B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Patents for B81B 3 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (12,727)
11/2006
11/29/2006	EP1725405A1 Actuator, liquid drop discharge head, ink cartridge, inkjet recording device, micro pump, optical modulation device, and substrate
11/29/2006	CN1871176A Process for fabricating micromachine
11/29/2006	CN1287134C Semiconductor pressure sensor with diaphragm
11/29/2006	CN1286710C Encapsulated machinery system band-pass filter for integrated circuits and method of fabrication thereof
11/28/2006	US7142087 Micromechanical latching switch
11/28/2006	US7141915 Actuator device
11/28/2006	US7141385 Immobilization onto coated surface; presence of microforce is measured by deflection of the apparatus
11/23/2006	WO2006123788A1 Mems element, mems device and mems element manufacturing method
11/23/2006	WO2006091791A3 Methods and apparatus for actuating displays
11/23/2006	WO2006074352A3 Mems passivation with transition metals
11/23/2006	US20060262126 Transparent thin films
11/23/2006	US20060260401 Integrated monolithic tri-axial micromachined accelerometer
11/23/2006	DE20122618U1 Projection system with array of rectangular micro-mirror elements for providing images at angles depending on mirror tilt angle in light ray steering system
11/23/2006	DE102005023059A1 Verfahren zum Herstellen eines mikromechanischen Strukturelementes und Halbleiteranordnung Method for producing a micromechanical structural element and semiconductor device
11/23/2006	DE102005022665A1 Mikromechanisches Bauelement und entsprechendes Herstellungsverfahren Micro-mechanical device and manufacturing method thereof
11/23/2006	CA2607918A1 Micro-electro-mechanical transducers
11/22/2006	EP1723460A1 Mems scanner adapted to a laser printer
11/22/2006	EP1723072A2 Mechanical sensor with pyramid socket suspension
11/22/2006	EP1590588A4 Integrated surface-machined micro flow controller method and apparatus
11/22/2006	CN1868120A Electromechanical filter and electric circuit and electric apparatus employing it
11/22/2006	CN1868002A Nanotube-based switching elements with multiple controls and circuits made from same
11/22/2006	CN1865124A Micro or nano structure inertia sensor and its production method
11/22/2006	CN1286134C Microswitch with a micro-electromechanical system
11/21/2006	US7138893 Micro device
11/21/2006	US7138748 Method of enlarging a travel of piezoelectric sensor and MEMS switch employing the same
11/21/2006	US7138694 Single crystal silicon sensor with additional layer and method of producing the same
11/21/2006	US7137830 Miniaturized contact spring
11/16/2006	WO2006091904A3 Methods and apparatus for spatial light modulation
11/16/2006	US20060255901 Production of microelectromechanical systems (mems) using the high-temperature silicon fusion bonding of wafers
11/15/2006	EP1721866A1 MEMS device having a trilayered beam and related methods
11/15/2006	EP1721173A1 Force sensor
11/15/2006	EP1266142B1 Thermally actuated microvalve assembly
11/14/2006	US7134453 Microfluidic switch for stopping a liquid flow during a time interval
11/14/2006	US7134445 Double-effect pyrotechnic microactuator for microsystem and microsystem using same
11/14/2006	US7134340 Apparatus and method for anchoring micromachined structures
11/09/2006	US20060250337 Photonic MEMS and structures
11/09/2006	US20060250201 Micro relay
11/09/2006	US20060249801 Semiconductor device
11/09/2006	DE102005020282A1 Mikromechanischer Drucksensor für ein Touchpad sowie ein entsprechendes Herstellungsverfahren Micromechanical pressure sensor for a touch pad, as well as a corresponding production method
11/08/2006	EP1720201A1 Semiconductor device
11/08/2006	EP1719154A2 Method and apparatus for making a mens scanner
11/08/2006	EP1719012A2 Mems scanning system with improved performance
11/08/2006	EP1719011A2 Method and apparatus for scanning a beam of light
11/08/2006	EP1719010A2 High performance mems scanner
11/08/2006	EP1429992B1 Flexible structure with integrated sensor/actuator
11/08/2006	EP1345843B1 System and method for constraining totally released microcomponents
11/08/2006	CN1283547C Micro-machined ultrasonic transducer (MUT) that limits the lateral propagation of acoustic energy and method thereof
11/07/2006	US7132723 Micro electro-mechanical system device with piezoelectric thin film actuator
11/02/2006	WO2006092820A3 Surface micromechanical process for manufacturing micromachined capacitive ultra- acoustic transducers
11/02/2006	US20060244782 Discrete air and nozzle chambers in a printhead chip for an inkjet printhead
11/02/2006	US20060244085 Method for forming a chamber in an electronic device and device formed thereby
11/02/2006	EP1717195A1 Trilayered beam MEMS device and related methods
11/02/2006	EP1717194A1 Trilayered Beam MEMS device and related methods
11/02/2006	EP1717193A1 Trilayered beam MEMS device and related methods
11/02/2006	EP1716070A1 Micromechanical sensor
11/02/2006	EP1165432B1 Thermal bend actuator and paddle structure for ink jet nozzle
11/02/2006	DE102005018321A1 Kapazitiver Mikropower-Generator für mehrfrequente Vibrationsquellen The capacitive micro power generator for vibration sources mehrfrequente
11/01/2006	CN1856440A Process for fabricating a micro-electro-mechanical system with movable components
11/01/2006	CN1854061A Sockets for microassembly
11/01/2006	CN1282597C Cantilever with step-type structure and its manufacturing method
10/2006
10/31/2006	US7130099 Micromirror unit with torsion connector having nonconstant width
10/31/2006	US7129617 Rotary-type comb-drive actuator and variable optical attenuator using the same
10/31/2006	US7129081 Microarray apparatus for monitoring and screening biological activity, especially metabolism and/or reproduction of bacteria, fungi and cells
10/31/2006	US7128843 Process for fabricating monolithic membrane substrate structures with well-controlled air gaps
10/31/2006	US7128403 Microactuator and fluid transfer apparatus using the same
10/26/2006	WO2006112387A1 Micromachine structure system and method for manufacturing same
10/26/2006	US20060239635 Shell type actuator
10/26/2006	US20060238239 Thermal-mechanical signal processing
10/26/2006	US20060238206 Measuring system for the combined scanning and analysis of microtechnical components comprising electrical contacts
10/26/2006	US20060237805 detectors comprising patterned carbon nanotubes having electrical properties on support structures so that it may be exposed to fluids and control circuits; analysis apparatus
10/26/2006	DE102005019125A1 Compound layer, with opto-mechanical reaction to light, has sensor layer on pliable substrate which gives distorting bending action when exposed to electromagnetic radiation
10/26/2006	DE102005018867A1 Piezoelektrischer Mikro-Power Wandler Piezoelectric Micro-power converter
10/26/2006	DE102005018731A1 Verfahren zur Herstellung freitragender Schichten aus Titan und Nickel Process for producing self-supporting layers of titanium and nickel
10/25/2006	EP1714265A1 Mechanical structure including a layer of polymerised liquid crystal and method of manufacturing such
10/25/2006	EP1714264A1 Mechanical shutter with polymerised liquid crystal layer
10/25/2006	EP1713882A1 Flexible foil moveable by non-mechanical means
10/25/2006	EP1713881A1 Flexible foil moveable by means of light
10/25/2006	EP1395516B1 Membrane for micro-electro-mechanical switch, and methods of making and using it
10/25/2006	EP1194693B1 Microfabricated elastomeric valve and pump systems
10/25/2006	CN1853106A A three-axis accelerometer
10/25/2006	CN1851972A MEMS millimeter phase-shifter of low-exciting-voltage and precisie control
10/25/2006	CN1282258C Drive device and its driving method, and small machine tool using same
10/25/2006	CN1281418C 一种键盘 A keyboard
10/24/2006	US7126255 Piezoelectric/electrostrictive film-type device
10/24/2006	US7126220 Miniaturized contact spring
10/24/2006	US7125478 Microscale electrophoresis devices for biomolecule separation and detection
10/19/2006	WO2006110908A1 Microactuator having multiple degrees of freedom
10/19/2006	WO2006110304A1 Mems drives adapted to provide three degrees of mobility
10/19/2006	WO2006109687A1 Micromachine structure
10/19/2006	WO2006081888A3 Acceleration measuring micromechanical sensor element and method for the production thereof
10/19/2006	US20060234476 Electronic component and method for its production
10/19/2006	US20060232638 Actuator, liquid drop discharge head, ink cartridge, inkjet recording device, micro pump, optical modulation device, and substrate
10/19/2006	US20060232631 MEMS device with movement amplifying actuator
10/19/2006	US20060232626 High volume pagewidth printing
10/19/2006	US20060231865 Electromechanical three-trace junction devices
10/19/2006	DE10052419B4 Verfahren zur Herstellung mikromechanischer Bauelemente A process for preparing micromechanical components
10/18/2006	EP1712515A2 Technique for manufacturing micro-electro mechanical structures
10/18/2006	EP1414739B1 Micro-machined ultrasonic transducer (MUT) array
10/18/2006	CN1849747A Mems type resonator, process for fabricating the same and communication unit
10/18/2006	CN1848472A Semiconductor device using MEMS technology

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