| 05/11/2006 | DE10100438B4 Verfahren zur Herstellung eines Sensorelements und Sensorelement A process for producing a sensor element and sensor element |
| 05/10/2006 | EP1655610A2 Method of manufacturing an external force detection sensor |
| 05/10/2006 | EP1654546A1 A three-axis accelerometer |
| 05/10/2006 | EP1540661B1 Sensor with cantilever and optical resonator |
| 05/10/2006 | CN1771575A Micro relay |
| 05/10/2006 | CN1771191A Method for fabricating microstructure and microstructure |
| 05/09/2006 | US7042621 Micromirror device |
| 05/09/2006 | US7042319 Thin film electromagnet and switching device comprising it |
| 05/09/2006 | US7042015 Semi-transparent power monitor integrated with a light producing module |
| 05/09/2006 | US7041593 Method for manufacturing thin-film structure |
| 05/09/2006 | US7041435 Method of manufacturing micro actuated blazed grating |
| 05/09/2006 | US7041225 Micromechanical component and method for producing the same |
| 05/09/2006 | US7041224 Method for vapor phase etching of silicon |
| 05/09/2006 | US7040738 Printhead chip that incorporates micro-mechanical translating mechanisms |
| 05/09/2006 | US7040338 Microfabricated elastomeric valve and pump systems |
| 05/09/2006 | US7040173 Pressure sensor and method for operating a pressure sensor |
| 05/04/2006 | WO2006045914A1 Microsystem comprising a deformable bridge |
| 05/04/2006 | WO2006036560A3 Mems switches with deforming membranes |
| 05/04/2006 | US20060092228 Micro-electromechanical liquid ejection device with a thermal actuator that undergoes rectilinear motion |
| 05/04/2006 | US20060092227 Printhead integrated circuit with planar actuators |
| 05/04/2006 | US20060092226 Motion transmitting structure for a nozzle arrangement of a printhead chip for an inkjet printhead |
| 05/04/2006 | DE102005039465A1 Micromachined ultrasonic transducer device for medical diagnostic ultrasound imaging system, has unit switch cells, each includes switches for closing pathways to connection point that is connected to respective sensor |
| 05/03/2006 | EP1652219A2 Anchors for microelectromechanical systems having an soi substrate, and method of fabricating same |
| 05/03/2006 | EP1347937B1 Micromechanical component and corresponding production method |
| 05/03/2006 | CN1768003A Thermal actuator |
| 05/03/2006 | CN1254432C Micro-machinery component and method of manufacture |
| 05/02/2006 | US7039268 Optical device |
| 05/02/2006 | US7038834 Optical deflector and method of producing same |