| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
|---|
| 07/26/2006 | EP1684108A1 Electromagnetic scanning micro-mirror and optical scanning device using the same |
| 07/26/2006 | EP1683199A2 Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems |
| 07/26/2006 | EP1683172A1 Radio-frequency microelectromechanical systems and a method of manufacturing such systems |
| 07/26/2006 | EP1682444A2 A method of manufacturing an electronic device and electronic device |
| 07/26/2006 | EP1625659B1 Integrated resonators and time base incorporating said resonators |
| 07/26/2006 | EP1509324B1 Device for the actively-controlled and localised deposition of at least one biological solution |
| 07/26/2006 | EP1062684A4 Trench isolation for micromechanical devices |
| 07/26/2006 | CN1809745A Nanotube sensor |
| 07/26/2006 | CN1266516C Variable optical attenuator |
| 07/25/2006 | US7082251 Optical device |
| 07/25/2006 | US7081872 Micromirror device using interdigitated cantilevers and applications thereof |
| 07/25/2006 | US7081624 Scanning probe microscopy probes and methods |
| 07/25/2006 | US7081592 Micromechanical switch |
| 07/20/2006 | WO2006075717A1 Torsion resonator and filter using this |
| 07/20/2006 | WO2006075292A1 Micro electromechanical device for tilting a body in two degrees of freedom |
| 07/20/2006 | WO2006075081A1 Micromechanical component with active elements and method for producing a component of this type |
| 07/20/2006 | WO2006036518A3 Method of fabricating a free-standing microstructure |
| 07/20/2006 | US20060157808 Electronic component having micro-electrical mechanical system |
| 07/20/2006 | DE102005001439A1 Electromechanical control element for producing mechanical effect and seizing this by electrical control has electrically isolating polymer body in which conducting or semiconducting clusters are embedded with regular distribution |
| 07/20/2006 | DE102005001116A1 Mikrosystemtechnisches Bauelement Microsystems Technical component |
| 07/19/2006 | EP1423714B1 Microstructure with movable mass |
| 07/19/2006 | CN1805853A Actuator, liquid drop discharge head, ink cartridge, inkjet recording device, micro pump, optical modulation device, and substrate |
| 07/19/2006 | CN1805120A Method of forming separable interface and producing micro-electromechanical film with the method |
| 07/19/2006 | CN1803453A Electrostatic actuator, droplet discharging head, droplet discharging apparatus, electrostatic device |
| 07/19/2006 | CN1265547C Time base comprising integrated micromechanical ring resonator |
| 07/18/2006 | US7079299 Staggered torsional electrostatic combdrive and method of forming same |
| 07/18/2006 | US7078849 Longitudinal piezoelectric optical latching relay |
| 07/18/2006 | US7078778 Micromechanical device |
| 07/18/2006 | US7078337 Selective isotropic etch for titanium-based materials |
| 07/18/2006 | US7077508 Micro-electromechanical liquid ejection device with a thermal actuator that undergoes rectilinear motion |
| 07/13/2006 | WO2006074352A2 Mems passivation with transition metals |
| 07/13/2006 | WO2006073111A1 Mirror device, mirror array, optical switch, mirror device manufacturing method and mirror substrate manufacturing method |
| 07/13/2006 | US20060152793 Micromirror device |
| 07/13/2006 | US20060152785 Micro-oscillating member, light-deflector, and image-forming apparatus |
| 07/13/2006 | US20060152690 Yokeless hidden hinge digital micromirror device |
| 07/13/2006 | CA2530252A1 Photo-sensitive mems structure |
| 07/12/2006 | CN1263674C Production device and production method for silicon-based structure |
| 07/11/2006 | US7075209 Compliant bistable micromechanism |
| 07/11/2006 | US7075081 Method of fabrication of an infrared radiation detector and infrared detector device |
| 07/11/2006 | US7073380 Pyramid socket suspension |
| 07/11/2006 | CA2421934C Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| 07/06/2006 | WO2006070060A1 Oscillating micro-mechanical sensor of angular velocity |
| 07/06/2006 | WO2006070059A1 Oscillating micro-mechanical sensor of angular velocity |
| 07/06/2006 | WO2006036642A3 Method of making a reflective display device using thin film transistor production techniques |
| 07/06/2006 | US20060144948 MEMS scanning mirror with distributed hinges and multiple support attachments |
| 07/06/2006 | US20060144816 Method for separating a useful layer and component obtained by said method |
| 07/05/2006 | EP1677373A2 Method of using pre-formed nanotubes to make carbon nanotube films, layers, ribbons, elements and articles |
| 07/05/2006 | EP1677328A1 Mems switch |
| 07/05/2006 | EP1677133A1 Microcomponent holder and method for manufacture thereof |
| 07/05/2006 | EP1677118A1 Micromachined accelerometer with capacitive combs |
| 07/05/2006 | EP1677117A1 Micromachined accelerometer with capacitive comb structures |
| 07/05/2006 | EP1676810A1 Bi-directional released-beam sensor |
| 07/05/2006 | EP1676809A1 Weighted released-beam sensor |
| 07/05/2006 | CN1798696A Method of manufacturing a micro-mechanical element |
| 07/05/2006 | CN1796952A Force sensor based on Micro-Nano composite structure |
| 07/05/2006 | CN1262864C Optical modulator, display device and its manufacturing method |
| 07/05/2006 | CN1262470C Manufacturing method of flexible micro-electromechanical system changer |
| 07/04/2006 | US7071520 MEMS with flexible portions made of novel materials |
| 07/04/2006 | US7071017 Micro structure with interlock configuration |
| 07/04/2006 | US7070699 Bistable microelectromechanical system based structures, systems and methods |
| 07/04/2006 | US7069795 Sensor using electro active curved helix and double helix |
| 07/04/2006 | CA2270070C Zero tcf thin film resonator |
| 06/29/2006 | US20060141656 Micromechanical sensors and methods of manufacturing same |
| 06/29/2006 | US20060139882 Cooler for electronic equipment |
| 06/29/2006 | DE202005019286U1 Differential pressure sensor with diaphragm on tensioning frame, supporting tensile sensitive electrical resistor(s), connectable to resistance meter |
| 06/29/2006 | DE19754462B4 Halbleitervorrichtungen Semiconductor devices |
| 06/28/2006 | EP1674913A2 Scanning micro-mirror package, method for fabricating the same, and optical scanning device employing the same |
| 06/28/2006 | EP1674865A1 Miniaturized sensor for detecting characteristics of a fluid, in particular a lubricating oil |
| 06/28/2006 | EP1419511B1 Snap action thermal switch |
| 06/28/2006 | CN1795140A Mems actuators |
| 06/28/2006 | CN1261767C Low voltage and low power thermal bubble film type micro-fluid driving device |
| 06/27/2006 | US7068409 Tip-tilt-piston actuator |
| 06/27/2006 | US7067958 Wide frequency range electromechanical actuator |
| 06/27/2006 | US7067344 Method of manufacturing an external force detection sensor |
| 06/27/2006 | US7067239 Micro electrical mechanical systems |
| 06/27/2006 | US7067067 Method of fabricating an ink jet printhead chip with active and passive nozzle chamber structures |
| 06/27/2006 | US7066574 Micro-electromechanical device having a laminated thermal bend actuator |
| 06/22/2006 | WO2006063885A1 Method for producing a trench in a microstructure |
| 06/22/2006 | WO2006063872A1 Detecting, measuring and controlling particles and electromagnetic radiation |
| 06/22/2006 | US20060131262 Fabrication of a reflective spatial light modulator |
| 06/22/2006 | CA2588339A1 Detecting, measuring and controlling particles and electromagnetic radiation |
| 06/21/2006 | EP1671924A2 Micromechanical device and method of manufacturing a micromechanical device |
| 06/21/2006 | EP1671923A2 Micromechanical device and method of manufacturing a micromechanical device |
| 06/21/2006 | EP1671922A2 Electromechanical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of the same |
| 06/21/2006 | EP1670898A2 Microfluidic rotary flow reactor matrix |
| 06/21/2006 | EP1016135A4 Fusion-bond electrical feed-through |
| 06/21/2006 | CN1790751A Semiconductor device having actuator |
| 06/21/2006 | CN1260796C Side welding method for flip-chip semiconductor device |
| 06/21/2006 | CN1260762C Micro-relay |
| 06/20/2006 | US7064879 Magnetically actuated microelectrochemical systems actuator |
| 06/20/2006 | US7063796 Micromechanical component and method for producing the same |
| 06/20/2006 | US7063541 Composite microelectronic spring structure and method for making same |
| 06/15/2006 | WO2006031846A3 Self-assembled monolayers on the surface of gold coated microcantilevers for application to chemical sensing and method of operation |
| 06/15/2006 | US20060128049 Devices having vertically-disposed nanofabric articles and methods of making the same |
| 06/15/2006 | US20060128048 Pyramid socket suspension |
| 06/15/2006 | US20060125348 Micromachined ultrasonic transducer cells having compliant support structure |
| 06/15/2006 | US20060125033 Sensor platform using a non-horizontally oriented nanotube element |
| 06/15/2006 | US20060125032 Micro electro mechanical system apparatus |
| 06/15/2006 | US20060125031 Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making aspects thereof |
| 06/15/2006 | US20060123927 Pyramid socket suspension |