| Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727) |
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| 10/18/2006 | CN1847916A Micro movable element and optical switching device |
| 10/17/2006 | US7123400 Light deflector |
| 10/17/2006 | US7123399 Micro-support structures |
| 10/17/2006 | US7123396 Optical scanning apparatus and image forming apparatus |
| 10/17/2006 | US7123216 Photonic MEMS and structures |
| 10/17/2006 | US7122942 Electrostatic RF MEMS switches |
| 10/17/2006 | US7122937 Electrostatic driving device having an interval between electrodes facing each other and manufacturing method of the same |
| 10/17/2006 | US7122872 Control of stress in metal films by controlling the atmosphere during film deposition |
| 10/17/2006 | US7122790 Mass analysis by photon desorption comprising at least one layer for contacting an analyte, and a substrate on which said layer is deposited. Upon irradiation said analyte desorbs and ionizes for analysis by mass spectrometry. |
| 10/17/2006 | US7122395 Method of forming semiconductor devices through epitaxy |
| 10/17/2006 | US7121809 Method of driving pump |
| 10/12/2006 | WO2006107942A1 Vapor hf etch process mask and method |
| 10/12/2006 | WO2006106567A1 Switch circuit |
| 10/12/2006 | WO2006091791A9 Methods and apparatus for actuating displays |
| 10/12/2006 | US20060227175 Ink jet printhead with active and passive nozzle chamber structures arrayed on a substrate |
| 10/12/2006 | US20060226553 Selective isotropic etch for titanium-based materials |
| 10/12/2006 | US20060226114 Method for producing a micromechanical device and a micromechanical device |
| 10/12/2006 | DE19703271B4 Materialprüfvorrichtung, Materialprüfgerät und Materialprüfverfahren Material testing, material testing and material testing method |
| 10/12/2006 | DE102005015730A1 Micro-mechanical sensor for use in e.g. pressure sensor, has closure layer locally bounded on diaphragm and closing openings that are designed in diaphragm, where diaphragm surrounding area is locally bounded |
| 10/11/2006 | EP1325302B1 Nanoelectromechanical device for biochemical analysis |
| 10/10/2006 | US7120047 Device selection circuitry constructed with nanotube technology |
| 10/10/2006 | US7119940 Capacitively coupled micromirror |
| 10/10/2006 | US7119474 Systems and methods for overcoming stiction |
| 10/05/2006 | WO2006104467A1 Configurable microfluidic device and method |
| 10/05/2006 | WO2006103725A1 Micro gripper |
| 10/05/2006 | DE10307561B4 Meßanordnung zur kombinierten Abtastung und Untersuchung von mikrotechnischen, elektrische Kontakte aufweisenden Bauelementen Measuring arrangement for combined sampling and analysis of micro-technical, electrical contacts having components |
| 10/04/2006 | EP1706888A2 Mems nanoindenter |
| 10/04/2006 | EP1346382B1 Mems-switched stepped variable capacitor and method of making same |
| 10/04/2006 | CN1842884A Electrode configuration in a MEMS switch |
| 10/04/2006 | CN1278400C Method for forming convex point on back side of single side flexible substrate |
| 10/04/2006 | CN1277738C Clamp for disk vacuum pack |
| 10/03/2006 | US7116465 Micromirror device |
| 10/03/2006 | US7116462 Electrostatic drive type MEMS device and manufacturing method thereof, optical MEMS device, light modulation device, GLV device, and laser display |
| 10/03/2006 | US7116192 Micro actuator and optical switch using the actuator |
| 10/03/2006 | US7115863 Probe for scanning probe lithography and making method thereof |
| 10/03/2006 | US7115437 Micromachined device having electrically isolated components and a method for making the same |
| 09/28/2006 | WO2006101762A1 Method of manufacturing vibrating micromechanical structures |
| 09/28/2006 | WO2006101067A1 Switch array |
| 09/28/2006 | US20060216847 Process for fabricating micromachine |
| 09/28/2006 | US20060214761 Micro-electromechanical actuator |
| 09/28/2006 | US20060214745 Air-gap type FBAR, and duplexer using the FBAR |
| 09/28/2006 | US20060214248 Single crystal silicon sensor with additional layer and method of producing the same |
| 09/28/2006 | DE102005016243B3 Micromechanical component e.g. micro electro mechanical system structure, for use as e.g. micro sensor, has one metal layer of multi-layer structure extending at side over pile and electrically conductive membrane integrated in structure |
| 09/27/2006 | EP1705489A2 Sensor design and process |
| 09/27/2006 | EP1705151A1 Microelectromechanical system having a flexible beam |
| 09/27/2006 | EP1454349B1 Trilayered beam mems device and related methods |
| 09/27/2006 | CN1837026A Microelectromechanical system having a flexible beam |
| 09/26/2006 | US7113689 Microelectromechanical systems (MEMS) variable optical attenuator |
| 09/26/2006 | US7113321 Optical deflection apparatus and manufacturing method thereof, optical deflection array, imaging apparatus, and image projection display apparatus |
| 09/26/2006 | US7112872 Flexible semiconductor device with groove(s) on rear side of semiconductor substrate |
| 09/26/2006 | US7112464 Devices having vertically-disposed nanofabric articles and methods of making the same |
| 09/26/2006 | US7111513 Physical quantity sensor having protrusion and method for manufacturing the same |
| 09/21/2006 | WO2006098403A1 Light reflecting element, light reflecting device, wave front curvature modulator, and optical scanning type display device |
| 09/21/2006 | US20060209378 Tiltable-body apparatus, and method of fabricating the same |
| 09/21/2006 | US20060208611 Micro movable device and method of making the same using wet etching |
| 09/21/2006 | DE19639946B4 Mikromechanisches Bauelement Micromechanical component |
| 09/21/2006 | DE10231935B4 Longitudinales, piezoelektrisches, optisches Verriegelungsrelais Longitudinal, piezoelectric, optical latching relay |
| 09/21/2006 | DE10227662B4 Mikromechanisches Bauelement für Beschleunigungs-oder Drehratensensoren und Sensor Micromechanical component of acceleration or angular rate sensors and sensor |
| 09/21/2006 | DE102005040293B3 Sound sensor has magnetoresistive sensor whereby sensor material of magnetoresistive sensor is an electrically anisotropic conductor, whereby the electric field and the magnetic field is applied to sensor material |
| 09/20/2006 | EP1702884A2 Method of making a microsensor |
| 09/20/2006 | CN1836371A Mems type oscillator, process for fabricating the same, filter, and communication unit |
| 09/20/2006 | CN1835188A Micro movable device and method of making the same using wet etching |
| 09/20/2006 | CN1276449C 开关 Switch |
| 09/19/2006 | US7110158 Photonic MEMS and structures |
| 09/19/2006 | US7109834 Electromagnetic drive type actuator |
| 09/19/2006 | US7109641 Low voltage micro switch |
| 09/19/2006 | US7109580 Hermetically sealed package for optical, electronic, opto-electronic and other devices |
| 09/19/2006 | US7109121 Stress control of semiconductor microstructures for thin film growth |
| 09/19/2006 | US7107840 Pyramid socket suspension |
| 09/14/2006 | US20060205106 Integrated micro electro-mechanical system and manufacturing method thereof |
| 09/14/2006 | DE20122617U1 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system |
| 09/14/2006 | DE20122616U1 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system |
| 09/14/2006 | DE20122615U1 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system |
| 09/14/2006 | DE20122614U1 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system |
| 09/14/2006 | DE102005009422A1 Micromechanical component, has diaphragm with oxidized pores layer, which is attached at n-doped ring-shaped frame area, and consisting of macro porous silicon with middle pore diameter in certain range |
| 09/13/2006 | EP1700821A2 Sockets for microassembly |
| 09/13/2006 | EP1485758A4 A method for fabricating a structure for a microelectromechanical systems (mems) device |
| 09/13/2006 | EP1230574B1 A deflectable spatial light modulator having superimposed hinge and deflectable element |
| 09/13/2006 | EP1153405B1 Electronic devices including micromechanical switches |
| 09/13/2006 | EP1007873B1 Thermal microvalves |
| 09/13/2006 | CN1833352A Actuator element and production method therefor |
| 09/13/2006 | CN1275275C Switch |
| 09/13/2006 | CN1275056C MEMS reconfigurable optical grating |
| 09/13/2006 | CN1274581C Microelectronic mechanism system structure and its producing method |
| 09/12/2006 | US7106514 Optical tunable filter and method for manufacturing the optical tunable filter |
| 09/12/2006 | US7106066 Micro-electromechanical switch performance enhancement |
| 09/12/2006 | US7105902 Optical device having movable portion and method for manufacturing the same |
| 09/12/2006 | US7105758 Switch |
| 09/12/2006 | US7105447 Etching method |
| 09/12/2006 | US7105358 Device for monitoring microfluidic forces |
| 09/08/2006 | WO2006092820A2 Surface micromechanical process for manufacturing micromachined capacitive ultra- acoustic transducers |
| 09/08/2006 | WO2006092474A1 Device comprising an encapsulated microsystem and production method thereof |
| 09/08/2006 | CA2600016A1 Carbon nanotube resonator transistor and method of making the same |
| 09/07/2006 | US20060197413 Actuator Device |
| 09/07/2006 | US20060196843 Process for fabricating monolithic membrane substrate structures with well-controlled air gaps |
| 09/07/2006 | US20060196409 High throughput screening of crystallization materials |
| 09/07/2006 | US20060196253 Resonant sensor and sensing system |
| 09/06/2006 | EP1697783A1 Optical components and production therof |
| 09/06/2006 | EP1697255A1 Method for containing a device and a corresponding device |
| 09/06/2006 | EP1697254A1 Micro-oscillating member, light-deflector, and image-forming apparatus |