| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
|---|
| 09/06/2006 | EP1410398A4 Electromechanical memory having cell selection circuitry constructed with nanotube technology |
| 09/06/2006 | EP1381523A4 Freestanding polymer mems structures with anti stiction |
| 09/05/2006 | US7102808 MEMS device and methods for manufacturing thereof, light modulation device, GLV device and methods for manufacturing thereof, and laser display |
| 09/05/2006 | US7102268 Micromachine and method of fabricating the same |
| 09/05/2006 | US7101724 Method of fabricating semiconductor devices employing at least one modulation doped quantum well structure and one or more etch stop layers for accurate contact formation |
| 09/05/2006 | US7100444 Isolated resonator gyroscope |
| 08/31/2006 | WO2006091904A2 Methods and apparatus for spatial light modulation |
| 08/31/2006 | WO2006091791A2 Methods and apparatus for actuating displays |
| 08/31/2006 | US20060191831 Nanopump devices and methods |
| 08/31/2006 | DE10239306B4 Verfahren zum selektiven Verbinden von Substraten A method of selectively bonding substrates |
| 08/31/2006 | DE102006007494A1 Ultraschallelement Ultrasonic element |
| 08/31/2006 | DE102005007540A1 Mikromechanischer Membransensor mit Doppelmembran The micromechanical membrane sensor with double membrane |
| 08/31/2006 | DE10120069B4 Scheibenförmiges Siliziumsensorelement für einen Druckfühler sowie Druckfühler unter Verwendung eines derartigen Siliziumsensorelements Disk-shaped silicon sensor element for a pressure sensor and pressure sensor using such a silicon sensor element |
| 08/31/2006 | CA2795356A1 Methods and apparatus for actuating displays |
| 08/31/2006 | CA2795329A1 Methods and apparatus for actuating displays |
| 08/31/2006 | CA2795302A1 Methods and apparatus for actuating displays |
| 08/31/2006 | CA2598825A1 Methods and apparatus for spatial light modulation |
| 08/31/2006 | CA2598740A1 Methods and apparatus for actuating displays |
| 08/30/2006 | EP1695937A2 Integrated micro electro-mechanical system and manufacturing method thereof |
| 08/30/2006 | EP1695031A1 Micro-machined vibrating structure and associated micro-gyroscope |
| 08/30/2006 | EP1317399B1 Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| 08/30/2006 | CN1826682A Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same |
| 08/30/2006 | CN1826285A Stacked structure and production method thereof |
| 08/30/2006 | CN1272235C Gas sensor and fabrication method thereof |
| 08/30/2006 | CN1272234C Method for forming microelectronic spring structures on a substrate |
| 08/29/2006 | US7099066 Micromirror unit and method of making the same |
| 08/29/2006 | US7099065 Micromirrors with OFF-angle electrodes and stops |
| 08/29/2006 | US7099063 MEMS device for an adaptive optics mirror |
| 08/29/2006 | US7098570 Charge screening in electrostatically driven devices |
| 08/29/2006 | US7098517 Semiconductor device |
| 08/24/2006 | WO2006087045A1 Micromechanical membrane sensor comprising a double membrane |
| 08/24/2006 | WO2006017009A3 Surface lubrication microstructures |
| 08/24/2006 | US20060186498 Microminiature moving device and method of making the same |
| 08/24/2006 | DE102006007083A1 Druck abtastendes Element und Sensor in welchem dasselbe aufgenommen ist Pressure scanning element and sensor is included in which the same |
| 08/23/2006 | EP1693950A1 Actuator element and production method therefor |
| 08/23/2006 | CN1821050A Mems device and manufacturing method of mems device |
| 08/23/2006 | CN1821049A Photo-sensitive mems structure |
| 08/23/2006 | CN1821048A Micronl nano thermoacoustic vibration excitor based on thermoacoustic conversion |
| 08/22/2006 | US7095546 Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays |
| 08/22/2006 | US7095309 oxidation resistance; titanium silicide, carbide |
| 08/22/2006 | US7094621 Fabrication of diaphragms and “floating” regions of single crystal semiconductor for MEMS devices |
| 08/22/2006 | US7094620 Semiconductor device manufacturing method |
| 08/22/2006 | US7093493 Pressure sensor having a silicon chip on a steel diaphragm |
| 08/22/2006 | US7093486 Isolated resonator gyroscope with a drive and sense plate |
| 08/22/2006 | CA2364498C Ic-compatible parylene mems technology and its application in integrated sensors |
| 08/17/2006 | WO2006084977A1 Micromechanical device comprising a mobile beam |
| 08/17/2006 | US20060183262 Thin film encapsulation of MEMS devices |
| 08/17/2006 | US20060182404 High reflector tunable stress coating, such as for a MEMS mirror |
| 08/17/2006 | US20060182403 High reflector tunable stress coating, such as for a MEMS mirror |
| 08/16/2006 | EP1690287A2 Method for depositing silicon carbide and ceramic films |
| 08/16/2006 | EP1395835B1 Accelerometer strain relief structure |
| 08/16/2006 | CA2536722A1 Articulated mems structures |
| 08/15/2006 | US7092593 Microactuator device and optical switching system using the same |
| 08/15/2006 | US7091715 Method and apparatus for micro-machined sensors using enhanced modulated integrative differential optical sensing |
| 08/15/2006 | US7090781 Micro-actuator and method making the same |
| 08/15/2006 | US7090471 Integrated electrostatic peristaltic pump method and apparatus |
| 08/10/2006 | WO2006082155A1 Micromechanical component and corresponding production method |
| 08/10/2006 | WO2006081888A2 Acceleration measuring micromechanical sensor element and method for the production thereof |
| 08/10/2006 | US20060177349 Chemical sensor |
| 08/10/2006 | US20060175203 Electroplating pcb components |
| 08/10/2006 | DE102005004878A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 08/10/2006 | DE102005004877A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof |
| 08/09/2006 | EP1687535A1 Cooling device for an integrated circuit |
| 08/09/2006 | EP1590644B1 Micromechanical sensor and method for production thereof |
| 08/09/2006 | CN1815657A Microswitching element |
| 08/09/2006 | CN1268538C Micromachine and production method thereof |
| 08/09/2006 | CN1268537C Micro-actuator, micro-actuator device, optical switch and optical switch array |
| 08/08/2006 | US7088566 Charge control of micro-electromechanical device |
| 08/08/2006 | US7088494 Hinge structure of micromirror device |
| 08/08/2006 | US7088030 High-aspect-ratio-microstructure (HARM) |
| 08/08/2006 | US7088019 Air bearing for MEMS based motor |
| 08/08/2006 | US7087456 Stiction resistant release process |
| 08/08/2006 | US7086709 Print engine controller for high volume pagewidth printing |
| 08/03/2006 | WO2006079765A1 Microresonator |
| 08/03/2006 | US20060171628 Mems element and method of producing the same, and diffraction type mems element |
| 08/02/2006 | EP1686689A1 Electromechanical filter |
| 08/02/2006 | EP1685391A2 An oscillating probe with a virtual probe tip |
| 08/02/2006 | EP1379463B1 Method for producing a semiconductor component and a semiconductor component produced according to this method |
| 08/02/2006 | EP1345842B1 Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method |
| 08/02/2006 | EP1208002A4 Deposited thin film void-column network materials |
| 08/02/2006 | EP0917652B1 Tunneling sensor with linear force rebalance |
| 08/02/2006 | CN1813506A Cooler for electronic equipment |
| 08/02/2006 | CN1267756C Variable optical attenuator |
| 08/02/2006 | CN1267336C A microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams |
| 08/01/2006 | US7083997 Bonded wafer optical MEMS process |
| 08/01/2006 | US7083737 Method for manufacturing a micro-actuator |
| 08/01/2006 | US7083398 Vibrating pumping stage for molecular vacuum pumps, and molecular vacuum pump with vibrating pumping stages |
| 08/01/2006 | US7083264 Micro-electromechanical liquid ejection device with motion amplification |
| 08/01/2006 | US7083263 Micro-electromechanical fluid ejection device with actuator guide formations |
| 07/27/2006 | WO2006078933A1 Coil driven light direction assembly comprising a shorted turn |
| 07/27/2006 | WO2006077987A1 Electro-mechanical switch |
| 07/27/2006 | WO2006077565A1 Packaging of micro devices |
| 07/27/2006 | US20060166403 Fabrication of advanced silicon-based MEMS devices |
| 07/27/2006 | US20060166357 Integrated microfludic control employing programmable tactile actuators |
| 07/27/2006 | DE19623072B4 Verfahren zur Herstellung eines Dünnfilmstrukturkörpers A method for producing a thin-film structure body |
| 07/27/2006 | DE102005002304A1 Micro-electromechanical sensor e.g. acceleration sensor, has sensor unit area-wisely and directly attached on substrate body in attachment area, where thermal expansion coefficient of unit is adjusted at expansion coefficients of body |
| 07/27/2006 | DE10144467B4 Elektronisches Sensorbauteil und Verfahren zu seiner Herstellung Electronic sensor component and method for its preparation |
| 07/27/2006 | DE10101561B4 Winkelgeschwindigkeitssensor Angular velocity sensor |
| 07/26/2006 | EP1684425A1 Micro-resonator and communication apparatus |
| 07/26/2006 | EP1684414A1 MEMS oscillator drive |